JPS60103569A - Magnetic head device - Google Patents

Abstract

PURPOSE:To obtain a gimbal spring having a high Young's modulus with good wear resistance and corrosion resistance by constituting the gimbal spring with a compound material where the 2nd phase grains are dispersed uniformly three- dimensionally in an superquenched alloy matrix comprising amorphous, crystal or their mixed phases. CONSTITUTION:An alloy of various systems such as a cobalt system alloy like a cobalt-iron alloy using the cobalt as major component is used as a alloy mother material 1 constituting the superquenched alloy matrix. As the 2nd phase grains 4, carbon or carbide such as WC, TiC and NbC is used. The alloy mother material 1 constituting the superquenched alloy matrix is heated and molten by a vacuum high frequency melting furnace 2 and the molten metal is poured in a casting die 3 of ingot. On the other hand, the 2nd phase grains 4 are added through jetting forcibly to the molten alloy mother material 1 on the way of being poured into the casting die 3 by a plasma melt-spraying powder feeder 5, they are cooled and solidified as they are and the ingot where the 2nd phase grains 4 are held dispersed uniformly is obtained.

Description

[Detailed description of the invention]

[Field of Application of the Invention] The present invention relates to a magnetic head device used, for example, in a magnetic disk recording '9 reproducing device, and particularly to a gimbal spring thereof. [Background of the Invention] A magnetic head device used in a magnetic disk recording/reproducing device has a magnetic head held on a support such as an arm via a gimbal spring. This device makes use of the elasticity and striking properties of the gimbal spring to follow the fluctuations of the running magnetic disk, ista, and N, % air, and rad to achieve close contact between the magnetic heads. It is something that we try to do. By the way, various types of gimbal springs of 1.4 kg have been studied in the past, but a gimbal spring with a high Young's modulus and good wear resistance and corrosion resistance has not been obtained. The present inventors succeeded in creating a super-quenched magnetic alloy with secondary particle dispersion using the liquid quenching method, which is conventionally known as a manufacturing method for ultra-quenched alloys, and this new composite material It has been found that this material selectively combines the excellent properties and functions of both acid materials (ultra-quenched magnetic alloy and second phase particles), and is extremely suitable as a gimbal spring for magnetic head devices. That is, the present invention provides a gimbal spring using a composite material in which at least one type of second phase particles are uniformly dispersed three-dimensionally in an ultra-quenched alloy matrix consisting of an amorphous, crystalline, or mixed phase thereof. It is characterized by the following structure. In the present invention, the alloy base material constituting the ultra-quenched alloy matrix includes, for example, a cobalt-based alloy such as a cobalt-iron alloy containing cobalt as its main component, and an iron-iron alloy containing iron as its main component.
Iron-based alloys such as silicon-boron alloys and iron-molybdenum alloys, nickel-based alloys such as nickel-silicon-boron alloys whose main component is nickel, or copper-zirconium alloys. Various types of alloys such as zirconium-niobium alloys are used. In the present invention, the second phase particles include, for example, C2WC,
Charcoal compounds such as TiC and NbC are 7/(compounds.Nitrides such as NbN and TaN, Cr?, O:
'+ 1 Cc O2+MgO, Zr0= , Y2 Om
l, WO:+, TI+O:. AQ = O:), Fez 03, Zr+O, Sin
, : Nonfi compounds such as borides such as BN + silicates such as Slc + T i , F e , 'M
Metals such as O, W, etc. are used. Next, an example of manufacturing a ribbon according to the present invention will be explained. Figures 1 and 2 are for explaining the first WJQ example.
Figure 1 is a diagram for explaining the process of making an ingot, and Figure 2 is a diagram for explaining the process of making a ribbon using the ingot. In FIG. 1, an alloy base material 1 forming an ultra-quenched alloy matrix in four stages is heated by a vacuum high-frequency melting furnace 2.
