JPS5990961A - Semiconductor memory device - Google Patents

Semiconductor memory device

Info

Publication number
JPS5990961A
JPS5990961A JP57201560A JP20156082A JPS5990961A JP S5990961 A JPS5990961 A JP S5990961A JP 57201560 A JP57201560 A JP 57201560A JP 20156082 A JP20156082 A JP 20156082A JP S5990961 A JPS5990961 A JP S5990961A
Authority
JP
Japan
Prior art keywords
rays
section
semiconductor chip
protective film
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP57201560A
Other languages
Japanese (ja)
Inventor
Shingo Koshida
越田 信吾
Mitsuharu Kato
光治 加藤
Kenji Kanamaru
健次 金丸
Katsunori Okura
大倉 勝徳
Koji Senbokuya
仙北屋 浩二
Munenari Kondo
近藤 宗成
Masabumi Takada
高田 正文
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Denso Corp
Original Assignee
NipponDenso Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NipponDenso Co Ltd filed Critical NipponDenso Co Ltd
Priority to JP57201560A priority Critical patent/JPS5990961A/en
Publication of JPS5990961A publication Critical patent/JPS5990961A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C16/00Erasable programmable read-only memories
    • G11C16/02Erasable programmable read-only memories electrically programmable
    • G11C16/06Auxiliary circuits, e.g. for writing into memory
    • G11C16/10Programming or data input circuits
    • G11C16/18Circuits for erasing optically
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805Shape
    • H01L2224/4809Loop shape
    • H01L2224/48091Arched
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481Disposition
    • H01L2224/48151Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/48221Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/48245Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
    • H01L2224/48247Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic connecting the wire to a bond pad of the item

Abstract

PURPOSE:To form structure the same as a normal plastic package, and to obtain the semiconductor memory device, which is easy to be molded and cost thereof is low, by irradiating X-rays through a molding member from the surface side of a chip loading section and erasing memory contents in a semiconductor chip. CONSTITUTION:A surface section except a memory cell forming region 3a and a signal extracting section 3b by bonding wires 5 is coated with a protective film 4 as an X-ray shielding member. The protective film 4 is constituted by a material or a mixture, which is difficult to transmit X-rays, such as lead, and the quality of material and film thickness are selected in consideration of the irradiating intensity of used X-rays. The protective film 4 consists of an exposed section 4a, in which the memory cell forming region 3a is exposed, and a coating section 4b on the semiconductor chip 3. When X-rays of predetermined intensity are irradiated from the upper surface of the plastic package, X-rays transmit the molding member 6, and reach the EPROM section of the semiconductor chip 3 through the exposed section 4a of the protective film 4. Accordingly, charges in the floating gate of the EPROM are discharged, and memory contents can be erased.

Description

【発明の詳細な説明】 この発明はX #、litを照射して半導体チップ内の
記1、ヲ内容を消去できる簡易構造の半導体記憶装置に
関する。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a semiconductor memory device with a simple structure that can erase the contents of a semiconductor chip by irradiating it with X#, lit.

一般に、間外線消去型のEPROM(つまり1iras
able and electrically pro
grammable rtradonIy rnern
oryの略称)の場合、1ン○Mの部分のみに紫外線が
当たるように透明な樹脂等で窓状の構造をした特殊なパ
ッケージを作る必要があり、コスI・的に割高となって
いた。
In general, an EPROM of the line erasing type (i.e. 1 iras
able and electrically pro
grammable rtradonIy rnern
In the case of (abbreviation for "ory"), it was necessary to make a special package with a window-like structure made of transparent resin so that only the 1n○M part was exposed to ultraviolet rays, making it relatively expensive in terms of cost. .

本発明は上記点に鑑み、通常のプラスチックパッケージ
とfiJ様の構造にし゛C成型しゃJ−<、かつ低コス
トの半導体記憶装置を提供゛4るごとを目的とする。
In view of the above points, it is an object of the present invention to provide a low-cost semiconductor memory device that uses an ordinary plastic package and a FIJ-like structure, and is capable of C-molding.

