JPS5990901A - Method of producing voltage nonlinear resistor - Google Patents
Method of producing voltage nonlinear resistorInfo
- Publication number
- JPS5990901A JPS5990901A JP57200411A JP20041182A JPS5990901A JP S5990901 A JPS5990901 A JP S5990901A JP 57200411 A JP57200411 A JP 57200411A JP 20041182 A JP20041182 A JP 20041182A JP S5990901 A JPS5990901 A JP S5990901A
- Authority
- JP
- Japan
- Prior art keywords
- voltage
- nonlinear resistor
- resistor
- same conditions
- voltage nonlinear
- Prior art date
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Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
【発明の詳細な説明】
〔発明の技術分野〕
本発明Fi酸化物半導体からなる電圧非直線抵抗体に関
する。DETAILED DESCRIPTION OF THE INVENTION [Technical Field of the Invention] The present invention relates to a voltage nonlinear resistor made of an Fi oxide semiconductor.
半導体を応バ1した回路素子の一つに電圧非直線4ハ1
抗体があり、その代表的なものとしてZn0−Bl40
8系焼結体を用いたバリスタが知られている0この種の
バリスタは非直馴的な′電圧−電流特性を有しており電
圧の増大6二伴ない抵抗が急激C二減少して電流が著し
く増加するため異常な過電圧の吸収や電圧安定化用とし
て広く実用化されている。Voltage nonlinearity is one of the circuit elements based on semiconductors.
There are antibodies, a typical example of which is Zn0-Bl40.
Varistors using 8-series sintered bodies are known. This type of varistor has non-normal voltage-current characteristics, and as the voltage increases, the resistance rapidly decreases. Because the current increases significantly, it is widely used for absorbing abnormal overvoltage and stabilizing voltage.
ところで電圧非直線抵抗体の特性θ一般に次の近似式で
示される電圧−電流特性をもpて評i、p+されている
。By the way, the voltage-current characteristics expressed by the following approximate expression are also evaluated as i and p+ for the characteristic θ of a voltage non-linear resistor.
z=(−−)ゝ
(但し工はバリスタ(電流れる■l、流、Vは印加電圧
、OFi定数、αは非直線係数)
従ってバリスタの一般特性けCとtXの2つの定数で表
示することができ、通常はCの代りに1mAにおける電
圧Vlで示され、°また電圧非直線特性を示す指数であ
るαイ16の大きいことが重視されている0
上記zno −BigOB系バリスタ(電圧非直線抵抗
体)け前記電圧−電流特性が良好なこと、さらに素子の
厚さ制御により電圧−電流特性を任意にw4節しうるな
ど多くの特長を備えている一方次のような不都合さが認
められる。即ちZnO−BiBOB系バリスタの一つの
特長とも云うべき対称型電流電圧特性についてみると、
衝撃電流、直流負荷、或いは温度サイクルなどC二よる
負方向における変化率が大きく、信頼性が劣ると云う欠
点がある。z=(--)ゝ(However, the work is the varistor (current is flowing, current, V is the applied voltage, OFi constant, α is the non-linear coefficient) Therefore, the general characteristics of the varistor are expressed by two constants, C and tX. It is usually indicated by the voltage Vl at 1 mA instead of C, and emphasis is placed on a large value of α, which is an index indicating voltage nonlinear characteristics. Although it has many features such as good voltage-current characteristics (linear resistor) and the ability to arbitrarily adjust the voltage-current characteristics by controlling the thickness of the element, it has the following inconveniences: In other words, looking at the symmetrical current-voltage characteristics, which can be said to be one of the features of ZnO-BiBOB varistors,
The disadvantage is that the rate of change in the negative direction due to C2, such as impact current, DC load, or temperature cycle, is large, resulting in poor reliability.
