JPS61103689A - Laser beam machine - Google Patents
Laser beam machineInfo
- Publication number
- JPS61103689A JPS61103689A JP59225004A JP22500484A JPS61103689A JP S61103689 A JPS61103689 A JP S61103689A JP 59225004 A JP59225004 A JP 59225004A JP 22500484 A JP22500484 A JP 22500484A JP S61103689 A JPS61103689 A JP S61103689A
- Authority
- JP
- Japan
- Prior art keywords
- temperature
- compressed air
- tube
- dust
- supplied
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/70—Auxiliary operations or equipment
- B23K26/702—Auxiliary equipment
- B23K26/703—Cooling arrangements
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/14—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
- B23K26/1462—Nozzles; Features related to nozzles
Abstract
Description
【発明の詳細な説明】
（ａ）、産業上の利用分野
本発明は、レーザ加工機に係り、特にレーザ発振器から
集光レンズ迄の外部光学系を外部から遮断する防塵チュ
ーブが設けられたレーザ加工機に関する。DETAILED DESCRIPTION OF THE INVENTION (a) Industrial Application Field The present invention relates to a laser processing machine, and in particular to a laser processing machine equipped with a dustproof tube that shields an external optical system from a laser oscillator to a condensing lens from the outside. Regarding processing machines.
（ｂ）、従来の技術
従来、この種のレーザ加工機においては、防塵チューブ
内に外部から塵埃が侵入して反射鏡等の光学系が汚染さ
れることを防止するために、防塵チューブ内に外気圧よ
り僅かに高い圧力の窒素ガスや乾燥空気等を送り込んで
いる。しかも、それ等は何らの温度制剤も加えられるこ
となく注入されている。(b), Conventional technology Conventionally, in this type of laser processing machine, in order to prevent dust from entering the dust-proof tube from the outside and contaminating the optical system such as the reflector, a Nitrogen gas, dry air, etc. are sent in at a pressure slightly higher than the outside pressure. Moreover, they are injected without any temperature control agent added.
（Ｃ）０発明が解決しようとする問題点しかし、窒素ガ
スを用いると、常時ガス量を点検管理しておかない限り
ガス欠等による運転不能状態の発生が危惧され、また乾
燥空気の場合には、過度に冷却された空気による反射鏡
等の光学部品への結露や、空気と光学部品との間の謳度
差から熱歪が生じ、光路のアライメントが狂ってしまう
等多くの問題が有った。(C) 0 Problems to be Solved by the Invention However, when nitrogen gas is used, unless the gas amount is constantly inspected and managed, there is a risk of an inoperable state due to lack of gas, and in the case of dry air. There are many problems such as condensation on optical components such as reflectors due to excessively cooled air, and thermal distortion caused by the difference in optical performance between the air and optical components, which disrupts the alignment of the optical path. It was.
本発明は、前述の欠点を解消すべく、窒素ガス等の特殊
なガスを用いることなく、シかも光学部品への結露、熱
歪等の悪影響が無い、信頼性の高いレーザ加工機を提供
することを目的とするものである。In order to eliminate the above-mentioned drawbacks, the present invention provides a highly reliable laser processing machine that does not use special gas such as nitrogen gas and does not have adverse effects such as dew condensation and thermal distortion on optical components. The purpose is to
（ｄ）０問題点を解決するための手段
即ち、本発明は、防塵チューブ周囲の温度を測定する温
度測定手段を設けると共に、前記温度測定手段の測定結
果に基づいて防塵チューブ内に供給する圧縮空気の温度
をｉｕａする温度制御装置を、圧縮空気の供給手段中に
設けて構成される。(d) Means for solving the zero problem, that is, the present invention provides a temperature measuring means for measuring the temperature around the dust-proof tube, and also provides a compressor to be supplied into the dust-proof tube based on the measurement result of the temperature measuring means. A temperature control device for controlling the temperature of the air is provided in the compressed air supply means.