そのため本発明では、リード部及びチップ搭載部を有す
るリードフレーム、と、前記デツプ搭載ff1tに載置
された記1を素子形成領域を有する半導体チップと、こ
の半導体チップ」二において少なくとも前記記憶素子形
成領域を除< tp++分に形成されたX線遮えい部材
と、前記半導体−f ノブ及び0;1記デツプ搭載部及
び前記リード部の一部を被覆するモールド部材とからな
り、前記デツプ搭載部の表面側より前記モールド部材を
介しζX線を照射しn;1記半導体チップ内の記憶内容
を消去′する構造とり、たことを特徴とする。
Therefore, in the present invention, there is provided a lead frame having a lead portion and a chip mounting portion, a semiconductor chip placed on the depth mounting ff1t and having an element formation region, and a semiconductor chip in which at least the memory element is formed. It consists of an X-ray shielding member formed in an area < tp++ excluding the region, and a molding member that covers the semiconductor-f knob and a part of the depth mounting part and the lead part, and The semiconductor chip is characterized in that it has a structure in which the memory contents in the semiconductor chip are erased by irradiating ζX-rays from the front surface side of the semiconductor chip through the mold member.

次に、本発明の一実施例につい一ζ説明する。Next, one embodiment of the present invention will be explained.

第1図及び第2図は半導体記憶装置の断面図及び平面図
である。1.2はリードフレームを構成するリード部と
チップ搭載部、3は記憶素子形成領域(IE l) R
OM 2部分)を有する半導体チップで、この記憶素子
形成領域(第3図中領域3a)及びホンディングワイヤ
5などによる信号取出し部分(第3図中領域3b)を除
く表面部分をX線遮へい部材である保護11ia4で被
覆されている。この保i!1f1941;l、鉛などX
線を透過しにくい材料またはその混合物から構成されて
おり、使用されるX#fAのII<l射強度を考慮しζ
そのヰ]質や膜厚は適宜選択されている。第3図は半導
体チップ部分を拡大図したもので、半導体チップ3」二
におい“C保1(NA4は、記憶未了・形成領域3aを
鮪出さ(る露出部4aと被覆部4bからなる。6はエポ
キシ樹脂等のプラスデックモールド部材である。
1 and 2 are a sectional view and a plan view of a semiconductor memory device. 1.2 is the lead part and chip mounting part that make up the lead frame, 3 is the storage element formation area (IE l) R
This semiconductor chip has an X-ray shielding member for the surface area excluding the memory element forming area (area 3a in FIG. 3) and the signal extraction area by the bonding wire 5 (area 3b in FIG. 3). It is coated with protection 11ia4. This protection! 1f1941; l, lead etc.
It is made of a material or a mixture thereof that does not easily transmit radiation, and considering II<l radiation intensity of X#fA used, ζ
Its quality and film thickness are appropriately selected. FIG. 3 is an enlarged view of the semiconductor chip portion, where the semiconductor chip 3 consists of an exposed portion 4a and a covered portion 4b, which expose the unmemorized/formed area 3a. 6 is a plus deck mold member made of epoxy resin or the like.

そこで、この半導体装置のE P ROM部分の記憶内
容を消去するには、プラスチソクパノケーシ」二面から
所定強度のX線を照射すればよい。X線はモールF部材
6を透過し保i1膜4の掲出部4aを通して半導体デツ
プ3のlff1 PROM部分に到達する。そごでE 
P ROMのフローティングゲート中の電荷を放出させ
、記憶内容を消却できる。この際、E I) ROM以
外のチップ部分は保護膜4で覆われているためX線によ
る損傷から保護されることになる。
Therefore, in order to erase the stored contents of the EP ROM portion of this semiconductor device, it is sufficient to irradiate X-rays of a predetermined intensity from two sides of the plastic pan casing. The X-rays pass through the molding F member 6 and reach the lff1 PROM portion of the semiconductor depth 3 through the raised portion 4a of the insulating i1 film 4. Sogode E
The charges in the floating gate of the PROM can be released and the stored contents can be erased. At this time, the chip portions other than the EI) ROM are covered with the protective film 4 and are therefore protected from damage caused by X-rays.

