JPS5991378U - Boat for liquid phase epitaxial growth - Google Patents
Boat for liquid phase epitaxial growthInfo
- Publication number
- JPS5991378U JPS5991378U JP18869082U JP18869082U JPS5991378U JP S5991378 U JPS5991378 U JP S5991378U JP 18869082 U JP18869082 U JP 18869082U JP 18869082 U JP18869082 U JP 18869082U JP S5991378 U JPS5991378 U JP S5991378U
- Authority
- JP
- Japan
- Prior art keywords
- boat
- liquid phase
- epitaxial growth
- phase epitaxial
- blocking member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図ａ、 ｂは従来用いられてきた液相エピタキシ
ャル反応系の縦断面図及びＡＡ’に沿う横断面図である
。第２図は従来の反応炉内の温度分布である。第３図ａ
、 ｂは、遮断部材つきボートを用いた反応系の縦断
面図及び、ＢＢ’に沿う横断面図である。第４図ａ、
ｂは本考案の方法ｉこよる反応系の縦断面図と、横断
面図を示している。第４図すは、第４図ａのＥＥ’に沿
う横断面図である。第５図は第４ａに対応する反応炉内
の温度分布である。
１・・・反応管（石英）、２・・・操作棒、３・・・保
護管、４・・・熱を対、５・・・基板ホルダー、６・・
・メルトホルダー、７・・・基板結晶入れ、８．８’、
８″・・・原料メルト、９・・・側壁、１０・・・遮断
部材、１１・・・間隙、１２・・・底板、１３・・・雰
囲気ガスＨ２゜ヤ３回（０）
Ｂ
キ３図（ｂ）FIGS. 1a and 1b are a longitudinal cross-sectional view and a cross-sectional view taken along the line AA' of a conventionally used liquid phase epitaxial reaction system. FIG. 2 shows the temperature distribution inside a conventional reactor. Figure 3a
, b are a longitudinal cross-sectional view and a cross-sectional view along BB' of a reaction system using a boat with a blocking member. Figure 4a,
b shows a longitudinal cross-sectional view and a cross-sectional view of the reaction system according to method i of the present invention. FIG. 4 is a cross-sectional view along EE' of FIG. 4a. FIG. 5 shows the temperature distribution in the reactor corresponding to FIG. 4a. 1... Reaction tube (quartz), 2... Operating rod, 3... Protection tube, 4... Heat pair, 5... Substrate holder, 6...
・Melt holder, 7...Substrate crystal holder, 8.8',
8''... Raw material melt, 9... Side wall, 10... Shutoff member, 11... Gap, 12... Bottom plate, 13... Atmospheric gas H2° 3 times (0) B Ki 3 Figure (b)
Claims (1)
壁が直接対向するのを防ぐような構造の遮断部材を持つ
液相エピタキシャル成長用ボートにおいて側壁、遮断部
材、底板からなるボートの外周部材を反応炉内低温部ま
で延長し延長部分の構成部材の肉厚を薄くして熱伝導を
低減させるような構造をもつことを特徴とする液相エピ
タキシャル成長用ボート。In a boat for liquid phase epitaxial growth that has a blocking member structured to prevent the raw material melt for liquid phase epitaxial growth from directly opposing the inner wall of the quartz reaction tube, the outer peripheral members of the boat, consisting of the side wall, blocking member, and bottom plate, are heated in a reactor at a low temperature. 1. A boat for liquid phase epitaxial growth, characterized by having a structure in which the thickness of the constituent members of the extended portion is reduced to reduce heat conduction.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18869082U JPS5991378U (en) | 1982-12-13 | 1982-12-13 | Boat for liquid phase epitaxial growth |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18869082U JPS5991378U (en) | 1982-12-13 | 1982-12-13 | Boat for liquid phase epitaxial growth |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5991378U true JPS5991378U (en) | 1984-06-21 |
Family
ID=30406997
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18869082U Pending JPS5991378U (en) | 1982-12-13 | 1982-12-13 | Boat for liquid phase epitaxial growth |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5991378U (en) |
-
1982
- 1982-12-13 JP JP18869082U patent/JPS5991378U/en active Pending
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