JPS5960950A - X-ray tube device of rotary anode type - Google Patents

Abstract

PURPOSE:To enable a rotary anode to be rotated without contact by supporting it radially and axially while allowing the magnetic fluxes of permanent magnets installed outside a case to pas inside cylinders which are made of a high permeability material and installed at different levels in the axial direction of the rotary anode. CONSTITUTION:A rotary anode 3 is provided with cylinders 16a and 16b which are made of a high permeability material and located at different levels in the axial direction. Inside the cylinders 16 and 16b, coils 34, 35 and 39 which cause the magnetic fluxes of annular permanent magnets 26 and 28, placed outside a vacuum case 1 corresponding to the cylinders 16a and 16b and attached to a magnetic pole 38, to pass through both a magnetic gap producing radially supporting force and magnetic gap producing axially supporting force arranged in series so as to obtain magnetic attraction and which regulate these magnetic fluxes, are installed. In addition, a driving motor 18 and displacement detectors 42 and 43 are installed, thereby constituting an X-ray tube device. As a result, the rotary anode 3 can be rotated without contact by magnetically supporting it axially and radially in a stable manner.

Description

DETAILED DESCRIPTION OF THE INVENTION [Technical Field of the Invention] The present invention relates to a rotating anode type X-ray tube device, and in particular, to a rotating anode type X-ray tube device in which the rotating anode side is completely non-contacted by a magnetic force supply source installed outside the vacuum vessel. This invention relates to improvements in X-ray layers and equipment that support the

[Technical background of the invention]

Structurally, X-ray tube devices are roughly divided into fixed anode types and rotating anode types. Among these, the rotating anode type has the advantage that since the anode is rotating, the effective area of the heat load applied to the anode can be increased to a large area, and this allows for a temporary large investment. ωh is getting better.

By the way, the rotating anode type XA, +l! In the pipe equipment,
In order to protect the anode from heavy loads, it is necessary to rotate the anode as fast as possible. As described above, when the anode is rotated at a high speed and the rotating part is supported by a mechanical bearing, the rotation speed is usually at most about 18,000 rotations per minute. Further, when a mechanical bearing is used, if an attempt is made to increase the rotational speed to a specified level within a time period of 0.degree. C., it not only requires a large amount of power, but also has the disadvantage that the life of the bearing is significantly shortened.

Furthermore, the noise caused by mechanical contact is large, making it unsuitable for use as a single base.

In order to solve this problem, recently it has been proposed to support the rotating anode in a completely non-contact manner using magnetic force supplied from outside the vacuum container.

In other words, in this magnetic bearing type installation FY, a cylinder made of a high magnetic permeability material is attached coaxially to the rotating anode, and the magnetic force necessary to apply a magnetic bearing force to the cylinder outside the vacuum vessel is supplied. Additional permanent magnets and electromagnets are arranged to support the cylinder in both the axial and radial directions in a completely non-contact manner.

In this way, the rotation 1 (Li 1fij type XIi, Iil 'i' + device 2-
1, the rotating part is in a so-called floating form within the vacuum container, so there is no loss of energy due to friction, and it is more permissible than that supported by a mechanical 1i1i1 support. The rotation speed can be significantly increased,
Moreover, the low oil pressure makes it easy to increase the engine speed in the ↓゛ rotation speed range in a short time. :1 /, -1! (There are no 4 words in the blank answer box, so 1j:W :F)
Jj's heart has no self and %'jm f? lI: Significantly increases the overall lifespan.

[Problems with background technology]

However, the conventional rotating persimmon type X-ray tube apparatus has the following problems. In other words, in order to support the rotating part by magnetic force, it is necessary to apply an axial magnetic bearing force and a radial magnetic bearing force, but with conventional devices,
The 418 bundles from Eikyoku are subjected to magnetic bearing force,
It is distributed and supplied to two parallel magnetic paths: an axial support magnetic path and a radial support magnetic path. For this reason, it is not possible to supply sufficient magnetic flux to the magnetic path with large magnetic resistance, and as a result, it is not possible to provide support with large magnetic rigidity in the axial direction or radial direction. There was a problem in that it was not possible to provide a bearing with low power consumption. It was a cone that could not sufficiently increase the magnetic rigidity and could sufficiently resist external forces in all directions.

