JPH0681483B2 - Pulse motor - Google Patents

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a pulse motor applied to head feeding of a printer, head feeding of a photoelectric reading device, and the like.

“Prior Art” As is well known, a linear pulse motor is based on a pulse signal supplied to a slider on a primary side, and a slider or
The scale on the next side is stepwise moved stepwise, and the configuration of the magnetic circuit is as shown in FIG.
In this figure, 1 is a scale composed of a long plate-shaped magnetic body, and the upper surface of the scale has uneven tooth portions 1a, 1a.
are formed at equal intervals along the longitudinal direction (left and right direction in the drawing). A slider 2 is mounted on the upper surface of the scale 1 in a state of being supported movably in the longitudinal direction of the scale 1 by a support mechanism including rollers (not shown). The slider 2 includes a U-shaped A-phase core 4 and a B-phase iron core 5, coils 6a and 6b wound around the A-phase magnetic poles 4a and A1 phase magnetic poles 4b of the A-phase iron core 4, and a B-phase iron core 5 respectively. B-phase magnetic pole
Coil 7a and 7b wound around 5a and B1-phase magnetic pole 5b, respectively
And permanent magnets 8 and 9 attached to the upper surfaces of the iron cores 4 and 5 with the polarities shown in the figure, and a back plate 10 formed of a plate-shaped magnetic body attached to the upper surfaces of the permanent magnets 8 and 9. ing. Then, three pole teeth 14a having the same pitch as the pitch P of the tooth portion 1a of the scale 1 are formed on the lower surface of the magnetic pole 4a, and the pole teeth 14b, 5b are similarly formed on the lower surfaces of the magnetic poles 4b, 5a, 5b. 15a and 15b are formed respectively.
Further, these pole teeth 14b, 15a, 15b are sequentially P /
They are arranged so as to be offset by four, and a predetermined gap G is formed between each lower surface of the pole teeth 14a, 14b, 15a, 15b and the upper surface of the tooth portion 1a. Then, by sequentially supplying a predetermined pulse signal to the coils 6a, 6b, 7a, 7b, the coils 6a, 6a
The magnetic flux generated by b, 7a, 7b and the magnetic flux generated by the permanent magnets 8, 9 are sequentially adjusted in each magnetic pole 4a, 4b, 5a, 5b, and the magnetically stable position of the slider 2 relative to the scale 1 is sequentially moved. As a result, the slider 2 moves along the longitudinal direction of the scale 1.

Here, a case where the slider 2 is driven by a two-phase excitation method in which current is always supplied to the two sets of coils 6a, 6b and 7a, 7b will be described as an example.

As shown in FIG. 7 (a), by supplying a predetermined current to the coils 6a and 6b from the terminals 6c to 6d and a predetermined current to the coils 7a and 7b from the terminals 7d to 7c,
The magnetic flux generated by the coil 6a and the magnetic flux generated by the permanent magnet 8 are added to each other in the A-phase magnetic pole 4a and cancel each other out in the A1-phase magnetic pole 4b, while the magnetic flux generated by the coil 7a,
Since the magnetic flux generated by the permanent magnet 9 is added to the B-phase magnetic pole 5a and cancels each other in the B1-phase magnetic pole 5b,
The main magnetic flux shown by the solid line φ ₁ in the figure is generated, and as a result, the magnetic poles 14a and 15a of the A-phase magnetic pole 4a and the B-phase magnetic pole 5a and the tooth portion 1a of the scale 1 vertically oppose each other. It will be in a stable position.

As shown in FIG. 7 (b), the coils 6a, with flowing a predetermined current in the same direction to 6b, the coil 7a, by flowing backward to the predetermined current and to 7b, a solid line phi ₂ in FIG. The main magnetic flux shown is generated, and as a result, the position where the pole teeth 14a and 15b and the tooth portion 1a vertically face each other becomes a magnetically stable position.