本発明e」上記欠点に鑑みなされたもので、対称型11
(圧−電流性ah及び信頼性を向上させた電圧非直線抵
抗体の製造方法を提供することを目的とする0
〔発明のIk′4.敬〕
かかる目的を達成させるため、本発明は酸化亜鉛を主成
分とする焼結体から成る電圧非直線抵抗素子なPχとP
を含有する溶液中に所定時間浸した後、熱処理を行いつ
いで電極旬を行うことをその特徴とする。This invention e" was made in view of the above drawbacks, and is a symmetrical type 11
(An object of the present invention is to provide a method for manufacturing a voltage nonlinear resistor with improved piezo-current properties and reliability.) Voltage nonlinear resistance elements Pχ and P made of a sintered body containing zinc as the main component
The feature is that after being immersed in a solution containing for a predetermined period of time, a heat treatment is performed, and then electrode heating is performed.
そして溶液はPを0.05〜5 モル% l piを0
.05〜5重t %官有するものであると好適であり、
熱処理は300 ”C〜850℃の酸化性雰囲気で行う
ことが望ましい。The solution contains 0.05 to 5 mol% P and 0 pi.
.. It is preferable that it has 05 to 5 weight t%,
The heat treatment is preferably performed in an oxidizing atmosphere at 300"C to 850C.
本発明に係る電圧非直線抵抗体は例えば、次のような方
法により容易に製造し得る。即ち、主成分のZnOにB
12O3成分などを添加し、これらをボットミルなどで
湿式混合し、乾燥させた後、たとえばポリビニルアルコ
ールなどのバインダを添加配合し% 100〜100
0Kf/’cuJ f′l’、度の圧力で加圧成形して
例えば、直径20關厚を21程度のディスク形に仕上げ
成形体を得る。次いでこの成形体を例えば1100〜1
400℃程度の高温9気雰囲気中にて焼成し、焼結体を
得る。このようi二して得た焼結体の両生前を平行に研
磨する。この焼結体を例えばリン酸(H8PO4) 1
モル−〇水溶液中に塩化白金酸(HBPlat6 ・6
HBO)をP、tに換舞、シて1wz%を溶角了させた
ものの中に含浸させる。その後この焼結体を空気中で3
00℃〜850℃の範、凹で熱処理を行ない、室温まで
冷却した後、A1を両生前に溶射し、宿1彬とすること
により所要の電圧非直線抵抗体が得られる。本発明にお
いて、含浸工程は、焼結体を上記の溶液中に浸せばよい
が、さらに焼結体を浸した溶液の周囲を真空吸引した場
合は、含浸が短時間で行なえ、確実に実施できる。The voltage nonlinear resistor according to the present invention can be easily manufactured, for example, by the following method. That is, B is added to the main component ZnO.
12O3 components etc. are added, these are wet-mixed in a bot mill etc., and after drying, a binder such as polyvinyl alcohol is added and blended to give a composition of % 100-100.
Pressure molding is carried out at a pressure of 0 Kf/'cuJ f'l' to obtain a finished molded product in the shape of a disk with a diameter of 20 mm and a thickness of about 21 mm, for example. Next, this molded body is heated to a temperature of, for example, 1100 to 1
A sintered body is obtained by firing at a high temperature of about 400° C. in a 9-atmosphere atmosphere. Both sides of the sintered body thus obtained are polished in parallel. This sintered body, for example, phosphoric acid (H8PO4) 1
Chloroplatinic acid (HBPlat6 ・6
HBO) was converted to P and t, and 1 wz% was impregnated into the melted material. After that, this sintered body was placed in the air for 3
After performing heat treatment in the range of 00° C. to 850° C. and cooling to room temperature, A1 is thermally sprayed on both sides to form a coating, thereby obtaining the required voltage nonlinear resistor. In the present invention, the impregnation step can be carried out by immersing the sintered body in the above solution, but if the area around the solution in which the sintered body is immersed is vacuum-suctioned, the impregnation can be carried out in a short time and can be carried out reliably. .
