JPS5990217A - Thin-film magnetic recording head - Google Patents

Abstract

PURPOSE:To provide a magnetic recording head with high saturated magnetic flux density and superior soft magnetic characteristics and to improve its recording efficiency by forming a magnetic core by using a thin film of amorphous alloy such as of Co-Zr-Nb alloy of specific composition. CONSTITUTION:The magnetic layer 2 of amorphous three-component alloy is formed on a nonmagnetic material substrate 1 of glass, etc., by sputtering so that the alloy consists essentially of Co and contains about 2.5wt% Zr while the total content of Zr and Nb is about 5-20wt% at a 6.5:10.1wt. ratio of Zr and Nb. The layer is heat-treated in a rotating magnetic field to obtain a hard magnetization axis in the operating direction of the core thin film 2. Then, an insulating thin film 3, conductive thin film 4, and insulating thin film 5 are formed successively and the 2nd magnetic core thin film 6 is formed with the same alloy as the 1st core thin film 2 by a similar treatment. Thus, the extremely thin core films 2 and 6 are formed to improve the recording efficiency of the magnetic head.

Description

[Detailed description of the invention]

Be non-inventive, ^ii i+j Related to magnetic heads, q, +I
This relates to the 4:4 quality of the core thin film in the first G12 recording head. Wt+ 111j\magnetic period 0 head is non^tht property+
4 to 1