As shown in FIG. 7 (c), by applying a predetermined current to the coils 6a and 6b in the opposite direction, the main magnetic flux shown by the solid line φ ₃ in the figure is generated, and as a result, each pole tooth 14b and 15b The position where the tooth portion 1a and the tooth portion 1a face each other is a magnetically stable position.

As shown in FIG. 7 (c), the coil 6a, with flow to the predetermined current in the same direction 6b, the coil 7a, by flowing backward to the predetermined current and to 7b, a solid line phi ₄ in FIG. The main magnetic flux shown is generated, and as a result, the position where the pole teeth 14b and 15a and the tooth portion 1a face each other becomes a magnetically stable position.

By repeating the pulse excitation in the order of the above →→→ excitation modes, the slider 2 moves in the right direction of the drawing, that is, in the direction from the magnetic poles 4a to 5b. Also,
By repeating pulse excitation in the order of →→→ excitation modes, the slider 2 is moved to the left in the drawing, that is, the magnetic pole 5b.
To 4a. The same applies when the slider 2 is fixed and the scale 1 is moved.

[Problems to be Solved by the Invention] By the way, the above-described linear pulse motor has the following problems.

Since the A-phase iron core 4 and the B-phase iron core 5 are divided, the mechanical strength is low.

Since the permanent magnets 8 and 9 are separated from the gap G, the leakage magnetic flux becomes large, and the permanent magnet must be made larger accordingly. In addition, when the permanent magnet is made large, the detent force becomes large, and it becomes difficult to move it by hand when the power is off.

Since the length of the magnetic path differs depending on the excitation mode (see FIGS. 7A to 7D), the thrust is not constant.

The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a pulse motor that can shorten the magnetic path, reduce the leakage magnetic flux, and obtain sufficient mechanical strength. .

"Means for Solving the Problem" The present invention provides a secondary scale having teeth formed at equal intervals P along a specific direction, and a secondary scale movably supported with respect to the secondary scale. The primary side magnetic flux generator, and the magnetic poles around which the coil of the primary side magnetic flux generator is wound and the gaps formed between the tooth portions of the secondary scale are sequentially formed. By generating a magnetic flux, the above 1
In a pulse motor for moving a secondary magnetic flux generator relative to the secondary scale, the secondary scale is embedded in an end surface of each magnetic pole of the primary magnetic flux generator facing the secondary scale. A permanent magnet magnetized in a direction parallel to and a plurality of pole teeth formed on both end faces of the permanent magnet, wherein one pole tooth and the other pole tooth of both end faces of the permanent magnet are P / 2 The pole teeth of the magnetic poles adjacent to the permanent magnet are in a positional relationship deviated from each other, and the polar teeth of the magnetic poles adjacent to the permanent magnet are in a positional relationship deviated from (1 / magnetic pole) × P, and the magnetic poles of the primary side magnetic flux generator are integrally formed Is characterized by.

[Operation] According to the present invention, since the permanent magnet is arranged near the gap between the primary side magnetic flux generating section and the secondary side scale, when a current is applied to the coil, the primary side magnetic flux generating section The magnetic flux flows from the pole teeth of the magnetic pole to the adjacent pole teeth on the N pole side via the permanent magnet of the magnetic pole, and further the magnetic flux flowing from the pole teeth to the tooth portion of the secondary side scale generates the primary side magnetic flux. Since a main magnetic flux loop that flows into the pole tooth on the S pole side of the other magnetic pole of the part and flows into the adjacent pole tooth on the N pole side via the permanent magnet of the magnetic pole, the main magnetic flux loop that returns to the original magnetic pole is formed. The leakage flux can be reduced and the length of the magnetic path can be made constant. Further, the primary side magnetic flux generating section is formed integrally without dividing the respective magnetic poles, so that the mechanical strength can be made sufficient.

[Embodiment] An embodiment of the present invention will be described below with reference to the drawings.

FIG. 1 is a diagram showing the configuration of a magnetic circuit of a linear pulse motor according to the first embodiment of the present invention.

