JPS5968983A - Laser generator - Google Patents
Laser generatorInfo
- Publication number
- JPS5968983A JPS5968983A JP17832182A JP17832182A JPS5968983A JP S5968983 A JPS5968983 A JP S5968983A JP 17832182 A JP17832182 A JP 17832182A JP 17832182 A JP17832182 A JP 17832182A JP S5968983 A JPS5968983 A JP S5968983A
- Authority
- JP
- Japan
- Prior art keywords
- laser beam
- plane
- mirror
- mirrors
- plane mirrors
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
- H01S3/06—Construction or shape of active medium
- H01S3/07—Construction or shape of active medium consisting of a plurality of parts, e.g. segments
- H01S3/073—Gas lasers comprising separate discharge sections in one cavity, e.g. hybrid lasers
- H01S3/076—Folded-path lasers
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Lasers (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
Abstract
Description
【発明の詳細な説明】
〔発明の利用分野〕
折返し個所に使用した複数の平面ミラーの配置を改良し
たレーザ発生装置に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Application of the Invention] The present invention relates to a laser generator in which the arrangement of a plurality of plane mirrors used at folding points is improved.
一般に１ｋＷ級の炭酸ガスレーザ発生装置は、小型化と
共にレーザビームの質が優れていることが要求されてい
る。その為、多数の平面ミラーを使用した共振器が採用
されているが、レーザビームの折返し回数が多くなると
、平面ミラーの微小な凹あるいは凸の影響が累積されて
、レーザビームの質に悪影響を及ぼしている。この点に
ついて第１図に示す従来のガスレーザ発生装ｅ１によシ
説明する。Generally, a 1 kW class carbon dioxide laser generator is required to be compact and to have excellent laser beam quality. For this reason, a resonator using a large number of plane mirrors is used. However, as the laser beam is turned back many times, the influence of minute concavities or convexities on the plane mirrors accumulates and adversely affects the quality of the laser beam. It's affecting me. This point will be explained using a conventional gas laser generator e1 shown in FIG.
同一平面上に配置された４個の放電ｇ２，３゜４．５は
、内部Ｋ Ｃ０２１Ｎ ｅ ＋ Ｈｅ等のガス媒体６を
充填すると共に、図示していない陰極と陽極とから成る
電極全配設している。電極からグロー放電によって、ガ
ス媒体６を反転分布状態に励起して、レーザビーム７を
発生する。レーザビーム７は後述するミラー間を往復す
る。上段および下段放電管２乃至５の１端には、全反射
ミラー８および出力ミラー１取付けている。全反射ミラ
ー８と出力ミラ゛−９との間には、各放電管を光学的に
結合して、レーザビーム７を往復反射する様、折反し用
平面ミラー１０ａ＋ １０ｂ、１０ｃ、１０ｄ。Four discharges g2,3°4.5 arranged on the same plane are filled with an internal gas medium 6 such as K C021N e + He, and the entire electrode arrangement consists of a cathode and an anode (not shown). are doing. The gas medium 6 is excited to a population inversion state by glow discharge from the electrodes, and a laser beam 7 is generated. The laser beam 7 reciprocates between mirrors, which will be described later. A total reflection mirror 8 and an output mirror 1 are attached to one end of the upper and lower discharge tubes 2 to 5. Between the total reflection mirror 8 and the output mirror 9, there are folding plane mirrors 10a+10b, 10c, and 10d for optically coupling each discharge tube and reflecting the laser beam 7 back and forth.
１０ｅ、１０ｆが同一平面内に配置されている。10e and 10f are arranged in the same plane.
ところで、折返し用平面ミラー１０ａ〜１０ｆの表面が
、完全な平面に仕上げられている場合には、多数回の反
射の影響は全く現われない。By the way, when the surfaces of the folding plane mirrors 10a to 10f are finished to be completely flat, the influence of multiple reflections does not appear at all.
