JP3044850B2 - Magnetic recording medium and method of manufacturing the same - Google Patents

Magnetic recording medium and method of manufacturing the same

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Publication number
JP3044850B2
JP3044850B2 JP3200604A JP20060491A JP3044850B2 JP 3044850 B2 JP3044850 B2 JP 3044850B2 JP 3200604 A JP3200604 A JP 3200604A JP 20060491 A JP20060491 A JP 20060491A JP 3044850 B2 JP3044850 B2 JP 3044850B2
Authority
JP
Japan
Prior art keywords
magnetic layer
magnetic
substrate
recording medium
degrees
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP3200604A
Other languages
Japanese (ja)
Other versions
JPH0546968A (en
Inventor
和義 本田
可治 前澤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Corp
Panasonic Holdings Corp
Original Assignee
Panasonic Corp
Matsushita Electric Industrial Co Ltd
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Filing date
Publication date
Application filed by Panasonic Corp, Matsushita Electric Industrial Co Ltd filed Critical Panasonic Corp
Priority to JP3200604A priority Critical patent/JP3044850B2/en
Publication of JPH0546968A publication Critical patent/JPH0546968A/en
Application granted granted Critical
Publication of JP3044850B2 publication Critical patent/JP3044850B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Compositions Of Macromolecular Compounds (AREA)
  • Magnetic Record Carriers (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【産業上の利用分野】本発明は磁気記録媒体とその製造
方法に関するものである。
The present invention relates to a magnetic recording medium and a method for manufacturing the same.

【0002】[0002]

【従来の技術】情報化社会の進展に伴い情報記録担体の
大容量化,高密度化が進められている。磁気テープの分
野においても記録媒体の高密度化を目指した研究開発が
盛んであり、これに応える薄膜媒体がいくつか提案され
ている。超高密度磁気記録材料としてはCo−Cr等が
広く研究されており、Co−Cr薄膜(あるいはCo−
Ni−Cr薄膜)等を用いた研究開発が行われている。
またCo−Cr薄膜の上に磁性を有するCo−O(ある
いはCo−Ni−O薄膜)を積層した記録媒体(以下2
層媒体と略す)によって、記録密度特性と実用耐久性の
両立を目指した研究もされている。
2. Description of the Related Art With the progress of the information society, the capacity and density of information recording media have been increased. In the field of magnetic tapes as well, research and development aimed at increasing the density of recording media have been actively pursued, and several thin-film media have been proposed to meet this requirement. Co-Cr and the like have been widely studied as ultra-high density magnetic recording materials, and Co-Cr thin films (or Co-Cr thin films) have been studied.
Research and development using Ni-Cr thin films) have been conducted.
In addition, a recording medium (hereinafter referred to as 2) in which a magnetic Co—O (or Co—Ni—O thin film) is laminated on a Co—Cr thin film.
Research has been conducted with the aim of achieving both recording density characteristics and practical durability by using a layered medium).

【0003】また、これらの薄膜磁気記録媒体を製造す
る方法としては、連続巻き取り真空蒸着法が特にその生
産性において他を凌いでおり、現実的量産方法として非
常に有力である。すなわち長尺の高分子基板が円筒状キ
ャンの周面に沿って走行中に磁性層を電子ビーム蒸着す
ることによって磁気テープの量産ができる。例えばCo
−Cr磁性薄膜の形成においてはCo−Crを蒸発材料
として用いればよく、また、Co−O薄膜の形成におい
ては酸素雰囲気にてCoを蒸発させればよい。
As a method for manufacturing these thin-film magnetic recording media, a continuous winding vacuum evaporation method is superior to other methods, particularly in terms of productivity, and is very effective as a practical mass production method. In other words, the magnetic tape can be mass-produced by e-beam evaporation of the magnetic layer while the long polymer substrate runs along the peripheral surface of the cylindrical can. For example, Co
In forming the -Cr magnetic thin film, Co-Cr may be used as an evaporation material, and in forming the Co-O thin film, Co may be evaporated in an oxygen atmosphere.

