JPS5956216A - Production of flexible magnetic medium - Google Patents
Production of flexible magnetic mediumInfo
- Publication number
- JPS5956216A JPS5956216A JP57165814A JP16581482A JPS5956216A JP S5956216 A JPS5956216 A JP S5956216A JP 57165814 A JP57165814 A JP 57165814A JP 16581482 A JP16581482 A JP 16581482A JP S5956216 A JPS5956216 A JP S5956216A
- Authority
- JP
- Japan
- Prior art keywords
- film
- magnetic
- thin ferromagnetic
- flexible
- thin film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005291 magnetic effect Effects 0.000 title claims abstract description 34
- 238000004519 manufacturing process Methods 0.000 title claims description 6
- 230000005294 ferromagnetic effect Effects 0.000 claims abstract description 19
- 238000000034 method Methods 0.000 claims abstract description 15
- 239000000758 substrate Substances 0.000 claims abstract description 10
- 238000001771 vacuum deposition Methods 0.000 claims abstract description 4
- 239000010408 film Substances 0.000 claims description 28
- 239000010409 thin film Substances 0.000 claims description 17
- 239000000853 adhesive Substances 0.000 abstract description 8
- 230000001070 adhesive effect Effects 0.000 abstract description 7
- 238000007740 vapor deposition Methods 0.000 abstract description 5
- 239000012298 atmosphere Substances 0.000 abstract description 2
- 238000004544 sputter deposition Methods 0.000 description 7
- 239000010410 layer Substances 0.000 description 6
- 230000005415 magnetization Effects 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 229910000599 Cr alloy Inorganic materials 0.000 description 2
- 229920000139 polyethylene terephthalate Polymers 0.000 description 2
- 239000005020 polyethylene terephthalate Substances 0.000 description 2
- 229920001721 polyimide Polymers 0.000 description 2
- 229920002799 BoPET Polymers 0.000 description 1
- 229910000684 Cobalt-chrome Inorganic materials 0.000 description 1
- 239000004698 Polyethylene Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000010952 cobalt-chrome Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 239000003302 ferromagnetic material Substances 0.000 description 1
- 238000001659 ion-beam spectroscopy Methods 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 229910000889 permalloy Inorganic materials 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- -1 polyethylene terephthalate Polymers 0.000 description 1
- 238000001552 radio frequency sputter deposition Methods 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/62—Record carriers characterised by the selection of the material
- G11B5/64—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent
- G11B5/66—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent the record carriers consisting of several layers
Landscapes
- Magnetic Record Carriers (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
本発明は挿々の信号の記録に用いる磁気記録媒体として
用いられる町撓性不に５．”＝媒体の製造方法に関する
。DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to a flexible magnetic recording medium used for recording occasional signals.5. ”=Relating to a method of manufacturing a medium.
従来例の構成とその問題点
可撓性の薄い基体、たとえばプシスチノクスフイルムの
表面りこ強磁性体の薄層を設ｒｌ−Ｃなる磁気記録媒体
ヲ、１１、磁気テープ２フレキンプル磁気テイスク、磁
気カードのような形態て広く１史われている０強磁性体
薄層は、通常、強磁性体微粒子と有機物とから成る塗膜
である。このような磁気記録媒体の記録密度をあげるべ