[Purpose of the invention]

The present invention has been made in view of the above circumstances, and its purpose is to magnetically support the rotating anode side with large magnetic rigidity in the axial and radial directions using a permanent magnet as the main magnetic force supply source. An object of the present invention is to provide a rotating anode type X-ray tube device that can achieve stable magnetic support in all directions with low power consumption.

[Summary of the invention]

The X-ray tube device according to the present invention includes a cylindrical body made of a high magnetic permeability material, which is coaxial with the rotating anode and connected to the rotating anode in a vacuum container housing a cathode and a rotating anode therein. A plurality of are provided in the axial direction.

Then, an annular permanent magnet magnetized in the 11911 direction is disposed outside the vacuum container so as to fit into each of the cylindrical bodies, and is arranged in the same direction as the cylindrical bodies. Both of these annular permanent magnets
/+#f is magnetically connected to both Miia, and each has one of the 4P-shaped permanent stones.
The b'Q bundle coming out of lA is passed through the corresponding segmental body in one direction and guided along the path to return to the other segment, and in relation to the axial length of the cylinder, -f and the above. A radial magnetic attraction force is applied between the cylindrical body and the other side.
A pair of magnetic poles each exerting a magnetic attractive force with an axial component between the magnetic pole and the body are arranged 6゛, and furthermore, it is arranged so that Hk' passing through each of the above magnetic poles can be divided in the east. The coil is installed.

[Efficacy of invention]

When the above A':B composition is established, the magnetic flux emitted from each permanent imite is 〕f along the path from the permanent magnet to one magnetic pole to the corresponding f3tJ cylinder to the other magnetic pole to the permanent magnet. Therefore, the magnetic gap existing between one magnetic pole and the cylinder and the magnetic gap existing between the other magnetic pole and the cylinder are in series with the permanent gemstone. In this case, the magnetic flux passing through the two magnetic gaps is determined by the sum of the magnetic reluctances of the two magnetic gaps. As mentioned above, in relation to the axial length of the cylinder, a radial magnetic attractive force acts between one magnetic pole and the cylinder, and an axial magnetic attraction force acts between the other pole and the cylinder. Since the IJ port is set to act as a pneumatic attraction force with components, these radial magnetic attraction forces, that is, the radial support force, the magnetic attraction force in the 11J1 direction, and the support force in the 11J1 direction and the 11J1 direction support force. This means that unlike conventional devices, one side does not apply an extremely small force, and the force is balanced. Therefore, by effectively utilizing the magnetic flux emitted from the permanent magnet, the entire rotary anode side can be supported with large magnetic rigidity in both the circular direction and the radial direction. Therefore, unlike conventional devices, the power consumption of the magnetic bearing can be suppressed to a sufficiently small amount.

[Example after invention]

Embodiments of the present invention will be described below with reference to the drawings.

In FIG. 1, numeral 1 in the figure is a vacuum container formed in a cylindrical shape from elongated thorn material.
! y, 2 and B Kokoe are formed into a disk shape 7'? The rotating 1% pole 3 is mounted opposite to the upper direction in the figure.

Inside the cathode 2, a 7-fold filament is attached. The cathode 2 is provided airtightly penetrating the central portion of the earthen wall of the vacuum vessel 1 in the figure, and is fixed to the tip of the conductor 4.

Rotation 1 silicon electrode 3 has a peripheral part of its upper surface always connected to cathode 2.
The upper surface of the peripheral portion is formed into a tapered surface necessary to obtain the desired X-rays as it approaches the outer peripheral edge. And rotating positive Qi
3/Ii It is supported by a rotor 11 which will be described later.

