JPH0357445B2 - - Google Patents
Info
- Publication number
- JPH0357445B2 JPH0357445B2 JP57157804A JP15780482A JPH0357445B2 JP H0357445 B2 JPH0357445 B2 JP H0357445B2 JP 57157804 A JP57157804 A JP 57157804A JP 15780482 A JP15780482 A JP 15780482A JP H0357445 B2 JPH0357445 B2 JP H0357445B2
- Authority
- JP
- Japan
- Prior art keywords
- cooling fluid
- container
- reflecting mirror
- reflector
- temperature
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000012809 cooling fluid Substances 0.000 claims description 41
- 238000001816 cooling Methods 0.000 claims description 18
- 230000005540 biological transmission Effects 0.000 description 7
- 230000003287 optical effect Effects 0.000 description 7
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 6
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 3
- 239000003570 air Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 2
- 239000012080 ambient air Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910002092 carbon dioxide Inorganic materials 0.000 description 1
- 239000001569 carbon dioxide Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000031700 light absorption Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
- 239000008399 tap water Substances 0.000 description 1
- 235000020679 tap water Nutrition 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
- G02B7/181—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors with means for compensating for changes in temperature or for controlling the temperature; thermal stabilisation
- G02B7/1815—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors with means for compensating for changes in temperature or for controlling the temperature; thermal stabilisation with cooling or heating systems
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Optical Elements Other Than Lenses (AREA)
- Lasers (AREA)
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は反射鏡等の冷却装置、特に反射鏡等が
保持された容器に冷却流体を循環させ反射鏡等を
直接又は間接的に冷却する装置に関する。[Detailed Description of the Invention] [Industrial Application Field] The present invention is a cooling device for a reflecting mirror, etc., and in particular, a cooling device for cooling a reflecting mirror, etc. directly or indirectly by circulating a cooling fluid through a container in which the reflecting mirror, etc. is held. Regarding equipment.
レーザ光などの強い光に対する透過板、集光レ
ンズ又は反射鏡などの光伝送部品が保持された容
器に冷却流体を循環させて光伝送部品を直接又は
間接的に冷却する装置が周知であり、これら光伝
送部品を適正温度に保つことにより、性能の維持
が図られていた。
Devices are well known that directly or indirectly cool light transmission components by circulating a cooling fluid through a container holding light transmission components such as a transmission plate for strong light such as a laser beam, a condensing lens, or a reflecting mirror. Performance was maintained by keeping these optical transmission components at appropriate temperatures.
従来、この種の冷却装置として例えば第１図に
示される装置が使用されていた。図において容器
１０はジヤケツト１２を有し、このジヤケツト１
２にはｏリング１４を介して反射鏡１６が嵌入固
定されている。またジヤケツト１２の外周には蓋
１８がネジ固定され、反射鏡１６の外周部と蓋１
８の内周部との間にはスペーサ２０が介在配置さ
れている。そして矢印Ａ方向に照射されたレーザ
光は、蓋１８に形成された開口部を通り、反射鏡
１６にて矢印Ｂ方向に反射される。 Conventionally, a device shown in FIG. 1, for example, has been used as this type of cooling device. In the figure, a container 10 has a jacket 12.
A reflecting mirror 16 is fitted and fixed to 2 through an O-ring 14. Further, a lid 18 is screwed to the outer periphery of the jacket 12, and the outer periphery of the reflector 16 and the lid 18 are screwed to the outer periphery of the jacket 12.
A spacer 20 is interposed between the inner periphery of 8 and the inner circumferential portion of 8 . The laser beam irradiated in the direction of arrow A passes through an opening formed in the lid 18 and is reflected in the direction of arrow B by the reflecting mirror 16.
この時、レーザ光の入射エネルギの一部は反射
鏡１６に吸収されるが、波長が10.6〔μｍ〕の炭
酸ガスレーザ光を銅製の反射鏡１６にて反射させ
た場合、レーザ光の吸収率は約〔１％〕となる。 At this time, part of the incident energy of the laser beam is absorbed by the reflecting mirror 16, but when a carbon dioxide laser beam with a wavelength of 10.6 [μm] is reflected by the copper reflecting mirror 16, the absorption rate of the laser beam is Approximately [1%].
