JPS5964966U - Rotary joint for internal CVD method - Google Patents
Rotary joint for internal CVD methodInfo
- Publication number
- JPS5964966U JPS5964966U JP15997382U JP15997382U JPS5964966U JP S5964966 U JPS5964966 U JP S5964966U JP 15997382 U JP15997382 U JP 15997382U JP 15997382 U JP15997382 U JP 15997382U JP S5964966 U JPS5964966 U JP S5964966U
- Authority
- JP
- Japan
- Prior art keywords
- pipe
- fixed pipe
- rotary joint
- annular projection
- cvd method
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Joints Allowing Movement (AREA)
- Chemical Vapour Deposition (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は一般の内付けＣＶＤ法を示す模式図、第２図は
従来のロータリージヨイントを示す断面図、第３図は本
考案に係るロータリージヨイントを示す断面図である。FIG. 1 is a schematic diagram showing a general internal CVD method, FIG. 2 is a sectional view showing a conventional rotary joint, and FIG. 3 is a sectional view showing a rotary joint according to the present invention.
Claims (3)
相原料を供給するための気相系配管とを連結するための
内付けＣＶＤ法用ロータリージヨイントにおいて、上記
反応管に連結される回転パイプと、上記気相系配管に連
結されかつ先端部が回転パイプに挿入自在な固定パイプ
と、当該回転パイプと固定パイプとを連結するための連
結部とを有し、該連結部は上記固定パイプの外周に設け
られかつ上記回転パイプの端面に接当自在な環状突起と
該回転パイプの外周に取り付は自在であってかつ環状突
起を介して上記固定パイプに連結力を付与する取付は部
とからなり、さらに上記回転パイプと固定パイプとの間
隙に設けられかつ両パイプの内周面及び外周面に摺接自
在なシール部材を備えていると共に上記固定パイプの基
端部には気相系配管に取付は自在な可撓性を有する可撓
パイプが取付けられている内付けＣＶＤ法用ロータリー
ジヨイント。(1) An internal CVD rotary joint for connecting a rotatably held reaction tube and gas phase piping for supplying gas phase raw materials into the reaction tube, connected to the reaction tube. a rotating pipe connected to the gas phase system piping, a fixed pipe whose tip part can be freely inserted into the rotating pipe, and a connecting part for connecting the rotating pipe and the fixed pipe, the connecting part is an annular projection provided on the outer periphery of the fixed pipe and capable of freely coming into contact with the end surface of the rotating pipe; and an annular projection that can be freely attached to the outer periphery of the rotating pipe and applies a connecting force to the fixed pipe via the annular projection. The mounting includes a sealing member provided in the gap between the rotary pipe and the fixed pipe and slidable on the inner and outer circumferential surfaces of both pipes, and a base end portion of the fixed pipe. This is an internal rotary joint for the CVD method, which is equipped with a flexible pipe that can be freely attached to gas phase piping.
径大部が設けられており、該径大部と径小部との段差部
に上記固定パイプの端面が接当自在である実用新案登録
請求の範囲第１項記載の内付けＣＶＤ法用ロータリージ
ヨイント。(2) A large-diameter portion is provided on the tip side of the rotary pipe into which the fixed pipe is inserted, and the end surface of the fixed pipe can freely come into contact with the stepped portion between the large-diameter portion and the small-diameter portion. The rotary joint for internal CVD method according to claim 1 of the patent registration claim.
と、袋ナツトとからなり、該袋ナツトは環状突起の外径
よりも小さくかつ固定パイプの外径と同等かまたはそれ
よりも大きい径を有する透孔を備えている実用新案登録
請求の範囲第１項または第２項記載の内付けＣＶＤ法用
ロータリージヨイント。(3) The connecting part consists of an annular projection formed on the outer periphery of the fixed pipe and a cap nut, and the cap nut is smaller than the outer diameter of the annular projection and is equal to or larger than the outer diameter of the fixed pipe. A rotary joint for internal CVD method according to claim 1 or 2 of the utility model registration claim, which is provided with a through hole having a diameter.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15997382U JPS5964966U (en) | 1982-10-22 | 1982-10-22 | Rotary joint for internal CVD method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15997382U JPS5964966U (en) | 1982-10-22 | 1982-10-22 | Rotary joint for internal CVD method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5964966U true JPS5964966U (en) | 1984-04-28 |
| JPH017723Y2 JPH017723Y2 (en) | 1989-03-01 |
Family
ID=30351995
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15997382U Granted JPS5964966U (en) | 1982-10-22 | 1982-10-22 | Rotary joint for internal CVD method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5964966U (en) |
-
1982
- 1982-10-22 JP JP15997382U patent/JPS5964966U/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH017723Y2 (en) | 1989-03-01 |
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