In this figure, 21 is a fixed scale, and the pitch P is arranged along the longitudinal direction on the upper surface of the scale 21.
The tooth portions 21a, 21a, ... Are formed at intervals of.

On the other hand, reference numeral 22 denotes a slider (primary magnetic flux generator), which is supported by a support mechanism (not shown) such as a roller so as to be movable along the longitudinal direction of the scale 21 (direction of arrow M in the figure).

The slider 22 has magnetic poles A, A, which face the teeth 21a of the scale 21 with a constant gap G therebetween.
An iron core 23 having a phase magnetic pole 23PA, a B phase magnetic pole 23PB, a C phase magnetic pole 23PC, and a D phase magnetic pole 23PD, and coils 24A to 24D wound around the magnetic poles 23PA to 23-PD, respectively. The magnetic poles 23PA to 23PD of the iron core 23 are integrally formed with each other as shown in FIG. 1, and two split magnetic poles 23A, 23 to 23D, 23 are formed at their lower ends, respectively. Further, concave grooves are formed between the two divided magnetic poles, and the permanent magnets 25A to 25D are inserted in these concave grooves, respectively. The permanent magnets 25A to 25D are magnetized so that the polarities thereof are opposite to each other between the adjacent magnetic poles 25A to 25D as shown in the figure.

In addition, the tooth portion 2 of the scale 21 is provided on the lower surface of the A-phase split magnetic pole 23A.
Three pole teeth 27a having the same pitch as the pitch P of 1a are formed, and the other divided magnetic poles 23, 23B, 23, 23C, 23, 23D, 23
Similarly, the pole teeth 28a, 29a, 30a, 31a, 32a, 33a, 34a
Are formed respectively.

These pole teeth 27a to 34a are in a positional relationship in which the pole teeth on both sides of each permanent magnet are displaced by P / 2. For example, as shown
With the pole tooth 27a of the A-phase split magnetic pole 23A facing the tooth portion 21a of the scale 21, the pole tooth 28a of the phase-divided magnetic pole 23 has a tooth portion 2a.
The positional relationship is shifted by P / 2 with respect to 1a, and similarly, the pole teeth of the other divided magnetic poles are also shifted by P / 2.

Further, regarding the positional relationship of the pole teeth of the divided magnetic poles of the respective magnetic poles 23PA to 23PD, when the pole tooth 27a of the A-phase divided magnetic pole 23A is used as a reference (0 degree), the pole teeth 30a of the phase divided magnetic pole 23 are separated by 180 degrees. Position to,
The pole teeth 31a of the C-phase split magnetic pole 23C are located 90 degrees apart, and the pole teeth 34a of the phase-split magnetic pole 23 are located 270 degrees apart. As a result, the scale 2 is divided into the magnetic poles 23A, 23C, 23, 23 in this order.
The phase relationship of 1 with respect to each tooth portion 21a is displaced by P / 4 in the movement direction (direction of arrow M).

The pole tooth 29a of the B-phase split magnetic pole 23B is in phase (0 degree) with the pole tooth 27a of the A-phase split magnetic pole 23A, and the pole tooth 29a of the B-phase split magnetic pole 23B is used as a reference. Teeth 28a 18
The pole teeth 32a of the phase division magnetic pole 23 are located 270 degrees apart, and the pole teeth 33a of the D phase division magnetic pole 23D are located 90 degrees apart. Thereby, the divided magnetic poles 23B, 23D, 23, 23
In this order, the phase relationship of each scale 21 with respect to each tooth 21a is displaced by P / 4 in the direction of movement (direction of arrow M).

Next, regarding the operation of the linear pulse motor described above,
It will be described with reference to the drawings.

In the state shown in FIG. 2 (a), the A-phase and B-phase coils
When currents in the directions shown in the figures are passed through 24A and 24B, the coils 24A and 24 are moved from the B-phase magnetic pole 23PB to the A-phase magnetic pole 23PA in the iron core 23.
A magnetomotive force is generated by B, which forms the main magnetic flux loop indicated by φ5 in the figure.

