JPS5980150A - Linear pulse motor - Google Patents

Linear pulse motor

Info

Publication number
JPS5980150A
JPS5980150A JP18884382A JP18884382A JPS5980150A JP S5980150 A JPS5980150 A JP S5980150A JP 18884382 A JP18884382 A JP 18884382A JP 18884382 A JP18884382 A JP 18884382A JP S5980150 A JPS5980150 A JP S5980150A
Authority
JP
Japan
Prior art keywords
scale
linear pulse
magnetic pole
pulse motor
teeth
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18884382A
Other languages
Japanese (ja)
Other versions
JPS6314584B2 (en
Inventor
Zenichiro Miwa
三輪 善一郎
Hiroshi Nakagawa
洋 中川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shinko Electric Co Ltd
Original Assignee
Shinko Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shinko Electric Co Ltd filed Critical Shinko Electric Co Ltd
Priority to JP18884382A priority Critical patent/JPS5980150A/en
Priority to US06/543,927 priority patent/US4578622A/en
Priority to DE19833338864 priority patent/DE3338864A1/en
Publication of JPS5980150A publication Critical patent/JPS5980150A/en
Publication of JPS6314584B2 publication Critical patent/JPS6314584B2/ja
Granted legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02KDYNAMO-ELECTRIC MACHINES
    • H02K41/00Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02Linear motors; Sectional motors
    • H02K41/03Synchronous motors; Motors moving step by step; Reluctance motors

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Electromagnetism (AREA)
  • Power Engineering (AREA)
  • Linear Motors (AREA)

Abstract

PURPOSE:To be adapted for a small thrust and a small stroke in a linear pulse motor by forming a direction of a magnetic flux generated at the primary side body when passing in the pole and a direction when passing the pole surface and between teeth parts formed on the scale surface opposed to the pole surface at a right angle. CONSTITUTION:The primary side 17 of a linear pulse motor is composed of cores 18, 19, permanent magnets P1, P2 for coupling the both sides of the cores, poles 20-23 extending perpendicularly from the opposed surface of the cores 18, 19, and exciting coils 24-27 respectively mounted on the poles 20-23. In this case, the pole surfaces 20a-23a of the poles 20-23 are determined in a direction at 90 deg. from the direction extending at the poles 20-23 from the pole mounting surfaces of the cores 18, 19.

Description

【発明の詳細な説明】 この発明は特に小形で可動側の最大変位量が小のリニア
パルスモータの基本構成に関するものである。
DETAILED DESCRIPTION OF THE INVENTION The present invention particularly relates to the basic configuration of a linear pulse motor that is small and has a small maximum displacement on the movable side.

