JPS5977051U

JPS5977051U - Disk defect detection device

Info

Publication number: JPS5977051U
Application number: JP17266682U
Authority: JP
Inventors: 小松　忠紀
Original assignee: 株式会社東芝
Priority date: 1982-11-15
Filing date: 1982-11-15
Publication date: 1984-05-24

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

[Brief explanation of drawings]

第１図は本考案の一実施例におけるディスク欠陥検出装
置の概略構成図、第２図は同装置の受光器の構成を示す
図、第３図ａ”−ｄは第１図に示した装置の作用説明に
用いるための信号波形図、第４図は本考案の他の実施例
における欠陥検出装置の検出光学系の構成を示す図であ
る。１・・・被検査ディスク、２・・・回転機構、３・・・
回転座標検出部、４・・・検出光学系、４１・・・レー
ザ発生器、４２・・・照射光学系、４３・・・受光器、
４３ａ。〜、４３ｄ・・・受光素子、４３ｅ、４３ｆ・・・減算
器、５ａ・・・レーザ光、５ｂ・・・反射光、６・・・
移動機構、７・・・信号処理部、７１・・・フィルタ回
路、７２・・・微分回路、７３・・・増幅回路、訃・・
演算回路、９・・・移動座標検出部、１０・・・出力装
置、１１・・・半透鏡あるいはプリズム型ハーフミラ−
０Fig. 1 is a schematic configuration diagram of a disk defect detection device according to an embodiment of the present invention, Fig. 2 is a diagram showing the configuration of a light receiver of the same device, and Fig. 3 a”-d are the devices shown in Fig. 1. FIG. 4 is a diagram showing the configuration of a detection optical system of a defect detection device in another embodiment of the present invention. 1... disk to be inspected, 2... Rotating mechanism, 3...
Rotating coordinate detection unit, 4... Detection optical system, 41... Laser generator, 42... Irradiation optical system, 43... Light receiver,
43a. ~, 43d... Light receiving element, 43e, 43f... Subtractor, 5a... Laser light, 5b... Reflected light, 6...
Moving mechanism, 7... Signal processing unit, 71... Filter circuit, 72... Differentiating circuit, 73... Amplifying circuit, Death...
Arithmetic circuit, 9... Moving coordinate detection unit, 10... Output device, 11... Half mirror or prism type half mirror
0

Claims

[Scope of utility model registration request]

(1) A detection optical system that irradiates the surface of the disk to be inspected while rotating at a constant speed, receives the reflected light, and detects changes in the light reception position, and a detection optical system that detects changes in the light reception position obtained by this detection optical system. a filter for removing at least regular changing signal components due to the surface shape of the disk to be inspected from the signal; a signal processing circuit for waveform-shaping the signal passing through the filter to obtain a defect signal; a rotational coordinate detection unit that detects rotational coordinates; an irradiation position moving unit that relatively moves the irradiation position of the laser beam on the surface of the disk to be inspected in the radial direction of the disk; a defect signal obtained by the signal processing circuit; What is claimed is: 1. A disk defect detection device comprising: a calculation section that determines a defect state of a disk to be inspected based on a coordinate detection signal from a rotational coordinate detection section and an irradiation position signal from an irradiation position moving section.゛

(2) The disk defect detection device according to claim 1, wherein the detection optical system shares most of the laser beam irradiation optical path and the reflected light reception optical path.