なお、」ニド実施例では保111Q4を半導体チ・ノブ
3上に被覆するようにしたが、所定の露出穴を有゛4る
X線遮へい板を用い、プラスチ・ツクモールド時に、こ
の遮へい板が半導体チ・ノブ」二の所定位置に固定され
るようにしCもよい。
In addition, in the Nido Example, the semiconductor chip 111Q4 was coated on the semiconductor chip knob 3, but when an It may also be fixed in a predetermined position on the second knob.

上記実施例では1チツプマイクロコンピユータなどIZ
 P 110Mを一部分に搭載するものについて説明し
たが、全体がROMからなりその一部が12゜13 R
OMからなるものにも同様に適用できる。
In the above embodiment, a one-chip microcomputer, etc.
I explained about a model with P 110M installed in a part, but the whole is made up of ROM and part of it is 12゜13R.
The same applies to those made of OM.

以」二述べた如く、本発明によれば通常のプラスチック
モールV品と何ら構造的に変化がなく、しかも安価な手
段により、X線消去可能な半導体記憶装置を提供できる
As described above, according to the present invention, it is possible to provide an X-ray erasable semiconductor memory device that is structurally unchanged from ordinary plastic molded V products and is inexpensive.

【図面の簡単な説明】[Brief explanation of drawings]

第1.2図は本発明装置の一実施例を示1°断面図と、
111面図、第3図は半導体チ・ノブn1ζ分を1珪二
大した図である。 l・・・リード部、2・・・チ・ノブ搭載部、3・・・
半導体−ブツブ、4・・・X線遮へい部材をなす保護膜
、6・・・プラスチックモールド部材。 代理人弁理士 岡 部   隆 第11掲     第214 第 3 1゛:1 40  3b
Figure 1.2 shows an embodiment of the device of the present invention, a 1° cross-sectional view, and
The 111th view and FIG. 3 are views in which the semiconductor chip n1ζ is enlarged by 1×1. l...Lead part, 2...Ch knob mounting part, 3...
Semiconductor-bubble, 4... Protective film forming an X-ray shielding member, 6... Plastic mold member. Representative Patent Attorney Takashi Okabe No. 11 No. 214 No. 3 1゛: 1 40 3b

Claims (1)

【特許請求の範囲】[Claims] ソー1′部及びチップ搭載部を有するリードフレームと
、t):1記チ、ゾ搭載部に載置された記憶素子形成v
I域を有する半導体チップと、この半導体チップ上に才
?いて少なくとも前記記iff素子形成領域を除く部分
に形成されたX線遮えい部材と、前記半導体−ノーソゾ
及びflil記チノゾ搭載部及びflil記リードリー
1部を被覆するモールド部月とがらなり、t’+il記
チノゾIδ載a++の表面側よりn:1記モ一ルド部材
を介してX線を照射し前記半導体−f〜ツブ内の記1゜
な内容を?li去する構造の半導体記1σ装置。
A lead frame having a saw 1' portion and a chip mounting portion, and t): 1.
Is there a semiconductor chip with an I region and a semiconductor chip on this semiconductor chip? t'+il X-rays are irradiated from the surface side of the chinozo Iδ mounted a++ through the n:1 molded member to examine the contents of the semiconductor -f to lumps as described above. A semiconductor 1σ device having a structure in which li is removed.
JP57201560A 1982-11-16 1982-11-16 Semiconductor memory device Pending JPS5990961A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57201560A JPS5990961A (en) 1982-11-16 1982-11-16 Semiconductor memory device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57201560A JPS5990961A (en) 1982-11-16 1982-11-16 Semiconductor memory device

Publications (1)

Publication Number Publication Date
JPS5990961A true JPS5990961A (en) 1984-05-25

Family

ID=16443071

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57201560A Pending JPS5990961A (en) 1982-11-16 1982-11-16 Semiconductor memory device

Country Status (1)

Country Link
JP (1) JPS5990961A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH033257A (en) * 1989-05-30 1991-01-09 Mitsubishi Electric Corp Semiconductor device
US5656521A (en) * 1995-01-12 1997-08-12 Advanced Micro Devices, Inc. Method of erasing UPROM transistors

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH033257A (en) * 1989-05-30 1991-01-09 Mitsubishi Electric Corp Semiconductor device
US5656521A (en) * 1995-01-12 1997-08-12 Advanced Micro Devices, Inc. Method of erasing UPROM transistors

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