JPS5992453A - Disk inspecting device - Google Patents

Disk inspecting device

Info

Publication number
JPS5992453A
JPS5992453A JP20276182A JP20276182A JPS5992453A JP S5992453 A JPS5992453 A JP S5992453A JP 20276182 A JP20276182 A JP 20276182A JP 20276182 A JP20276182 A JP 20276182A JP S5992453 A JPS5992453 A JP S5992453A
Authority
JP
Japan
Prior art keywords
disk
track
recording surface
sensor
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP20276182A
Other languages
Japanese (ja)
Inventor
Shinichiro Haramura
原村 新一郎
Hiroshi Yamamoto
寛 山本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP20276182A priority Critical patent/JPS5992453A/en
Publication of JPS5992453A publication Critical patent/JPS5992453A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B33/00Constructional parts, details or accessories not provided for in the other groups of this subclass
    • G11B33/10Indicating arrangements; Warning arrangements

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Manufacturing Optical Record Carriers (AREA)

Abstract

PURPOSE:To ensure an inspection of a disk by setting a sensor so as to detect just either one of diffracted beams of the primary or higher orders generated from a signal track and detecting only the signal corresponding to a defect on the disk recording surface. CONSTITUTION:When the laser light is projected to a disk 1, the diffracted light is emitted due to a defect and a track on the disk surface. If the recording surface has no defect, the laser light 11 projected to the disk 1 produces diffracted beams 13 and 14 at the prescribed angle positions by the track on the disk recording surface in addition to the positive reflected light 12. While no diffraction phenomenon is produced due to the track if the track has a partial crack owing to the defect of the recording surface. In other words, the beams 13 and 14 are modulated in response to the crack state of the track and generate the diffracted light 15. Thus the change of a diffraction phenomenon can be detected by setting a sensor 9 on the optical axis of the beam 13. Furthermore, it is possible to provide a sensor corresponding to the diffracted beam of higher order.

Description

【発明の詳細な説明】 産業上の利用分野 本発明はビデオディスク、オーディオディスク等のディ
スク記録面の欠陥を検査するためのディスク検査装置に
関するものである。
DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a disc inspection device for inspecting defects on the recording surface of a video disc, audio disc, or the like.

従来例の構成とその問題点 一般に、ディスクの製造過程でディスク表面にはキズ、
凹凸、異物付着などに起因して欠陥が生じてディスクの
品質不良となり、この製造工程などで上述した欠陥の検
査が必要となる。そこで、ディスク記録面をレーデ光で
走査し欠陥に対応する信号をセンサで検出する事により
、ディスク記録面の欠陥を高速で検査する試みがなされ
ている。
Conventional structure and its problems In general, scratches and scratches occur on the disk surface during the disk manufacturing process.
Defects occur due to unevenness, adhesion of foreign matter, etc., resulting in poor quality of the disk, and the above-mentioned defects must be inspected during the manufacturing process. Therefore, attempts have been made to inspect the disk recording surface for defects at high speed by scanning the disk recording surface with Raded light and detecting signals corresponding to defects with a sensor.