また本発明において用いるP及びPiを含有する溶液と
しては例えば、リン酸(HBPO4)の水溶液C二、塩
化白金酸(H2,p、tOJ6・6H$lO)水溶液を
溶解したものまたは、たとえば(09HB)8P、 0
9H6P、to19などの有機化合物なエテルアルコー
ル、ベンゼンなどの有機溶媒に溶解させたものであって
もよい。1次用いる溶液の濃度はPを0.05〜5モル
チ、P差を0.05〜5爪量チ含有するものであること
が好ましい。Examples of the solution containing P and Pi used in the present invention include a solution containing an aqueous solution of phosphoric acid (HBPO4), an aqueous solution of chloroplatinic acid (H2, p, tOJ6.6H$lO), or a solution containing, for example, (09HBPO4). )8P, 0
Organic compounds such as 9H6P and to19 may be dissolved in organic solvents such as ether alcohol and benzene. The concentration of the solution used for the first time is preferably one containing 0.05 to 5 moles of P and 0.05 to 5 moles of P difference.
さらに、PおよびPχを上記の方法により含浸させた後
空気または酸素雰囲気中で熱処理を行なうことに上り、
含浸の効果をより高めることができる。Furthermore, after impregnating P and Pχ by the above method, heat treatment is performed in air or oxygen atmosphere,
The effect of impregnation can be further enhanced.
この熱処理温度は300〜850℃のうちのいずれが1
点の温1yでよ<850℃をこえないようにすることが
望ましいを検証した。This heat treatment temperature is 1 between 300 and 850℃.
It was verified that it is desirable that the temperature at a point does not exceed 850°C.
次に本発明の実施例を記載するが、使用した焼結体は酸
化!11(鉛(2n0)粉末にBt4oB成分などを添
加配合し、圧力100Ky/aAで直径2o胃り厚さ2
寵のディスク形に成形し、成形体と空気雰囲気中120
0℃で焼成し、両生前を平行に研磨して厚さ1關シニし
たものである。Next, an example of the present invention will be described, but the sintered body used was oxidized! 11 (Bt4oB component etc. are added to lead (2n0) powder, and the diameter is 2o and the thickness is 2 at a pressure of 100Ky/aA.
Molded into a disc shape and heated in an air atmosphere with the molded body for 120 minutes.
It was fired at 0°C and polished on both sides parallel to each other to a thickness of 1 inch.
(実施例1)
焼結体をp、tに換算して1 wi%の浜度の塩化白金
酸を・溶解したリン酸1モルチ水溶液中に含浸させた。(Example 1) A sintered body was impregnated in an aqueous solution of 1 molar phosphoric acid in which chloroplatinic acid of 1 wi% in terms of p and t was dissolved.
この後600℃で熱処理を行ない、両生前にA1の溶射
電極を付けて、酸化物電圧非直線抵抗体を得た。この酸
化物電圧非直線抵抗体について1rnAの電流が流れる
ときの印加111圧Vl(V) 、非直線性α ゛およ
び商用周波(50gg)/4aれ電流工R(μA)をそ
れぞれ求めた結果を第1表e二併ぜて示した。さらに極
性特性、即ち衝撃大電流特性および直流負荷特性を正方
向の変化率と負方向の変化率として求めた結果を第1表
にあわせて示した。Thereafter, heat treatment was performed at 600° C., and a sprayed electrode of A1 was attached to both sides to obtain an oxide voltage nonlinear resistor. For this oxide voltage nonlinear resistor, when a current of 1rnA flows, the applied voltage Vl (V), nonlinearity α ゛, and commercial frequency (50gg)/4a current R (μA) are calculated. Table 1 e and 2 are shown together. Furthermore, the polarity characteristics, that is, the shock large current characteristics and the DC load characteristics were determined as the rate of change in the positive direction and the rate of change in the negative direction, and the results are shown in Table 1.
尚、上記Cおいて衝撃大電流特性け500Aのサージ電
流を10,000回印加した場合のVl(Aの変化率で
あり、直流負荷特性は周囲温度85℃で2wの負荷を連
続500時間印加後のvlflI′Iの変化率をそれぞ
れ求めたものである。また比較のためPおよびPえを討
浸させない従来のZnO系焼結体からなる電圧4ト直線
抵抗体の場合も(参考例1)−二、リン酸水浴液に含浸
させた場合(参考例2)、塩化白金酸水溶液に含rシさ
せた場合(参考例3)をそれぞれ第1表に示した。In addition, in C above, the impact large current characteristic is the rate of change in Vl (A) when a surge current of 500 A is applied 10,000 times, and the DC load characteristic is when a load of 2 W is continuously applied for 500 hours at an ambient temperature of 85°C. The rate of change of vlflI'I after that was determined respectively.For comparison, the case of a voltage 4-t linear resistor made of a conventional ZnO-based sintered body in which P and P are not impregnated (Reference Example 1) )-2. Table 1 shows the case of impregnation in a phosphoric acid water bath solution (Reference Example 2) and the case of impregnation in a chloroplatinic acid aqueous solution (Reference Example 3), respectively.