[Rusen board J 2 &) 1 core F, '7 IN, non-exit let in (, (month i, 4, bud) 2 core thin film 1.~ or sputtering stop 9 y... This 71i911A-magnetic recording head is made up of a thin film magnetic head that is paired with a 71i7 film magnetic+4.F raw head. , for example, 'r1ζ, child word 1 calculator's d self 1. is applied to device N, etc. In a thin 0 magnetic 6 self-recording head, d self-recording effect ≥ + (, I (, Mero Tomasae) 1 and 2
The core thin film tends to be as thin as possible, but the core thin J
111 is ;'Ijj <: t'((kito;
11, which may lead to a decline in magnetic properties). To prevent this, core 7'I:mel11';-
Soft magnetic ζr "f
Seek 3' sex. Conventionally, Φ1, magnetic materials have been used, ranging from iron-nickel alloys to lronny element permalloys and their binary permalloys.
Multi-component permalloy is known in which an 3jC1 element such as 1, molybdenum, and 11 is added to 1i (; 1j ehari [1mu, molybdenum, 11, etc.]. However, permalloy generally has magnetic permeability tC and F).
1 sum j, L+1. ! ! It was also difficult for 1f to raise +Q'4' IQ- to a sufficiently high level. Therefore, there is a limit to the recording efficiency of the head. The present invention iIS et al.
(As a result of extensive research, we found that a thin film made of a three-component amorphous alloy consisting of cobal (CO) as the main component and a small amount of zirconium (Zr) and nickel (Nb) added) is a three-component system. ) 1p is Mj month! ,! raF? It has been found that the core type 11 of the Qi Wang Jinroku head is the first and most suitable. Using crystallized glass as the substrate, a cobalt disk (target diameter 4
Zirconium pellets and niobium pellets (both pellets are arranged in a radiation direction from the center) are placed alternately on the target. ”, the alloy composition can be changed by adjusting the number of pellets. Then, the degree of vacuum was set to a high vacuum of less than l It is possible to create a three-component amorphous alloy thin film.Alloy samples of each cell composition created in this way are used for each characteristic test described later. It is a characteristic diagram showing the results of measurement of the coercive force (■1c) when the content rate of N1) is changed by 11%. . Therefore, according to this figure, if the Nb content is Oj, li jii, % ('', Cog4 vehicle 11
It becomes a binary alloy of 1%-Zr 6 jjl, +11ch. This alloy is also produced under similar conditions. . As is clear from this figure, when Zr is added to CO and 2
Although Hc is still high in the component thread self-metallic, by roughly adding a small amount of Nb to it, Co -Zr-
When it comes to Nb ternary alloys, IIc suddenly decreases. In particular, the Nb content f ratio is about 2 [11 or more, preferably about 5
i′r (lj % or more) Ic is 0.1
(Oe) It is possible to lower it to near +I. If the content of Nb exceeds 1C in 5 strands or more, the saturation magnetic flux density of the 3-component system becomes 13 s. This is not preferable because it lowers the value. Therefore, the content of Nl+ in the alloy is about 2 to 17, preferably about 5 to 15.
- (It is better to adjust the regulations to the range of
Experiments have shown that even if the Zr content changes slightly, it remains 11ω'! I am called. Like this (・koCo -
By making a ternary alloy of Zr-Nb, CoJ
He than Li or Co-Zr binary alloys.
can be suppressed to extremely low
The addition of b also greatly affects the magnetic permeability μ. Figure 412 (, ↓ The relationship between the total content of Zr and N13 and μ is not shown. The Q:f inspection diagram shows that the weight of /rr and Nb is 11 (the ratio is always: 1.rr) :N1)-6,
5: 10. IK becomes key 4;'-sa 1st. As is clear from this figure, by adding KZI and Nl) in CO, /l suddenly increases, especially when Zr and N
b total a dominant force 1 about 5 to 20 claw amount θ] range c
Jp can be VCed over 40 + l f1, and among these, especially those with a total a ratio of Zr and Nb in the range of about 8 to 1 full h], μIJ is constant □, and the quality of τ is stable. Is it an amorphous alloy with high magnetic permeability? jJ will be done. The characteristics shown in Figure 2 show the same tendency even if the weight ratio of Zr and Nb is slightly changed. In the row fi diagram, which does not show the result, as in the phase 2 diagram, the weight between Z' and Nb is 1+;
5: Becomes 10.1”: Sea urchin H, +1 has been moved. From this figure, as shown in E) and 4C, as the total content of Zr and Nb increases to 81. ↓Trend to become lower [
