JPS5994594A - Laser light transmitter - Google Patents

Laser light transmitter

Info

Publication number
JPS5994594A
JPS5994594A JP57202925A JP20292582A JPS5994594A JP S5994594 A JPS5994594 A JP S5994594A JP 57202925 A JP57202925 A JP 57202925A JP 20292582 A JP20292582 A JP 20292582A JP S5994594 A JPS5994594 A JP S5994594A
Authority
JP
Japan
Prior art keywords
protective cover
transmission device
cooler
cover
temp
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP57202925A
Other languages
Japanese (ja)
Inventor
Shigenori Fujiwara
藤原 重徳
Takashi Watanabe
隆司 渡辺
Sakae Ikuta
栄 生田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP57202925A priority Critical patent/JPS5994594A/en
Publication of JPS5994594A publication Critical patent/JPS5994594A/en
Pending legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/70Auxiliary operations or equipment
    • B23K26/702Auxiliary equipment
    • B23K26/703Cooling arrangements

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Laser Beam Processing (AREA)
  • Lasers (AREA)

Abstract

PURPOSE:To decrease the change in the shape of a laser beam owing to a thermal effect and to perform stable laser working by providing a cooling means and maintaining the inside of a protection cover at a low temp. CONSTITUTION:A cooling pipe 9 is disposed along the surface of the wall in a protective cover 3 provided in an optical path wherein the laser light 2 emitted from a laser oscillator 1 is conducted via a total reflection mirror 4 to a material 8 to be worked. Both ends of the pipe 9 are connected to a cooler 10 provided on the outside of the cover 3. The cooler 10 is connected to a temp. control unit 11 and the unit 11 is connected to a temp. measuring device 12. A temp. sensor 13 is attached through the wall surface of the cover 3, which sensor 13 is connected to the device 12. The cooler 10 is controlled by the sensor 13 and the unit 11 to maintain the inside of the cover 3 at a low temp. in the stage of operation.

Description

【発明の詳細な説明】 〔発明の技術分野〕 この発明は、レーデ光伝送装置の改良に関する。[Detailed description of the invention] [Technical field of invention] The present invention relates to an improvement in a radar optical transmission device.

〔発明の技術的背景〕[Technical background of the invention]

一般に、レーデ発振器によって得られるレーデ光は指光
性のよい光であって、゛集光レンズで集光することによ
りて高い出力密度のものが得られるので、被加工物の孔
明け、溶接、切断、焼入れなど広く各種の加工工程に利
用されている。
In general, the Rade light obtained by a Rade oscillator is a light with good directivity, and by condensing it with a condensing lens, a high output density can be obtained. It is widely used in various processing processes such as cutting and hardening.

即ち、従来のレーザ光伝送装置は第1図に示すように構
成され、レーデ発振器1から発射されたレーデ光2は、
保護と安全のための・ぐイブ状保護カバー3を通してビ
ーム折曲げ用全反射ミラー4へ導かれる。そして、この
全反射ミラー4によシ、レーデ光2は90°折シ曲げら
れ、集光レンズ5に導かれる。この集光レンズ5でレー
デ光2は集光され、加工ノズル6を通過して、テーブル
7上に置かれた被加工物8に照射される。
That is, the conventional laser beam transmission device is configured as shown in FIG.
The beam is guided to a total reflection mirror 4 for beam bending through a rib-shaped protective cover 3 for protection and safety. The total reflection mirror 4 bends the Radhe light 2 by 90° and guides it to the condenser lens 5. The radar light 2 is condensed by the condenser lens 5, passes through a processing nozzle 6, and is irradiated onto a workpiece 8 placed on a table 7.

〔背景技術の問題点〕[Problems with background technology]

上記のような従来のレーデ光伝送装置においては、保護
カバー3内の空気のレーデ光伝送たよる吸収に伴なう熱
効果によシ、レーデ光2のビーム形状が変化する。この
結果、例えば切断加工の場合、集光スポットの径が変化
したシ、位置が変化し、正常な切断ができなくなる。
In the conventional radar light transmission device as described above, the beam shape of the radar light 2 changes due to the thermal effect accompanying the absorption of the air within the protective cover 3 during transmission of the radar light. As a result, in the case of cutting, for example, the diameter and position of the focused spot change, making it impossible to perform normal cutting.

〔発明′の目的〕[Objective of the invention]

この発明の目的は、レーザ光の伝送時における吸収を減
らし、熱効果によるレーデビームの形状変化を軽減し、
安定したレーザ加工を行なうことができるレーデ光伝送
装置を提供することである。
The purpose of this invention is to reduce absorption during laser beam transmission, reduce shape changes in the Radhe beam due to thermal effects,
An object of the present invention is to provide a radar optical transmission device capable of performing stable laser processing.

