JPS5960854A - Scanning electron microscope - Google Patents

Abstract

PURPOSE:To reduce the effect of external oscillation affecting an image by moving a sample while touching a sample holder and an objective lens. CONSTITUTION:A sample 3 is mounted on a sample bench 4 and the sample bench 4 is mounted on a sample holder 5 along with a spring receiver 6, coil spring 7, ball receiver 8, and ball 9. The holder 5 is mounted on an R mechanism 10 that rotates the sample 3 and a T mechanism 11 that inclines the R mechanism 10, Z mechanism 12 that moves it in the vertical direction, and Y mechanism 13 and X mechanism 14 that move it in the horizontal two directions are assembled sequentially. The lower surface (A) of an objective lens 2 is worked in a mirror surface and the ball 9 can smoothly be moved along the surface (A). When the sample 3 is moved in the two directions of the objective lens by means of the Z mechanism 12 while the sample 3 is being observed, the surface (A) and the ball 9 are made to touch and contact pressure can be obtained by the coil spring 7 and then a mirror body that generates an electron beam 1 and the sample 3 is integrated. Since the electron beam 1 and the sample 3 oscillate in the same status even if oscillation is applied externally, the effect of external oscillation on an image is small.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a scanning electron microscope, and particularly to a sample moving device that can reduce the influence of external vibrations on a sample.

In conventional scanning electron microscopes, the sample is moved horizontally, vertically, rotated, and tilted in a complex manner, and the sample holder and objective lens are separated.

However, in recent years, as the resolution of equipment has improved, external vibrations of a few microns cause tens of vibrations to the sample, which causes image disturbances such as jagged edges in the image. In order to eliminate this image disturbance, the structure of the sample moving device was strengthened to increase the stability of the sample in a stationary state, and the conditions of the vibration isolator installed between the sample moving device and the floor were changed, but As the frequency and amplitude become more complex, expensive sample equipment and vibration isolators are required.

An object of the present invention is to provide a sample moving device that can reduce the influence of external imaging on images.

The present invention aims to reduce the influence of external vibrations on an image by moving the sample with the sample holder in contact with the objective lens.

Examples of the present invention will be described below.

FIG. 1 shows an embodiment of the invention.

In the figure, an electron beam 1 is focused by an electron lens such as an objective lens 2 and irradiated onto a sample 3. The sample 3 is attached to a sample stage 4. The size of the sample stage 4 can be changed depending on the size of the sample 3. Sample stand 4
is attached to the sample holder 5. A spring receiver 6, a coil spring 7, a ball receiver 8, and a ball 9 made of a polymeric material are attached to the sample holder 5. This sample holder 5 is attached to an R mechanism 10 that rotates the sample 3, a T mechanism 11 that tilts the sample 3, a Z mechanism 12 that moves the sample vertically, and a Z mechanism 12 that moves the sample 3 in two horizontal directions. The X mechanism 13 and the X mechanism 14 are assembled in sequence. The A surface, which is the lower surface of the objective lens 2, is processed into a mirror surface so that the ball 9 can move smoothly along the A surface. When observing the sample 3, the Z mechanism 12 moves the sample 3 in the direction of the objective lens 2, so that the A surface and the ball 9 come into contact, and the coil spring 7 applies contact pressure, causing the sample 3 and the electrons to contact each other. The mirror body from which the beam 1 is generated is integral, and even if external vibrations are applied, the electron beam 1 and the sample 3 vibrate in almost the same state, so the influence on the image plane is small. Further, when moving the sample 3, since the ball 9 and the A side are in contact with each other, the sample 3 can be moved with high accuracy along the A side.

When observing a large sample, use the spring receiver 6, coil spring 7, ball receiver 8, and ball 9 assembled on the sample holder 5.
By removing it, you can observe a large sample.

According to one embodiment of the present invention, the sample 3 and the mirror body including the objective lens 2 can be integrated, which has the effect of minimizing the influence of external vibrations on the image. Moreover, since the structure is simple, it is very inexpensive.

Moreover, since a large sample can be observed by removing the spring receiver 6, coil spring 7, ball receiver 8, and ball 9 assembled on the sample holder 5, it is possible to provide a scanning electron microscope that does not limit the size of the sample.

Although a coil spring was used as the elastic body in this embodiment, the same effect can be obtained even if a plate spring or the like is used.

In addition, although the coil spring 7, the ball 9, etc. were incorporated into the sample holder 5 and the sample stage 3, the same effect can be obtained even if they are incorporated into the sample stage 3. .

As explained above, according to the present invention, the vibration of the sample caused by external vibration can be made to be in the same state as the vibration of the electron beam, so that the influence on the scanning electron microscope image is minimal, and even at high magnification, there is no interference. It is possible to observe an image without.

[Brief explanation of the drawing]

FIG. 1 is a sectional view showing an embodiment of the present invention. l...electron beam, 2.2.objective lens, 3...sample,
4... Sample stand, 5... Sample holder, 6... Spring holder, 7... Coil spring, 8... Ball holder, 9...
...ball, 10...shaku mechanism, 11...T mechanism, 1
2...2 mechanism, 13...Y mechanism, 14...X mechanism. $1 Figure

Claims (1)

[Claims] 1. In a scanning electron microscope that focuses an electron beam, scans it over a sample, and displays an image by modulating the brightness of a cathode ray tube using the signal emitted from the sample, a sample stage or sample on which the sample is mounted. A scanning electron microscope characterized by being provided with a mechanism that slides a specimen holder that holds a stage and the lower surface of an objective lens in contact with each other.