（ｅ）０作用
上記した構成により、本発明は、防塵チューブ内に温度
調整された圧縮空気が供給されるので、光学部品等への
結露や熱歪等の発生を防止することが出来るように作用
する。(e) 0 effect With the above-described configuration, the present invention supplies temperature-controlled compressed air into the dustproof tube, so that it is possible to prevent the occurrence of dew condensation and thermal distortion on optical components, etc. act.
（ｆｌ、実施例 以下、本発明の実施例を図面に基づき説明する。(fl, Example Embodiments of the present invention will be described below based on the drawings.
第１図は本発明によるレーザ加工機の外部光学系の温度
制御系統を示す概略図、第２図は本発明が適用されるレ
ーザ加工機の一実施例を示す正面図、第３図は第２図の
平面図である。FIG. 1 is a schematic diagram showing a temperature control system of an external optical system of a laser processing machine according to the present invention, FIG. 2 is a front view showing an embodiment of a laser processing machine to which the present invention is applied, and FIG. FIG. 2 is a plan view of FIG.
レーザ加工機１は、第２図及び第３図に示すように、フ
レーム２を有しており、フレーム２にはテーブル３が矢
印Ａ、Ｂ方向に移動自在に設けられている。フレーム２
にはコラム５が設けられており、コラム５にはサドル６
が矢印Ｃ，Ｄ方向、即ち水平方向に移動駆動自在に設け
られている。The laser processing machine 1 has a frame 2, as shown in FIGS. 2 and 3, and a table 3 is provided on the frame 2 so as to be movable in the directions of arrows A and B. frame 2
A column 5 is provided in the column 5, and a saddle 6 is provided in the column 5.
is provided so as to be freely movable and driven in the directions of arrows C and D, that is, in the horizontal direction.
サドル６にはヘッド７が矢印Ｅ、Ｆ方向、即ち図中上下
方向に移動自在に設けられており、ヘッド７には集光レ
ンズ９がヘッド７と共に矢印ＥＳＦ方向に移動自在に設
けられている。A head 7 is provided on the saddle 6 so as to be movable in the directions of arrows E and F, that is, in the vertical direction in the figure, and a condenser lens 9 is provided on the head 7 so as to be movable together with the head 7 in the direction of the arrow ESF. .
一方、コラム５の、第２図左方には、レーザ発振器１０
が設けられており、レーザ発振器１０と集光レンズ９間
には外部光学系を構成する反射鏡１１．１２．１３．１
４等が設けられている。On the other hand, on the left side of column 5 in FIG.
is provided, and between the laser oscillator 10 and the condenser lens 9 there are reflecting mirrors 11, 12, 13, 1 constituting the external optical system.
4th class is provided.
レーザ発振器１０、反射鏡１１．１２．１３．１４、集
光レンズ９間の、レーザ発振器１０から発射されたレー
ザ光１５が通過する経路は、筒状の防塵チューブ１６Ａ
、１Ｂ、、１６゜、１６ｏにより被覆されている。防塵
チューブ１６．は、サドル６のＣ，Ｄ方向の移動に対応
できるように、Ｃ，Ｄ方向に伸縮自在に設けられており
、また防塵チューブ１６゜も集光レンズ９のＥ、Ｆ方向
の移動（こ対応出来るようにＥ、Ｆ方向に１Ｉｌｊｖａ
自在１こ設（すられている。The path through which the laser beam 15 emitted from the laser oscillator 10 passes between the laser oscillator 10, the reflector 11.12.13.14, and the condenser lens 9 is a cylindrical dust-proof tube 16A.
, 1B, , 16°, 16o. Dustproof tube 16. is extendable and retractable in the C and D directions to accommodate the movement of the saddle 6 in the C and D directions, and the dustproof tube 16° is also provided to accommodate the movement of the condenser lens 9 in the E and F directions. 1Iljva in the E and F direction as much as possible
Freely set up one (sold).