【0004】[0004]

【発明が解決しようとする課題】しかしながら上記従来
の磁気記録媒体およびその製造方法では媒体の特性はも
ちろんのこと、材料コストの点で解決すべき大きな課題
があった。その材料コストに占める高分子基板の割合は
大きく、安価な基板材料が求められていた。真空蒸着法
で形成するCo−Cr系の磁気記録媒体においてはこれ
までポリアミドやポリイミド基板が用いられていたが、
これらの超耐熱性高分子基板は一般的には高価な材料で
あり、比較的安価なポリエチレンナフタレート基板や、
さらに安価なポリエチレンテレフタレート基板を用いて
も十分な磁気特性が得られるような媒体設計を行うこと
が必要であった。
However, the above-described conventional magnetic recording medium and the method of manufacturing the same have a great problem to be solved in terms of material cost as well as medium characteristics. The ratio of the polymer substrate to the material cost is large, and an inexpensive substrate material has been required. In the Co-Cr-based magnetic recording media formed by the vacuum deposition method, polyamide or polyimide substrates have been used so far,
These super heat resistant polymer substrates are generally expensive materials, and relatively inexpensive polyethylene naphthalate substrates,
Further, it was necessary to design a medium such that sufficient magnetic properties could be obtained even when an inexpensive polyethylene terephthalate substrate was used.

【0005】本発明は上記課題を解決するものであり、
低い材料コストで記録再生特性に優れた磁気記録媒体お
よびその製造方法を提供することを目的とする。
[0005] The present invention is to solve the above problems,
An object of the present invention is to provide a magnetic recording medium excellent in recording / reproducing characteristics at a low material cost and a method for manufacturing the same.

【0006】[0006]

【課題を解決するための手段】上記目的を達成するため
に本発明は、ポリエチレンテレフタレートよりなる基板
上に直接または下地層を介して、基板側から順にCoと
CrまたはCoとCrとNiを主成分として含む第1の
磁性層と、CoとOまたはCoとNiとOを主成分とし
て含む第2の磁性層とを有し、第1の磁性層の磁気異方
性が膜面内方向から15度以下5度以上にあることを特
徴とするものであり、またポリエチレンナフタレートよ
りなる基板上に直接または下地層を介して、基板側から
順にCoとCrまたはCoとCrとNiを主成分として
含む第1の磁性層と、CoとOまたはCoとNiとOを
主成分として含む第2の磁性層とを有し、第1の磁性層
の磁気異方性が膜面内方向から30度以下15度以上に
あることを特徴とするものである。
In order to achieve the above-mentioned object, the present invention provides a method for producing Co and Cr or Co, Cr and Ni on a substrate made of polyethylene terephthalate directly or through an underlayer in order from the substrate side. A first magnetic layer containing as a component, and a second magnetic layer containing Co and O or Co, Ni, and O as main components, wherein the magnetic anisotropy of the first magnetic layer is from the in-plane direction of the film. It is characterized in that it is 15 degrees or less and 5 degrees or more, and Co and Cr or Co, Cr and Ni as main components on the substrate made of polyethylene naphthalate directly or through an underlayer from the substrate side. And a second magnetic layer containing Co and O or Co, Ni and O as main components, and the first magnetic layer has a magnetic anisotropy of 30 from the in-plane direction of the film. Less than 15 degrees or more Is shall.

【0007】[0007]

【作用】したがって本発明によれば、Co−Crまたは
Co−Cr−Niからなる第1の磁性層の異方性を膜面
方向に傾斜させることにより、記録再生時の効率を上昇
させることができる。しかし第1の磁性層を形成する柱
状粒間の分離が不十分であると保磁力が低下し、再生ノ
イズは増加する。保磁力の値は蒸気入射角ならびに基板
温度によって左右され、同じ保磁力を得るためには基板
温度が高いほど、膜面法線方向に近い入射角成分を取り
込むことができ、媒体耐久性、及び生産性の観点から有
利である。また第1の磁性層の異方性を過度に膜面方向
に傾斜させると短波長領域での記録再生特性に悪影響を
与えるので適度な傾斜で形成させることが必要である。
使用する基板の耐熱温度に合わせて低ノイズのための保
磁力が確保できる範囲で第1の磁性層の異方性を最適傾
斜に近付けることにより、低コスト基板を用いた高密度
磁気記録媒体を得ることができる。
According to the present invention, the anisotropy of the first magnetic layer made of Co-Cr or Co-Cr-Ni can be inclined in the direction of the film surface to increase the recording / reproducing efficiency. it can. However, if the separation between the columnar grains forming the first magnetic layer is insufficient, the coercive force decreases and the reproduction noise increases. The value of the coercive force depends on the vapor incident angle and the substrate temperature.In order to obtain the same coercive force, the higher the substrate temperature, the more the incident angle component closer to the normal direction of the film surface can be taken in. This is advantageous from the viewpoint of productivity. If the anisotropy of the first magnetic layer is excessively inclined in the direction of the film surface, the recording / reproducing characteristics in a short wavelength region are adversely affected. Therefore, it is necessary to form the first magnetic layer with an appropriate inclination.
A high-density magnetic recording medium using a low-cost substrate can be obtained by making the anisotropy of the first magnetic layer close to the optimum inclination within a range where the coercive force for low noise can be secured according to the heat resistant temperature of the substrate to be used. Obtainable.