従つて、反射鏡１６はレーザ光の吸収により発
熱し、その光学的性能が低下するので、反射鏡１
６は次に説明するような冷却装置により冷却され
ている。すなわち、ジヤケツト１２、Ｏリング１
４及び反射鏡１６にて形成された空間には矢印Ｃ
方向に冷却流体２２が供給され、矢印Ｄ方向に排
出されている。従つて、反射鏡１６はその一側面
に直接接触している冷却流体により冷却されるこ
ととなる。 Therefore, the reflecting mirror 16 generates heat due to absorption of the laser beam, and its optical performance deteriorates.
6 is cooled by a cooling device as described below. That is, the jacket 12, the O-ring 1
4 and the space formed by the reflecting mirror 16 is marked with an arrow C.
Cooling fluid 22 is supplied in the direction of arrow D and discharged in the direction of arrow D. Therefore, the reflecting mirror 16 is cooled by the cooling fluid that is in direct contact with one side of the reflecting mirror 16.
しかしながら、従来の冷却装置においては、冷
却流体２２として水道水あるいはチリングユニツ
トにて冷却された循環水が使用されていたので、
十分な光学的性能を発揮することができないとい
う欠点があつた。すなわち、従来装置においては
反射鏡１６の周囲温度よりも低温度の冷却流体２
２が使用されていたので、反射鏡１６の表面温度
がその周囲温度よりも低温となり、反射鏡１６の
表面に水蒸気が結露し、この結果反射率の低下、
塵埃の付着などが生じ、場合によつては反射鏡１
６の表面の部分光吸収率の増大により、反射鏡１
６が焼損するという欠点があつた。
However, in conventional cooling devices, tap water or circulating water cooled by a chilling unit was used as the cooling fluid 22.
The drawback was that sufficient optical performance could not be achieved. That is, in the conventional device, the cooling fluid 2 whose temperature is lower than the ambient temperature of the reflector 16 is
2 was used, the surface temperature of the reflector 16 was lower than the ambient temperature, and water vapor condensed on the surface of the reflector 16, resulting in a decrease in reflectance.
Dust may adhere to the reflector 1 in some cases.
Due to the increase in the partial light absorption of the surface of reflector 1,
6 was burnt out.
本発明は上述した従来の課題に鑑みなされたも
のであり、この目的は、反射鏡等の温度を常時そ
の周辺温度より高い適正温度に保持して該反射鏡
等の光学的性能を十分に発揮することができる反
射鏡等の冷却装置を提供することにある。
The present invention has been made in view of the above-mentioned conventional problems, and its purpose is to maintain the temperature of a reflecting mirror, etc. at an appropriate temperature higher than the surrounding temperature at all times to fully exhibit the optical performance of the reflecting mirror, etc. The object of the present invention is to provide a cooling device for a reflecting mirror, etc., which can be used as a cooling device.
本発明は、反射鏡等が保持された容器に冷却流
体を流通させ反射鏡等を直接又は間接に冷却する
反射鏡等の冷却装置において、前記容器の周囲温
度とほぼ等しい温度の雰囲気中に設置されその雰
囲気によつて前記冷却流体を冷却し周囲温度より
も高い温度の冷却流体を得る熱交換手段と、前記
容器内で冷却流体を流通させるための冷却流体通
路と、容器の前記熱交換手段との間で冷却流体を
循環させるための冷却流体循環路とから成る冷却
流体経路と、該冷却流体経路内で冷却流体を循環
させるポンプと、を有し、容器の雰囲気で冷却さ
れた周囲温度よりも高い温度の冷却流体により反
射鏡等を冷却することを特徴とする。 The present invention provides a cooling device for a reflecting mirror, etc., which cools the reflecting mirror, etc. directly or indirectly by circulating a cooling fluid through a container holding the reflecting mirror, etc., which is installed in an atmosphere having a temperature approximately equal to the ambient temperature of the container. heat exchange means for cooling the cooling fluid with its atmosphere to obtain a cooling fluid at a temperature higher than ambient temperature; a cooling fluid passage for circulating the cooling fluid within the container; and the heat exchange means of the container. a cooling fluid path for circulating cooling fluid between the cooling fluid path and a pump for circulating the cooling fluid within the cooling fluid path, the ambient temperature being cooled by the atmosphere of the container; It is characterized by cooling the reflecting mirror etc. with a cooling fluid having a temperature higher than that of the cooling fluid.