(実施例2)
焼結体をPiに換算して0.05重量%の濃度の塩化白
金酸を溶解したリン酸0.05モルチ水溶液中に含浸さ
せた。以下実施例1と同一条件で電圧非直線抵抗体を得
た。この抵抗体について実施例1と同一の条件で特性評
価を行なった結果を第1表C示した。(Example 2) A sintered body was impregnated in an aqueous solution of 0.05 molar phosphoric acid in which chloroplatinic acid was dissolved at a concentration of 0.05% by weight in terms of Pi. A voltage nonlinear resistor was obtained under the same conditions as in Example 1. The characteristics of this resistor were evaluated under the same conditions as in Example 1, and the results are shown in Table 1C.
(実施例3)
μ゛と粘体をPiに換算して0.04重相−の濃度の塩
化白金酸を溶解したリン酸0.04モルチ水溶液中に含
浸させた。以下実施例1と同一条件で電、正非直線抵抗
体を得た。この抵抗体l二ついて実施例1と同一の条件
で特性評価を行なった結果を第1表に示した。(Example 3) The viscosity was impregnated in a 0.04 molty phosphoric acid aqueous solution in which chloroplatinic acid was dissolved at a concentration of 0.04 double phase in terms of Pi. A positive nonlinear resistor was obtained under the same conditions as in Example 1. The characteristics of these two resistors were evaluated under the same conditions as in Example 1, and the results are shown in Table 1.
(実施例4)
焼結体をPχ1−換り−シて5.ルVi%の瀞度の塩化
白金酸を浩解しfcリン酸5七ルチ水溶液中に含浸させ
た。以下実施例1と同一条件で電圧非直線抵抗体を得た
。この抵抗体について実施例1と同一の条件で特性評価
を行なった結果を第1表に示した。(Example 4) The sintered body was replaced with Pχ1.5. Chloroplatinic acid with a consistency of 1% Vi% was dissolved and impregnated into an aqueous solution of fc phosphoric acid. A voltage nonlinear resistor was obtained under the same conditions as in Example 1. The characteristics of this resistor were evaluated under the same conditions as in Example 1, and the results are shown in Table 1.
(実施例5)
焼結体をPχに換算してO,(J 5乗置チの濃度の塩
化白金酸を溶jlj’F したリン酸5モA−チ水溶液
中に含浸させた。以下実施例1と同−条件で電圧非直線
抵抗体を得た。この抵抗体l二ついて実施例1と同一の
条件で特性評価を行なった結果を第1表C示した。(Example 5) The sintered body was impregnated in an aqueous solution of phosphoric acid with a concentration of O, (J5 times the power of H) in terms of Px. A voltage nonlinear resistor was obtained under the same conditions as in Example 1. Two of these resistors were evaluated for their characteristics under the same conditions as in Example 1. The results are shown in Table 1C.
(実施例6)
焼結体をPχに換算して5爪N−%の開度の塩化白金酸
を溶解したリン酸0.05モルチ水溶液中に含浸させた
。以下実施例1と同一条件で電圧4ト直線抵抗体を得た
。この抵抗体について実施例1と同一の条件で特性評価
を行なった結果を第1表C二示した0
(実施例7)
焼結体を”f に換譜して1)sI量チの濃度の塩化白
金酸を溶解したリン酸アンモニウム1モルチ水溶液中に
含浸させた。以下実施例1と同一条件で電圧非直線抵抗
体を得た。この抵抗体6二ついて実施例1と同一の条件
で特性評価を行なった結果を第1表に示した。(Example 6) A sintered body was impregnated in an aqueous solution of 0.05 molty phosphoric acid in which chloroplatinic acid was dissolved with an opening degree of 5 claws N-% in terms of Pχ. A 4-volt linear resistor was obtained under the same conditions as in Example 1. The characteristics of this resistor were evaluated under the same conditions as in Example 1, and the results are shown in Table 1. It was impregnated in a 1 mol ammonium phosphate aqueous solution in which chloroplatinic acid was dissolved.A voltage nonlinear resistor was obtained under the same conditions as in Example 1. Two of these 6 resistors were impregnated under the same conditions as in Example 1. The results of the characteristic evaluation are shown in Table 1.