ところで、防塵チューブ１６には、第１図（こ示すよう
に、後述のコンプレッサ２０と共（こ圧縮空気供給手段
を構成する空気供給ノ（イブ１７を介して温度制御装置
１９が接続しており、温度制御装置１９にはコンプレッ
サ２０が接続してＬ）る。By the way, the dustproof tube 16 is connected to a temperature control device 19 via an air supply tube 17 (as shown in FIG. 1) together with a compressor 20 (to be described later). , a compressor 20 is connected to the temperature control device 19.
また、温度制御装置１９には、温度センサ２１．２２が
接続しており、温度センサ２１（ま防塵チューブ１６の
表面温度を、温度センサ２２ζよコラム５の表面温度を
測定することが出来る。Furthermore, temperature sensors 21 and 22 are connected to the temperature control device 19, and can measure the surface temperature of the dustproof tube 16 and the surface temperature of the column 5 by the temperature sensor 22ζ.
レーザ加工機１は、以上のような構成を有するので、ワ
ークの加工に際して【よ、ワークをテーブル３上に載置
して、テーブル３をＡ 、 Ｂ 方向１と、集光レンズ
９をヘッド７、サドル６と具化こ、Ｃ１Ｄ方向に移動さ
せ、更に集光レンズ９をＥ、Ｆ方向にヘッド７と共に移
動させてレーザ光１５をワーク上の所定の点に集光させ
て加工を行う。その際には、レーザ光１５は、レーザ発
振＠ｌ！１０力）ら防塵チューブ１６内に向けて発射さ
れ、反射鏡１１．１２．１３．１４により反射されて集
光レンズ９に入射し、更に集光レンズ９で集光されて所
°定の加工を行うが、防塵チューブ１６内には、コンプ
レッサ２０により圧縮された圧縮空気２３が温度制御装
置１９を介して、空気供給パイプ１７から供給されてい
る。温度制御装置１９は、温度センサ２１．２２により
防塵チューブ１６及びコラム５の表面温度を測定してそ
の平均値Ｍを求め、その平均値Ｍに基づいてコンプレッ
サ２０から供給される圧縮空気２２の温度を、平均値Ｍ
に一致させるように冷却または加熱する。こうして、防
塵チューブ１６及びシラム５の平均温度に調整された圧
縮空気２３は空気供給パイプ１７を介して防塵チューブ
１６内に供給されるが、供給される圧縮空気２３は、外
部光学系周辺の部品である防塵チューブ１６、コラム５
等の平均温度にＭＡ整されているので、圧縮空気２３と
反射鏡１１．１２．１３．１４等光学部品の間に顕著な
品度差が発生することが無く、熱歪や結露が発生するこ
とば無い。また、防塵チューブ１６内は外気圧よりも高
−い圧縮空気２３で満たされているので、防塵チューブ
１６内に外部から塵埃が侵入することも無い。Since the laser processing machine 1 has the above configuration, when processing a workpiece, the workpiece is placed on the table 3, the table 3 is oriented in the A and B directions 1, and the condenser lens 9 is aligned with the head 7. , the saddle 6 is moved in the C1D direction, and the condenser lens 9 is moved together with the head 7 in the E and F directions to focus the laser beam 15 on a predetermined point on the workpiece to perform processing. At that time, the laser beam 15 emits laser oscillation @l! 10 force) is emitted into the dustproof tube 16, reflected by the reflecting mirrors 11, 12, 13, and 14, and incident on the condensing lens 9. The condensing lens 9 further condenses the light to perform a predetermined processing. Compressed air 23 compressed by a compressor 20 is supplied into the dustproof tube 16 from an air supply pipe 17 via a temperature control device 19. The temperature control device 19 measures the surface temperatures of the dustproof tube 16 and the column 5 using temperature sensors 21 and 22, calculates the average value M, and adjusts the temperature of the compressed air 22 supplied from the compressor 20 based on the average value M. , the average value M
Cool or heat to match. In this way, the compressed air 23 adjusted to the average temperature of the dustproof tube 16 and the cylinder 5 is supplied into the dustproof tube 16 via the air supply pipe 17. dustproof tube 16, column 5
Since the MA is adjusted to the average temperature of the compressed air 23 and the optical components such as the reflector 11, 12, 13, 14, etc., there will be no noticeable quality difference between the compressed air 23 and the optical components such as the reflector 11, 12, 13, 14, etc., and thermal distortion and dew condensation will not occur. There are no words. Further, since the inside of the dustproof tube 16 is filled with compressed air 23 having a pressure higher than the outside pressure, dust does not enter into the dustproof tube 16 from the outside.
