JPS5978927U - 熱式質量流量計の分流機構 - Google Patents

熱式質量流量計の分流機構

Info

Publication number
JPS5978927U
JPS5978927U JP17362682U JP17362682U JPS5978927U JP S5978927 U JPS5978927 U JP S5978927U JP 17362682 U JP17362682 U JP 17362682U JP 17362682 U JP17362682 U JP 17362682U JP S5978927 U JPS5978927 U JP S5978927U
Authority
JP
Japan
Prior art keywords
thermal mass
mass flowmeter
laminar flow
flow element
separation mechanism
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17362682U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0317226Y2 (enrdf_load_stackoverflow
Inventor
和地　昭
Original Assignee
大倉電気株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 大倉電気株式会社 filed Critical 大倉電気株式会社
Priority to JP17362682U priority Critical patent/JPS5978927U/ja
Publication of JPS5978927U publication Critical patent/JPS5978927U/ja
Application granted granted Critical
Publication of JPH0317226Y2 publication Critical patent/JPH0317226Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Measuring Volume Flow (AREA)
  • Details Of Flowmeters (AREA)
JP17362682U 1982-11-18 1982-11-18 熱式質量流量計の分流機構 Granted JPS5978927U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17362682U JPS5978927U (ja) 1982-11-18 1982-11-18 熱式質量流量計の分流機構

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17362682U JPS5978927U (ja) 1982-11-18 1982-11-18 熱式質量流量計の分流機構

Publications (2)

Publication Number Publication Date
JPS5978927U true JPS5978927U (ja) 1984-05-28
JPH0317226Y2 JPH0317226Y2 (enrdf_load_stackoverflow) 1991-04-11

Family

ID=30378191

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17362682U Granted JPS5978927U (ja) 1982-11-18 1982-11-18 熱式質量流量計の分流機構

Country Status (1)

Country Link
JP (1) JPS5978927U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2022522933A (ja) * 2019-03-04 2022-04-21 日立金属株式会社 大流量管状バイパス

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009192220A (ja) 2008-02-12 2009-08-27 Hitachi Metals Ltd 流量センサおよびこれを用いた質量流量制御装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5416708A (en) * 1977-07-07 1979-02-07 Kyokuto Kikai Seisakusho:Kk Low noize fan
JPS5534292U (enrdf_load_stackoverflow) * 1979-06-13 1980-03-05

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5416708A (en) * 1977-07-07 1979-02-07 Kyokuto Kikai Seisakusho:Kk Low noize fan
JPS5534292U (enrdf_load_stackoverflow) * 1979-06-13 1980-03-05

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2022522933A (ja) * 2019-03-04 2022-04-21 日立金属株式会社 大流量管状バイパス

Also Published As

Publication number Publication date
JPH0317226Y2 (enrdf_load_stackoverflow) 1991-04-11

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