(実施例8)
焼結体をPiに換算して1ル量−の濃度の塩化白金酸を
溶解した亜すン酸トリメチル1モル係水溶液中に3浸さ
せた。以下実施例1と同一条件で電圧非直線抵抗体を得
た。この抵抗体について実施例1と同一の条件で特性評
価を行々つだ結果を第1表に示した。(Example 8) The sintered body was immersed in a 1 molar aqueous solution of trimethylsulfite in which chloroplatinic acid was dissolved at a concentration of 1 liter in terms of Pi. A voltage nonlinear resistor was obtained under the same conditions as in Example 1. The characteristics of this resistor were evaluated under the same conditions as in Example 1, and the results are shown in Table 1.
(実施例9)
焼結体をPiに換算して1重訛チの濃度のシクロペンタ
塩化白金(08H6PiOJ6)を溶解した亜リン酸ト
リエーテル((cBn6o)B:p) 1モル俤水溶液
中C二含浸させた。以下実施例1と同一条件で電圧非直
線抵抗体を得た。この抵抗体について実施例1と同一の
条件で牛5性訂価を行々つた結果を第1表1:示した。(Example 9) Phosphite triether ((cBn6o)B:p) in which cyclopentaplatinum chloride (08H6PiOJ6) with a concentration of 1-fold concentration in terms of Pi was dissolved in a 1 molar aqueous solution of C2 Impregnated. A voltage nonlinear resistor was obtained under the same conditions as in Example 1. Table 1 shows the results of 5-sex testing of this resistor under the same conditions as in Example 1.
(実施例10)
焼結体をPλに換算して6重゛t!チの濃度の塩化白金
酸を溶解したリン酸0.1モルチ水溶液中C二名浸させ
た。以下実施例1と同一条件で電圧非直線抵抗体を得た
。この抵抗体について実施例と同一の条件で特性評価を
行なった結果をyl 1表1−示した0(実施例11)
焼結体p2に柳智して0.1車j#チの濃度の塩化白金
酸を溶解したリン酸6モルチ水溶液中に含浸させた。以
下実施例1と同−条件で報、正非直線抵抗体を得た。こ
の抵抗体l二ついて実施例1と同一の条件で特性評価を
行なった結果を第1表に示した。(Example 10) The sintered body is converted into Pλ and is 6 times t! Two people were immersed in a 0.1 molar phosphoric acid aqueous solution containing chloroplatinic acid having a concentration of 1. A voltage nonlinear resistor was obtained under the same conditions as in Example 1. The characteristics of this resistor were evaluated under the same conditions as in the examples. It was impregnated into an aqueous solution of 6 molar phosphoric acid in which chloroplatinic acid was dissolved. A positive nonlinear resistor was obtained under the same conditions as in Example 1. The characteristics of these two resistors were evaluated under the same conditions as in Example 1, and the results are shown in Table 1.
−以下余5−
第1表
第1表から明白なように本発明の製造方法に係る電圧非
直l1fi−抵抗体は極性に基づく特性の変動が10%
以内とl」〜さく長期負衝特性g二11111えられる
ことに特長旬けられる。しかしてこの極性C二基づく特
性の変動の小さいことは対称型の′亀圧電扼特性を維持
発揮させるうえで非常4二厖要である。即ち寿命特性、
バリスタ素子の(n軸性(二寄与するもので、例えば半
尋体l!!l路の保鰍、避雷器としての機能保証などの
点から実用上極めてJ涯資な事項である。-Remains 5- Table 1 As is clear from Table 1, the voltage non-direction resistor according to the manufacturing method of the present invention has a 10% variation in characteristics based on polarity.