J melted and poured into the mold 3 of the ingot. On the other hand, the second phase particles 4 are forcibly injected into the molten alloy base material 1 while being injected into the mold 3 by a plasma spray powder feeder 5, and then cooled and solidified. An ingot in which the two-phase particles 4 are uniformly dispersed is obtained. Second
For spraying and dispersing the phase particles 4, a spraying medium made of an inert gas such as argon gas, which is filled in a cylinder 6, is used. In order to avoid deterioration of the alloy base material 1 during injection dispersion, an inert gas such as argon gas is preferable as the injection medium. As a flour feeder for supplying the second phase particles 4, the second phase rice grains 4 can be supplied uniformly at all times, the injection conditions such as the injection pressure can be adjusted relatively easily, and the nozzle has excellent heat resistance. For this reason, a powder feeder for plasma spraying is suitable. Methods for producing a ribbon-like material using the ultra-quenching method include a single roll method, a twin roll method, and a centrifugal method. These ultra-quenching methods can produce metastable materials that are not in the equilibrium phase diagram, such as amorphous phases, non-equilibrium crystalline layers, or equilibrium crystalline phases, by controlling quenching conditions such as selection of alloy composition or quenching rate. is obtained. FIG. 2 shows the manufacturing process for creating a ribbon by the twin roll method. Six ingots 8 in which the 2111 particles described above are uniformly dispersed are placed in a heat-resistant tube 7 made of quartz glass having a nozzle at the lower end, and the inside of the tube is sufficiently replaced with an inert gas 9 such as argon gas. . A high-frequency melting furnace 1° is installed around the outer periphery of the heat-resistant tube 7, and the ingot 8 is remelted by this melting furnace 10 to such an extent that the second phase particles are not melted. After that, the piston 11 is operated to rotate the nozzle tip of the heat-resistant tube 7 at high speed, and the two rolls 12
．． 12 as close as possible, and the gas pressure inside the heat-resistant tube 7 is rapidly increased. The remelted ingot 8 is gradually fed from the nozzle as a uniform continuous jet to the joint of the rolls 1.2.12 under pressure A. Since the rolls 12 and 12 are rotating at a high speed and are always in pressure contact, when the melt is ejected, it is instantaneously cooled and solidified to obtain a continuous ribbon 13. FIG. 3 is an enlarged cross-sectional view of this ribbon 13, in which extremely fine second phase particles 4 are three-dimensionally uniform in a super-quenched alloy matrix 14 consisting of amorphous, crystalline, or a mixed phase thereof. Distributed. The thickness, width, etc. of the ribbon 13 can be adjusted by varying the circumferential speed and pressing force of the roll 12, the temperature of the melt, the ejection speed, etc. The twin roll method explained using FIG. 2 has the advantage that the thickness of the obtained ribbon is uniform, the surface roughness is small on both sides, and relatively thick ribbons can be easily manufactured.
ing. Although a twin roll method was used in this production example, a single roll method may be applied instead. FIG. 4 shows a second example of the ribbon according to the present invention. +! It is a principle explanatory diagram for explaining a construction example. An ingot of the alloy base material 1 constituting the ultra-quenched alloy matrix is placed in a heat-resistant tube 7 made of quartz glass having a nozzle at the lower end, and the inside of the tube is sufficiently replaced with an inert gas 9 such as argon gas. A high-frequency melting furnace 4 is installed around the outer periphery of the heat-resistant tube 7, and the ingot 1- of the alloy base material 1 is melted by the melting furnace 4 to such an extent that second phase particles 4, which will be described later, are not melted. Thereafter, the piston 11 is actuated to bring the nozzle tip of the heat-resistant tube 7 as close as possible to the upper peripheral surface of the roller 6 that is rotating at high speed, and the inert gas pressure inside the heat-resistant tube 7 is rapidly increased. Due to the pressure increase, the alloy base material 1 is supplied to the circumferential surface of the roll 6 as a thin uniform continuous jet from the nozzle.
Sign. The second phase particles 4 are forcibly added to the jet stream of the alloy base material 1 from the heat-resistant tube 7 together with a jetting medium such as argon gas by a powder feeder 5 for plasma spraying. Second
The alloy base material l in the molten state in which phase particles 4 are added
is rapidly solidified while being rolled out on the roll 12,
A continuous ribbon I3 is obtained. Similarly to the ribbon 13 obtained in this way, as shown in FIG. ing. The single roll method explained using FIG. 4 has the advantage that a relatively wide and thin film can be easily obtained. In addition, although the 1r roll method was used in this manufacturing example, it is also possible to apply a twin roll method instead. Figure 5 illustrates a third manufacturing example of the ribbon according to the present invention.