く、従来の磁気記録媒体の面方向に磁化記録する方式（
いイクゆる長手記録）に対して、媒体面に垂直に磁化し
て記録する方式（垂ＩＵ記録）が提案さ；？Ｌ、そのだ
めの媒体や磁気ヘッドの技術開発がさかんに行なわれて
おり、とりわけ、垂直記録のフレキシブル磁気ディスク
の実現のために多大の力が注がれている。このような磁
気ディスクのひとつの有力な形は、３Ｑ〜７０μｍ厚の
ＰＥＴ（ポリエチレンテレフタレート）フィルムあるい
はポリイミドフィルムの両面に高透磁率の磁性薄膜と垂
直磁化薄膜とを１μｍ程度の厚みに重ねて設けて成るデ
ィスクである。Structure of the conventional example and its problems A thin layer of ferromagnetic material is applied to the surface of a flexible thin substrate such as psystinox film.11.Magnetic tape 2.Flexible magnetic tape 2.Flexible magnetic tape 2.Magnetic recording medium A thin ferromagnetic layer, which is widely used in the form of cards, is usually a coating consisting of fine ferromagnetic particles and an organic substance. In order to increase the recording density of such magnetic recording media, the conventional method of recording magnetization in the in-plane direction of magnetic recording media (
In contrast to conventional longitudinal recording, a method of recording by magnetizing perpendicular to the medium surface (perpendicular IU recording) was proposed. Technical development of secondary media and magnetic heads is being actively carried out, and in particular, great efforts are being made to realize perpendicular recording flexible magnetic disks. One popular form of such a magnetic disk is a PET (polyethylene terephthalate) film or polyimide film with a thickness of 3Q to 70 μm, with a high permeability magnetic thin film and a perpendicular magnetization thin film overlaid on both sides to a thickness of about 1 μm. It is a disc consisting of
薄膜の作り方は一般の薄膜製作法たとえばスパッタリン
グ法、電子ビーム法などが適用できるとされている。こ
のような方法によるティスフ製作における問題点は、薄
膜形成の際に生ずるカーリング（ディスクがそりかえる
こと）である。このカーリングは（ｊｆ撓件の薄い有機
フィルムの］−に金属材料を真空蒸着するときに一般に
生じ易いものであり、一度カー リングしてし−まうと
こ７１．をあとで嬌正して平担にすることは容易ではな
い、）前述のようにフィルムの両面にあわせて４回の真
空蒸着を行なうと有機物フ、ｆルムそのものの熱変形も
犬きく、得られるディスクは平面性が田なわ、１１．て
いて使用することは難しい。It is said that general thin film manufacturing methods such as sputtering method and electron beam method can be applied to make the thin film. A problem in producing disks using this method is curling (warping of the disk) that occurs during thin film formation. This curling generally tends to occur when a metal material is vacuum-deposited on a thin organic film (of a thin organic film), and once curled, it can be corrected and smoothed out later. (It is not easy to achieve this.) As mentioned above, if vacuum deposition is performed four times on both sides of the film, the organic film itself will undergo thermal deformation, and the resulting disk will have poor flatness. 11. It's difficult to use.
発明の目的
本発明は容易に平面性のよい可撓性磁気媒体を得る方法
を提供するものである。OBJECTS OF THE INVENTION The present invention provides a method for easily obtaining a flexible magnetic medium with good planarity.
発明の構成
本発明は可撓性基体の一方の１ｆ１１にｌｊｊ’ｌｉ磁
ｆ’ｌ： ｆ’、９膜をＡ空蒸着法Ｖこよって形成し、
この」：°）に１１つ成した片面磁気フィルムを強磁性
薄膜側が９１−１１１１１ Ｉｔ（、ｆ＋’ｒ： ｌｆ
’ｉするように２枚貼り合せることシこより両面１＋ｆ
＋、 ’７．（媒体とするものである。Structure of the Invention The present invention forms a ljj'li magnetic f'l: f', 9 film on one side 1f11 of a flexible substrate by A-vapor deposition method V,
The ferromagnetic thin film side is 91-11111 It(,f+'r: lf
Paste the two sheets together so that
+, '7. (It is used as a medium.
実施例の説明 以下本発明の一実施例を説明する。Description of examples An embodiment of the present invention will be described below.