【0008】[0008]

【実施例】以下、本発明の一実施例について図面を用い
て説明する。図1は本発明の一実施例における磁気記録
媒体の部分断面図であり、図に示すように高分子材料か
らなる基板1に電子ビーム蒸着法によって、第1の磁性
層2として飽和磁化550emu/ccのCo−Cr層を形
成した。第1の磁性層2の膜厚は120nmである。つづ
いて電子ビーム蒸着法によって、第2の磁性層3として
膜厚60nmのCo−O層を形成した。第2の磁性層3の
飽和磁化もまた550emu/ccである。これをテープ状
に裁断してリングヘッドで記録再生特性を評価した。媒
体とヘッドとの相対速度は3.8m/sとした。以上の
条件でキャリア(C)及びノイズ(N)レベルの測定を
行った。測定バンド幅は30kHzとした。また保磁力を
振動試料磁力計によって測定し、磁気異方性の方向をト
ルク計を用いて測定した。
An embodiment of the present invention will be described below with reference to the drawings. FIG. 1 is a partial cross-sectional view of a magnetic recording medium according to an embodiment of the present invention. As shown in FIG. 1, a saturated magnetization 550 emu / m is formed as a first magnetic layer 2 on a substrate 1 made of a polymer material by electron beam evaporation. A cc Co-Cr layer was formed. The thickness of the first magnetic layer 2 is 120 nm. Subsequently, a Co—O layer having a thickness of 60 nm was formed as the second magnetic layer 3 by an electron beam evaporation method. The saturation magnetization of the second magnetic layer 3 is also 550 emu / cc. This was cut into a tape shape, and the recording / reproducing characteristics were evaluated using a ring head. The relative speed between the medium and the head was 3.8 m / s. The carrier (C) and noise (N) levels were measured under the above conditions. The measurement bandwidth was 30 kHz. The coercive force was measured using a vibrating sample magnetometer, and the direction of magnetic anisotropy was measured using a torque meter.

【0009】まず、基板1としてポリエチレンテレフタ
レートを用いた場合について述べる。初期入射角を90
度〜40度まで変化させ、終期入射角を20度に固定し
て第1の磁性層2としてCo−Cr層を形成した。この
場合第1の磁性層2の磁気異方性は図2に示すθにおい
て5〜15度の範囲とした。キャン温度を−20℃〜7
0℃まで変化させて作製し、膜の保磁力と磁気異方性の
方向を測定した。その結果を図3に示す。キャン温度が
60℃では蒸着時に基板1の熱損傷が起き、膜表面が粗
面になって安定に製膜することができなかった。またキ
ャン温度が70℃ではさらに基板1の熱損傷はひどく、
製膜は不可能であった。また、図3からわかるように初
期入射角が60度以下では保磁力は200Oe以下であ
るが、70度以上では400Oe以上の保磁力が得られ
る。また保磁力の小さい範囲では磁気異方性の方向はほ
ぼ膜面内方向であるのに対し、保磁力400Oe以上で
の磁気異方性の方向は膜面内方向から5度〜15度の範
囲にある。
First, the case where polyethylene terephthalate is used as the substrate 1 will be described. Initial incidence angle is 90
The Co-Cr layer was formed as the first magnetic layer 2 with the final incident angle fixed at 20 degrees. In this case, the magnetic anisotropy of the first magnetic layer 2 was in the range of 5 to 15 degrees at θ shown in FIG. Can temperature from -20 ° C to 7
The film was manufactured by changing the temperature to 0 ° C., and the coercive force and the direction of magnetic anisotropy of the film were measured. The result is shown in FIG. When the can temperature was 60 ° C., thermal damage of the substrate 1 occurred during the vapor deposition, and the film surface became rough and the film could not be stably formed. Further, when the can temperature is 70 ° C., the thermal damage of the substrate 1 is further severe,
Film formation was not possible. Further, as can be seen from FIG. 3, the coercive force is 200 Oe or less when the initial incident angle is 60 degrees or less, but the coercive force is 400 Oe or more when the initial incident angle is 70 degrees or more. In the range of small coercive force, the direction of magnetic anisotropy is almost in the in-plane direction. On the other hand, when the coercive force is 400 Oe or more, the direction of magnetic anisotropy is in the range of 5 ° to 15 ° from the in-plane direction of the film. It is in.