〔発明の実施例〕
以下図面に基づいて本発明の好適な実施例を説
明する。[Embodiments of the Invention] Preferred embodiments of the present invention will be described below based on the drawings.
第２図には本発明に係る反射鏡等の冷却装置の
好適な実施例が示され、図において第１図で示さ
れる従来装置と同一部分には同一符号を付して説
明を省略する。 FIG. 2 shows a preferred embodiment of the cooling device for a reflecting mirror or the like according to the present invention. In the figure, the same parts as those of the conventional device shown in FIG.
図において容器１０が設置された雰囲気中に
は、容器１０の周囲空気で冷却流体２６を冷却す
るために熱交換器２４が設置され、また容器１０
と熱交換器２４との間で冷却流体２６を循環させ
るためにポンプ２８が設置されている。上記冷却
流体２６としては、例えば純水、上質の水又はエ
チレングリコールなど種々の液体を使用すること
が可能である。そして、熱交換器２４を通る冷却
流体２６を冷却するためにフアン３０が設けられ
ており、このフアン３０により容器１０の周囲空
気が熱交換器２４に向けられて吹き付けられ、熱
交換器２４内を通る冷却流体２６はこの周囲空気
にて冷却される。 A heat exchanger 24 is installed in the atmosphere in which the container 10 is installed in order to cool the cooling fluid 26 with the surrounding air of the container 10, and a heat exchanger 24 is installed in the atmosphere in which the container 10 is installed.
A pump 28 is provided to circulate cooling fluid 26 between the heat exchanger 24 and the heat exchanger 24 . Various liquids can be used as the cooling fluid 26, such as pure water, high quality water or ethylene glycol. A fan 30 is provided to cool the cooling fluid 26 passing through the heat exchanger 24 , and the fan 30 blows ambient air around the container 10 toward the heat exchanger 24 . The cooling fluid 26 passing through is cooled by this ambient air.
このように本発明において特徴的なことは、容
器１０が設置された雰囲気中に熱交換器２４が設
置され、この熱交換器２４によつて容器１０の雰
囲気で冷却流体２６を冷却し、そして、容器１０
と熱交換器２４との間で冷却流体２６を循環さ
せ、容器１０の雰囲気で冷却された冷却流体２６
により光伝送部品たとえば反射鏡１６を冷却する
ことである。 As described above, a characteristic feature of the present invention is that a heat exchanger 24 is installed in the atmosphere in which the container 10 is installed, and the cooling fluid 26 is cooled by the heat exchanger 24 in the atmosphere of the container 10. , container 10
The cooling fluid 26 is circulated between the heat exchanger 24 and the cooling fluid 26 cooled by the atmosphere of the container 10.
This is to cool the light transmission components such as the reflecting mirror 16.
本発明の実施例は以上の構成から成り、以下に
その作用を説明する。 The embodiment of the present invention has the above configuration, and its operation will be explained below.
ポンプ２８にて容器１０に供給された冷却流体
２６は、反射鏡１６と接触して熱を奪い、この後
容器１０から排出され、容器１０と熱交換器２４
との間を循環する。この時、反射鏡１６から熱を
奪つた冷却流体２６は、熱交換器２４を通る際
に、フアン３０にて吹き付けられた容器１０の周
囲空気によつて冷却される。前述したように熱交
換器２４は容器１０が設置された雰囲気中に設置
され、反射鏡１６の周囲温度と熱交換器２４に吹
き付けられる空気の温度は同一であるので、冷却
流体２６の温度は常に反射鏡１６の周囲温度より
も高い適正温度に保たれる。従つて、反射鏡１６
の表面温度は反射鏡１６の周囲温度よりも高い適
正温度に保たれるので、反射鏡１６の表面に水蒸
気が結露することがなく、反射率の低下、塵埃の
付着、反射鏡の焼損などを防止することができ
る。 The cooling fluid 26 supplied to the container 10 by the pump 28 comes into contact with the reflector 16 and removes heat, and is then discharged from the container 10 and connects the container 10 and the heat exchanger 24.