しかしながら、現在の技術では、平面ミラーは１０００
〜２０００ｍ ８度の曲率牛径を有する凸面になってい
る。このようにわずかな曲面（凸面）を有する多数のミ
ラー金回一平面に配置し、レーザビームの反射を繰シ返
すと、ミ２−の入反射隨、これに垂直な面では球面収差
の影響が異るため影響が累積され、本来円形であるべき
レーザビームの断面形状がゆがんでくる。すなわち、第
１図に示すように、同一平面内に多数の平面ミラー（わ
ずかな凸面となっている）１０ａ〜１０ｆ’ｉ配置し、
レーザビーム７の多数回反射金繰返すと、入反射面（紙
面に平行）の方向＜ｘ−ｘ’軸）ではレーザビーム７は
集光され、これと直角な方向では（Ｙ−Ｙ’軸）レーザ
ビーム７は拡げられるため、取出されるレーザビーム断
面形状は７Ｂとなる。However, with current technology, a plane mirror can only have 1000
~2000m It has a convex surface with a curvature of 8 degrees. If a large number of mirrors with slightly curved (convex) surfaces are placed on one plane and the laser beam is reflected repeatedly, the incident reflection angle of the mirror will be affected by spherical aberration on the surface perpendicular to this. Because of the difference, the influence accumulates, and the cross-sectional shape of the laser beam, which should originally be circular, becomes distorted. That is, as shown in FIG. 1, a large number of plane mirrors (having a slightly convex surface) 10a to 10f'i are arranged in the same plane,
When the laser beam 7 is reflected many times, the laser beam 7 is focused in the direction of the incident reflection surface (parallel to the paper surface <x-x' axis), and in the direction perpendicular to this (Y-Y' axis) Since the laser beam 7 is expanded, the cross-sectional shape of the extracted laser beam becomes 7B.
ところでレーザビーム７Ｂ＝に焦点レンズで絞つへ
でも、一点に集光できない（焦点がずれる）という問題
を生ずる。このことは、たとえば、金属を切断する場合
には切断方向によシ切断巾が変るという結果となって表
われる。However, even if the laser beam 7B= is focused using a focusing lens, a problem arises in that the laser beam cannot be focused on one point (the focus shifts). This results, for example, in the cutting width when cutting metal, which varies depending on the cutting direction.
本発明の目的は、焦点位置のずれを少なくして集光性の
優れたレーザビームの得られるレーザ発生装置を提供す
ることにある。SUMMARY OF THE INVENTION An object of the present invention is to provide a laser generating device that can produce a laser beam with excellent convergence by reducing the shift in focal position.
この目的を達成するために、本発明では共振器を構成す
る多数の折返し平面ミラー全立体的に配置し、多数回折
返しによる平面ミラーのわずかな曲面の影響を除き、円
形断面を有するレーザビームを得るようにした。In order to achieve this objective, in the present invention, a large number of folded plane mirrors constituting the resonator are arranged three-dimensionally, and the influence of the slight curved surface of the plane mirror due to multiple folds is removed, and a laser beam having a circular cross section is generated. I tried to get it.
以下、本発明の実施例を第２Ａ図ないし第２Ｄ図によシ
説明する。Embodiments of the present invention will be described below with reference to FIGS. 2A to 2D.
支持枠２０の内側には、８本の放電管２ 、２ ／。Inside the support frame 20, there are eight discharge tubes 2, 2/.
３．３’ 、４．４’ ５．５’を配置している。各放
電管２〜５．２′〜５′の中間および左右端は、中央冷
却管２１および左右冷却管２２．２２”ａ一連通してい
る。中央冷却管２１と左右冷却管２２゜２２′とは、送
風機および熱交換器（図示せず）により互いに連通され
ている。送風機（図示せず）全駆動すれば、ガス媒体７
は中央冷却管２１から矢印方向に示す各放電管２〜５，
２′〜５′に分流し、左右冷却管２２．２２’を経て、
送風機に戻シ、再循環される。各放電管２〜５，２′〜
５′の端部は、ベローズ２５．２５’ −ｉ介して支持
枠端２０Ａ、２０Ｂに支持されている。支持枠端２０Ａ
には、第２Ｃ図に示す如く４面の傾斜面を有する第１保
持ブロツＩ、−１）ｉ保持されており各傾斜面には第１
平面ミラ一群である平面ミラー１０ａ。3.3', 4.4', 5.5' are arranged. The middle and left and right ends of each discharge tube 2-5.2'-5' communicate with the central cooling pipe 21 and the left and right cooling pipes 22.22''a.The central cooling pipe 21 and the left and right cooling pipes 22.22''a are communicated with each other by a blower and a heat exchanger (not shown).When the blower (not shown) is fully operated, the gas medium 7
are the discharge tubes 2 to 5 shown in the arrow direction from the central cooling pipe 21,
It is divided into 2' to 5', passes through the left and right cooling pipes 22 and 22',
It is returned to the blower and recirculated. Each discharge tube 2~5,2'~
The ends of 5' are supported by the support frame ends 20A, 20B via bellows 25, 25'-i. Support frame end 20A
As shown in FIG.