As a result, the pole tooth 27a of the A-phase split magnetic pole 23A faces the tooth portion 21a of the scale 21, and the pole tooth 29a of the B-phase split magnetic pole 23B is in the scale 2.
The position facing the tooth portion 21a of 1 is a magnetically stable position.

Further, in the C-phase magnetic pole 23PC and the D-phase magnetic pole 23PD, since the coils 24C and 24D of both magnetic poles are not energized, as shown in the figure, it is generated from the N pole of the permanent magnet 25C of the C-phase magnetic pole 23PC. The magnetic flux passes through the C-phase magnetic pole 23PC and the S of the permanent magnet 25C
The magnetic flux entering the pole forms a magnetic flux loop φ6, and the magnetic flux generated from the N pole slightly flows from the pole tooth 31a of the C-phase split magnetic pole 23C into the pole tooth 21a of the scale 21, passes through the scale 21, and passes through the pole tooth. 2
From 1a, it flows into the pole teeth 32a of the phase-divided magnetic pole 23 and enters the S pole, forming a magnetic flux loop φ7 (shown by the broken line). Further, the permanent magnet 25D of the D-phase magnetic pole 23PD generates a magnetic flux loop φ8 in the opposite direction to the magnetic flux loop φ6, and the magnetic flux loop φ8.
In the direction opposite to 7, magnetic flux loop φ9 is generated. However, the magnetic flux of those magnetic flux loops φ7 and φ9 is the main magnetic flux loop φ5.
The magnetic flux is much weaker than that of
It's messy to move.

As shown in Fig. 2 (b), C-phase and D-phase coils 24C, 24
When a predetermined current is applied to D in the direction shown in the figure, a main magnetic flux loop indicated by φ10 is generated in the figure, and as a result, the pole teeth 32a of the phase-split magnetic pole 23 face the tooth portion 21a of the scale 21. ,
The position where the pole tooth 34a of the phase-divided magnetic pole 23 faces the tooth portion 21a of the scale 21 is a magnetically stable position.

In addition, the permanent magnet 25A and the non-energized magnetic poles 23PA and 23PB
25B and flux loop φ11 and flux loop φ12
And a magnetic flux loop φ13 and a magnetic flux loop φ14 are generated.

As shown in FIG. 2 (c), the A-phase and B-phase coils 24A, 24
When a predetermined current flows in the direction opposite to B, a main magnetic flux loop indicated by φ15 in the figure occurs, and as a result, the pole teeth 28a of the phase-split magnetic pole 23 face the tooth portion 21a of the scale 21, and the phase-split magnetic pole is formed.
The position where the 23 pole teeth 30a face the tooth portion 21a of the scale 21 is a magnetically stable position. In addition, the magnetic pole in the non-energized state
In 23PC and 23PD, a magnetic flux loop φ16 and a magnetic flux loop 17, a magnetic flux loop φ18 and a magnetic flux loop φ19 are generated, respectively.

As shown in Fig. 2 (d), C-phase and D-phase coils 24C, 24
When a predetermined current is passed in the direction opposite to B, a main magnetic flux loop indicated by φ20 is generated in the figure, and as a result, the pole tooth 31a of the C-phase split magnetic pole 23C faces the tooth portion 21a of the scale 21, and the D phase Split magnetic pole
The position where the pole tooth 33a of 23D faces the tooth portion 21a of the scale 21 is a magnetically stable position. In addition, the magnetic pole in the non-energized state
A magnetic flux loop φ21 and a magnetic flux loop φ22, and a magnetic flux loop φ23 and a magnetic flux loop φ24 are generated in 23PA and 23PB, respectively.

By repeating pulse excitation in the order of the above →→→ excitation modes, the slider 22 moves to the right in the drawing.
The slider 22 moves P4 by P / 4 to the left in the drawing by moving the pulse 22 by 4 and repeating pulse excitation in the order of →→→ excitation modes.