FIG. An ingot of the alloy base material 1 constituting the ultra-quenched alloy matrix is placed in a heat-resistant tube 7 made of quartz glass having a nozzle at the lower end, and the inside of the tube is sufficiently replaced with an inert gas 9 such as argon gas. A high-frequency melting furnace 10 is installed around the outer periphery of the heat-resistant tube 7, and the ingot of the alloy base material 1 is melted by the melting furnace 10 to such an extent that second phase particles 4, which will be described later, are not melted. Thereafter, the piston 11 is actuated to rapidly increase the inert gas pressure within the heat-resistant tube 7, and the molten alloy base material 1 is poured into the molten metal reservoir 15 located below. The second phase particles 4 are forcibly added to the jet stream of the alloy base material 1 from the heat-resistant tube 7 from the plasma spray powder feeder 5 . A high frequency melting furnace 16 is also installed on the outer periphery of this molten metal reservoir 15.
is attached, and the molten state of the alloy base material l is maintained. In this way, the alloy matrix containing the second phase particles 4, FA'
l is a thin, clean continuous jet supplied from the lower nozzle of the melting metal reservoir 15 to the joint of the rolls 12.12 by an inert gas (argon gas) high-pressure device (not shown) at °C, 1 L, the above manufacturing example. A continuous ribbon 13 is obtained by ultra-quenching in the same manner as in 1. This ribbon 13 is also similar to the one shown in FIG.
Although the twin roll method was used in this production example, it is also possible to apply the Q3 roll method instead. When making an ingot of the alloy base material constituting the ultra-quenched alloy matrix, or when remelting it for ultra-quenching, it is necessary to In the gold matrix where two-phase particles are in a molten state!-4
It is added to the air, and the condition is controlled by high frequency. Thereafter, the second phase particles can be three-dimensionally dispersed in the alloy matrix by applying superpower and cooling. However, with this method, there are limitations on the types of 24'l1 particles that can be applied and the amount that can be dispersed. The 24th particle at 1′I・ is gold such as C:rzOx or CeO=, -1
In the case of acid) arsenic materials, they have poor wettability with total molten materials such as iron, cobalt, and nickel, and are dispersed only in extremely small amounts, and moreover, they tend to be unevenly distributed in the surface layer of the super-quenched alloy matrix. The interfacial phenomenon that occurs when the second phase particles are added and dispersed in the alloy base material in the molten state can be considered in the following two stages. That is, in the first step, the second phase particles come into contact with the molten alloy base material, and at this time, the liquid phase of the molten alloy base material, the same phase of the second phase particles, and argon gas (inert gas) etc. It is a three-phase gas phase system. In the second step, the second phase particles are introduced into the molten alloy matrix lI! At this stage, the molten alloy is in a two-phase system consisting of the liquid phase of the molten alloy base material and the second phase particles. Furthermore, the three-phase interfacial phenomena described above can be roughly divided into three types: adhesion wetting, expansion wetting, and immersion wetting. Wa is the work when adhesion wetting occurs, W s is the work when extended wetting occurs,
If Wi is the amount of work when immersion wetting occurs, it is defined as linear. Wa=γ5V−γSL+γLV=°(1)Ws=γ
sv-γSL-γLV-(2)Wi=ysv-
7SL...(3) where γsL: solid phase-liquid phase interfacial tension γsL: interfacial tension of the same phase γLv: interfacial tension of the liquid phase At the gas phase-solid phase and liquid phase-solid phase interfaces, the Since the surface is considered to be hardly deformed, the following equation (4) holds true if the contact angle with the liquid phase is θ. ysv−γSL=γL V ” e03θ −(4) Substituting this into the above equations (1), (2), and (3) yields the following equations. Wa= 7 L (coso+1) −(5) Ws=γ
L (Cogθ-1) ... (6) Wi: γL V
' Cos θ - (7) In these equations, wettability occurs when W is positive. As is clear from the above equations (5) to (7), in the first stage when the second phase particles come into contact with the molten alloy base material, the contact angle θ of the second phase particles with respect to the alloy base material is It has a lot to do with sexuality. Iron, Kobal 1
– as well as for metal melts such as nickel. Generally, metal oxides have a large contact angle θ and therefore have poor wettability. Therefore, if the second phase particles are simply added to the molten alloy base material and stirred under high frequency, the so-called alloy base material and the
The phase particles do not fit well, and the second phase particles tend to be unevenly distributed on the surface layer side of the alloy base material. For this reason, when a metal oxide is used as the second phase particles, the amount that can be dispersed in the alloy base material is at most about 0.1% by volume, which is an extremely small amount. The effect of adding the second phase particles cannot be fully exhibited. In this regard, as mentioned above, when making an ingot of alloy base material,