【0010】次に、基板1としてポリエチレンナフタレ
ートを用いた場合について述べる。初期入射角を90度
〜30度まで変化させ、終期入射角を20度に固定して
第1の磁性層2としてCo−Cr層を形成した。この場
合第1の磁性層2の磁気異方性は図2に示すθにおいて
15〜30度の範囲とした。キャン温度を50℃〜13
0℃まで変化させて作製し、膜の保磁力と磁気異方性の
方向を測定した。その結果を図4に示す。キャン温度が
120℃では蒸着時に基板1の熱損傷が起き、膜表面が
粗面になって安定に製膜することができなかった。また
キャン温度が130℃ではさらに基板1の熱損傷はひど
く、製膜は不可能であった。また、図4からわかるよう
に初期入射角が40度以下ではキャン温度を110℃ま
で上げても保磁力は300Oe以下であるが、初期入射
角を50度以上とすれば、キャン温度が110℃以下で
あっても400Oe以上の保磁力が得られる。また保磁
力400Oe以上での磁気異方性の方向は膜面内方向か
ら5度〜30度の範囲にあり、特に初期入射角が70度
〜50度の範囲ではポリエチレンテレフタレート基板で
は得られなかった膜面内方向から15度以上傾いた異方
性を得ることができる。
Next, a case where polyethylene naphthalate is used as the substrate 1 will be described. The Co-Cr layer was formed as the first magnetic layer 2 by changing the initial incident angle from 90 degrees to 30 degrees and fixing the final incident angle to 20 degrees. In this case, the magnetic anisotropy of the first magnetic layer 2 was in the range of 15 to 30 degrees at θ shown in FIG. Can temperature is 50 ℃ ~ 13
The film was manufactured by changing the temperature to 0 ° C., and the coercive force and the direction of magnetic anisotropy of the film were measured. FIG. 4 shows the results. When the can temperature was 120 ° C., thermal damage to the substrate 1 occurred during the vapor deposition, and the film surface became rough and a stable film could not be formed. When the can temperature was 130 ° C., the substrate 1 was further severely damaged by heat, and film formation was impossible. As can be seen from FIG. 4, the coercive force is 300 Oe or less even when the can temperature is increased to 110 ° C. when the initial incident angle is 40 ° or less, but when the initial incident angle is 50 ° or more, the can temperature becomes 110 ° C. A coercive force of 400 Oe or more can be obtained even if it is less than or equal to. Also, the direction of magnetic anisotropy at a coercive force of 400 Oe or more was in the range of 5 to 30 degrees from the in-plane direction of the film, and especially when the initial incident angle was in the range of 70 to 50 degrees, it could not be obtained with the polyethylene terephthalate substrate. Anisotropy inclined by 15 degrees or more from the in-plane direction of the film can be obtained.