なお、上述の実施例は、温度センサを防塵チューブ１６
とコラム５に２個設けた場合について述べたが、温度セ
ンサ等の温度測定手段は２個に限らず必要に応じて３個
以上何個設けて構成してもよいことは勿論である。Note that in the above embodiment, the temperature sensor is connected to the dustproof tube 16.
Although a case has been described in which two temperature measuring means such as temperature sensors are provided in the column 5, it goes without saying that the number of temperature measuring means such as temperature sensors is not limited to two, and any number of three or more may be provided as necessary.
また、圧縮空気２３の温度は、本実施例のように、必ず
しも前述の平均値Ｍに一致させる必要は無く、測定され
た防塵チューブの周囲の温度に基づいて、８１械の状況
に応じて適宜調整することが出来ろことは勿論である。Furthermore, the temperature of the compressed air 23 does not necessarily have to match the above-mentioned average value M as in this embodiment, but can be set as appropriate depending on the situation of the 81 machine based on the measured temperature around the dustproof tube. Of course, it can be adjusted.
（ｇ）０発明の効果
以上、説明したように、本発明によれば、防塵チューブ
１６周囲の温度を測定する温度センサ２１．２２等の温
度測定手段を設けると共に、前記温度測定手段の測定結
果に基づいて防塵チューブ１６内に供給する圧縮空気２
３の温度を調整する温度制御装置１１９を設けたので、
防塵チューブ１６内に供給する圧縮空気２３の温度を、
反射鏡１１．１２．１３．１４等の光学部品に結露や熱
歪を生じさせないように調整することが可能となり、正
確な光路アライメントの維持が容易になり、信頼性の高
いレーザ加工機の提供が可能となる。(g) 0 Effects of the Invention As explained above, according to the present invention, temperature measuring means such as temperature sensors 21 and 22 for measuring the temperature around the dustproof tube 16 are provided, and the measurement results of the temperature measuring means are provided. Compressed air 2 supplied into the dustproof tube 16 based on
Since a temperature control device 119 was provided to adjust the temperature of step 3,
The temperature of the compressed air 23 supplied into the dustproof tube 16 is
It becomes possible to adjust optical components such as reflectors 11, 12, 13, 14 so that they do not cause dew condensation or thermal distortion, and it becomes easy to maintain accurate optical path alignment, providing a highly reliable laser processing machine. becomes possible.
また、窒素ガス等の特殊なガスを用いないので、ガス量
の監視等の日常の点検作業が不要で、管理が容易となる
。Furthermore, since no special gas such as nitrogen gas is used, daily inspection work such as monitoring the amount of gas is not required, making management easier.