この場合、上述した欠陥検出の手法には従来から第1図
に示すようにディスク21に垂直にレーデ光を投光し、
その散乱光を集光レンズ22で集光してセンサ23で検
出する方式と、第2図に示すようにディスク21に対し
て所定の角度をもってレーザ光を投光し、その正反射光
を集光レンズ24で集光してセンナ26で検出する方式
とが採用されている。しかしながら、上述したいずれの
欠陥検出方式の場合もコンパクトディスクの様に記録面
の上に保護層のあるディスクでは保護層表面の反射光と
記録面での反射光が混り合い、欠陥に対応する信号を確
実に検出出来ないという問題があった0 発明の目的 本発明の目的は、ディスク記録面の欠陥に対応する信号
のみ検出することにより、より確実な検査ができるディ
スク検査装置を提供することにある0 発明の構成 本発明のディスク検査装置は、ディスクに設けた信号ト
ラックにより発生する一次以上の回折光のいずれかのみ
を検出するように上記回折光に対応してセンサを配置し
、とのセンサにより一次以上の回折光のみを検出するこ
とにより、ディスク記録面の欠陥検出を行なうように構
成したものである。
In this case, the above-described defect detection method has conventionally involved projecting radar light perpendicularly onto the disk 21 as shown in FIG.
One method is to collect the scattered light with a condenser lens 22 and detect it with a sensor 23, and the other is to project a laser beam onto the disk 21 at a predetermined angle and collect the specularly reflected light, as shown in FIG. A method of condensing light with an optical lens 24 and detecting it with a sensor 26 is adopted. However, in the case of any of the above-mentioned defect detection methods, in discs such as compact discs that have a protective layer on the recording surface, the light reflected from the surface of the protective layer and the light reflected from the recording surface are mixed, and it is difficult to detect defects. There was a problem that signals could not be detected reliably.Objective of the Invention An object of the present invention is to provide a disk inspection device that can perform more reliable inspection by detecting only signals corresponding to defects on the disk recording surface. 0 Structure of the Invention The disk inspection device of the present invention includes a sensor arranged in correspondence with the diffracted light so as to detect only one of the first-order or higher-order diffracted light generated by the signal track provided on the disk. This sensor is configured to detect defects on the disk recording surface by detecting only first-order or higher-order diffracted light.

実施例の説明 第3図は本発明の一実施例を示しており、第3図におい
て、1は被検査ディスク、2はディスク1の回転駆動部
、3は回転駆動部2を含めたディスク1の送り機構部、
4は送り機構部3の駆動部、6はレーザ光源、6は投光
レンズ、7はハーフミラ−18はミラー、9は一次回折
光のセンサである。
DESCRIPTION OF EMBODIMENTS FIG. 3 shows an embodiment of the present invention. In FIG. 3, 1 is a disk to be inspected, 2 is a rotational drive section of the disk 1, and 3 is a disk 1 including the rotation drive section 2. feeding mechanism section,
Reference numeral 4 designates a drive unit of the feed mechanism section 3, 6 a laser light source, 6 a projection lens, 7 a half mirror, 18 a mirror, and 9 a sensor for primary diffracted light.

このような構成において、送り機構部3とその駆動部4
及び回転駆動部2によりディスク1は回転しながら送り
が掛けられ、レーザ光源5からのレーザ光が投光レンズ
6、ハーフミラ−7およびミラー8を経てディスク1の
被検査面に投光されてうす巻き状に走査する。ディスク
1に投光されたレーザ光はディスク面の欠陥とトラック
により回折され、センサ9で検出される。
In such a configuration, the feed mechanism section 3 and its drive section 4
The disk 1 is rotated and fed by the rotation drive unit 2, and the laser light from the laser light source 5 is projected onto the surface to be inspected of the disk 1 through the projection lens 6, half mirror 7, and mirror 8. Scan in a spiral. The laser beam projected onto the disk 1 is diffracted by defects and tracks on the disk surface and detected by the sensor 9.

ここで、上記ディスク1にレーザ光を投光すると、ディ
スク面の欠陥とトラックにより第4図に示すように回折
光が発光する。第4図中、11は投入レーザ光、12は
正反射光、13はトラックの一次回折光、14はトラッ
クの二次回折光、16は欠陥による回折光である。記録
面に欠陥がない場合、上記ディスク1に投光されたレー
ザ光11はディスク記録面のトラックにより正反射光2
以外に所定の角度位置に回折光3,4を発生する。
Here, when a laser beam is projected onto the disk 1, diffracted light is emitted due to defects and tracks on the disk surface as shown in FIG. In FIG. 4, 11 is an input laser beam, 12 is a specularly reflected light, 13 is a first-order diffracted light of the track, 14 is a second-order diffracted light of the track, and 16 is a diffracted light due to a defect. If there are no defects on the recording surface, the laser beam 11 projected onto the disk 1 is specularly reflected light 2 by the tracks on the disk recording surface.
In addition, diffracted lights 3 and 4 are generated at predetermined angular positions.

