JPS5995027U - 搬送装置 - Google Patents

搬送装置

Info

Publication number
JPS5995027U
JPS5995027U JP19004382U JP19004382U JPS5995027U JP S5995027 U JPS5995027 U JP S5995027U JP 19004382 U JP19004382 U JP 19004382U JP 19004382 U JP19004382 U JP 19004382U JP S5995027 U JPS5995027 U JP S5995027U
Authority
JP
Japan
Prior art keywords
conveyance table
nozzle
polyhedron
conveyance
conveyance device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP19004382U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0114577Y2 (enrdf_load_stackoverflow
Inventor
一郎 福渡
渡辺　清樹
Original Assignee
日立機電工業株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日立機電工業株式会社 filed Critical 日立機電工業株式会社
Priority to JP19004382U priority Critical patent/JPS5995027U/ja
Publication of JPS5995027U publication Critical patent/JPS5995027U/ja
Application granted granted Critical
Publication of JPH0114577Y2 publication Critical patent/JPH0114577Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Non-Mechanical Conveyors (AREA)
JP19004382U 1982-12-15 1982-12-15 搬送装置 Granted JPS5995027U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19004382U JPS5995027U (ja) 1982-12-15 1982-12-15 搬送装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19004382U JPS5995027U (ja) 1982-12-15 1982-12-15 搬送装置

Publications (2)

Publication Number Publication Date
JPS5995027U true JPS5995027U (ja) 1984-06-28
JPH0114577Y2 JPH0114577Y2 (enrdf_load_stackoverflow) 1989-04-28

Family

ID=30409573

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19004382U Granted JPS5995027U (ja) 1982-12-15 1982-12-15 搬送装置

Country Status (1)

Country Link
JP (1) JPS5995027U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009041250A (ja) * 2007-08-08 2009-02-26 Ihi Corp 搬送台車及び立体駐車場

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4825369A (enrdf_load_stackoverflow) * 1971-08-07 1973-04-02
JPS517804U (enrdf_load_stackoverflow) * 1974-07-05 1976-01-21
JPS5223831U (enrdf_load_stackoverflow) * 1975-08-06 1977-02-19
JPS5375683A (en) * 1976-12-17 1978-07-05 Hitachi Ltd Wafer transporting apparatus
JPS5748520A (en) * 1980-09-03 1982-03-19 Shinko Electric Co Ltd Stop method for carrier in conveyor

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4825369A (enrdf_load_stackoverflow) * 1971-08-07 1973-04-02
JPS517804U (enrdf_load_stackoverflow) * 1974-07-05 1976-01-21
JPS5223831U (enrdf_load_stackoverflow) * 1975-08-06 1977-02-19
JPS5375683A (en) * 1976-12-17 1978-07-05 Hitachi Ltd Wafer transporting apparatus
JPS5748520A (en) * 1980-09-03 1982-03-19 Shinko Electric Co Ltd Stop method for carrier in conveyor

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009041250A (ja) * 2007-08-08 2009-02-26 Ihi Corp 搬送台車及び立体駐車場

Also Published As

Publication number Publication date
JPH0114577Y2 (enrdf_load_stackoverflow) 1989-04-28

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