一般に、リニアパルスモータは一次側コイルに供給する
入力パルスごとに一定の距離ずつステップ状に可動側を
変位させる。この動作に伴って、リニアパルスモータは
正確々位置決め制御を要求する各種プリンタのヘッド送
り、光電式読取装置のヘッド送りなどに応用されている
。そして、このリニアパルスモータの従来常用の具体例
は第1図、第2図に示す通りである0すなわち、第1図
は1部切欠き正面図、第2図11″ll:1部切欠き側
面図で、各図において、1はリニアパルスモーク1次側
で、正面中央部で磁気的にしゃ断状態にある2つの鉄心
2,3、各鉄心2,3を両側部にて固定する側板4,5
、上記各鉄心2,3の背面に図示の極性にて着磁してお
る永久磁石6,7、当該水  ′久磁石6.′7の背面
部に接合する磁性板8.上記各鉄心2.3に形成してい
る磁極2a、 2b、 3a、 3bに取付けられたコ
イル9a〜9(1,各側板4,5の両側下に支持される
軸10.1111’n回動自在に支持される車輪12〜
15から構成される。そして、上記各磁極2a、 2b
、 3a、 3bにはl/4ピツチずつのずれを有して
2al、 2bl、 3al、 3blが形成されてい
る。16はリニアパルスモータの2次側をなすスケール
で、平面には上記各磁極歯部2al、 2bl、 3a
l、 3blと同一ピッチの歯部16aが形成されてい
る。
Generally, a linear pulse motor displaces the movable side in steps by a fixed distance for each input pulse supplied to the primary coil. Along with this operation, linear pulse motors are applied to head feeding of various printers that require accurate positioning control, head feeding of photoelectric reading devices, and the like. Specific examples of conventionally commonly used linear pulse motors are as shown in Figs. In the side views, 1 is the linear pulse smoke primary side, two cores 2 and 3 are magnetically cut off at the center of the front, and side plates 4 fix each core 2 and 3 on both sides. ,5
, permanent magnets 6, 7 magnetized with the polarities shown on the back of each of the iron cores 2, 3, and the permanent magnet 6. '7 magnetic plate 8. Coils 9a to 9 (1, shaft 10.1111'n rotation supported under both sides of each side plate 4, 5) attached to magnetic poles 2a, 2b, 3a, 3b formed on each of the above iron cores 2.3 Wheels 12 that are freely supported
It consists of 15 parts. And each of the above magnetic poles 2a, 2b
, 3a, and 3b, 2al, 2bl, 3al, and 3bl are formed with a shift of 1/4 pitch. 16 is a scale forming the secondary side of the linear pulse motor, and the above-mentioned magnetic pole teeth 2al, 2bl, 3a are shown on the plane.
Teeth portions 16a are formed with the same pitch as those of teeth 1 and 3bl.

上記第1,2図に示すリニアパルスモータにおいて、例
えば−相励磁方式にて駆動する場合、順次各コイル9a
〜9dヲ励磁していく過程において各磁極2a、 2b
、 3a、 3bに形成した歯部2al、 2b工、 
3al、3blが順次2次側スケールの歯部に対向する
ことによシ1/4ピッチずつ歩進(実際の動作過程にお
いては連続動作のように見える)していく。この際。
In the linear pulse motor shown in FIGS. 1 and 2 above, when driving, for example, by the -phase excitation method, each coil 9a is
~9d In the process of excitation, each magnetic pole 2a, 2b
, tooth portions 2al and 2b formed on 3a and 3b,
3al and 3bl sequentially oppose the teeth of the secondary scale, thereby stepping forward by 1/4 pitch (in the actual operation process, it appears to be a continuous operation). On this occasion.

1次側本体1及び2次側スケール16は一方を固定して
、他方を可動することによシ実用化される。
The primary main body 1 and the secondary scale 16 are put into practical use by fixing one and moving the other.

ところで、近年OA機器の発展とともに各種の情報端末
機器は小形化、薄形化志向が強く、例えばフロッピーデ
ィスクドライブにおいても、この傾向が強込。このよう
な市場の要求により縮小形、超薄形のリニアパルスモー
タが求められている。
Incidentally, in recent years, with the development of office automation equipment, there has been a strong trend toward smaller and thinner information terminal equipment, and this trend is also becoming stronger in floppy disk drives, for example. Due to such market demands, compact and ultra-thin linear pulse motors are required.

今、上記市場の要求に対して、前記第1図、第2図に示
す台車形リニアパルスモータは適合できない。すなわち
、上記フロッピーディスクドライブなどでは通常推力は
10〜loog程度、ストロークは10〜30闘程度で
足フるのに対し、上記従来の台車タイプのリニアパルス
モークでは小形化を目的とするにも厚みWの減少は車輪
取付機構の強度を最小限得るために限度があり、高さH
につbての減少は1次、2次の各歯部対向面が磁極中を
通過する磁束に直交する上記第1.2図に示す従来の構
成では困難である。一方、長さLについては磁極がリニ
アパルスモータ可動側の進行方向に並べる必然性に基づ
いて短縮には限度がある。
Currently, the trolley-type linear pulse motor shown in FIGS. 1 and 2 cannot meet the above-mentioned market demands. In other words, in the above-mentioned floppy disk drive, etc., the thrust is usually about 10 to 10 logs and the stroke is about 10 to 30 logs, whereas the conventional trolley type linear pulse smoker has a large thickness even for the purpose of miniaturization. There is a limit to the reduction of W in order to obtain the minimum strength of the wheel mounting mechanism, and the height H
It is difficult to reduce b in the conventional structure shown in FIG. 1.2 above, in which the primary and secondary teeth facing surfaces are perpendicular to the magnetic flux passing through the magnetic pole. On the other hand, there is a limit to the shortening of the length L based on the necessity of arranging the magnetic poles in the moving direction of the linear pulse motor movable side.