【0011】図5はポリエチレンテレフタレートよりな
る基板1およびポリエチレンナフタレートよりなる基板
1をそれぞれ用いた場合の、第1の磁性層2の磁気異方
性の方向と、磁気記録媒体の電磁変換特性の関係を示す
図である。記録波長は1.5μmとした。なお、図5に
おいて、白丸および白三角はポリエチレンテレフタレー
トよりなる基板1を用いた場合、黒丸および黒三角はポ
リエチレンナフタレートよりなる基板1をそれぞれ用い
た場合の結果を示すものである。図からわかるように
で示したキャリア(C)レベルは異方性磁界が膜面内方
向から15度〜30度の間で再高値をとる。一方、三角
で示したノイズ(N)レベルは異方性磁界が膜面から5
度以上傾いた範囲ではほぼ一定で、保磁力に依存する。
異方性磁界がほぼ膜面内のときにノイズが高いのは柱状
粒界での磁気的分離度が小さく、磁壁モードの磁化過程
をとるためではないかと思われ、膜面内方向から10度
前後異方性磁界が傾いた場合とは磁化過程にかなりの隔
たりがあることを示唆している。
FIG. 5 shows the direction of the magnetic anisotropy of the first magnetic layer 2 and the electromagnetic conversion characteristics of the magnetic recording medium when the substrate 1 made of polyethylene terephthalate and the substrate 1 made of polyethylene naphthalate are used, respectively. It is a figure showing a relation. The recording wavelength was 1.5 μm. In FIG. 5, white circles and white triangles indicate the results when the substrate 1 made of polyethylene terephthalate was used, and black circles and black triangles indicate the results when the substrate 1 made of polyethylene naphthalate was used. Round As can be seen from FIG.
The carrier (C) level shown by (1) takes a re-high value when the anisotropic magnetic field is between 15 and 30 degrees from the in-plane direction of the film. Meanwhile, triangle
The noise (N) level indicated by indicates that the anisotropic magnetic field is 5
It is almost constant in a range inclined more than a degree and depends on the coercive force.
It is considered that the reason why the noise is high when the anisotropic magnetic field is almost in the film plane is that the magnetic separation at the columnar grain boundaries is small and the magnetization process of the domain wall mode is taken, and the noise is 10 degrees from the in-plane direction of the film. This suggests that there is a considerable gap in the magnetization process from the case where the anisotropic magnetic field is tilted.

【0012】このように上記実施例によれば、ポリエチ
レンテレフタレートよりなる基板1上に直接あるいは下
地層を介して基板1側から順に形成したCoとCrを主
成分として含む第1の磁性層2と、CoとOを主成分と
して含む第2の磁性層3とを有する磁気記録媒体の製造
工程において、第1の磁性層2の磁気異方性を膜面内方
向から15度以下かつ5度以上としているため、またポ
リエチレンナフタレートよりなる基板1上に直接あるい
は下地層を介して基板側から順に形成したCoとCrを
主成分として含む第1の磁性層2と、CoとOを主成分
として含む第2の磁性層3とを有する磁気記録媒体の製
造工程において、第1の磁性層2の磁気異方性を膜面内
方向から30度以下かつ15度以上としているために優
れた記録再生特性を有する磁気記録媒体を、ポリアミ
ド,ポリイミド等の基板よりも安価に得ることができ
る。また図6は本発明の製造方法を実施するために用い
る装置の概要を示すものであり、図に示すように真空中
で送り軸4より長尺のポリエチレンテレフタレートより
なる基板1を円筒状のキャン5の周面に沿って走行させ
ながら真空蒸着法によって基板1上に直接あるいは下地
層を介して電子ビーム蒸発源6よりCoとCrを主成分
として含む第1の磁性層2およびCoとOを主成分とし
て含む第2の磁性層3を図1に示すように順次形成し、
さらに上記製造方法において、第1の磁性層2を形成す
る際の初期入射蒸気流と基板1の法線のなす角を90度
〜70度の範囲内とし、かつ円筒状のキャン5の周面温
度を50℃以下とすることにより、また同じく真空中で
送り軸4より長尺のポリエチレンナフタレートよりなる
基板1を円筒状のキャン5の周面に沿って走行させなが
ら真空蒸着法によって基板1上に直接あるいは下地層を
介して電子ビーム蒸発源6よりCoとCrを主成分とし
て含む第1の磁性層2およびCoとOを主成分として含
む第2の磁性層3を同様に図1に示すように順次形成
し、そのとき第1の磁性層2を形成する際の初期入射蒸
気流と基板1の法線のなす角を70度〜50度の範囲内
とし、かつ円筒状のキャン5の周面温度を60℃〜11
0℃の範囲内とすることによって優れた記録再生特性を
有する磁気記録媒体を製造することができる。
As described above, according to the above embodiment, the first magnetic layer 2 containing Co and Cr as main components formed directly on the substrate 1 made of polyethylene terephthalate or in order from the substrate 1 side via the underlayer is provided. In the manufacturing process of the magnetic recording medium having the second magnetic layer 3 containing Co and O as main components, the magnetic anisotropy of the first magnetic layer 2 is set to 15 degrees or less and 5 degrees or more from the in-plane direction of the film. Therefore, a first magnetic layer 2 containing Co and Cr as main components formed directly on the substrate 1 made of polyethylene naphthalate or in order from the substrate side via an underlayer, and Co and O as main components In the manufacturing process of the magnetic recording medium having the second magnetic layer 3 including the magnetic layer, the magnetic anisotropy of the first magnetic layer 2 is set to 30 degrees or less and 15 degrees or more from the in-plane direction of the film, so that excellent recording / reproduction is achieved. Characteristic A magnetic recording medium having, polyamides, can be obtained at low cost than the substrate such as polyimide. FIG. 6 shows an outline of an apparatus used for carrying out the manufacturing method of the present invention. As shown in FIG. 6, a substrate 1 made of polyethylene terephthalate, which is longer than a feed shaft 4 in a vacuum, is mounted on a cylindrical can. The first magnetic layer 2 containing Co and Cr as main components and Co and O from the electron beam evaporation source 6 are deposited on the substrate 1 directly or through an underlayer by a vacuum evaporation method while running along the peripheral surface of 5. A second magnetic layer 3 containing as a main component is sequentially formed as shown in FIG.
Further, in the above-described manufacturing method, the angle between the initial incident vapor flow when forming the first magnetic layer 2 and the normal line of the substrate 1 is in the range of 90 to 70 degrees, and the peripheral surface of the cylindrical can 5 is formed. The substrate 1 made of polyethylene naphthalate, which is longer than the feed shaft 4 in a vacuum, is moved along the peripheral surface of the cylindrical can 5 by setting the temperature to 50 ° C. or lower, and the substrate 1 The first magnetic layer 2 containing Co and Cr as the main components and the second magnetic layer 3 containing Co and O as the main components are similarly shown in FIG. 1 from the electron beam evaporation source 6 directly or via the underlayer. As shown in the figure, the angle between the initial incident vapor flow and the normal line of the substrate 1 when forming the first magnetic layer 2 is in the range of 70 to 50 degrees, and the cylindrical can 5 is formed. The peripheral surface temperature of
By setting the temperature within the range of 0 ° C., a magnetic recording medium having excellent recording / reproducing characteristics can be manufactured.