第１図８のようにフィルム状の可撓性基体１の一方の面
に情報記録のための強磁性薄膜２を真空１図すに示すよ
うにこの片面磁気フィルムの２枚を強磁性薄膜２が外側
となるように接着剤で接着部３で張りあわせて両面磁気
フィルムとし、第１図Ｃのようにこの両面磁気フィルム
を円形に打ちぬいて磁気ディスクとするものである。第
２図は上記のような工程によって完成した可撓性磁気テ
ィスクの斜視図である。上記の工程において第１図すの
工程とＣの工程とは順序が入れかわってもよい。すなわ
ち、片面磁気フィルムをまず円形に打ちぬき、次いで２
枚の磁気フィルムを強磁性薄膜２が外側になるように接
着剤で接着部３て張りあわせても結果として乎面件のよ
いディスクが得られる。また」二記構成しこおいて、フ
ィルム状の＋ｊＪＪ充性基体性基体１Ｔ、ポリイはドな
とが１吏用でき、強磁性薄膜２はたとえば単層のＣｏ
−Ｃｒ合金膜あるいはパーマロイ膜とＣｏ −Ｃｒ合金
ｊ模とから成る２層膜でもよい。As shown in FIG. 1, a ferromagnetic thin film 2 for recording information is placed on one side of a film-like flexible substrate 1 under vacuum. The double-sided magnetic film is pasted together with an adhesive at the adhesive part 3 so that the outer side is on the outside, and the double-sided magnetic film is punched out in a circular shape as shown in FIG. 1C to form a magnetic disk. FIG. 2 is a perspective view of a flexible magnetic disk completed by the above process. In the above steps, the order of the step in FIG. 1 and the step in C may be reversed. That is, a single-sided magnetic film is first punched in a circular shape, and then 2
Even if two pieces of magnetic film are pasted together using an adhesive at the adhesive portion 3 with the ferromagnetic thin film 2 facing outward, a disk with good surface quality can be obtained as a result. In addition, in the structure described above, a film-like +jJJ replete substrate 1T, a polyimide film can be used, and the ferromagnetic thin film 2 can be made of, for example, a single layer of Co.
A two-layer film consisting of a -Cr alloy film or a permalloy film and a Co-Cr alloy film may also be used.
丑だ真空蒸着法はＲＦスパッタ法、ＯＣスパッタ法、Ｅ
Ｂ蒸着法、もしくはイオンビームスパッタ法などが使用
でき、特に限定されるー・きものではない。Ushida vacuum evaporation method is RF sputtering method, OC sputtering method, E
B vapor deposition method, ion beam sputtering method, etc. can be used, and there are no particular limitations on this method.
〈実施例１〉
厚さが３６１ｔｍ、巾１５０ｍｍの長尺のＰＥＴフィル
ムの片面にまずＣｏＴａ合金膜を約６００Ｑへの厚さに
形成した。使用した装置は通常の高周波スパッタリング
方式のもので、ＰＪ！：Ｔフィルムが２５ ｍｍ ／分
の速度で連続して送られる機構をもつ。<Example 1> First, a CoTa alloy film was formed to a thickness of about 600Q on one side of a long PET film having a thickness of 361tm and a width of 150mm. The equipment used was a normal high-frequency sputtering system, and PJ! : It has a mechanism in which the T film is continuously fed at a speed of 25 mm/min.
スパッタの条件はターゲットとフィルム吉の距離、７０
關、スパッタ電力２５０Ｗ、ターゲット寸法８インチφ
である。なお、ＰＥ、Ｔ〕ｆルノ、が熱により変形する
のを防止するためにＰＪＣＴ７１ルノ・は水冷されたヒ
ートンンカーの平面に密接（−２で動きながら膜がつけ
られる。続いてこ（／Ｉ Ｃｏ ’Ｉ’ ６膜のにＶこ
同じ方法によりＣｏＣｒ垂直磁化＋１１４を・約６００
０人の厚さにスパッタリングにより形成＋、 ｉｒ−、
、、スパッタの条件ｉｉ、ａ力が２００ＷであるＪ゛Ｊ
、夕１． ＆、、Ｌ Ｃｏ Ｔ ａ膜を作る時と同じで
ある。この」こうｐｉニし、てＩＩられたものはいわゆ
る垂直磁気記録媒体、１し、て１史用できるものである
。このものは金属膜が外ｆｕｌｌとなるヨウなカーリン
グを示す。その程度はこれを直径７２ｒｒａＲの円板状
に打ちぬいた時曲率半径が４０〜６０喘の大きさであっ
た。またひとつの而に上述の２層膜をつけたのち裏がえ
して他の面にも同じように２層膜をつけると、カーリン
グの大きさは緩和されたが波状のくせがついてしまう。The conditions for sputtering are the distance between the target and the film, 70
Regarding, sputtering power 250W, target size 8 inches φ
It is. In addition, in order to prevent PE, T]f Luno from deforming due to heat, a film is attached to the surface of the water-cooled heat tunnel car while moving closely at (-2). CoCr perpendicular magnetization +114 and about 600 by the same method as I'6 film
Formed by sputtering to a thickness of 0 +, ir-,
,, Sputtering conditions ii, a power is 200W J゛J
, Evening 1. &,, It is the same as when making L Co Ta film. The material described above is a so-called perpendicular magnetic recording medium, which can be used for a long time. This material exhibits severe curling in which the metal film becomes full on the outside. The radius of curvature was 40 to 60 mm when punched out into a disk shape with a diameter of 72 rraR. Furthermore, if you apply the above-mentioned two-layer film to one surface and then turn it over and apply the same two-layer film to the other side, the degree of curling is alleviated, but a wavy pattern remains.