However, if the total content of Zr and Nb in bamboo exceeds about 20 tons, Bs will be less than 10 KG or Kl+. This 9,y property shows the same tendency even if the weight ratio of zr and Nb changes somewhat. As shown in Figure 2 and Figure 3, the total content of Zr and Nb must be increased to an extreme value in order to obtain a high amorphous composite of /' and B5. It is better to restrict it to a range of 5 to 20 jlj l'1%. In this way, the total content of 7Jr and Nl) is approximately 5 to 2
0 jlj t11%'uni Il,li Even if the VC regulation is controlled, if the Zr content in the sono is too low, it will become an amorphous alloy with high Hc. Figure 4 (well, the Nb content in the alloy is always KIO weight tit)
FIG. 3 is a characteristic diagram showing the results of measuring changes in llc when the Zr content is varied by 4111. Therefore, in this figure, the Zr content is
SCo 90 if'< IC 7%-N1310 nail ji
-t%) becomes a two-component alloy. This alloy is also +i+
Firstly, under the conditions of the same ball, 11; it is acidified. As is clear from this figure, the two-component alloy l (and Z+) containing C0KNb is 2 Itt tr
3 of Go - Z r - N b up to t chi (Silk thread alloy G35tic is high. In fact, when the Zr content increases by one notch from about 25 to 11 chi, Tic also suddenly decreases to 11 - 1 row about 5 i Rtjl Chii-
When t: i(:, Ilc can be made below +1.1 (OC). In this way, Co-7,r -Nb
A three-component yarn amorphous alloy containing about 2.0% of Zr.
By containing 51 sentences M- or more, it is possible to keep Ire low, but even if the content of z becomes higher, the effect of keeping Ilc low is the same, and on the contrary, 1b becomes lower, so tjf *L <No○(Fui・tsute I
Ic should be kept low and 8S should not be maintained too low.
The inclusion rate of C mouth Zr is set to about 25 to 6.6 jl (f^chi, preferably in the range of about 65 to 17H).
Power or Desirability. The Co-Zr-Nh ternary amorphous alloy according to the present invention has a high shear magnetic anisotropy 'i/i, H, and has high 181 wave characteristics. Magnetization III felt 1f (i direction is core die i
'j collapse, '-041) Can be directed in the direction of construction Z)
. By the way, Co-Zr-N11 30 thread alloy 1
1. f, 'j II'% adhesive strength immediately after sputtering (
The magnetic field is 11 kC; as large as j15 to 7.0 (Oe). As a result of careful consideration of means to reduce this dihetoric magnetic field, we found a method of heat-treating an amorphous alloy film of the F+iJ period ternary system formed as a thin core 1i in a rotating magnet y-. It was found to be effective. In the heat treatment 11i in this rotating magnetic field, the temperature is 300 to 400 (°C), the rotation speed is 1a i; 11 o to 20 (r, p, nb),
(+j, the strength of the i field is 1oo (Oe) or more, the processing time is 3 hours) - is appropriate. For example, 1AAI'J: is 3
5o (℃), ft,! 1 rotation and elongation I O(r,
p, m,). The strength of the city is 100 (Ue), tilt I
The processing deviation of the core thin film formed by sputtering with the I
It can be lowered to about Oe). FIG. 5 is a partially sectional perspective view of a thin film magnetic recording head according to an example of the present invention. glass and silicon tC
First, a first core thin film 2 is formed on the J- of the substrate 1, which is separated from the external material, and a non-sand-free insulating thin film 1 is formed on it, and a Thin III;'
A second core γ' and a J7 film 6 are formed via the film 5. These first core thin ++t, 12, insulation thin 1 and 3. Conductive II'7 film 4, 1 (!I edge thin film 57.c and second
(7) The core thin 1llXt6 is sputtered'/
, [σ] are sequentially formed to a constant thickness of tjf using a film forming technique. Note that 4α and 4b are terminal portions for external tflI connection. Ail Hα phase 1 Koano II January sail 27J6 and 2nd
The core thin film Q6 is made of a ternary amorphous alloy thin film of Co-Zr-Nb. j, the CO content in the alloy is 8
34 layers 1ft tall. Z "includes, fJ ratio i; I)) Prisoner 2,6
are formed by sputtering, and then heat-treated in a rotating magnetic field under the above-mentioned conditions.1 As described above, the core thin film of the thin-film magnetic recording F4 head is made of cobalt as a main component1. This ternary amorphous alloy is characterized by a 31J-2 bipartite amorphous alloy to which a small amount of VC zirconium and niobium is added.This ternary amorphous alloy has high saturation magnetic flux density and magnetic permeability. Therefore, it is possible to form an extremely thin core thin film, which makes it possible to improve the recording efficiency of the magnetic head.