〔発明の概要〕[Summary of the invention]

この発明は、レーザ発振器から出たレーザ光が全反射ミ
ラーを介して被加工物に至る光路に、保護カバーを設け
てなるレーザ光伝送装置において、 上記保護カバー内を低温に保つ冷却手段を設けたレーデ
光伝送装置である。
The present invention provides a laser beam transmission device in which a protective cover is provided on the optical path of a laser beam emitted from a laser oscillator to a workpiece via a total reflection mirror, and a cooling means is provided to keep the inside of the protective cover at a low temperature. This is a radar optical transmission device.

〔発明の実施例〕[Embodiments of the invention]

一般に、レーザ光伝送時のビーム形状の歪はレーザ光の
空気等の気体による吸収に伴なう熱効果によって気体密
度に分布が生じるためと考えられる。この原因となるレ
ーザ光の吸収は、CO□レーザ光(λ=10.6μm)
の場合、空気中のH2Oが主に効いていると思われる。
Generally, the distortion of the beam shape during laser beam transmission is thought to be due to the distribution of gas density caused by the thermal effect accompanying the absorption of the laser beam by a gas such as air. The absorption of laser light that causes this is CO□ laser light (λ = 10.6 μm)
In this case, it seems that H2O in the air is mainly effective.

一方、H20蒸気の空気中での飽和時の密度は300に
で209/cTL程度あシ、温度を30に下げると、1
桁ずつ減少する。従って、伝送路内の空気を低温に保て
ば、H20蒸気の量を減らし、吸収を軽減することがで
き、レーザビームの形状の歪を少なくすることができる
On the other hand, the density of H20 vapor when saturated in air is about 209/cTL at 300, and when the temperature is lowered to 30, 1
Decrease by orders of magnitude. Therefore, by keeping the air in the transmission line at a low temperature, the amount of H20 vapor can be reduced, absorption can be reduced, and distortion in the shape of the laser beam can be reduced.

そこで、この発明のレーザ光伝送装置は第2図に示すよ
うに構成され、従来例(第1図)と同一箇所には同一符
号を付すことにする。
Therefore, the laser beam transmission device of the present invention is constructed as shown in FIG. 2, and the same parts as in the conventional example (FIG. 1) are given the same reference numerals.

即ち、レーデ発振器1から出たレーデ光2が全反射ミラ
ー4を介して被加工物8に至る光路に設けられた例えば
i9イノ状の保護カバー3内には、壁面に沿って冷却パ
イプ9が配設され、この冷却ノ+イゾ9の両端は保護カ
バー3外にある冷却器10に接続されている。この冷却
器10は温度制御ユニット11に接続され、この温度制
御ユニット11は温度測定器12i1C接続されている
。又、保護カバー3の壁面を貫通して温度センサ13が
取付けられ、この温度センサ13は上記温度測定器12
に接続されている。
That is, a cooling pipe 9 is installed along the wall inside a protection cover 3 in the shape of an i9 ink, for example, which is provided on the optical path of the Raded light 2 emitted from the Raded oscillator 1 and reaches the workpiece 8 via the total reflection mirror 4. Both ends of this cooling nozzle 9 are connected to a cooler 10 located outside the protective cover 3. This cooler 10 is connected to a temperature control unit 11, and this temperature control unit 11 is connected to a temperature measuring device 12i1C. Further, a temperature sensor 13 is installed through the wall surface of the protective cover 3, and this temperature sensor 13 is connected to the temperature measuring device 12.
It is connected to the.

そして動作時には、冷却器10は温度センサ13及び温
度制御ユニット11によシ制御され保護カバー3内を低
温に保っている。
During operation, the cooler 10 is controlled by the temperature sensor 13 and the temperature control unit 11 to maintain the inside of the protective cover 3 at a low temperature.

〔発明の効果〕〔Effect of the invention〕

この発明によれば、冷却手段を設けて保護カバー3内を
低温に保っているので、レーデ光2の伝送時における吸
収が減少し、熱効果によるレーザビームの形状変化が軽
減する。この結果、安定したレーデ加工を行なうことが
できる。
According to the present invention, since the inside of the protective cover 3 is kept at a low temperature by providing a cooling means, absorption of the radar light 2 during transmission is reduced, and changes in the shape of the laser beam due to thermal effects are reduced. As a result, stable radar processing can be performed.