circulate between. At this time, the cooling fluid 26 that has taken heat from the reflector 16 is cooled by the surrounding air of the container 10 blown by the fan 30 when passing through the heat exchanger 24 . As mentioned above, the heat exchanger 24 is installed in the atmosphere in which the container 10 is installed, and the ambient temperature of the reflector 16 and the temperature of the air blown onto the heat exchanger 24 are the same, so the temperature of the cooling fluid 26 is The reflector 16 is always kept at an appropriate temperature higher than the ambient temperature. Therefore, the reflecting mirror 16
Since the surface temperature of the reflector 16 is maintained at an appropriate temperature higher than the ambient temperature of the reflector 16, water vapor does not condense on the surface of the reflector 16, which prevents a decrease in reflectance, dust adhesion, burnout of the reflector, etc. It can be prevented.
なお、前述した実施例では光伝送部品として反
射鏡１６を使用した場合について説明したが、集
光レンズ、透過板、部分反射鏡など他の光伝送部
品を単数あるいは複数個冷却する場合であつて
も、容器１０の構造を変えることによつて同様の
効果を奏することができる。 In addition, in the above-mentioned embodiment, the case where the reflecting mirror 16 is used as the optical transmission component was explained, but it is also possible to cool one or more other optical transmission components such as a condenser lens, a transmitting plate, a partial reflecting mirror, etc. Similar effects can also be achieved by changing the structure of the container 10.
また、前述した実施例では反射鏡１６に冷却流
体２６を直接接触させて該反射鏡１６を冷却する
場合について説明したが、ジヤケツト１２を冷却
すると共にＯリング１４をインジウム、鉛などの
熱伝導度の高い材料で形成し、反射鏡１６を間接
冷却するように構成しても同様の効果を奏するこ
とができる。 Further, in the above-described embodiment, a case has been described in which the reflecting mirror 16 is cooled by bringing the cooling fluid 26 into direct contact with the reflecting mirror 16. The same effect can be obtained even if the reflecting mirror 16 is made of a material with high heat resistance and is configured to be indirectly cooled.
以上説明したように本発明によれば、容器が設
置された位置の周囲温度と等しい温度の範囲であ
る容器の雰囲気中に熱交換手段が設置され、この
熱交換手段によつて容器の雰囲気で冷却流体を冷
却する。そして、冷却流体は容器と熱交換手段と
の間で循環される。従つて、冷却流体は雰囲気温
度よりも低温に冷却されることがなく、反射鏡等
の温度が常時その周囲温度より高い適正温度に保
持されるので、反射鏡等の表面に水蒸気が結露せ
ず、該反射鏡等の光学的性能を十分に発揮するこ
とができる。
As explained above, according to the present invention, the heat exchange means is installed in the atmosphere of the container, which has a temperature range equal to the ambient temperature at the position where the container is installed, and the heat exchange means allows the atmosphere of the container to be Cooling the cooling fluid. The cooling fluid is then circulated between the container and the heat exchange means. Therefore, the cooling fluid is not cooled to a temperature lower than the ambient temperature, and the temperature of the reflector, etc. is always maintained at an appropriate temperature higher than the ambient temperature, so water vapor does not condense on the surface of the reflector, etc. , the optical performance of the reflecting mirror etc. can be fully exhibited.