A plane mirror 10a is a group of plane mirrors.
１０ｂ、１０ｃ、１０ｄがそれぞれ取付けている。10b, 10c, and 10d are attached respectively.
一方、支持枠端２０Ｂには、第２Ｄ図に示す如く２面の
傾斜面を有する第２保持ブロツク２８゜全反射ミ２−８
及び出力ミラー９が保持される。On the other hand, at the support frame end 20B, there is a second holding block 28° total reflection mirror 2-8 having two inclined surfaces as shown in FIG. 2D.
and output mirror 9 are held.
第２保持ブロツクには第２平面ミラ一群を構成する平面
ミラー１０ａ、１０ｂＷｃ取付けている。Plane mirrors 10a and 10bWc constituting a second group of plane mirrors are attached to the second holding block.
これらの全反射ミラー８及び出カミ２−９と各平面ミラ
ー１０ａ〜１０ｆの相互関係を、第３Ａ図によシ説明す
る。全反射ミラー８で反射されたレーザビーム７は平面
ミラー１０ａ、１０ｄで１８０度曲げられて平面ミラー
１０ｆに入る。平面ミラー１ｏｆ、１０ｅで１８０度曲
げられて平面ミラー１０ｃに入る。平面ミラー１０ｃ、
１０ｂで１８０度曲げられて出力ミラー９に入る。The mutual relationship between the total reflection mirror 8, the output mirror 2-9, and each of the plane mirrors 10a to 10f will be explained with reference to FIG. 3A. The laser beam 7 reflected by the total reflection mirror 8 is bent by 180 degrees by plane mirrors 10a and 10d and enters a plane mirror 10f. It is bent 180 degrees by the plane mirrors 1of and 10e and enters the plane mirror 10c. plane mirror 10c,
It is bent 180 degrees at 10b and enters the output mirror 9.
第３Ｂ図は平面ミラー１０ａと１０ｄの入反射面３０ａ
（入反射面とは、ミラー面に垂直に立てた線−法線−と
入射（反射）光線とを含む平面）、平面ミラー１０ｆと
１０ｅの入反射面３０ｂ及び平面ミラー１０Ｃと１０ｂ
の入反射面３０Ｃの相対的位置関係を示すもので、入反
射面はいずれでも紙面に垂直な方向に延びている。なお
、第８図においては、説明を容易にする為、入反射面３
０ｂは中央部へ平行移動しである。各入反射面３０ａと
３０ｂ及び３０ｂと３０Ｃのなす角αはいずれも等しく
α＝６０度となるように、各平面ミラーを立体的に配置
している。Figure 3B shows the incident and reflective surfaces 30a of plane mirrors 10a and 10d.
(The input/reflection surface is a plane that includes a line perpendicular to the mirror surface - the normal line - and the incident (reflected) ray), the input/reflection surfaces 30b of the plane mirrors 10f and 10e, and the plane mirrors 10C and 10b.
It shows the relative positional relationship of the entrance and reflection surfaces 30C, and both entrance and reflection surfaces extend in a direction perpendicular to the plane of the paper. In addition, in FIG. 8, for ease of explanation, the entrance and reflection surface 3 is
0b is translated to the center. The plane mirrors are three-dimensionally arranged so that the angles α formed by the incident and reflective surfaces 30a and 30b and 30b and 30C are all equal and α=60 degrees.