Alternatively, when melting the ingot for ultra-quenching, if a method is adopted in which the second phase particles are added to the molten alloy base material using the injection dispersion method, the second phase particles will be added to the alloy by strong injection energy. It is mechanically pushed into the base material. Therefore, even second phase particles with poor wettability to the alloy base material can be forcibly and uniformly dispersed, making it possible to
There is a margin in the type of phase particles and the amount that can be dispersed, which greatly contributes to improving the properties and functions of the core material. Examples of in-phase contact angles for metal melts are shown in Table 1 below. As is clear from this table, metal oxides generally have a larger contact angle than other solid phases, and have poor wettability with gold-containing contact materials. Next, 6 Example 1 (Cor'o, Fe 4 S Sxx s131 o
) Riri, s (IJC) o, s (Co-, o,
SFe, +, 1si15B1 0)! l 9 (up
)i(Ca?o,5Fe4SSix sB'x O)9
S (uc) = (Co = o, 5FeJ, 5six
5Bio)q-, (lIC)5(CO7*, 5F
e4,5siz SBx O)9'O(WCh. Each ribbon is made of a second phase particle-dispersed ultra-quenched alloy having the above composition formula. The composition of the ultra-quench alloy is shown in the table () in the above composition formula, The numbers at the bottom right of each element indicate atomic %, and the second phase particle constituents are shown in parentheses on the right of the composition formula.The numbers at the bottom right of both parentheses indicate the respective volume %.Others A similar display method was adopted for the example.Next, the specific preparation procedure will be explained.First, in order to obtain the desired composition of the ultra-rapidly solidified alloy, the constituent gold m Co pFe, S
i, B as Co 420.9g, Fe 22.5g
, 42.7 g of 5i and 110 g of B are weighed, and the pieces are melted together in a vacuum high-frequency melting furnace 2 (see FIG. 2) to produce a molten alloy base material 1. This alloy base material 1 is poured into a mold 3 as it is. On the other hand, WC fine powder (second phase particles 4) is filled in advance in a powder feeder 5 for plasma spraying, and is injected into the mold injection flow of the alloy base material 1 by high pressure argon gas from a cylinder 6. Ru. The injection amount of the WC fine powder is adjusted by the powder feeder 5 so that the volume % of the alloy base material 1 is expressed by the above-mentioned compositional formula. The temperature of the alloy base material 1 when it is poured into the mold 3 is such that it maintains its molten state and the WC fine powder as the second phase particles does not melt, that is, about 1
The temperature is adjusted to 200°C. The WC fine powder that is forcibly injected toward the mold injection flow of the molten alloy base material 1 is dispersed in the alloy base material 1 in a finely divided state without becoming a soul, and the distance between the particles is short. . In this way, the WC* powder dispersed in a fine state without coarsening has a slow floating speed in the alloy base material 1, so that it may segregate when the alloy base material 1 solidifies in the mold 3. The dispersion state is stable. For this reason, Co-Fe-8i with uniformly dispersed WC powder
An ingot 8 made of a -B alloy is obtained. Next, as shown in FIG. 2, this ingot 8 is put into a heat-resistant tube 7 made of quartz glass, the inside of the tube is sufficiently replaced with argon gas 9, and then the ingot 8 is melted in a high-frequency melting furnace IO. At this time as well, the temperature is maintained at a temperature of approximately 1200°C, which is such that the fine WC powder does not dissolve.Then, the piston 11 is activated to rotate the lower end nozzle of the heat-resistant tube 7 at high speed at the joint between the two rollers 12, 12. The argon gas pressure inside the heat-resistant tube 7 is rapidly increased, and the ingots 1 to 8 are flowed as a uniform continuous jet from the nozzle to the roll 1.
2.12 joints are supplied. Since the rolls 12 and 12 rotate at high speed while being cooled and are constantly pressed against each other, the ejected alloy base material is instantly cooled and solidified to a width of 40 mm and a thickness of 30 μm. A ribbon 13 with a length of 5 m is obtained. When the surface of this ribbon 13 and the cut surface in the J'X direction were observed with a scanning electron microscope, it was found that the WC fine powder was aggregated with each other in the ultra-quenched alloy matrix at short intervals of 0. Coarsening>7 They are uniformly dispersed individually as fine particles, and there is no porosity at all. From this, WC fine powder

[3 in the earth alloy matrix
It was confirmed that the particles were dimensionally uniform and bidispersed. Furthermore, it was confirmed by X-ray diffraction that this ultra-quenched alloy matrix alloy was amorphous. This ribbon 13 is continuously punched into a predetermined shape (1) to form a gimbal spring 17.