第１図は本発明によるレーザ加工機の外部光学系の温度
制御系統を示す概略図、第２図は本発明が適用されるレ
ーザ加工機の一実施例を示す正面図、第３図は第２図の
平面図である。
１・・・・・レーザ加工機
９ ・・集光レンズ
１０・・・・・レーザ発振甜
１１．１２．１３１．１４・・・・外部光学系（反射鏡
）
１６・・・・防塵チューブ
１７ ・・・圧縮空気供給手段（空気供給パイプ）１９
・・−温度制御装置
２０・・・・圧縮空気供給手段（コンプレッサ）２１．
２２・・・・温度測定手段（温度センサ）２３・・・圧
縮空気
出願人 株式会社 山崎鉄工所
代理人 弁理士 相１）伸二
（ほか１名）
第１図FIG. 1 is a schematic diagram showing a temperature control system of an external optical system of a laser processing machine according to the present invention, FIG. 2 is a front view showing an embodiment of a laser processing machine to which the present invention is applied, and FIG. FIG. 2 is a plan view of FIG. 1...Laser processing machine 9...Condensing lens 10...Laser oscillation tube 11.12.131.14...External optical system (reflector) 16...Dust-proof tube 17 ... Compressed air supply means (air supply pipe) 19
...-Temperature control device 20... Compressed air supply means (compressor) 21.
22... Temperature measuring means (temperature sensor) 23... Compressed air applicant Yamazaki Iron Works Co., Ltd. Agent Patent attorney Phase 1) Shinji (and 1 other person) Figure 1
Claims (1)
を外部から被覆する形で防塵チューブを設け、該防塵チ
ューブに圧縮空気供給手段を接続したレーザ加工機にお
いて、防塵チューブ周囲の温度を測定する温度測定手段
を設けると共に、前記温度測定手段の測定結果に基づい
て防塵チューブ内に供給する圧縮空気の温度を調整する
温度制御装置を、前記圧縮空気の供給手段中に設けて構
成したレーザ加工機。[Scope of Claims] A laser oscillator and a condensing lens connected to the laser oscillator through an external optical system, a dustproof tube is provided to cover the external optical system from the outside, and compressed air is supplied to the dustproof tube. A temperature control device that includes a temperature measuring means for measuring the temperature around the dust-proof tube, and adjusts the temperature of compressed air supplied into the dust-proof tube based on the measurement result of the temperature measuring means, in a laser processing machine connected to the device. A laser processing machine comprising: provided in the compressed air supply means.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59225004A JPS61103689A (en) | 1984-10-25 | 1984-10-25 | Laser beam machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59225004A JPS61103689A (en) | 1984-10-25 | 1984-10-25 | Laser beam machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61103689A true JPS61103689A (en) | 1986-05-22 |
Family
ID=16822569
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59225004A Pending JPS61103689A (en) | 1984-10-25 | 1984-10-25 | Laser beam machine |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61103689A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08197267A (en) * | 1995-01-18 | 1996-08-06 | Taiyo Yuden Co Ltd | Laser beam machine and production of electronic parts using the same |
| JP2018080393A (en) * | 2016-11-14 | 2018-05-24 | エスエルエム ソルーションズ グループ アーゲー | Apparatus for producing three-dimensional workpiece with process temperature control |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5994594A (en) * | 1982-11-19 | 1984-05-31 | Toshiba Corp | Laser light transmitter |
-
1984
- 1984-10-25 JP JP59225004A patent/JPS61103689A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5994594A (en) * | 1982-11-19 | 1984-05-31 | Toshiba Corp | Laser light transmitter |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08197267A (en) * | 1995-01-18 | 1996-08-06 | Taiyo Yuden Co Ltd | Laser beam machine and production of electronic parts using the same |
| JP2018080393A (en) * | 2016-11-14 | 2018-05-24 | エスエルエム ソルーションズ グループ アーゲー | Apparatus for producing three-dimensional workpiece with process temperature control |
| CN108068342A (en) * | 2016-11-14 | 2018-05-25 | Slm方案集团股份公司 | For utilizing the equipment of process temperature control production 3 D workpiece |
| CN108068342B (en) * | 2016-11-14 | 2020-07-03 | Slm方案集团股份公司 | Apparatus for producing three-dimensional workpieces and method for operating the same |
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