Next, a linear pulse motor according to a second embodiment of the present invention will be described with reference to FIG. In this figure, portions corresponding to the respective portions in FIG. 1 are designated by the same reference numerals, and description thereof will be omitted.

The difference between the linear pulse motor according to the second embodiment and the linear pulse motor according to the first embodiment is that the N poles and S poles of the permanent magnets 25B and 25D inserted in the iron core are magnetized in reverse. The positional relationship of the pole teeth of the split magnetic poles of each of the magnetic poles 23PA to 23PD is different as shown below.
First, assuming that the pole tooth 27a of the A-phase split magnetic pole 23A is a reference (0 degree), the pole tooth 29a of the B-phase split magnetic pole 23B is positioned 180 degrees apart,
The pole teeth 33a of the D-phase split magnetic pole 23D are located 270 degrees apart. As a result, the phase relationship with respect to each tooth portion 21a of the scale 21 in the order of the divided magnetic poles 23A, 23C, 23B, 23D is displaced by P / 4 in the moving direction (arrow M direction).

Further, the pole tooth 30a of the phase-divided magnetic pole 23 is in phase (0 degree) with the pole tooth 27a of the A-phase divided magnetic pole 23.
The pole tooth 28a of the phase-split magnetic pole 23 is 180
The pole teeth 32a of the phase-split magnetic pole 23 are located 270 degrees apart, and the pole teeth 34a of the phase-split magnetic pole 23 are located 90 degrees apart. As a result, the divided magnetic poles 23,23,23,2
In the order of 3, the phase relationship with respect to each tooth portion 21a of the scale 21 is displaced by P / 4 in the moving direction (arrow M direction).

In such a configuration, when a current is applied to each coil as in the first embodiment, the pole teeth 27a and 30a of the A-phase and phase-split magnetic poles 23A and 23 and the tooth portion of the scale 21 are changed depending on the excitation mode of. 21a face each other, and depending on the excitation mode of, the pole teeth 32a, 33 of the phase and D-phase split magnetic poles 23, 23D
a and the tooth portion 21a of the scale 21 face each other, and depending on the excitation mode of, the pole teeth 28a, 29a of the phase and B-phase split magnetic poles 23, 23B and the tooth portion 21a of the scale 21 face each other, By the excitation mode, the pole teeth 31a and 34a of the C-phase and phase-divided magnetic poles 23C and 23D and the tooth portion 21a of the scale 21 face each other, so that the position is magnetically stable. Therefore, by repeating pulse excitation in the above →→→ excitation modes, slider 22S
Moves to the right in the drawing by P / 4, and the pulse excitation is repeated in the order of each of the →→→ excitation modes, so that the slider 22S moves in the leftward direction in the drawing by P / 4.

Next, a three-phase linear pulse motor which is a third embodiment of the present invention will be described with reference to FIG. In this figure, 41 is a scale, and the upper surface has teeth at regular intervals.
41a is formed. A slider 42 is movably supported in the longitudinal direction of the scale 41 by a supporting mechanism such as a roller (not shown). This slider 42 has an A-phase magnetic pole 43A.
And an iron core 43 having a B-phase magnetic pole 43B and a C-phase magnetic pole 43C
And coils 44A to 44C wound around the magnetic poles 43A to 43C, respectively. Grooves are formed in the center of the end faces of the magnetic poles 43A, 43B, 43C facing the scale 41, and the permanent magnets 45A, 45B, 45C are inserted in these grooves. In addition, two pole teeth 46a, 46a and 47a, 4 are provided on each of the two end faces of the A-phase magnetic pole 43A that sandwich the permanent magnet.
7a is formed, and similarly, the B-phase magnetic pole 43B has pole teeth 48a, 4a.
8a and 49a, 49a and pole teeth 50a, 50a and 51a, 51a are formed on the C-phase magnetic pole 43C, respectively.