そこで片面に強磁性２層薄膜をつけたフィルムを２枚、
薄膜が外側となるように接着剤を用いて張りあわせた。Therefore, two sheets of film with two ferromagnetic thin layers on one side,
They were pasted together using adhesive so that the thin film was on the outside.
こうして得られたものから直径７２ ｍｍのディスクを
打ちぬいた。このディスクはカーリングを示さず平坦で
あった。Discs with a diameter of 72 mm were punched out from the material thus obtained. The disc showed no curling and was flat.
これを２００〜４００ ｒ、 ｐ、 ｍの回転数をもつ
ティスフ駆動装置ｔｌ／こかけて磁気ヘッドを接触きぜ
て記録再生を行な・）だが何等の支障も起さなかった。This was run through a tisf drive device TL/ having a rotational speed of 200 to 400 r, p, m, and the magnetic head was brought into contact with the magnetic head for recording and reproducing. However, no trouble occurred.
発明の効果
このように本発明は片面に強磁性薄膜を形成したフィル
ムを強磁性薄膜が外側になるように２枚貼り合せたもの
であり強磁性薄膜を形成する際にカーリングがあっても
、平面性のよい磁気記録媒体が得られる。Effects of the Invention As described above, the present invention is made by laminating two films with a ferromagnetic thin film formed on one side so that the ferromagnetic thin film is on the outside, and even if there is curling when forming the ferromagnetic thin film, A magnetic recording medium with good planarity can be obtained.
さらに一つの基体の両面に強磁性薄膜を形成する場合よ
りも蒸着装置の機構が単純になる。Furthermore, the mechanism of the vapor deposition apparatus is simpler than in the case where ferromagnetic thin films are formed on both sides of one substrate.
丑だフィルムの接合は大気中で作業できるから生産性が
よい。Bonding of Ushida film can be done in the atmosphere, so it is highly productive.
第１図ａ、ｂ、ｃは本発明の可撓性磁気媒体の製造方法
における製造工程を順に示す断面図、第２図は本発明に
よりでき上った可撓性磁気ティスクの斜視図である。
１・・・・フィルム状の可撓性基体、２・・・・・強磁
性薄膜、３・・・・・・接着部。
代理人の氏名 弁理士 中 尾 敏 男 ほか１名第１
図
第２図FIGS. 1a, b, and c are cross-sectional views sequentially showing the manufacturing steps in the method for manufacturing a flexible magnetic medium of the present invention, and FIG. 2 is a perspective view of a flexible magnetic disk produced according to the present invention. . 1...Film-like flexible substrate, 2...Ferromagnetic thin film, 3...Adhesive part. Name of agent: Patent attorney Toshio Nakao and 1 other person No. 1
Figure 2
Claims (1)
強磁性薄膜を真空蒸着法によ・）で設け−ＣＣ片線磁気
フィルムし、この片面磁気７４ルムの２枚を強磁性薄膜
が外側となるように張りあわ【Ｆて両面磁気フィルムと
する工程を有すること全１１５へとする可撓性磁気媒体
の製造方法０[Claims] A ferromagnetic thin film for information recording is provided on one side of a film-like flexible substrate by a vacuum evaporation method. A method for manufacturing a flexible magnetic medium including the step of pasting the sheets together with the ferromagnetic thin film facing outward to form a double-sided magnetic film.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57165814A JPS5956216A (en) | 1982-09-22 | 1982-09-22 | Production of flexible magnetic medium |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57165814A JPS5956216A (en) | 1982-09-22 | 1982-09-22 | Production of flexible magnetic medium |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5956216A true JPS5956216A (en) | 1984-03-31 |
Family
ID=15819499
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57165814A Pending JPS5956216A (en) | 1982-09-22 | 1982-09-22 | Production of flexible magnetic medium |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5956216A (en) |
-
1982
- 1982-09-22 JP JP57165814A patent/JPS5956216A/en active Pending
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