19 is a bottom view showing a state in which the magnetic head 18 is attached to the arm 191 via the arm 191. FIG. FIG. 7 is a partially sectional side view of the magnetic spatula 14 device using this arm 19. The magnetic head device includes a carriage 21 that supports a magnetic head 20 and an arm 19 that supports a magnetic head 18. One end of the arm 19 is connected to the base end of the carriage 21 via a leaf spring 22, so that the arm 19 can rotate relative to the carriage 21. Arm 19
is rotationally biased by a tension spring 23, and this biasing force can be adjusted by an adjustment screw 24. The magnetic head 18° 20 drives the magnetic disk cartridge 25.
A magnetic disk 26 is held between the disks 26 and 26 for recording and reproduction. Example 2 (Ni=O8i:ioB1=)9F(
We) Ko (Ni-, e Siyu o B x z)
O:! (WC) p(Niy C) Six o Bi
x ) CI z (WC)i'. Ribbons made of second-phase particle-dispersed super-quenched platinum having the above compositional formula are each prepared. Next, the specific creation procedure will be explained. First, the forming metal N i to obtain the composition of the desired ultra-quenched alloy. Si and B are weighed to give 459 g of Ni, 5128 g of Ni, and 3 g of Bl, respectively, and these are melted in a vacuum high-frequency melting furnace to create an alloy base material, and this alloy is poured into a spinning mold. WC fine powder (second phase particles) is injected from a plasma spray powder feeder together with high-pressure argon gas into the injection flow of the alloy base material 1, and then cooled to uniformly disperse the WC powder into NI Si B. Create ingots made of alloys. If the temperature of the alloy base material when spraying and dispersing the V7 C fine powder is adjusted to approximately 200℃, the added WC fine powder will not dissolve in the alloy base material and will remain as fine particles uniformly. distributed. The ingot 1- was placed in a heat-resistant tube placed directly above one roll, and the inside of the tube was sufficiently replaced with argon gas. Then, a high frequency melting furnace installed around the outer circumference of the heat-resistant tube melts the
The temperature is maintained at 200° C., and only the alloy matrix is remelted. Then, the argon gas pressure inside the heat-resistant tube was suddenly increased, and the molten alloy base material containing WC fine powder was jetted from the lower nozzle of the heat-resistant tube onto the rolls rotating at 200 Or, p, m. Ru. Once ejected, it instantly cools and solidifies to a width of 40 ridges. A ribbon with a thickness of 30 μm and a length of 5 m is obtained. When the surface and the cut surface in the thickness direction of this ribbon were observed with a scanning electron microscope, it was found that W
The C fine powder is uniformly dispersed as fine particles in the ultra-quenched alloy 7 trinox. It was confirmed by X-ray diffraction that this ultra-quenched alloy 7-trinox was amorphous. A magnetic head device as shown in FIG. 7 is manufactured using this ribbon. Example 3 (Co-, o, sFe, +, *sii 5810)9
ri, 9 (Cr5Os) o, x (Co= o, s F
e4. s Siyu5 B□o)! II s,-,,(C
rzOa). 3(Co-, o, ;Fe4.ss'ils
B10) g3. ! 1. (Cr:0:i)o,s(Co
−, o, sFe++, :Six SBI O)! 9
(CrzOv)1(Coro,=:Fe4.sSi
1513xo)qa (Cr-:Oi), i+A magnetic/\rad arrangement is assembled in the same manner as in the previous example using a ribbon made of a second phase particle-dispersed ultra-quenched alloy having the above compositional formula. Example 4 (CO7o, +5Fe4., s5iyu SBI O)!
