JPS5977614A - Thin film magnetic head - Google Patents
Thin film magnetic headInfo
- Publication number
- JPS5977614A JPS5977614A JP18742782A JP18742782A JPS5977614A JP S5977614 A JPS5977614 A JP S5977614A JP 18742782 A JP18742782 A JP 18742782A JP 18742782 A JP18742782 A JP 18742782A JP S5977614 A JPS5977614 A JP S5977614A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic
- layer
- thin film
- magnetic layer
- magnetic head
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3109—Details
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Magnetic Heads (AREA)
Abstract
Description
【発明の詳細な説明】
〔発明の利用分野〕
本発明は薄膜磁気ヘッドに係り、とくに尚周波数帯域で
良好な特性の磁気ヘッド構造に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Application of the Invention] The present invention relates to a thin film magnetic head, and particularly to a magnetic head structure with good characteristics in a frequency band.
し従来技vトナj
従来の磁気ヘッドは機械加工によって磁極を形成し、巻
線してコイルを作るいわゆるバルクヘッドであった。こ
のようなヘッドは浮遊容量が太きい丸め、高周波数帯域
では使用が困難であり、周波数が〜IOMH2以下の範
囲でしか使われていない、最近筒周波帯域で使用可能な
ヘッドとして、ホトリングラフィ技術r1丈って磁惰の
形成〜薄膜巻id’を行なういわゆる薄膜磁気ヘッドが
開発されつつあるが、これでも〜100M)1程度の周
波数では記録再生効率が低下し7てし咬うという欠点が
あつ几、
〔発明の目的〕
本発明は磁極の構造を工夫することによって高周波斂で
使用可能な薄膜磁気ベット欠提供することにある。Conventional Techniques v Toner J Conventional magnetic heads are so-called bulk heads in which magnetic poles are formed by machining and wound to form a coil. Such heads have a large stray capacitance and are difficult to use in high frequency bands, and are only used in the frequency range below ~IOMH2. A so-called thin-film magnetic head that performs magnetic inertia formation and thin-film winding ID' is being developed, but even this has the disadvantage that recording and reproducing efficiency decreases at frequencies of about 100 M)1 OBJECTS OF THE INVENTION The object of the present invention is to provide a thin film magnetic bed that can be used in high frequency waves by devising the structure of the magnetic poles.
上記目的音達成するための本発明の構成は、磁路音形成
するための後部コア部の少なくとも一部ケ絶縁物により
分断せしめることにある。The structure of the present invention for achieving the above-mentioned target sound is that at least a portion of the rear core portion for forming the magnetic path sound is separated by an insulator.
本発明は上記構成になるので磁路音形成するための後部
コアにおける幅音記録再生ケ行なうトラック幅よりも大
きくして磁気抵抗ケ低くし記録再生効率全高め、磁極を
強磁性合金と絶縁物との積周体とし同時にコア部の少な
くとも一部ケ絶縁物によって、トラック幅以下の幅に分
断し、渦N1流損失、および共振にともなう損失を軽減
して高周波数まで使用できる。Since the present invention has the above-mentioned configuration, the width of the rear core for forming magnetic path sound is made larger than the track width for recording and reproducing, lowering the magnetic resistance and increasing the recording and reproducing efficiency. At the same time, at least part of the core portion is divided into widths smaller than the track width by an insulator, reducing vortex N1 flow loss and loss due to resonance, and can be used up to high frequencies.
以下、本発明の一実施例葡第1図により説明する。第1
図(a)は本発明の薄膜ヘッド主要部の断面図、(l〕
)はこれに対応する上下両磁性層2.5部分の平面図ケ
示す((b)のAA’断面が(a)に当る。)。Hereinafter, one embodiment of the present invention will be explained with reference to FIG. 1st
Figure (a) is a sectional view of the main part of the thin film head of the present invention, (l)
) shows a corresponding plan view of 2.5 portions of both the upper and lower magnetic layers (the AA' section in (b) corresponds to (a)).
記号1は非磁性基板であって、本実施例においては厚さ
Lmm、直径40順φのホトセラノ、(米国。Symbol 1 is a non-magnetic substrate, and in this example, it is a photocerano substrate (USA) with a thickness of L mm and a diameter of 40 mm.