次に、わずかな曲面を有する各平面ミラー１０ａ〜１０
ｆ’ｉ上述の構成で立的に配置すれば、円形断面を有す
るレーザビームの得られる理由を第３Ａ図により説明す
る。Next, each plane mirror 10a to 10 having a slightly curved surface
The reason why a laser beam having a circular cross section can be obtained by arranging f'i vertically in the above-described configuration will be explained with reference to FIG. 3A.
まず、内部レーザビーム７は平面ミラー１０ａ。First, the internal laser beam 7 is formed by a plane mirror 10a.
１０ｄで１８０度曲げられることによシ、第４Ａ図に示
す如く、入反射面３０ａの方向で集光され、これと直角
の方向で拡げられたビーム断面形状となる。同様に平面
ミラー１０ｆ、１０ｅでは第４Ｂ図の如くまた、平面ミ
ラーｌＱｃ、１０ｂでは第４Ｃ図の如く、ビームは変形
を受ける。従って、内部レーザビーム７は全反射ミ２−
８から出力ミラー９に至るまでこれらの変形を一度ずつ
受けることになる。各入反射面３０ａ、３０ｂ、３０ｃ
が６０度の傾きで交差しているので、第４Ｄ図に示すよ
うに、これらの変形が、ビームの中心軸のまわシに、等
角度で戎われるため、変形後も円形断面を有するレーザ
ビーム４０を保持できることになる。結果として、各平
面ミラーのわずかな曲面の影響の大半を除去できる。By being bent by 180 degrees at 10d, the cross-sectional shape of the beam becomes such that the light is focused in the direction of the incident reflection surface 30a and expanded in the direction perpendicular thereto, as shown in FIG. 4A. Similarly, the beams are deformed in the plane mirrors 10f and 10e as shown in FIG. 4B, and in the plane mirrors lQc and 10b as shown in FIG. 4C. Therefore, the internal laser beam 7 is totally reflected mirror 2-
8 to the output mirror 9 are subjected to these deformations once each. Each input reflection surface 30a, 30b, 30c
intersect at an inclination of 60 degrees, and as shown in Figure 4D, these deformations are cut at equal angles around the central axis of the beam, resulting in a laser beam with a circular cross section even after deformation. This means that you can hold 40. As a result, most of the influence of the slightly curved surface of each plane mirror can be removed.
以上のように、本発明の発生装置によれば、焦点位置の
ずれの少い集光性の優れたレーザビーム４０を受ること
かできる。As described above, according to the generator of the present invention, it is possible to receive the laser beam 40 with excellent convergence and less deviation of the focal position.
第１図は従来のガスレーザ発生装置の平面図、第２Ａ図
及び第２Ｂ図は本発明のガスレーザ発生装置の側断面図
及び平面図、第２Ｃ図、第２Ｄ図は第１及び第２保持ブ
ロツクの斜視図、第３Ａ図は第２Ａ図のレーザビーム光
路を示す説明図、第３Ｂ図は出力ミラー側から見た保持
ブロック内の内部レーザビームの光路説明図、第４Ａ図
は、平面ミ５−１０ａ、１０ｄによる内部レーザビーム
の変形金、第４Ｂ図は、平面ミラーｘｏｆ、１０ｅによ
る内部レーザビームの変形を、第４Ｃ図は、平面ミラー
１０ｃ、１０ｂによる内部レーザビームの変形を、第４
Ｄ図は出力ビームの断面形状を、それぞれ示す特性図で
ちる。
２ 、２’ ｔ ３ ｐ ３ ’ ＊ ４ ｙ ４ ’
＃ ５ ｒ ５ ’・・・放電管、８・・・全反
射ミラー、９・・・出力ミラー、１０ａ−３（
羞１ 図
第２Ａ図
３ＡＩｊＪ
第３Ｂ図FIG. 1 is a plan view of a conventional gas laser generator, FIGS. 2A and 2B are a side sectional view and a plan view of the gas laser generator of the present invention, and FIGS. 2C and 2D are first and second holding blocks. FIG. 3A is an explanatory diagram showing the laser beam optical path of FIG. 2A, FIG. 3B is an explanatory diagram of the optical path of the internal laser beam in the holding block as seen from the output mirror side, and FIG. FIG. 4B shows the deformation of the internal laser beam by plane mirrors xof and 10e, and FIG. 4C shows the deformation of the internal laser beam by plane mirrors 10c and 10b.