Further, the pole teeth 46a to 51a are in a positional relationship in which the pole teeth on both sides of the permanent magnet are offset by P / 2, and the positional relationship of the pole teeth between the magnetic poles is the A-phase magnetic pole 43A. Based on the polar tooth 46 of (0
Degree), the pole teeth 48a of the B-phase magnetic pole 43B are displaced by 120 degrees, and C
There is a positional relationship in which the pole teeth 50a of the phase magnetic pole 43C are displaced by 240 degrees.

In such a configuration, the slider 42 is moved by supplying pulse currents whose polarities are reversed to the A-phase coil 44A, the B-phase coil 44B, and the C-phase coil 44C.

A three-phase rotary pulse motor according to a fourth embodiment, which is a rotary type of the three-phase linear pulse motor according to the third embodiment of the present invention, will now be described with reference to FIG.

In this figure, 60 is a rotor fixed to the shaft S. Tooth portions 60a are formed on the circumferential surface of the rotor 60 at a constant pitch P. 61 is a cylindrical stator. On the inner peripheral surface of this stator, six magnetic poles 61A,
61B, 61C, 61, 61, 61 are formed, and these magnetic poles
61A to 61 have coils 64A, 64B, 64C, 64, 64, 64 respectively.
Is wound. In addition, each magnetic pole facing the rotor 60
A groove is formed in the center of the end surface of each of 61A to 61,
Permanent magnets 63A, 63B, 63C, 63, 6 are placed in these grooves.
3,63 are inserted. Further, pole teeth 65a to 76a are formed on the end surfaces on both sides of the permanent magnets 63A to 63 of each magnetic pole 61A to 61, and these pole teeth 65a to 76a are located on both sides of a permanent magnet of the same magnetic pole. The pole teeth are in a positional relationship deviating by P / 2, and the positional relationship of the pole teeth between the magnetic poles is A phase magnetic pole 61A.
Of the phase tooth 61a of the rotor 60, the pole tooth 67a of the B-phase magnetic pole 61B and the pole tooth 73a of the phase magnetic pole 61 are separated from the tooth portions 60a to 120a. The pole tooth 69a of the C-phase magnetic pole 61C and the pole tooth 75 of the phase-magnetic pole 61.
There is a positional relationship in which a is displaced by 240 degrees from the tooth portion 60a.

In such a configuration, the A-phase and phase coils 64A, 64
Then, the rotor 60 is rotationally driven by supplying pulse currents whose polarities are inverted to the B-phase and phase coils 64B and 64 and the C-phase and phase coils 64C and 64, respectively.

The present invention is not limited to the above-described embodiments, and various modifications described below are possible.

A double-sided linear pulse motor in which teeth are formed on the upper and lower surfaces of the secondary scale and the primary slider is fixed to the upper and lower surfaces of the secondary scale by a supporting mechanism such as rollers may be used. Further, as a modification of this double-sided linear pulse motor, the primary side slider may be fixed to the upper and lower surfaces of the secondary side scale to form the linear pulse motor.

The primary slider may be provided with a sensor that detects the amount of relative movement with respect to the secondary scale, and may be driven as a servo motor.

A skew structure or a slight pitch shift (equivalent skew) within the same pole may be applied in order to remove cogging or improve thrust waveform distortion.

The rotary pulse motor may have an outer rotor structure, a rotor-shaped structure, or the like.

[Advantages of the Invention] As described above, according to the present invention, a secondary scale having tooth portions formed at equal intervals P along a specific direction,
A primary magnetic flux generating section movably supported in the specific direction with respect to the secondary scale, each magnetic pole around which a coil of the primary magnetic flux generating section is wound, and the secondary side A pulse motor for moving the primary-side magnetic flux generator relative to the secondary-side scale by sequentially generating magnetic flux in each gap formed between the scale and each tooth portion, wherein the secondary-side scale And a plurality of poles formed on both end surfaces of the permanent magnet, the permanent magnet being embedded in the end surface of each magnetic pole of the primary side magnetic flux generating section facing each other and magnetized in a direction parallel to the secondary side scale. Since the teeth are provided, there are the following effects.

