JPS5984408U - Reference position error detection device - Google Patents
Reference position error detection deviceInfo
- Publication number
- JPS5984408U JPS5984408U JP16662583U JP16662583U JPS5984408U JP S5984408 U JPS5984408 U JP S5984408U JP 16662583 U JP16662583 U JP 16662583U JP 16662583 U JP16662583 U JP 16662583U JP S5984408 U JPS5984408 U JP S5984408U
- Authority
- JP
- Japan
- Prior art keywords
- reference position
- position mark
- pattern
- detection device
- error detection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は半導体基板の平面図、第２図は従来法 □にお
けるベンチマークの検出装置を示す模式図、第３図はベ
ンチマークの拡大断面図、第４Ａおよび４Ｂ図は実在す
るベンチマークと本考案によるデータ上のベンチマーク
の相互位置関係を示す形態図、第５図は矩形方式による
スキャニングを説明するための図、第６図は本考案に基
づく一実施例を示すブロック図である。
゛ 図において、２０はスポット露光装置、２９は反射
電子ビーム検出器、６６１は記憶装置、６６２はアドレ
ス選択回路、６６４および６６６はラッチ回路、６６９
および６７０はそれぞれ第１および第２のカウンタであ
る。Fig. 1 is a plan view of the semiconductor substrate, Fig. 2 is a schematic diagram showing the detection device of the conventional benchmark □, Fig. 3 is an enlarged cross-sectional view of the benchmark, and Figs. 4A and 4B are the existing benchmark and the method according to the present invention. FIG. 5 is a diagram illustrating the mutual positional relationship of benchmarks on data, FIG. 5 is a diagram illustrating scanning using a rectangular method, and FIG. 6 is a block diagram illustrating an embodiment based on the present invention.゛ In the figure, 20 is a spot exposure device, 29 is a reflected electron beam detector, 661 is a storage device, 662 is an address selection circuit, 664 and 666 are latch circuits, and 669
and 670 are first and second counters, respectively.
Claims (1)
と、記憶装置内に記憶された、該基準位置マークに対応
する同様の？マターンを有する基準位置マークデータと
の間の相対的な誤差を検出する基準位置誤差検出装置に
おいて、 −前記基板上の基準位置マークをビーム走査することに
よって検出さくた該基板上のパターン端部検出信号と、
該ビーム走査と同期して前記記憶装置より順次読出され
た前記基準位置マークデータにおけるパターン端部を示
す信号とを得、前記パターン端部検出信号および前記の
パターン端部を示す信号を計数制御人寄として前記ビー
ム走査に同期した所定のクロッ多を計数するカウンタを
設け、該カウンタのカウント値によって前記基準位置マ
ークと前記基準位置マークデータとの間の相対的な誤差
を検出することを特徴とする基準位置誤差検出装置。[Claims for Utility Model Registration] A reference position mark existing on a substrate and having a predetermined pattern, and a similar reference position mark stored in a storage device corresponding to the reference position mark. In a reference position error detection device that detects a relative error between reference position mark data having a pattern, - detection by beam scanning the reference position mark on the substrate; and detection of pattern ends on the substrate; signal and
A counting controller obtains a signal indicating a pattern edge in the reference position mark data sequentially read out from the storage device in synchronization with the beam scanning, and calculates the pattern edge detection signal and the signal indicating the pattern edge. A counter for counting a predetermined number of clocks synchronized with the beam scanning is provided as a counter, and a relative error between the reference position mark and the reference position mark data is detected based on the count value of the counter. Reference position error detection device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16662583U JPS5984408U (en) | 1983-10-27 | 1983-10-27 | Reference position error detection device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16662583U JPS5984408U (en) | 1983-10-27 | 1983-10-27 | Reference position error detection device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5984408U true JPS5984408U (en) | 1984-06-07 |
Family
ID=30364746
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16662583U Pending JPS5984408U (en) | 1983-10-27 | 1983-10-27 | Reference position error detection device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5984408U (en) |
-
1983
- 1983-10-27 JP JP16662583U patent/JPS5984408U/en active Pending
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