*,s (Ce0z)o 1(CO7o,=;Fe
, +55i158I O)917 (CeO,x)o(CO7o5Fe4,5siz 5B1u)39. s
(Ce0z)o,=(Co-,o,;Fea,,Si
x sBz O)99 (Ce0z)1(CO7o,
5Fe4,5sii sBi O)9 = (Ce0z
) g A magnetic head device is assembled in the same manner as in the previous embodiment using a ribbon made of a second phase particle-dispersed ultra-quenched alloy having the above compositional formula. Example 5 (Coyo,s Fe4.s Six s Blo
)99.9 (WO3) o, i (Co= o, 5Fe
(zsix gBx O)! l = a, -, (WOa
)0.3(Co-, o, sFe, +55ix sBx
O)99. q (WO-310,5(Co-, o, 5F
e4.5Six sBx o)s 9 (Won)x
(, Co-, o, sFe+, 5siz =; Bx o
)9? (WOq)=+A magnetic head device is assembled in the same manner as in the previous embodiment using a ribbon made of a second phase particle-dispersed ultra-quenched alloy having the above compositional formula. Example 6 (C070, G Fe4.s Six q Bx o
)99.9 (ZrOz ) o, x (Co-y o, r
, Fea, s 5ilF fh o )9 j7 (
ZrOr, )0. :1(Coyo, 5Fea, 5s
ix gBi o)g 9.5 (ZrOz)o, s(
Co-, n, 5Fea) Sil gB Co o) s s
(ZrOz)1(Co-,0,5Fe4.s Six
s Blo ) a 7 (ZrOz) 3 Using a bomb made of a second phase particle-dispersed ultra-quenched alloy having the above compositional formula,
A magnetic head device R is assembled in the same manner as in the previous embodiment. Example 7 (CO7o,sFe+,r,six tsBiO)9
9.9 (Y:!03)o 1(Coy o,q
Fe4ssil! :BI 0) eJ*, 7(Yz O?
l ) o, v (C1) 7 ogFea, 5sii 5s
x o)s 9. ; (Yz0.+). −. (Co-, o, s Fe, +, i Six 581 o
). 9 (YzO:=)□(Coyo, *Fe-+,
, Six 5Bxo)9y (Yzo:l)a A magnetic head device is assembled in the same manner as in the previous example using a ribbon made of second-phase particle-dispersed ultra-quenched platinum-gold having the above compositional formula. Example 8 (Niy o 5i1o Bs,!), 30 (T
hes )10(Niy e 5i1o Bl z)a
o (ThOz) = . A magnetic head device is assembled in the same manner as in the previous embodiment using a ribbon made of a second-phase particle-dispersed ultra-quenched alloy having the above compositional formula. Example 9 (Ni75Six, BzC)9* (TiC:)e
(Niy b Six o B x g) - x a (
TiC)x. A magnetic head device is assembled in the same manner as in the previous embodiment using a ribbon made of a second-phase particle-dispersed ultra-quenched alloy having the above compositional formula. Furthermore, scanning electron microscopy revealed that GoiC is N
It is three-dimensionally uniformly dispersed in the i-5i-B series ultra-quenched alloy matrix, has no pores, and has the same properties as the alloy 7.
The substance was confirmed to be amorphous by X-ray diffraction. Example i0 (Fe39.a MOS CIL, r, >9 e (
NbC)g(Fe:+9.'l Moq C1,e)
9 es (IilbC) g (Fei g, J Mo
9C3s) s o (NbC3:i. Using a ribbon made of a second phase particle-dispersed ultra-quenched alloy having the above compositional formula, a magnetic/\rad device is assembled in the same manner as in the above example. According to Shinko microscopic observation, NI)
C is uniformly dispersed three-dimensionally in the Fa-84C+ C-based ultra-quenched alloy matrix, and there are no pores. It was confirmed by X-ray diffraction that Alloy 71-Rix was a non-equilibrium γ-austenite 1-single phase with an ultrafine grain structure. Since this γ-austenite phase is a crystalline alloy, it has higher thermal stability than an amorphous alloy. Example 11 (Cu6oZr40)gO(SiC)z. (Cu6 o Zra o )-, o (SiC)i
. A magnetic head device is assembled in the same manner as in the previous embodiment using a ribbon made of a second-phase particle-dispersed ultra-quenched alloy having the above compositional formula. Furthermore, scanning electron microscopy revealed that SiC is Cu.