【0013】なお、図6において7は基板1のガイドロ
ール、8は巻取り軸、9は電子ビーム蒸発源6から出る
蒸気流が不要な部分へ回り込むのを防止するためのマス
ク、10は真空槽、11は排気系である。
In FIG. 6, 7 is a guide roll for the substrate 1, 8 is a take-up shaft, 9 is a mask for preventing the vapor flow from the electron beam evaporation source 6 from going to unnecessary parts, and 10 is a vacuum. The tank 11 is an exhaust system.

【0014】また実施例としては第1の磁性層2として
Co−Crを用いた場合について述べてきたが、Co−
Ni−Crを用いた場合や、第2の磁性層3としてCo
−Oの代わりにCo−Ni−Oを用いた場合にも同様の
効果が得られた。
In the embodiment, the case where Co--Cr is used for the first magnetic layer 2 has been described.
When Ni—Cr is used, or when the second magnetic layer 3 is made of Co
Similar effects were obtained when Co-Ni-O was used instead of -O.

【0015】さらに本発明における、第2の磁性層3と
して、同じ材料を多層化したものを用いることもでき
る。また、第1の磁性層はポリエチレンテレフタレート
やポリエチレンナフタレートからなる基板の上に直接形
成せずに、下地層を介して形成しても良い。即ち、基板
の上に例えばCoの非磁性酸化物層やCo−Crの非磁
性層を予め真空蒸着法などによって形成しておき、これ
らの非磁性層の上に第1の磁性層を形成しても良い。こ
れらの非磁性層は磁性層形成時に基板から出るガスを抑
制するので、基板の含水状態のばらつきなどに左右され
ず、記録再生特性の製品ばらつきを小さくすることがで
きるなどの利点がある。非磁性下地層の厚みは例えば3
〜30nmである。
In the present invention, the second magnetic layer 3 may be formed of the same material in multiple layers. The first magnetic layer is made of polyethylene terephthalate.
Directly on a substrate made of polyethylene or polyethylene naphthalate
Instead, it may be formed via an underlayer. That is, the substrate
A non-magnetic oxide layer of Co or a non-magnetic layer of Co-Cr
The conductive layer is formed in advance by vacuum evaporation, etc.
A first magnetic layer may be formed on these nonmagnetic layers. This
These non-magnetic layers suppress the gas emitted from the substrate when forming the magnetic layer.
Control because of the variation of the moisture content of the substrate.
Product variation in recording and reproduction characteristics can be reduced.
There are advantages such as cutting. The thickness of the nonmagnetic underlayer is, for example, 3
3030 nm.