Therefore, on the wall of the vacuum chamber I, the entire portion of the rotary anode 3 facing the lower surface of the rotary anode 3 in the drawing is
A recessed wall 5 recessed in the shape of a cylinder with a bottom is formed toward the side of the recessed wall 5, and furthermore, at a central portion of the recessed wall 5, which is called a bottom wall, the central portion is connected to the recessed wall. An inner recessed wall 6 is formed concentrically with the rotary anode 5 and recessed toward the side opposite to the rotating anode side. A cylindrical space 8 is formed between the recessed wall 5 and a cylindrical portion 7 located outside the recessed wall 5, and a rotor 1 is disposed within the inner recessed wall 6. is rotatably housed.

The rotor 11 is divided into two parts and arranged coaxially with the rotary anode 3, and the upper end in the figure is connected to the center of the lower surface of the rotary anode 3 in the figure, and the lower end 1 in the figure is connected to the inner recess. wall 6
The j-n11j+ auxiliary shaft 12 fitted into the cavity surrounded by
2 and is connected to [? 21 is composed of a cylindrical rotor main body 14 fitted into the cylindrical space 8. The rotor main body 14 has an outer diameter smaller than the inner diameter of the wall portion 7, A cylindrical support frame 15 made of a non-gun-like material or a paramagnetic material and having a dimension larger than the outer diameter of the recessed wall 5, and an axial direction 17Il:2 on the inner surface of this support frame 15. Annular τN11 formed in a step configuration
6IL, 16b, and a cylindrical body 12a made of a highly permeable main material mounted inside the sieves 16a, 16b.

17b, and a loaf 1g of a motor I8 fixed to, for example, the center of the outer peripheral surface of the support frame 15. In the inside ωi of the inside 1 recessed wall 6, there is an emergency new
1 pongee support 211L that mechanically supports the auxiliary shaft 12
, 21b are provided in a non-contact manner with respect to the auxiliary shaft 12 when on base. In addition, auxiliary + iQl + 72 1 n 1
A bottle 22 is protruded from the middle and lower end surface, and a contact plate 23 is provided at a position 16 opposite to the bottle 22. The binding is configured. And upper 6 pins 1. To the limit plate 23: i:, the so-called bottom 1 & of the inward I recessed wall 6 is airtightly 1. It is connected to the tip of a conductive rod 24 passed through N7.

Therefore, within the space 78 surrounded by the recessed wall 5, there is an annular magnetic pole material 25 extending from the top to the bottom in the drawing.
'12 in the 110 direction 'H': 2' J-shaped permanent Jo
The b stone 26, the annular magnetic pole material 27, the current permanent magnet 28 which is axially magnetized with the illustrated polarity, and the current magnetic magnet 29 are the same as +li.
It is very small and has a slightly thinner layer. The annular magnetic pole members 25 and 29 each have an annular portion 3θ, 3n having an outer diameter approximately equal to the outer diameter of the annular permanent magnet, and an annular portion 30,
,? The outer circumference of J? As shown in FIG. 2, a magnetic pole 32a integrally protrudes from +-1 with an opening angle of, for example, 90 degrees.

32 b + J 2c , 32d b and 33aL3
3b.

ssc, 5sa (however, 33b and 33d are not shown). The outer periphery of each magnetic pole is provided with radial stabilization f'! i control river carp 34a, 3
4b, 34c, 34d and 358°35b,
35c, 35d (however, 35b and ?5d
is not shown. ) is mounted on the sled. On the other hand, the annular magnetic pole material 27 has an inner and outer diameter equal to that of the annular permanent magnet 26.
A cylindrical portion 37 approximately equal to that of 28, and this cylindrical portion 37
The ring-shaped magnetic pole part 38 is integrally provided on the outer circumferential surface of the magnetic pole part 38. Axial stabilization control coils 39 a + 39 b are attached to the outer periphery of both ends of the cylindrical portion 37, respectively. Note that the cylindrical body 17a,
The axial length of 17b is the magnetic poles s 2a to 32 d (
33a to 33d) and the magnetic pole part 38:
, is set to be one length longer, and the cylinder bodies 17a and 1
7b is set to be slightly narrower than the axial thickness of the magnetic pole portion 38.