It was confirmed that the alloy matrix was three-dimensionally uniformly dispersed in the -Zr-based ultra-quenched alloy matrix, with no pores, and that the alloy matrix was amorphous by X-ray diffraction. Example 12 (Ni7 o Sil o Bx z ) U 0 (BN
)10(Niy e 5i1o Bz z)e o (
BN) = . A magnetic head device is assembled in the same manner as in the previous embodiment using a ribbon made of a WI type ultra-quenched alloy having the second phase particle composition having the above composition formula. Note that scanning electron microscopy revealed that BN is Ni
It is uniformly dispersed three-dimensionally in the super-quenched -3i-B alloy matrix and has many pores. v Inside the pot+ffl 1+': l-L Ll hehe-m
L II Jl h-I J, de → trl win < J
- I confirmed that it was true. Example 13 (Zr4g Nba o Six g)e, o (
NbN)z. A magnetic head device is assembled in the same manner as in the previous embodiment using a ribbon made of a second-phase particle-dispersed ultra-quenched alloy having the above compositional formula. Note that scanning electron microscopy revealed that NbN is Zr
-Three-dimensionally uniformly dispersed in the Nb-8i super-quenched alloy matrix, with no pores. It was confirmed by X-ray diffraction that the alloy matrix was amorphous.6 Example 14 (Co7o,, Fe4.s 5i1s B x O)
9 s (C)i(Coyo, s Fea,, Si
x 5B x o )a s (C)s(Coy o,
s Fea, s Six s Bi O)9 0 (C
)i. A magnetic head device is assembled in the same manner as in the previous embodiment using a ribbon made of a second-phase particle-dispersed ultra-quenched alloy having the above compositional formula. Furthermore, scanning electron microscopy revealed that C was Go-F.
It is uniformly dispersed three-dimensionally in the eSiB-based ultra-quenched alloy matrix and has no pores.
It was confirmed that there was 111ft-17 in 仝=pl, II-'jhia<#. Example 15 (Fce = B x e ), 39(Fe)z(Fe
e = B x s)! 3 a (Fe)z A magnetic head device is assembled in the same manner as in the previous example using a ribbon made of a second phase particle dispersed ultra-quenched alloy having the above compositional formula. Furthermore, using a scanning electron microscope (RGIM), Fe was uniformly dispersed three-dimensionally in the Fe-B super-quenched alloy matrix.
It was confirmed by X-ray diffraction that the alloy matrix was an amorphous Invar alloy. FIG. 8 is a particle size distribution diagram of second phase particles in the ultra-quenched alloy matrix, where (a) is '11C, (b) is WC, and (c) is CrzO:1. In the same figure (d), ZrO
Coy o5Fe4. s Six sB io Dispersed in super rapidly solidified alloy matrix1. The particle size was measured using an electron microscope. The average particle size of each of these second phase particles was approximately 0.06 μn1. As is clear from each of these times, the particle diameter of about 70% or more of the dispersed second phase particles is less than about 0.1 μm. In order to disperse. It is necessary to appropriately adjust the particle size of the second phase particles before addition and the conditions for spraying them. The following Table 2 shows the ultra-quenched alloy matrix (Coyo, es Fea, s Six s B x
Fig. 3 is a table showing the average particle diameters of other second phase particles in (o). Table 2 If most of the second phase particles are ultrafine particles as described above, the state of dispersion of the second phase particles is stable even in the molten alloy base material. That is, at the stage where the second phase particles are suspended in the molten alloy base material, a dispersion system exists in which the alloy base material is the dispersion medium and the second phase particles are the dispersoid. Since this dispersion system is thermodynamically unstable, the free energy change ΔF for dispersion or aggregation of the second phase particles is greatly depressed. Generally, the free energy change ΔF includes a change in interfacial free energy and a change due to a chemical reaction. However, if the molten alloy base material and the second sum particles are in equilibrium,
Since the change in free energy due to chemical reaction is considered to be zero, the state of dispersion of the second phase particles is controlled by the change in interfacial free energy. The dispersion of the second phase particles in the molten alloy matrix eliminates the solid phase (second phase particles)-in-phase (second phase particles) interface, and the solid phase (second phase particles) and liquid phase (molten alloy matrix) disappear. This is a change in which an interface (material) is formed. Therefore, the change in interfacial free energy ΔFs at this time is defined as in the following equation (8). Note that γss in the formula is the interfacial tension at the solid phase-solid phase interface. ΔFg=2γ5L-y ss - (8) From this formula, ΔF
If the value of s is negative, the second phase particles will be dispersed or naturally clouded with S in the molten alloy base material, and if the value is positive, they will aggregate. In order to make the change in interfacial free energy ΔFs negative when changing from this in-phase-in-phase interface to a solid-liquid phase interface, it is necessary to make the particle size of the second phase particles as small as possible. Approximately 7 of the second phase particles are dispersed as
If the particle diameter of 0% or more, preferably 90% or more, is less than about 0.1 μm, the second phase particles do not aggregate with each other, are stable in a dispersed state, and are uniformly dispersed. (CO70,5Fea, 5Six s B) o)s obtained according to the above example
The Young's modulus of the gimbal spring of 2(WC)1e is approximately 200
00 kg/mm 2 and an amorphous alloy of the same composition without second phase particles, i.e. (Co = 0.!l Fe
4. Young's modulus (925
It has excellent spring elasticity, which is approximately 2.16 times higher than 0kg/rrtn 2). Furthermore, the gimbal spring according to the present invention has excellent wear resistance and corrosion resistance, and can also improve durability.