この発明の目的はリニアパルスモータの1次側の構成の
特徴を基に駆動原理は同一なるも、低推力、短ストロー
ク特性に適合するように小型化を実現するリニアパルス
モータを提供することにある。
The purpose of this invention is to provide a linear pulse motor that uses the same driving principle based on the characteristics of the configuration of the primary side of the linear pulse motor, but is miniaturized to suit low thrust and short stroke characteristics. be.

以下、図示する実施例について具体的に説明する。第1
図は平面図、第2図は正面図、第3図は側面図をそれぞ
れ示し、各図において、17はリニアパルスモータ1次
側で、鉄心18.19 、この両側部を結ぶ図示の極性
に着磁しである永久磁石P1↓P2上記鉄心18.19
の互に対向する面から垂直に延びる磁極20〜23、及
び当該磁極20〜23に装着される励磁コイル24〜2
7から構成される。この際、各磁極20〜23の磁極面
20a〜23aは、鉄心18.19における磁極取付面
から当該磁極20〜23が延びる方向とは90度の方向
(図においては上面に位置している)に定める。そして
、これらの磁極面20a〜23aの表面には歯部が形成
されるが、各歯部ピッチは後述する2次側歯部ピッチと
等しく形成され、磁極面20a、 22a、 21a及
び23aに形成される歯部は、順次1/4ピツチずつ変
位して配置されてい超。28は2次側スケールで、上記
磁極面20a〜23aに一定のギャップGを維持して1
次側1とでリニアパルスモータを構成し、上記磁極面2
0a〜23aの対向面に(は各磁極面20a〜23aに
形成した歯部と同一ピッチの歯部28aが形成される。
The illustrated embodiment will be specifically described below. 1st
The figure shows a plan view, FIG. 2 shows a front view, and FIG. Magnetized permanent magnet P1↓P2 above iron core 18.19
magnetic poles 20 to 23 extending perpendicularly from mutually opposing surfaces, and excitation coils 24 to 2 attached to the magnetic poles 20 to 23;
Consists of 7. At this time, the magnetic pole faces 20a to 23a of each of the magnetic poles 20 to 23 are 90 degrees from the direction in which the magnetic poles 20 to 23 extend from the magnetic pole mounting surface of the iron core 18.19 (located on the upper surface in the figure). stipulated in Teeth are formed on the surfaces of these magnetic pole faces 20a to 23a, and the pitch of each tooth is equal to the pitch of the secondary teeth, which will be described later. The teeth are arranged sequentially displaced by 1/4 pitch. 28 is a secondary scale, which maintains a constant gap G between the magnetic pole faces 20a to 23a and
The next side 1 constitutes a linear pulse motor, and the above magnetic pole surface 2
Tooth portions 28a having the same pitch as the tooth portions formed on the respective magnetic pole faces 20a to 23a are formed on the opposing surfaces of the magnetic pole faces 0a to 23a.

29ハ軸受用ボールで、リニアパルスモータ本体として
の1次側とスケール28との各歯部対向面の間隔を一定
に維持しつつ転動し、スケール2日のガイド作用をも担
持する。
29 C is a bearing ball that rolls while maintaining a constant distance between the primary side as the linear pulse motor main body and the facing surface of each tooth portion of the scale 28, and also carries out the guiding action of the scale 28.

また、このボール29は鉄心1B、’190両側4箇所
に配置され、その転勤範囲を図示しなAガイドによって
規制し、ひいては可動側(例えばスケール28)の動作
範囲は自らボール25の転勤範囲の2倍に定められる。
Further, the balls 29 are arranged at four locations on both sides of the iron core 1B and '190, and their transfer range is regulated by an A guide (not shown). It is determined to be twice.

