JPS5987738A - イオン発生装置 - Google Patents

イオン発生装置

Info

Publication number
JPS5987738A
JPS5987738A JP57197671A JP19767182A JPS5987738A JP S5987738 A JPS5987738 A JP S5987738A JP 57197671 A JP57197671 A JP 57197671A JP 19767182 A JP19767182 A JP 19767182A JP S5987738 A JPS5987738 A JP S5987738A
Authority
JP
Japan
Prior art keywords
anode
cathode
ion
control electrode
potential
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57197671A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0129295B2 (cs
Inventor
Katsuhiro Kageyama
影山　賀都鴻
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP57197671A priority Critical patent/JPS5987738A/ja
Publication of JPS5987738A publication Critical patent/JPS5987738A/ja
Publication of JPH0129295B2 publication Critical patent/JPH0129295B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/08—Ion sources; Ion guns using arc discharge
    • H01J27/14—Other arc discharge ion sources using an applied magnetic field

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Particle Accelerators (AREA)
  • Electron Sources, Ion Sources (AREA)
JP57197671A 1982-11-12 1982-11-12 イオン発生装置 Granted JPS5987738A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57197671A JPS5987738A (ja) 1982-11-12 1982-11-12 イオン発生装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57197671A JPS5987738A (ja) 1982-11-12 1982-11-12 イオン発生装置

Publications (2)

Publication Number Publication Date
JPS5987738A true JPS5987738A (ja) 1984-05-21
JPH0129295B2 JPH0129295B2 (cs) 1989-06-09

Family

ID=16378392

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57197671A Granted JPS5987738A (ja) 1982-11-12 1982-11-12 イオン発生装置

Country Status (1)

Country Link
JP (1) JPS5987738A (cs)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5150010A (en) * 1990-03-14 1992-09-22 Kabushiki Kaisha Toshiba Discharge-in-magnetic-field type ion generating apparatus
JP2021158092A (ja) * 2020-03-30 2021-10-07 住友重機械工業株式会社 Ｐｉｇイオン源装置およびイオン源ガス供給システム

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5150010A (en) * 1990-03-14 1992-09-22 Kabushiki Kaisha Toshiba Discharge-in-magnetic-field type ion generating apparatus
JP2021158092A (ja) * 2020-03-30 2021-10-07 住友重機械工業株式会社 Ｐｉｇイオン源装置およびイオン源ガス供給システム

Also Published As

Publication number Publication date
JPH0129295B2 (cs) 1989-06-09

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