[Brief explanation of the drawing]

1 and 2 are principle explanatory diagrams showing a first manufacturing example of the ribbon according to the present invention, FIG. 13 is an enlarged sectional view of the manufactured ribbon, and FIG. 4 is a second example of the ribbon according to the present invention. FIG. 5 is a principle explanatory diagram showing a manufacturing example of the ribbon according to the present invention.
FIG. 6 is a principle explanatory diagram showing a manufacturing example of Embodiment 1 of the present invention.
FIG. 7 is a side view of a partially sectional side view of a magnetic head device using the arm, and FIG. 8 is a particle size distribution of the 2+[1 particles in the alloy matrix. It is a diagram. DESCRIPTION OF SYMBOLS 1... Alloy base material, 4... Second phase particle 513... Ribbon, 14... Super rapidly solidified alloy 71-ricks, 17...
Gimbal blade, 18...Magnetic head, 19...
...Arm Fig. 1 Fig. 2 Fig. 3 Fig. 4 Fig. 4

Claims (1)

[Scope of Claims] (1) In a magnetic head device in which a magnetic head is held on a support via a gimbal spring, the gimbal spring is made of an ultra-quenched alloy consisting of amorphous, crystalline, or a mixture thereof (■). At least one second phase particle is present in the matrix.
1. A magnetic head device characterized in that it is constructed of a Ne-M composite material which is three-dimensionally distributed evenly. (2) The magnetic/rad device according to claim (1), characterized in that the ultra-quenched alloy 71 is a cobalt-based amorphous alloy whose main component is cobalt 1-. (3) The magnetic head device according to claim (1), wherein the super-quenched alloy matrix is a nickel-based amorphous alloy containing nickel as a main component. (4) The magnetic head device according to claim (1), wherein the super-quenched alloy matrix is an iron-based amorphous alloy containing iron as a main component. (5) The magnetic head device according to claim 1, wherein the second phase particles are carbide. (6) The magnetic head device according to claim (5), wherein the second phase particles are tungsten carbide. (7) The magnetic head device according to claim (1), wherein the second phase particles are carbon. (8) The magnetic head device according to claim (1), wherein the second phase particles are oxides. (9) The magnetic head device according to claim (8), wherein the second phase particles are chromium oxide. (10) The magnetic head device according to claim (1), wherein the second phase particles are nitride. (11) The magnetic head device according to claim (1), wherein the second phase particles are silicate. □ ('t2.) The magnetic head device according to claim 1, wherein the second phase grains are metal grains. (13) Uniformly dispersed A in the super-quenched alloy matrix
Of the second phase particles, more than 70% have a particle size of about 0.1μ! The magnetic head device according to claim (1), wherein the number of magnetic heads is less than n. (14) In the composite material, after the alloy base material constituting the ultra-quenched alloy matrix is heated and melted, and before the alloy base material solidifies, the second phase particles are injected into the super-quenched alloy matrix together with an injection medium consisting of inert dregs. Inbo! Sprayed and dispersed on the alloy base material, then cooled to uniformly disperse the second phase particles!
- Claim (1) characterized in that it is a composite moon obtained by re-I815fl and ultra-rapidly solidifying this ingot to the extent that the second phase particles do not dissolve.
The magnetic head device described in . (15) The composite material is heated and melted by heating and melting the alloy base material A formed by the ultra-quenched alloy matrix to such an extent that the second phase particles do not dissolve, and before the alloy base material solidifies, the alloy base material A is heated and melted from an inert gas. The magnetic material according to claim 1, characterized in that the composite material is obtained by spraying and dispersing second phase particles onto the alloy base material together with a spraying medium, and then solidifying it by ultra-rapid cooling. head device. (16) The magnetic head device according to claim (14) or (15), wherein the second phase particles are a metal that has poor wettability with respect to the super-quenched alloy matrix. (17) The magnetic head device according to claim (16), wherein the second phase particles are chromium oxide. (18) A claim characterized in that, of the second phase particles uniformly dispersed in the ultra-quenched alloy matrix, about 70% or more of the second phase particles have a particle size of less than about 0.1 μm. The magnetic head device according to item (14) or item (15).