上記第3図〜第5図に示す構成にお−で、今。Now that we have the configuration shown in FIGS. 3 to 5 above.

磁極面23aに成形した歯部とスケール28に形成した
歯部28aの各凸部が励磁コイル27の励磁に伴って永
久磁石P2の磁束を助長する磁束の発生に伴って吸引力
を得ている状態(第4図に示す状態)から、励磁コイル
27の励磁を断つと同時に励磁コイル25を励磁すると
、今度は磁極面21aに形成した歯部とスケール歯部2
8aの各凸部との間に永久磁石P2の磁束と励磁コイル
25の励磁に伴って生ずる磁束とが加算されて強力な磁
気吸引力が働き、いピッチの変位(−次側17を固定す
ればスケール24が左方に変位)を来す。次いで、順次
励磁コイル26.24のみを励磁していくことにより同
様の原理にて1/4ピツチずつの変位を生ずる。以上の
動作を繰返すことによりリニアパルスモータは1/4ピ
ツチずつの可動側の変位をなし、可動側に取付けられる
被制御体(図示せず)を位置決め制御する。
Each of the convex parts of the teeth formed on the magnetic pole surface 23a and the teeth 28a formed on the scale 28 obtains an attractive force as a result of the generation of magnetic flux that promotes the magnetic flux of the permanent magnet P2 as the excitation coil 27 is energized. When the excitation coil 27 is de-energized and the excitation coil 25 is simultaneously excited from the state (the state shown in FIG. 4), the teeth formed on the magnetic pole face 21a and the scale teeth 2
The magnetic flux of the permanent magnet P2 and the magnetic flux generated due to the excitation of the excitation coil 25 are added between each convex portion of the magnet 8a, and a strong magnetic attraction force is exerted, resulting in a large pitch displacement (- to fix the next side 17). In this case, the scale 24 is displaced to the left. Next, by sequentially exciting only the excitation coils 26 and 24, a displacement of 1/4 pitch is produced based on the same principle. By repeating the above operations, the linear pulse motor displaces the movable side by 1/4 pitch, thereby controlling the positioning of a controlled object (not shown) attached to the movable side.

このリニアパルスモータの動作に際して、−次側磁束発
生源から生ずる全磁束は第3〜5図よル明らかのように
磁極面20a〜23aに形成した歯部とスケール28に
形成した歯部28aとの対向面において方向変更を伴っ
て一旦は必ずスケール24中に流入し、当該スケール中
から流出する。
During operation of this linear pulse motor, the total magnetic flux generated from the negative side magnetic flux generation source is distributed between the teeth formed on the magnetic pole faces 20a to 23a and the teeth 28a formed on the scale 28, as shown in FIGS. 3 to 5. With a direction change on the opposing surface, the liquid always flows into the scale 24 and then flows out from the scale.

なお、上記この発明の実施例を示す第3〜5図にお込て
、各磁極に独立した励磁コイルを備える構成を示してい
るが、コイルの電流の流れる方向を制御することによV
励磁コイル数は半減させる。
In addition, in FIGS. 3 to 5 showing the embodiments of the present invention, a configuration is shown in which each magnetic pole is provided with an independent excitation coil, but by controlling the direction in which the current flows in the coil, the V
The number of excitation coils will be halved.

ことができ、また、励磁コイルの位置も、両側部とする
こともでき、各種の変形が考えられる。
In addition, the exciting coils can be located on both sides, and various modifications are possible.

一方、励磁コイルの励磁手段も上記説明のように一相ず
つ励磁する方法には限定されず、周知の2相励磁とする
こともでき、永久磁石金有しないリアクタンスタイプの
リニアパルスモークにも適用できる。
On the other hand, the excitation means of the excitation coil is not limited to the method of exciting one phase at a time as explained above, but can also be the well-known two-phase excitation, and can also be applied to reactance type linear pulse smoke that does not have a permanent magnet. can.