尚、第3図はこの考案の変形例を示したもので、上記実
施例と同様効果が得られる。即ち、保護カバー3にパイ
・ぐスとして循環路14を形成し、この循環路14内に
ファン15を設けると共に、蛇行状の冷却パイプ16を
配設し、保護カバー3内の空気を矢印のよりに循環させ
ると共にファン15で強制冷却している。
Incidentally, FIG. 3 shows a modification of this invention, and the same effect as the above embodiment can be obtained. That is, a circulation path 14 is formed as a pipe gas in the protective cover 3, a fan 15 is provided in this circulation path 14, and a meandering cooling pipe 16 is provided to direct the air inside the protective cover 3 in the direction indicated by the arrow. The air is circulated through the air, and the fan 15 is used to forcefully cool the air.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は従来のレーザ光伝送装置を示す概略構成図、第
2図はこの発明の一実施例に係るレーザ光伝送装置を示
す概略構成図、第3図はこの考案の変形例を示す概略構
成図である。 1・・・レーデ発振器、2・・・レーザ光、3・・・保
護カバー、4・・・全反射ミラー、5・・・集光レンズ
、6・・・加工ノズル、7・・・テーブル、8・・・被
加工徹9・・・冷却パイプ、10・・・冷却器、11・
・・温度制御ユニット、12・・・温度測定器、13・
・・温度センサ、14・・・循環路、15・・・ファン
、16・・・冷却7母イゾ。 出願人代理人  弁理士 鈴 江 武 彦第1図 3 第2図 第3図
FIG. 1 is a schematic diagram showing a conventional laser beam transmission device, FIG. 2 is a schematic diagram showing a laser beam transmission device according to an embodiment of the present invention, and FIG. 3 is a schematic diagram showing a modification of this invention. FIG. DESCRIPTION OF SYMBOLS 1... Rade oscillator, 2... Laser light, 3... Protective cover, 4... Total reflection mirror, 5... Condensing lens, 6... Processing nozzle, 7... Table, 8...Workpiece 9...Cooling pipe, 10...Cooler, 11.
...Temperature control unit, 12...Temperature measuring device, 13.
...Temperature sensor, 14...Circulation path, 15...Fan, 16...Cooling 7 mother iso. Applicant's agent Patent attorney Takehiko Suzue Figure 1 Figure 3 Figure 2 Figure 3

Claims (3)

【特許請求の範囲】[Claims] (1)  レーデ発振器から出たレーザ光が全反射ミラ
ーを介して被加工物に至る光路に、保護カバーを設けて
なるレーザ光伝送装置において、上記保護カバー内を低
温に保つ冷却手段を設けたことを特徴とするレーデ光伝
送装置。
(1) In a laser beam transmission device in which a protective cover is provided on the optical path of the laser beam emitted from a Rede oscillator to the workpiece via a total reflection mirror, a cooling means is provided to keep the inside of the protective cover at a low temperature. A radar optical transmission device characterized by:
(2)上記冷却手段は、上記保護カバー内に冷却パイプ
を配設して冷却器に接続し、更に温度制御ユニットと上
記保護カバー内に設けた温度センサとによシ上記冷却器
を制御している特許請求の範囲第1項記載のレーデ光伝
送装置。
(2) The cooling means has a cooling pipe arranged inside the protective cover and connected to the cooler, and further controls the cooler by a temperature control unit and a temperature sensor installed inside the protective cover. A radar optical transmission device according to claim 1.
(3)上記冷却手段は、上記保護カバーに循環路を設け
、この循環路内にファンを設けると共に蛇行状冷却A’
イブを配設して冷却器に接続し更に温度制御ユニットと
上記保護カバー内に設けた温度センサとによ)上記冷却
器を制御している特許請求の範囲第1項記載のレーデ光
伝送装置。
(3) The cooling means includes a circulation path provided in the protective cover, a fan provided in the circulation path, and a serpentine cooling A'
The radar optical transmission device according to claim 1, further comprising a temperature control unit and a temperature sensor provided within the protective cover, the radar optical transmission device further comprising a temperature control unit and a temperature sensor provided within the protective cover. .
JP57202925A 1982-11-19 1982-11-19 Laser light transmitter Pending JPS5994594A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57202925A JPS5994594A (en) 1982-11-19 1982-11-19 Laser light transmitter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57202925A JPS5994594A (en) 1982-11-19 1982-11-19 Laser light transmitter

Publications (1)

Publication Number Publication Date
JPS5994594A true JPS5994594A (en) 1984-05-31

Family

ID=16465425

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57202925A Pending JPS5994594A (en) 1982-11-19 1982-11-19 Laser light transmitter

Country Status (1)

Country Link
JP (1) JPS5994594A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61103690A (en) * 1984-10-25 1986-05-22 Yamazaki Mazak Corp Laser beam machine
JPS61103689A (en) * 1984-10-25 1986-05-22 Yamazaki Mazak Corp Laser beam machine
JPH08197267A (en) * 1995-01-18 1996-08-06 Taiyo Yuden Co Ltd Laser beam machine and production of electronic parts using the same

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61103690A (en) * 1984-10-25 1986-05-22 Yamazaki Mazak Corp Laser beam machine
JPS61103689A (en) * 1984-10-25 1986-05-22 Yamazaki Mazak Corp Laser beam machine
JPH08197267A (en) * 1995-01-18 1996-08-06 Taiyo Yuden Co Ltd Laser beam machine and production of electronic parts using the same

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