Figure D is a characteristic diagram showing the cross-sectional shape of the output beam. 2, 2' t 3 p 3' * 4 y 4'
# 5 r 5 '...Discharge tube, 8...Total reflection mirror, 9...Output mirror, 10a-3 (1) Figure 2A Figure 3AIjJ Figure 3B
Claims (1)
電管の両端部に設けられ内部レーザビームを折返す為の
複数の平面ミラーから成る第１平面ミラ一群及び第２平
面ミラ一群と、前記内部レーザビーム全両端で往復反射
せしめる一対の出力鏡と全反射鏡から成るレーザ発生装
置において、前記第１平面ミラ一群と第２平面ミラ一群
のいずれか一方、あるいは双方全通過する内部レーザビ
ームが出力鏡側よシ見た時互いに交差するよう前記複数
枚の平面ミラーが配置されていること全特徴とするレー
ザ発生装置。 ２、第１項記載のレーザ発生装置において、第１千面ミ
２一群及び第２平面ミラ一群全通過する３本の内部レー
ザビームの成す角が互いに６０度となる様、構成されて
いることを特徴とする第１項記載のレーザ装置。[Claims] 1. A first plane mirror group consisting of a plurality of discharge tubes whose interiors are fully filled with a laser medium, and a plurality of plane mirrors provided at both ends of the discharge tubes for folding back the internal laser beam; In a laser generating device comprising a second group of flat mirrors, and a pair of output mirrors and total reflection mirrors that reflect the internal laser beam back and forth at both ends, either one of the first group of flat mirrors or the second group of flat mirrors, or A laser generator characterized in that the plurality of plane mirrors are arranged so that the internal laser beams that completely pass through both sides intersect with each other when viewed from the output mirror side. 2. The laser generator described in item 1 is configured so that the angles formed by the three internal laser beams that pass through the first thousand-plane mirror 21 group and the second plane mirror group are 60 degrees to each other. 2. The laser device according to claim 1, characterized in that:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17832182A JPS5968983A (en) | 1982-10-13 | 1982-10-13 | Laser generator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17832182A JPS5968983A (en) | 1982-10-13 | 1982-10-13 | Laser generator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5968983A true JPS5968983A (en) | 1984-04-19 |
Family
ID=16046435
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17832182A Pending JPS5968983A (en) | 1982-10-13 | 1982-10-13 | Laser generator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5968983A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3722256A1 (en) * | 1987-07-06 | 1989-01-19 | Peter Dipl Phys Dr In Hoffmann | Laser resonator |
| WO1993020603A1 (en) * | 1992-03-30 | 1993-10-14 | Fanuc Ltd | Laser |
| US5696787A (en) * | 1992-03-30 | 1997-12-09 | Fanuc Ltd. | Laser oscillation apparatus |
| JP2019527479A (en) * | 2016-07-15 | 2019-09-26 | メトラー−トレド ゲーエムベーハー | Optical device for compensating for improper alignment of the reflector with respect to the light source |
-
1982
- 1982-10-13 JP JP17832182A patent/JPS5968983A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3722256A1 (en) * | 1987-07-06 | 1989-01-19 | Peter Dipl Phys Dr In Hoffmann | Laser resonator |
| WO1993020603A1 (en) * | 1992-03-30 | 1993-10-14 | Fanuc Ltd | Laser |
| JPH05283773A (en) * | 1992-03-30 | 1993-10-29 | Fanuc Ltd | Laser oscillation device |
| US5696787A (en) * | 1992-03-30 | 1997-12-09 | Fanuc Ltd. | Laser oscillation apparatus |
| JP2019527479A (en) * | 2016-07-15 | 2019-09-26 | メトラー−トレド ゲーエムベーハー | Optical device for compensating for improper alignment of the reflector with respect to the light source |
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