以上述べたように、この発明に係るリニアパルスモーク
は、−次側本体において発生する磁束の磁極中を通過す
るときの方向と磁極面とこれに対向するスケール面に形
成した歯部間を通過するときの方向とが直角をなすよう
に配置したことを要旨とするものである。この構成に基
づいて、特に小推力の用途のもとにお−ては従来の1次
側の高さHが磁極の長さくコイル巻長によシ決定される
)ギャップ及びスケールの厚みの和で定められる(推力
の犬/J%に関係ない)のに対し、この発明についての
リニアパルスモータの高さは磁極コアの厚み、ギャップ
及び軸受支持枠の厚みの和で定まることから、小推力に
なるにつれて磁極のコアの厚みを減少でき高さを減少す
ることができる。さらに、磁極面は従京の構成にお込て
はリニアパルスモータの可動側進行方向に沿って連続的
に配置されるのに比して、この発明に係るリニアパルス
モータでは磁極面が磁極内を通過する磁束と平行をなす
ことから、はぼ集中して配置でき、これに伴ってリニア
パルスモータの1次側の長さを短くすることができる。
As described above, the linear pulse smoke according to the present invention is characterized by the direction in which the magnetic flux generated in the negative side main body passes through the magnetic pole, and the direction in which the magnetic flux passes between the magnetic pole surface and the tooth portion formed on the scale surface opposite thereto. The gist of this is that the arrangement is such that the direction in which it is used is perpendicular to the direction in which it is used. Based on this configuration, the conventional primary height H is the sum of the gap and scale thicknesses (determined by the length of the magnetic pole and the length of the coil winding), especially in low-thrust applications. On the other hand, the height of the linear pulse motor of this invention is determined by the sum of the thickness of the magnetic pole core, the gap, and the thickness of the bearing support frame. The thickness of the core of the magnetic pole can be reduced as the height increases. Furthermore, in contrast to the structure of Jukei, in which the magnetic pole surfaces are arranged continuously along the moving direction of the linear pulse motor, in the linear pulse motor according to the present invention, the magnetic pole surfaces are arranged within the magnetic poles. Since the magnetic flux is parallel to the magnetic flux passing through the linear pulse motor, it can be arranged in a concentrated manner, and accordingly, the length of the primary side of the linear pulse motor can be shortened.

しかも1次、2次のギャップ維持機構がどく小径のボー
ルにてスケールのガイドを伴って担うことができるから
、従来に比して特に幅方向の長さを増す傾向をも生じな
い。これらのことからリニアパルスモータは小推力、小
ストロークの各種OA機器の使用に適合すべく小型化を
はかることのできる特長を有する。
Moreover, since the primary and secondary gap maintaining mechanisms can be carried out by small-diameter balls together with scale guides, there is no tendency to increase the length in the width direction compared to the prior art. For these reasons, linear pulse motors have the advantage of being able to be miniaturized to suit use in various office automation equipment with small thrusts and small strokes.

【図面の簡単な説明】[Brief explanation of drawings]

第1図、第2図はそれぞれ従来の構成を示す一部を切欠
いた正面図及び側面図、第3図、第4図及び第5図はそ
れぞれこの発明に係るリニアパルスモークの1具体的構
成を示す平面図、正面図及び側面図である。 20〜23・・・磁極  20a〜23a・・・磁極面
24・骨・スケール  24a・@eスケール歯部出願
人 神鋼電機株式会社 代理人 弁理士 斎藤春弥 第 1  図 第 4 図 第  g 図
1 and 2 are partially cutaway front and side views showing a conventional configuration, respectively, and FIGS. 3, 4, and 5 each show a specific configuration of a linear pulse smoke according to the present invention. FIG. 2 is a plan view, a front view, and a side view. 20 to 23...Magnetic poles 20a to 23a...Magnetic pole face 24, bone, scale 24a, @e Scale teeth Applicant Shinko Electric Co., Ltd. Agent Patent attorney Haruya Saito No. 1 Figure 4 Figure g