Therefore, on the outside of the wall 7 of the vacuum container 1, a bottomed cylindrical cylinder of non-magnetic or paramagnetic phase is provided with a gap 4o between the wall 7 and the wall 7. The body 41 has a diameter of 9fJ.The upper and lower parts of the gap 40, in the vicinity of the positions facing each of the magnetic poles 32a to 32d and 33a to 33d, are arranged as shown in FIG. A displacement detector 42 is provided for detecting the displacement of the rotor main body 14 in the axial direction and in the rectangular direction.
A displacement detector 43 for detecting the position is also provided. Further, the stator 20 of the motor 18 is inserted into the can 1i2 facing the rotor 19 in the space 40. The armature winding of the stator 2θ is connected to a motor drive power source (not shown), and each displacement detector 42 and 43
The output terminal of is connected to the rotor stabilization control device fα51. ”-allocation rotor stabilization flt1. Control device 511'i
, in fact, the radial stabilization is N and the axial stability f is 1.! Furthermore, both of them are located at the position 'jJl, and the positive stable north side ■11 method is set to the actual Lj1. The control method is comprised of one that performs the TM1 control method and one that performs the actual TM1 control method. Now, for the radial coverage fii1. One of the things that realizes the I control method is JllJ.
As shown in FIG. 1, the output of the preceding detector 42 located at the opposite position 1, i' is divided into two parts. i! Device 1
ζi52, signal amplification 1J position 53, power amplification device 54ν
Radial stabilization H11 which increases the position of 1ζt between the displacement detectors with this) e-war amplifier jr'j 54] Phase compensation and Ga1
In the case where the n-compensated signal is processed and the electric current υ1t is increased by 16° in the direction of adding 9I to the magnetic gap length, the magnetic gear horn is applied in the direction of adding m flux to jl = t, , t. bu 9iL for those who are located in the direction of decrease 6
I try to feed it in the opposite direction. The output of the axial displacement detector 43 is also processed using the same principle. Note that the first center 45 indicates an X-ray transmitting window.

With such a configuration, the magnetic flux emitted from the permanent magnet 26゜28 in Fig. 4 /I!It: ! The magnetic flux emitted from the permanent magnet 26 enters the end face of the cylinder 77a provided at the cylindrical body 77a from the magnetic pole bar 1538 of the annular bi, quadrupole 27. ld inside the cylinder 17a
After passing in the l direction, the magnetic poles 32h to 3 of the annular magnetic pole material 25
2d, and returns to the permanent magnet 26 at the bundled magnetic pole material 25'i-]7, passing through 1) 1≦. Therefore, between the magnetic pole part 38 and the end face part of the cylindrical body 17a, a magnetic attraction force including an axial component, that is, a one-way support force, acts, and the magnetic pole 32 a ~32 d and cylinder (4 = 27
A radial magnetic attraction force, that is, a radial support force acts between the a and the a. And lI le pole part 38
The magnetic gap between the cylindrical body 17g and the end face of the cylindrical body 17g and the magnetic gap between the magnetic poles 32a to 32d and the cylindrical body 17& are interposed in series with the permanent magnet 26VC. The force and the radial bearing force can be set to an appropriate value, since either one of them can become extremely small. The same applies to route X2. Therefore, the rotor 11 is supported by the magnetic flux supplied from the permanent magnets 26, 28 with a large supporting force both in the rotation axis direction and in the radial direction. Naoto (D (!: t=%) The rotor stabilization control device 51 described above causes the rotor to be placed in the shuttle where the magnetic bearing force balances the external force applied to the rotor.
4 or the current is adjusted.

