JPS5981767A - 信号処理装置 - Google Patents

信号処理装置

Info

Publication number
JPS5981767A
JPS5981767A JP58156258A JP15625883A JPS5981767A JP S5981767 A JPS5981767 A JP S5981767A JP 58156258 A JP58156258 A JP 58156258A JP 15625883 A JP15625883 A JP 15625883A JP S5981767 A JPS5981767 A JP S5981767A
Authority
JP
Japan
Prior art keywords
circuit
processing
register
pattern
output
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58156258A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6223457B2 (Direct
Inventor
Michihiro Mese
目瀬　道弘
Seiji Kashioka
誠治 柏岡
Masakazu Ejiri
江尻　正員
Takafumi Miyatake
孝文 宮武
Isamu Yamazaki
勇 山崎
Toshimitsu Hamada
浜田　利満
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP58156258A priority Critical patent/JPS5981767A/ja
Publication of JPS5981767A publication Critical patent/JPS5981767A/ja
Publication of JPS6223457B2 publication Critical patent/JPS6223457B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10W72/0711—

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Image Processing (AREA)
  • Image Analysis (AREA)
JP58156258A 1983-08-29 1983-08-29 信号処理装置 Granted JPS5981767A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58156258A JPS5981767A (ja) 1983-08-29 1983-08-29 信号処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58156258A JPS5981767A (ja) 1983-08-29 1983-08-29 信号処理装置

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP5651976A Division JPS52140278A (en) 1976-05-19 1976-05-19 Position detector

Publications (2)

Publication Number Publication Date
JPS5981767A true JPS5981767A (ja) 1984-05-11
JPS6223457B2 JPS6223457B2 (Direct) 1987-05-22

Family

ID=15623861

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58156258A Granted JPS5981767A (ja) 1983-08-29 1983-08-29 信号処理装置

Country Status (1)

Country Link
JP (1) JPS5981767A (Direct)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02103401A (ja) * 1988-10-12 1990-04-16 Nikon Corp アライメント方法
US7590280B2 (en) 1999-03-09 2009-09-15 Canon Kabushiki Kaisha Position detection apparatus and exposure apparatus

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02103401A (ja) * 1988-10-12 1990-04-16 Nikon Corp アライメント方法
US7590280B2 (en) 1999-03-09 2009-09-15 Canon Kabushiki Kaisha Position detection apparatus and exposure apparatus

Also Published As

Publication number Publication date
JPS6223457B2 (Direct) 1987-05-22

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