JPS5964966U - 内付けｃｖｄ法用ロ−タリ−ジヨイント - Google Patents

内付けｃｖｄ法用ロ−タリ−ジヨイント

Info

Publication number
JPS5964966U
JPS5964966U JP15997382U JP15997382U JPS5964966U JP S5964966 U JPS5964966 U JP S5964966U JP 15997382 U JP15997382 U JP 15997382U JP 15997382 U JP15997382 U JP 15997382U JP S5964966 U JPS5964966 U JP S5964966U
Authority
JP
Japan
Prior art keywords
pipe
fixed pipe
rotary joint
annular projection
cvd method
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15997382U
Other languages
English (en)
Japanese (ja)
Other versions
JPH017723Y2 (enrdf_load_stackoverflow
Inventor
和昭 吉田
古井　康郎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Furukawa Electric Co Ltd
Original Assignee
Furukawa Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Furukawa Electric Co Ltd filed Critical Furukawa Electric Co Ltd
Priority to JP15997382U priority Critical patent/JPS5964966U/ja
Publication of JPS5964966U publication Critical patent/JPS5964966U/ja
Application granted granted Critical
Publication of JPH017723Y2 publication Critical patent/JPH017723Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Joints Allowing Movement (AREA)
  • Chemical Vapour Deposition (AREA)
JP15997382U 1982-10-22 1982-10-22 内付けｃｖｄ法用ロ−タリ−ジヨイント Granted JPS5964966U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15997382U JPS5964966U (ja) 1982-10-22 1982-10-22 内付けｃｖｄ法用ロ−タリ−ジヨイント

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15997382U JPS5964966U (ja) 1982-10-22 1982-10-22 内付けｃｖｄ法用ロ−タリ−ジヨイント

Publications (2)

Publication Number Publication Date
JPS5964966U true JPS5964966U (ja) 1984-04-28
JPH017723Y2 JPH017723Y2 (enrdf_load_stackoverflow) 1989-03-01

Family

ID=30351995

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15997382U Granted JPS5964966U (ja) 1982-10-22 1982-10-22 内付けｃｖｄ法用ロ−タリ−ジヨイント

Country Status (1)

Country Link
JP (1) JPS5964966U (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH017723Y2 (enrdf_load_stackoverflow) 1989-03-01

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