コーニング社製)ケ用いた。記号2は下部磁性層であり
、厚み約0.5 μmのNi−1gwt%Fe合金と厚
み約0.1μmの5i02に積層し総厚み〜3μmとし
たもので、スパッタ法によシ形成した。(manufactured by Corning Inc.) was used. Symbol 2 is a lower magnetic layer, which is formed by laminating Ni-1gwt%Fe alloy with a thickness of about 0.5 μm and 5i02 with a thickness of about 0.1 μm to a total thickness of about 3 μm, and was formed by sputtering.
下部磁性層は上部磁性層5と同様絶縁層によって分断し
た。記号3は薄膜コイルであってAt=i約2μm厚み
で蒸着し、ホトリソグラフィ技術ケ用いて4ターンのコ
イルとし友。記号4は下部磁性層2、上部磁性層5およ
び4ターンのコイル3孕磁気的、電気的に絶縁するため
の絶縁層であって、本実施例においてはスパッタ法によ
って形成した約1μm厚みのstowおよび回転塗布に
よって形成し几ポリイミド系樹脂を用いた。これらの構
造およびヘッド作製技術は周知技術?用いて容易に形成
されるものであるので詳細は省略する。記号5は上部磁
性層ケ構成する総厚み約2μmのNi−19wt%Fe
合金と8fO2の積層体で、スパッタ法により下部磁性
層と同様に形成した。磁性層は第1図(b)に示すよう
に絶縁物6によって分断されている。このような分断は
ホトリソグラフィ技術?用いて磁性層のバターニング上
行なう従来技術で可能であるが、分断絶縁部の幅は数μ
m程度であることが特性上望ましいので、このような精
密加工?行なうためイオンミリングなどのドライエツチ
ングの加工法?使うことが望ましい。分断されている磁
性層の幅WViトラック幅Tw程度以下になるときに効
果が大きい。上下両磁性層は必ずしも同じように分断さ
れている必要はなく、一方だけが分断されていても効果
が大きい。下部磁性層としてはNi−Znフェライトや
M n −Znフェライトなど絶縁体の磁性基板ケ用い
上部磁性層奮分断する場合も効果が太きい。本実施例に
おいては磁性層の分断されている幅をトラック幅25μ
m以下になるように幅2μmの絶縁層で4つに分断した
。分断した絶縁層は下部磁性層については5i02、上
部磁性層についてはとくに、充てん物を用いず、空気全
絶縁層とした。なお第1図(b)において記号7は上下
両磁性層の接続部(バックギャップ)ケ示す。The lower magnetic layer, like the upper magnetic layer 5, was divided by an insulating layer. Symbol 3 is a thin film coil, which is deposited to a thickness of about 2 μm and made into a 4-turn coil using photolithography technology. Symbol 4 is an insulating layer for magnetically and electrically insulating the lower magnetic layer 2, the upper magnetic layer 5, and the 4-turn coil 3, and in this example, a stow layer with a thickness of about 1 μm formed by sputtering is used. It was formed by spin coating and a polyimide resin was used. Are these structures and head manufacturing techniques well-known? Since it can be easily formed using this method, the details will be omitted. Symbol 5 is Ni-19wt%Fe with a total thickness of about 2 μm constituting the upper magnetic layer.
A laminate of alloy and 8fO2 was formed by sputtering in the same manner as the lower magnetic layer. The magnetic layer is divided by an insulator 6 as shown in FIG. 1(b). Is this kind of division possible using photolithography technology? This is possible with the conventional technology of patterning the magnetic layer using
Since it is desirable for the characteristics to be about m, is this kind of precision processing? Is there a dry etching method such as ion milling for this purpose? It is desirable to use it. The effect is great when the width WVi of the divided magnetic layer is equal to or less than the track width Tw. Both the upper and lower magnetic layers do not necessarily have to be divided in the same way, and even if only one is divided, the effect is great. The effect is also great when a magnetic substrate of an insulating material such as Ni--Zn ferrite or Mn--Zn ferrite is used as the lower magnetic layer, and the upper magnetic layer is vigorously separated. In this example, the divided width of the magnetic layer is defined as the track width 25 μm.
It was divided into four parts by an insulating layer having a width of 2 μm so that the width was less than 2 μm. The divided insulating layers were 5i02 for the lower magnetic layer, and no filler was used for the upper magnetic layer, making it an all-air insulating layer. Note that in FIG. 1(b), the symbol 7 indicates the connecting portion (back gap) between the upper and lower magnetic layers.
