JPS60115684U - Laser optical path system abnormality detection device - Google Patents

Laser optical path system abnormality detection device

Info

Publication number
JPS60115684U
JPS60115684U JP1984003615U JP361584U JPS60115684U JP S60115684 U JPS60115684 U JP S60115684U JP 1984003615 U JP1984003615 U JP 1984003615U JP 361584 U JP361584 U JP 361584U JP S60115684 U JPS60115684 U JP S60115684U
Authority
JP
Japan
Prior art keywords
optical path
path system
laser optical
detection device
abnormality detection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1984003615U
Other languages
Japanese (ja)
Inventor
良平 植田
Original Assignee
三菱電機株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 三菱電機株式会社 filed Critical 三菱電機株式会社
Priority to JP1984003615U priority Critical patent/JPS60115684U/en
Publication of JPS60115684U publication Critical patent/JPS60115684U/en
Pending legal-status Critical Current

Links

Landscapes

  • Testing Of Optical Devices Or Fibers (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。
(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of drawings]

図はこの考案の一実施例であるレーザ光路系の異常検出
装置を示す概略構成図である。 図において、1・・・レーザ発振器、2〜4・・・反射
鏡、5・・・集光レンズ、6・・・ガスセンサ、7・・
・被加工物、8・・・レーザビーム、A・・・加工ポイ
ントである。
The figure is a schematic configuration diagram showing an abnormality detection device for a laser optical path system, which is an embodiment of the invention. In the figure, 1...Laser oscillator, 2-4...Reflector, 5...Condensing lens, 6...Gas sensor, 7...
- Workpiece, 8... Laser beam, A... Processing point.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] レーザビームにより被加工物を熱加工するレーザ装置の
レーザ光路系において、加工時に、前記被加工物から発
生するガスを検知することによって、前記レーザ光路系
の正常、異常を判定するガスセンサを、前記被加工物の
加工ポイントの近傍に設置して成る構成としたレーザ光
路系の異常検出装置。
In a laser optical path system of a laser device that thermally processes a workpiece with a laser beam, a gas sensor is provided that determines whether the laser optical path system is normal or abnormal by detecting gas generated from the workpiece during processing. An abnormality detection device for a laser optical path system configured to be installed near a processing point of a workpiece.
JP1984003615U 1984-01-12 1984-01-12 Laser optical path system abnormality detection device Pending JPS60115684U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984003615U JPS60115684U (en) 1984-01-12 1984-01-12 Laser optical path system abnormality detection device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984003615U JPS60115684U (en) 1984-01-12 1984-01-12 Laser optical path system abnormality detection device

Publications (1)

Publication Number Publication Date
JPS60115684U true JPS60115684U (en) 1985-08-05

Family

ID=30478410

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984003615U Pending JPS60115684U (en) 1984-01-12 1984-01-12 Laser optical path system abnormality detection device

Country Status (1)

Country Link
JP (1) JPS60115684U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04143088A (en) * 1990-10-03 1992-05-18 Mitsubishi Electric Corp Laser cutting method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04143088A (en) * 1990-10-03 1992-05-18 Mitsubishi Electric Corp Laser cutting method

Similar Documents

Publication Publication Date Title
JPS60115684U (en) Laser optical path system abnormality detection device
JPS5834735U (en) Wafer detection circuit
JPS6177184U (en)
JPS59172391U (en) Translucent sheet detection device
JPS59107729U (en) Disk defect repair equipment
JPS5962876U (en) Beam misalignment device in laser processing machine
JPS59157791U (en) Light concentrator positioning device
JPS60171684U (en) Laser processing equipment
JPS5817262U (en) Outrigger overhang length detection device
JPS6015640U (en) temperature detection device
JPS60143306U (en) Light reflective distance sensor
JPS59162678U (en) object detection device
JPS5954871U (en) detection device
JPS63173647U (en)
JPS6132934U (en) Liquid level detection device
JPS59175176U (en) Gas fluctuation detection device
JPS59106087U (en) Infrared moving object detection device
JPS6134409U (en) distance measuring device
JPS6086959U (en) Illuminator dirt detection device
JPS59180874U (en) Dual laser processing equipment
JPS60102605U (en) Light spot position measuring device
JPH01118888U (en)
JPS59180456U (en) Mirror angle fluctuation monitoring device
JPS6021940U (en) temperature detection device
JPS6041807U (en) surface inspection equipment