[Brief explanation of drawings]

Figure 1 is a characteristic diagram showing the relationship between the niobium content and the λ1 magnetic force, Figure 2 is a characteristic diagram showing the relationship between the total content of zirconium and niobium and magnetic permeability, and Figure 3 is a characteristic diagram showing the relationship between the total content of zirconium and niobium and magnetic permeability. Figure 4 is a characteristic diagram showing the relationship between the total content and the sum of magnetic flux density. Figure 5 is a characteristic diagram showing the relationship between zirconium and coercive force.
full:! f+→(, 6" A1 head perspective view (74). 1...JN plate, 2...1st core A<
*Membrane, 3... Insulating thin film, 4... Conductive ↑I
t thin film, 5... insulating thin film, 6... second
Core thinness It1: (. Fig. 1 05 10 15 2ONb
(wf'3≦) Fig. 2 5 Io 15 20
25Zr+Nb (wt%) Figure 3 0 5 10 1
5 20 25Zr+Nb(wt
%) Figure 4 0 5 10 15
20 Procedural Amendment (Spontaneous) July 23, 1980 Patent Office J, I Official Kazuo Wakasugi 1 Case Indication 1988! Samurai - Application No. 19832952, Name of town of Hatsu 1 Thin film magnetic recording head 3 Relationship in the case of the person making the correction, ゛J5 Applicant (1) Akiomi 1', 1r: The name of the invention of [thin [M magnetic] t, J-2 (2) ri, ? 77 mountains'/=114 t of range υn of R
i+! 4Q 'i: The following j+u? +Ili, l:
, Lma 4-1 "(1) Fu 16 said Ij: Jk excluded consisting of LJ" 2nd body H
The core thin film, the non-magnetic material N, and the second core thin film form a laminated structure h! i! +? It is formed. In the thin 2 nose - Qi language 匈hetsu 1 -. The core thin "(mainly composed of Kobal 1-6, a small amount of M,
Jirni 1-・su, /\ and nio) 3 products added)
(2) +'r'a'F MW-1S no NBffi
(1) 1nRd-mounted IEite, the dilinium and niobium σ rotal content is about 5 to 20 Q' (J ¥1
．． 1, that the standard Jt is in the range of %? Signs and”
Le r7j Ii'A IA Ki・\, 2- j 9-0
(3) Range of specific ii'F aA search Paragraph (1) and Paragraph (
2) In the description of J', -1111 "δ!! Jill: 1 Niuno," (r car is about 2.5% or more of insect paper L-,, 1, +
7, control, 1”, there is again. -What are the characteristics of Ichishoichi 11?
(4 magnetic mouse ◇tsu 1.. (4) 1'? permission, 17th range No. (1), rt"y description ni J:; Ite, Of note = 1a) Liao 11 (r and
Formed: h, i-2 I pal 1--fluconium niozo ternary amorphous alloy thin DJ rotates ka,)'
/、IIJC Heat treatment The core thin 1 model of it should not be captured like [especially the fan 1 gamma film of it]. (4) Page 2 of the specification, line I7, 1 Second core thin film...
'' to ``There was a limit.'' on page 1, line 9, are corrected as follows. 3 ``A soft magnetic material with high magnetic permeability and high saturation magnetic flux density for the second core thin film?') Conventionally, the first and second cores of this type of magnetic head are
For example, permalloy was used,
This material has a low saturation magnetic flux density. If the saturation magnetic flux density is high, Ninoa and Wn Samurai will become magnetically saturated during recording, especially for magnetic recording media with high saturation magnetic flux density such as metal tapes and black 11 tapes (when recording No. 3). ,
Recording efficiency is poor. Therefore, it is possible to suppress the decline in recording efficiency by increasing the coil glue (ζ) or by increasing the recording current.
] Get it. However, increasing the number of turns of the coil is 3~
It is limited to about 5 tans, and the effect cannot be obtained. On the other hand, when the i1+/i current is increased, the amount of heat generated increases, leading to wire breakage and magnetic deterioration of the J 7 and +4 films. ” (5) On page 3, line 15, and page 10, line 5, “thin film magnetic recording tm…, tsl, J [thin 1 magnetic recording, \rad”]
There is a police officer. (6) 10 pages 12 lines 1 record efficiency't
! L! Recording effect letter 11-supplement iF, L first.

Claims (3)

[Claims] (1) A first core thin film is placed on a wide plate J- made of a non-magnetic material, and a non-6'z'ζ magnetic layer is formed! , 17 films and a core thin film of m 2 are formed in a laminated state. A thin head head characterized by being made of a partial amorphous alloy. (2) In claim axis (1), the zirconium and the total content ratio Mt of 7 in FIG.
20 ll () 11% of 111NItlK regulated 2) 1 t 1'! Iku ζ′/, i, I
! I'm self-centered. (3) Special N'l't! l'i request 6・iji box a1
(In the descriptions in Items 11 and (2), the thin film 4G-itl'+1I1 is characterized in that the content of 011-based zirconium is regulated to about 25 + 1 (chi or more).
1! Head. (41'tarba'l'f!l'i, S north i'i
Part 1 (1) In Dingguchi, the cobalt-zirconium was placed on the previous core of the bone.
The feature is that the niobium ternary amorphous gamma alloy thin film is heat treated in a rotating magnetic field. “d,j film magnetic recording head.