JPS5981035U - 半導体ウエ−ハ搬送装置 - Google Patents

半導体ウエ−ハ搬送装置

Info

Publication number
JPS5981035U
JPS5981035U JP17829782U JP17829782U JPS5981035U JP S5981035 U JPS5981035 U JP S5981035U JP 17829782 U JP17829782 U JP 17829782U JP 17829782 U JP17829782 U JP 17829782U JP S5981035 U JPS5981035 U JP S5981035U
Authority
JP
Japan
Prior art keywords
semiconductor wafer
wafer transfer
elevator
transfer equipment
carrier
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17829782U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6221014Y2 (enrdf_load_html_response
Inventor
正博 中嶋
Original Assignee
日本電気ホームエレクトロニクス株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日本電気ホームエレクトロニクス株式会社 filed Critical 日本電気ホームエレクトロニクス株式会社
Priority to JP17829782U priority Critical patent/JPS5981035U/ja
Publication of JPS5981035U publication Critical patent/JPS5981035U/ja
Application granted granted Critical
Publication of JPS6221014Y2 publication Critical patent/JPS6221014Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Pile Receivers (AREA)
JP17829782U 1982-11-24 1982-11-24 半導体ウエ−ハ搬送装置 Granted JPS5981035U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17829782U JPS5981035U (ja) 1982-11-24 1982-11-24 半導体ウエ−ハ搬送装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17829782U JPS5981035U (ja) 1982-11-24 1982-11-24 半導体ウエ−ハ搬送装置

Publications (2)

Publication Number Publication Date
JPS5981035U true JPS5981035U (ja) 1984-05-31
JPS6221014Y2 JPS6221014Y2 (enrdf_load_html_response) 1987-05-28

Family

ID=30387136

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17829782U Granted JPS5981035U (ja) 1982-11-24 1982-11-24 半導体ウエ−ハ搬送装置

Country Status (1)

Country Link
JP (1) JPS5981035U (enrdf_load_html_response)

Also Published As

Publication number Publication date
JPS6221014Y2 (enrdf_load_html_response) 1987-05-28

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