Since the primary magnetic flux generating section is integrally formed without dividing each magnetic pole, the mechanical strength can be made sufficient.

-1 Since the permanent magnets are embedded in the end faces of the respective magnetic poles of the primary side magnetic flux generating section, the leakage magnetic flux becomes small and the magnetic flux circulates efficiently. Therefore, a small permanent magnet can be used.

-2 In addition, since the permanent magnet is magnetized in the magnetic pole of the primary side magnetic flux generating portion in a direction parallel to the secondary side scale, the magnetic flux of the permanent magnet is almost short-circuited within the magnetic pole when the coil is not energized. Therefore, since the magnetic flux flowing through each magnetic pole of the primary side magnetic flux generating section and each tooth of the secondary side scale becomes extremely small, the detent force becomes small and the relative movement of the primary side magnetic flux generating section is manually performed. It can be done lightly.

-3 Furthermore, the magnetic flux circulates efficiently, and the magnetic flux of the permanent magnet when not energized is almost short-circuited within the magnetic pole.
Only the magnetic flux that contributes to the relative movement flows in the portion other than the magnetic poles of the primary-side magnetic flux generator. For this reason, except for the magnetic poles, a simple structure is possible, so that it is possible to reduce the weight of the primary side magnetic flux generating section and improve the responsiveness due to the weight reduction.

When the respective phase coils are excited, the magnetic paths have the same length, so that the thrust variation between the phases is reduced.

[Brief description of drawings]

FIG. 1 is a side view showing the structure of a linear pulse motor according to the first embodiment of the present invention, and FIGS. 2A to 2D are side views for explaining the operation of the linear pulse motor according to the same embodiment. FIG. 3 is a side view showing the structure of a linear pulse motor according to the second embodiment of the present invention, and FIG. 4 is a side view showing the structure of a three-phase linear pulse motor according to the third embodiment of the present invention. FIG. 5 is a sectional view showing the structure of a three-phase rotary pulse motor according to the fourth embodiment of the present invention, FIG. 6 is a side view showing the structure of a linear pulse motor according to the conventional embodiment, and FIG. (D) is a side view for explaining the operation of the linear pulse motor according to the embodiment. 21 …… Slider (primary side magnetic flux generator), 21a …… Tooth, 2
2 …… Scale (secondary scale), 23 …… Iron core, 23PA
…… A phase magnetic pole, 23PB …… B phase magnetic pole, 23PC …… C phase magnetic pole,
23PD ... D-phase magnetic pole, 23A ... A-phase split magnetic pole, 23B ... B-phase split magnetic pole, 23C ... C-phase split magnetic pole, 23D ... D-phase split magnetic pole, 24A ... A-phase coil, 24B ... B Phase coil, 24C ...
C-phase coil, 24D ... D-phase coil, 25A-25D ... Permanent magnet, 27a-34a ... Pole teeth.

Claims (1)

[Claims] 1. A secondary-side scale having teeth formed at equal intervals P along a specific direction, and a primary-side magnetic flux generator movably supported on the secondary-side scale in the specific direction. And sequentially generating magnetic flux in each gap formed between each magnetic pole around which the coil of the primary side magnetic flux generating section is wound and each tooth section of the secondary side scale, 1
In a pulse motor for moving a secondary magnetic flux generator relative to the secondary scale, the secondary scale is embedded in an end surface of each magnetic pole of the primary magnetic flux generator facing the secondary scale. A permanent magnet magnetized in a direction parallel to the permanent magnet, and a plurality of pole teeth formed on both end surfaces of the permanent magnet, wherein one pole tooth and the other pole tooth of both end surfaces of the permanent magnet are P /
2 The pole teeth of the magnetic poles adjacent to the permanent magnet are in a positional relationship deviated from each other, and the polar teeth of the magnetic poles adjacent to the permanent magnet are in a positional relationship deviated from (1 / magnetic pole) × P. A pulse motor characterized by.