また、本発明によれば特別な温度調整機構やチ
リングユニツトを設ける必要がなく、容器が設置
された雰囲気中に熱交換器を設置すれば良いの
で、装置が安価となり、また運転コストも安価と
なるという利点を有している。 Furthermore, according to the present invention, there is no need to provide a special temperature adjustment mechanism or chilling unit, and the heat exchanger can be installed in the atmosphere where the container is installed, so the equipment is inexpensive and the operating cost is also low. It has the advantage of being
第１図は従来の反射鏡等の冷却装置の一例を示
す構成図、第２図は本発明に係る反射鏡等の冷却
装置の好適な実施例を示す構成図である。
各図中同一部分には同一符号を付し、１０は容
器、１６は反射鏡、２４は熱交換器、２６は冷却
流体、３０はフアンである。
FIG. 1 is a configuration diagram showing an example of a conventional cooling device for a reflecting mirror, etc., and FIG. 2 is a configuration diagram showing a preferred embodiment of the cooling device for a reflecting mirror, etc. according to the present invention. In each figure, the same parts are given the same reference numerals, 10 is a container, 16 is a reflector, 24 is a heat exchanger, 26 is a cooling fluid, and 30 is a fan.
Claims (1)
体を流通させ反射鏡等１６を直接又は間接に冷却
する反射鏡等の冷却装置において、 前記容器１０の周囲温度とほぼ等しい温度の雰
囲気中に設置されその雰囲気によつて前記冷却流
体２６を冷却し周囲温度よりも高い温度の冷却流
体を得る熱交換手段２４，３０と、 前記容器１０内で冷却流体２６を流通させるた
めの冷却流体通路と、容器１０と前記熱交換手段
２４，３０との間で冷却流体２６を循環させるた
めの冷却流体循環路とから成る冷却流体経路と、 該冷却流体経路内で冷却流体を循環させるポン
プ２８と、 を有し、容器１０の雰囲気で冷却された周囲温度
よりも高い温度の冷却流体２６により反射鏡等１
６を冷却することを特徴とする反射鏡等の冷却装
置。[Scope of Claims] 1. In a cooling device for a reflector, etc., which cools the reflector, etc. 16 directly or indirectly by circulating a cooling fluid through a container 10 holding a reflector, etc. 16, the temperature is approximately equal to the ambient temperature of the container 10. heat exchange means 24, 30 installed in an atmosphere of equal temperature and cooling the cooling fluid 26 by the atmosphere to obtain a cooling fluid having a temperature higher than the ambient temperature; and circulating the cooling fluid 26 within the container 10. a cooling fluid path for circulating the cooling fluid 26 between the container 10 and the heat exchange means 24, 30; and a pump 28 for circulating the reflector 1 by the cooling fluid 26 having a temperature higher than the ambient temperature cooled in the atmosphere of the container 10.
6. A cooling device for a reflecting mirror or the like.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15780482A JPS5948703A (en) | 1982-09-10 | 1982-09-10 | Device for cooling optical transmission parts |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15780482A JPS5948703A (en) | 1982-09-10 | 1982-09-10 | Device for cooling optical transmission parts |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5948703A JPS5948703A (en) | 1984-03-21 |
| JPH0357445B2 true JPH0357445B2 (en) | 1991-09-02 |
Family
ID=15657649
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15780482A Granted JPS5948703A (en) | 1982-09-10 | 1982-09-10 | Device for cooling optical transmission parts |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5948703A (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL8402872A (en) * | 1984-09-19 | 1986-04-16 | Optische Ind De Oude Delft Nv | DEVICE FOR SHIELDING OPTICAL ORGANS IN AN AUTOMATIC WELDING PROCESS. |
| JPS6198319A (en) * | 1984-10-18 | 1986-05-16 | サントル・ド・ルシエルシユ・メタリユルジク | Cooling for optical apparatus |
| JPS6262321A (en) * | 1985-09-13 | 1987-03-19 | Asahi Optical Co Ltd | Laser light absorber |
| JPS62193223U (en) * | 1986-05-30 | 1987-12-08 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5750122B2 (en) * | 1977-12-21 | 1982-10-26 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5750122U (en) * | 1980-09-09 | 1982-03-20 |
-
1982
- 1982-09-10 JP JP15780482A patent/JPS5948703A/en active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5750122B2 (en) * | 1977-12-21 | 1982-10-26 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5948703A (en) | 1984-03-21 |
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