Therefore, the trochanter 111rr,' is supported in a completely non-contact state and in a floating state due to the above-mentioned magnetic support force. When electrolytic corrosion is connected to the stator 2 (7) of the motor 18 in this state, the rotor J9 rotates, and the rotor 11 of the rotor 19 starts rotating accordingly.

Therefore, the rotating anode 3 also starts rotating u[]. Then, when the rotor 11 reaches the specified rotation speed, a signal is sent to the axial stabilization control coils 39a and 39b! By giving F and forcibly shifting the rotor position 16 in the axial direction, the positive vf
When the current introducing device f6 is activated, the rotating anode 3 and cathode 2
There is a large potential difference between , Yin = I'l1m, ? The 11□1 particles generated in this collision collide with the rotating anode 3, and X and J P are ejected as shown by the arrow P in FIG. Astride the L, the function of a rotating anode type X-ray tube device is exerted here. and,
X? tE4 non-irradiation coil 39 a, 39
At the same time, reduce the bias of the motor b. ], There is no attenuation of the rotation speed due to ゛, and if you adopt this Kabalance Ankyu "control method, the magnetic bearing force?: 1, is almost permanent 1
Due to the i'J stone 26.28, it is possible to constantly maintain the rotation with very little power consumption.Therefore, at any given time, the minimum waiting time can narrow down the X-rays.

In this way, the <ra flux emitted from the permanent magnet is made to pass in series through the magnetic gap for applying the radial bearing force and the magnetic gearing for applying the axial bearing force. Therefore, the magnetic flux emitted from the permanent magnet can be effectively used for radial support and axial support at an appropriate value, and as a result, the above-mentioned effects can be obtained.

It should be noted that the present invention is not limited to the above-mentioned embodiments. It's not something you do. That is, in the embodiment described above, one annular magnetic pole material 27 serves as two magnetic poles, but they may be provided separately. The rotor is housed in the inner part of the permanent magnet 26.28, but even if this relationship was reversed, there would be many problems. Although the cooling means is omitted in the embodiment, cooling may be provided from outside the vacuum container. Moreover, although 24 fl of magnetic bearing elements are provided in the axial direction, three or more sets may be provided.

[Brief explanation of the drawing]

FIG. 1 is a vertically sectional view of the main parts of an X-ray tube device according to an embodiment of the present invention, and FIG. Figure 3 shows the same device σ
1) 1 beat j diagram cut along the B-B thread in the 11th section 1 and seen in the direction of the arrow, Figure 4 shows the 41
It is a diagram for explaining the passage paths of eight bundles. 1... Vacuum vessel, 2... Cathode, 3... Rotating anode,
5... Concave wall, 11... Rotor, 14... Rotor body, J 7 a l I 7 b/f5 body, 18
...Motor, 26°28...Permanent magnet. 35a (35b, 35c, 35d)

Claims (1)

[Claims] A rotating anode type x in which a cathode and a rotating anode are placed in a vacuum container so as to be spaced apart and facing each other, and the rotating anode side is magnetically supported in a completely non-contact state by a magnetic force supply source provided outside the vacuum container. #i In the II tube device, a plurality of cylindrical bodies made of a high magnetic permeability material are provided and coaxially connected to the rotating anode in the axial direction, and a cylindrical body is arranged outside the vacuum vessel in a relationship to fit with the cylindrical bodies. , and the same number of JAJ-shaped permanent magnets as the cylindrical body magnetized in the axial direction, and magnetically connected to both ends of these annular permanent magnets, each corresponding to the magnetic flux emitted from one end of the annular permanent magnet. (in the axial direction) into the cylindrical body and guided along a path returning to the other end, and a radial magnetic attraction force is generated between one cylindrical body and the cylindrical body in relation to the axial length of the cylindrical body. and a pair of 71';j poles that apply a magnetic attraction force with an axial component between the other and the cylindrical body, respectively, and a pair of poles 71'; A rotating anode type X-ray tube device characterized by having an algebraic coil and a J4, I#fi.