一方、記録面の欠陥によりトラックの一部が欠けると前
述のトラックによる回折現象が発生しなくなる。すなわ
ち回折光3.4がトラックの欠は具合に応じて変調され
て回折光6を発生する。よって、−次回折光13の光軸
上にセンサ9を配置することにより、上述の回折現象の
変化をセンサ9で検出する事ができ、欠陥が確実に検出
される。
On the other hand, if a portion of the track is missing due to a defect in the recording surface, the aforementioned diffraction phenomenon due to the track will no longer occur. That is, the diffracted light beams 3.4 are modulated depending on the extent of track defects to generate the diffracted light beams 6. Therefore, by arranging the sensor 9 on the optical axis of the -order diffracted light 13, the sensor 9 can detect the change in the above-mentioned diffraction phenomenon, and defects can be reliably detected.

尚、上記の実施例では一次回折光13に対応してセンサ
9を配置しだが、これ以外に高次の回折光に対応するよ
うにセンサを配置してもよいことは云うまでもない。
In the above embodiment, the sensor 9 is arranged to correspond to the first-order diffracted light 13, but it goes without saying that the sensor may be arranged to correspond to higher-order diffracted light.

発明の効果 以上、詳述したように本発明によれば、ディスクに設け
た信号トラックにより発生する一次以上の回折光のいず
れかに対応するようにセンサを配置しだので、信号トラ
ックのある記録面に生じる欠陥を確実に検出することが
出来ると共に、集光レンズ等が不要と成り装置を簡素化
できる利点を有する。
Effects of the Invention As detailed above, according to the present invention, the sensor is arranged so as to respond to any of the first-order or higher-order diffracted light generated by the signal track provided on the disk. This method has the advantage of not only being able to reliably detect defects occurring on the surface, but also eliminating the need for a condenser lens and simplifying the apparatus.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は側方散乱受光による従来の欠陥検出方式の概略
図、第2図は正反射光受光による従来の欠陥検出方式の
概略図、第3図は本発明の一実施例を示すブロック図、
第4図はその要部の動作説明図である。 11・・・・・・投入レーザ光、12・・・・・・正反
射光、13・;・・・・−次回折光、14・・・・・・
二次回折光、15・・・・・・欠陥による回折光、9・
・・・・・センサ、1・・・・・・被検査ディスク。 代理人の氏名 弁理士 中 尾 敏 男 ほか1名aI
図 ?! 第 2 図 z/ 第4図
Fig. 1 is a schematic diagram of a conventional defect detection method using side scattering light reception, Fig. 2 is a schematic diagram of a conventional defect detection method using specular reflection light reception, and Fig. 3 is a block diagram showing an embodiment of the present invention. ,
FIG. 4 is an explanatory diagram of the operation of the main part. 11...Input laser beam, 12...Specular reflected light, 13...--order diffracted light, 14...
Second-order diffracted light, 15...Diffracted light due to defects, 9.
...Sensor, 1...Disk to be inspected. Name of agent: Patent attorney Toshio Nakao and one other aI
figure? ! Figure 2z/Figure 4

Claims (1)

【特許請求の範囲】[Claims] 信号が記録されたディスクの記録面をレーザ光で走査し
、上記ディスクの記録面の欠陥に相当する信号を検出す
るセンサを有してなり、上記センサは上記ディスクに設
けた信号トラックにより発生する一次以上の回折光のい
ずれかのみを検出するように上記回折光に対応して配置
してなるディスク検査装置。
The sensor includes a sensor that scans the recording surface of the disk on which a signal is recorded with a laser beam and detects a signal corresponding to a defect on the recording surface of the disk, and the sensor is generated by a signal track provided on the disk. A disk inspection device arranged in correspondence with the above-mentioned diffracted light so as to detect only one of the first-order or higher-order diffracted lights.
JP20276182A 1982-11-17 1982-11-17 Disk inspecting device Pending JPS5992453A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20276182A JPS5992453A (en) 1982-11-17 1982-11-17 Disk inspecting device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20276182A JPS5992453A (en) 1982-11-17 1982-11-17 Disk inspecting device

Publications (1)

Publication Number Publication Date
JPS5992453A true JPS5992453A (en) 1984-05-28

Family

ID=16462727

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20276182A Pending JPS5992453A (en) 1982-11-17 1982-11-17 Disk inspecting device

Country Status (1)

Country Link
JP (1) JPS5992453A (en)

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