The main feature is that it has long-term negative characteristics within the range of 1 and 1. However, it is very important that the fluctuation of the characteristics based on the polarity C2 be small in order to maintain and exhibit the symmetrical piezoelectric characteristics. That is, the life characteristics,
It contributes to the n-axis property of the varistor element, and is extremely important in practical terms from the standpoint of, for example, protecting the varistor's radial path and guaranteeing its function as a lightning arrester.
なお、りん化合Q1mtまここで用いたりん酸、りん酸
アンモニウムお工び1llj、りん10トリエチルに限
定されるものでにない。また電極相別もA1沼射に限定
されるもので(dなく、例えば欽ペーストおよびその焼
付け、 Id熱蒸着In蒸着などの手法を用いても同様
の効果がおることがイ濯認さtしている。Note that the phosphorus compound Q1mt is not limited to the phosphoric acid, ammonium phosphate used here, and 10 triethyl phosphorus. In addition, electrode phase separation is limited to A1 sintering, and it is recognized that the same effect can be obtained by using methods such as heat evaporation and Indium evaporation, for example. ing.
以上説明した様に、本発明によれば対称型箱、圧−電流
特性及び信頼性を向上させた電圧非1μ線抵抗体を提供
することができる。As described above, according to the present invention, it is possible to provide a voltage non-1μ wire resistor with a symmetrical box, improved piezo-current characteristics, and improved reliability.
手続補正書(自発) 1、 事件の表示 特願昭57−200411号 2、発明の名称 電圧非直線抵抗体の製造方法 3、補正をする者 事件との関係 特許出願人 (307)東京芝浦電気株式会社 4、代理人 〒100 東京都千代田区内幸町1−1−6 1、明細書の発明の詳細な説明の欄 6、 補正の内容Procedural amendment (voluntary) 1. Display of incident Patent Application No. 57-200411 2. Name of the invention Manufacturing method of voltage nonlinear resistor 3. Person who makes corrections Relationship to the incident: Patent applicant (307) Tokyo Shibaura Electric Co., Ltd. 4. Agent 〒100 1-1-6 Uchisaiwaicho, Chiyoda-ku, Tokyo 1. Detailed description of the invention in the specification 6. Contents of amendment
Claims (1)
抵抗素子をPiとPを含有する溶液中C二所定時間浸し
た後熱処理を行い、ついで電極付を行うことを%徴とす
るへ1.正非直線抵抗体の製造方法。 2、溶液tit pを0.05〜5モルチ+ Piを0
.05〜5亜M%含有する特許請求の範囲第1項記載の
電圧非直線抵抗体の製造方法。 3、熱処理は300℃〜850Cの酸化性雰囲気中で行
うl[♀的請求の範囲第1項及び第2項記載の電圧非直
線抵抗体の製造方法。[Claims] 1. A voltage non-linear resistance element made of a sintered body containing 2nO as a main component is immersed in a solution containing Pi and P for a predetermined period of time, then subjected to heat treatment, and then attached with electrodes. To use as a percentage 1. A method for manufacturing a positive nonlinear resistor. 2, solution tit p 0.05-5 molti + Pi 0
.. The method for manufacturing a voltage nonlinear resistor according to claim 1, wherein the voltage nonlinear resistor contains 05 to 5 M%. 3. The heat treatment is carried out in an oxidizing atmosphere at 300°C to 850°C.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP57200411A JPS5990901A (en) | 1982-11-17 | 1982-11-17 | Method of producing voltage nonlinear resistor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP57200411A JPS5990901A (en) | 1982-11-17 | 1982-11-17 | Method of producing voltage nonlinear resistor |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5990901A true JPS5990901A (en) | 1984-05-25 |
Family
ID=16423865
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP57200411A Pending JPS5990901A (en) | 1982-11-17 | 1982-11-17 | Method of producing voltage nonlinear resistor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5990901A (en) |
-
1982
- 1982-11-17 JP JP57200411A patent/JPS5990901A/en active Pending
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