Claims (1)

【特許請求の範囲】 1 スケール歯部に対向する一次側の複数の磁極面に、
上記スケール歯部と同一ピッチで、かつ。 磁極数の逆数ピッチずつのずれを有する歯部を形成し、
各磁極面の歯部を入力パルスごとに順次スケール歯部に
一致させることにより磁極数の逆数ピッチずつ、−次側
又はスケールのいずれかの可動側を歩進動作させる基本
構成において、−次側に発生する磁束の磁極中を通過す
るときの方向と磁極歯部面、空隙、及び磁極面に対向す
るスケール歯部面を通過する方向とが直角金なすように
構成してなるリニアパルスモータ。
[Claims] 1. A plurality of magnetic pole faces on the primary side facing the scale teeth,
Same pitch as the scale teeth above, and. Forming tooth portions having a deviation by a reciprocal pitch of the number of magnetic poles,
In a basic configuration in which either the -next side or the movable side of the scale is moved in steps by reciprocal pitches of the number of magnetic poles by aligning the teeth of each magnetic pole surface with the scale teeth in sequence for each input pulse, the -next side A linear pulse motor configured such that the direction in which the magnetic flux generated in the magnetic flux passes through the magnetic poles and the direction in which it passes through the magnetic pole tooth surface, the air gap, and the scale tooth surface facing the magnetic pole surface form a right angle.
JP18884382A 1982-10-26 1982-10-26 Linear pulse motor Granted JPS5980150A (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP18884382A JPS5980150A (en) 1982-10-26 1982-10-26 Linear pulse motor
US06/543,927 US4578622A (en) 1982-10-26 1983-10-20 Linear pulse motor
DE19833338864 DE3338864A1 (en) 1982-10-26 1983-10-26 LINEAR STEPPER MOTOR

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18884382A JPS5980150A (en) 1982-10-26 1982-10-26 Linear pulse motor

Publications (2)

Publication Number Publication Date
JPS5980150A true JPS5980150A (en) 1984-05-09
JPS6314584B2 JPS6314584B2 (en) 1988-03-31

Family

ID=16230806

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18884382A Granted JPS5980150A (en) 1982-10-26 1982-10-26 Linear pulse motor

Country Status (1)

Country Link
JP (1) JPS5980150A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60237853A (en) * 1984-05-10 1985-11-26 Shinko Electric Co Ltd Linear pulse motor
JPS60237850A (en) * 1984-05-10 1985-11-26 Shinko Electric Co Ltd Yoke for linear pulse motor
JPS60237851A (en) * 1984-05-10 1985-11-26 Shinko Electric Co Ltd Yoke for linear pulse motor
JPS61285063A (en) * 1985-06-08 1986-12-15 Omron Tateisi Electronics Co Linear pulse motor

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5199113U (en) * 1976-01-08 1976-08-09
JPS563570A (en) * 1979-06-21 1981-01-14 Yokogawa Hokushin Electric Corp Linear pulse motor

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5199113U (en) * 1976-01-08 1976-08-09
JPS563570A (en) * 1979-06-21 1981-01-14 Yokogawa Hokushin Electric Corp Linear pulse motor

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60237853A (en) * 1984-05-10 1985-11-26 Shinko Electric Co Ltd Linear pulse motor
JPS60237850A (en) * 1984-05-10 1985-11-26 Shinko Electric Co Ltd Yoke for linear pulse motor
JPS60237851A (en) * 1984-05-10 1985-11-26 Shinko Electric Co Ltd Yoke for linear pulse motor
JPH0156631B2 (en) * 1984-05-10 1989-11-30 Shinko Electric Co Ltd
JPH0156630B2 (en) * 1984-05-10 1989-11-30 Shinko Electric Co Ltd
JPH0315420B2 (en) * 1984-05-10 1991-03-01 Shinko Electric Co Ltd
JPS61285063A (en) * 1985-06-08 1986-12-15 Omron Tateisi Electronics Co Linear pulse motor

Also Published As

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JPS6314584B2 (en) 1988-03-31

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