第2図は本実施例の磁気ヘッドおよび従来の磁気ヘット
責磁性層が分断されである以外は本実施例と同様の構造
)の自己記録再生出力の周波数特性?示す。測定は記録
波長による影響?受けないようヘッド−媒体の相対速度
全調節して行なった。FIG. 2 shows the frequency characteristics of the self-recording and reproducing output of the magnetic head of this embodiment and the conventional magnetic head (which has a structure similar to that of this embodiment except that the magnetic layer is separated). show. Is measurement affected by recording wavelength? The relative speed between the head and the medium was fully adjusted to avoid any damage.
本発明のヘッドの特性11の方が従来の磁気ヘッドの特
性12よシも高周波特性にすぐれていることがわかる。It can be seen that characteristic 11 of the head of the present invention is better in high frequency characteristics than characteristic 12 of the conventional magnetic head.
通常薄膜磁気ヘッドにおいては磁路の磁気抵抗?低下さ
せ記録再生効率?高めるため、後部コアの幅をトラック
幅よりも大きくすることが行なわれる。また磁性層の高
周波特性?良好にするため磁性層?薄くシ、絶縁層との
多重積層構造とすることも公知の技術である。しかし、
これらの工夫だけでは容量的な結合による渦電流損失ケ
軽減できず、高周波特性は悪い。これらの周知技術の構
成に本発明ケ適用すれば、渦電流損失を軽減できるので
高周波特性が改善され、100M)IZ程度の周波数に
おいても使用できるヘッドが実現できる。What is the magnetic resistance of the magnetic path in a normal thin film magnetic head? Decrease recording and playback efficiency? To increase this, the width of the rear core is made larger than the track width. Also, the high frequency characteristics of the magnetic layer? Magnetic layer to make it better? It is also a known technique to form a multilayer structure with thin, insulating layers. but,
These measures alone cannot reduce eddy current loss due to capacitive coupling, and the high frequency characteristics are poor. If the present invention is applied to the configurations of these known techniques, eddy current loss can be reduced, high frequency characteristics are improved, and a head that can be used at frequencies of about 100 M) IZ can be realized.
【図面の簡単な説明】
第1図は本発明の一実施例としての薄膜ヘッド全説明す
る図で、(a);ま主要部の断面図、(b)は上下両磁
性層の平面図、第2図は本発明を使用した薄膜ヘッドの
周波数特性?示す図である。BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a diagram illustrating the entire thin film head as an embodiment of the present invention, (a) is a sectional view of the main part, (b) is a plan view of both the upper and lower magnetic layers, Figure 2 shows the frequency characteristics of the thin film head using the present invention? FIG.
Claims (1)
が絶縁物によって分断されていることt特徴とする薄膜
磁気ヘッド。 2、特許請求の範囲第1項記載の薄膜磁気ヘッドは後部
コアの最大幅が記録再生のためのトラック幅よりも大き
いことt%淑とする。 3、特許請求の範囲第1項記載の薄膜磁気ヘッドの磁極
は強磁性合威と絶縁物の積層体からなることt時猷と丁
ゐ。Claims: 1. A thin film magnetic head characterized in that at least a portion of a rear core portion for forming a magnetic path is separated by an insulator. 2. In the thin film magnetic head according to claim 1, the maximum width of the rear core is t% larger than the track width for recording and reproduction. 3. The magnetic pole of the thin film magnetic head according to claim 1 is composed of a laminate of a ferromagnetic composite and an insulating material.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18742782A JPS5977614A (en) | 1982-10-27 | 1982-10-27 | Thin film magnetic head |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18742782A JPS5977614A (en) | 1982-10-27 | 1982-10-27 | Thin film magnetic head |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5977614A true JPS5977614A (en) | 1984-05-04 |
Family
ID=16205861
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP18742782A Pending JPS5977614A (en) | 1982-10-27 | 1982-10-27 | Thin film magnetic head |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5977614A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7486478B2 (en) | 2005-02-07 | 2009-02-03 | Samsung Electronics Co., Ltd. | Magnetic head |
-
1982
- 1982-10-27 JP JP18742782A patent/JPS5977614A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7486478B2 (en) | 2005-02-07 | 2009-02-03 | Samsung Electronics Co., Ltd. | Magnetic head |
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