【0016】本発明では磁気テープ形状の磁気記録媒体
の実施例について述べたが、ディスク形状の磁気記録媒
体についても適用できるのはいうまでもない。
In the present invention, the embodiment of the magnetic recording medium in the form of a magnetic tape has been described, but it goes without saying that the present invention can be applied to a magnetic recording medium in the form of a disk.

【0017】[0017]

【発明の効果】上記実施例より明らかなように、本発明
の磁気記録媒体およびその製造方法はポリエチレンテレ
フタレートまたはポリエチレンナフタレートよりなる基
板上にCoとCrあるいはCoとCrとNiを主成分と
する第1の磁性層と、CoとOあるいはCoとNiとO
とを主成分とする第2の磁性層とを一定範囲の入射角で
形成していることにより、低い材料コストで記録再生特
性に優れた磁気記録媒体を製造することができるもので
ある。
As is apparent from the above embodiments, the magnetic recording medium and the method of manufacturing the same according to the present invention have Co and Cr or Co, Cr and Ni as main components on a substrate made of polyethylene terephthalate or polyethylene naphthalate. First magnetic layer, Co and O or Co, Ni and O
By forming the second magnetic layer whose main component is an incident angle within a certain range, a magnetic recording medium having excellent recording and reproducing characteristics can be manufactured at low material cost.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の一実施例における磁気記録媒体の部分
断面図
FIG. 1 is a partial sectional view of a magnetic recording medium according to an embodiment of the present invention.

【図2】同磁気記録媒体において第1の磁性層の磁気異
方性の角度を説明する図
FIG. 2 is a view for explaining an angle of magnetic anisotropy of a first magnetic layer in the magnetic recording medium.

【図3】同磁気記録媒体においてポリエチレンテレフタ
レートよりなる基板を用いた場合の初期入射角における
保磁力と磁気異方性の方向とに関する基板温度依存性を
示す特性図
FIG. 3 is a characteristic diagram showing substrate temperature dependence of coercive force and direction of magnetic anisotropy at an initial incident angle when a substrate made of polyethylene terephthalate is used in the magnetic recording medium.

【図4】同じくポリエチレンナフタレートよりなる基板
を用いた場合の初期入射角における保磁力と磁気異方性
の方向とに関する基板温度依存性を示す特性図
FIG. 4 is a characteristic diagram showing substrate temperature dependence of coercive force and direction of magnetic anisotropy at an initial incident angle when a substrate made of polyethylene naphthalate is used.

【図5】本発明の一実施例においてポリエチレンテレフ
タレートよりなる基板またはポリエチレンナフタレート
よりなる基板を用いた場合の、第1の磁性層の磁気異方
性の方向と、磁気記録媒体の電磁変換特性の関係を示す
特性図
FIG. 5 shows the direction of the magnetic anisotropy of the first magnetic layer and the magnetic recording medium when a substrate made of polyethylene terephthalate or a substrate made of polyethylene naphthalate is used in one embodiment of the present invention. Diagram showing the relationship between electromagnetic conversion characteristics

【図6】本発明の一実施例における磁気記録媒体の製造
方法を実施するために用いる装置の概要図
FIG. 6 is a schematic diagram of an apparatus used to carry out a method for manufacturing a magnetic recording medium according to an embodiment of the present invention.

【符号の説明】[Explanation of symbols]

1 基板 2 第1の磁性層 3 第2の磁性層 DESCRIPTION OF SYMBOLS 1 Substrate 2 1st magnetic layer 3 2nd magnetic layer

───────────────────────────────────────────────────── フロントページの続き (56)参考文献 特開 昭61−139920(JP,A) 特開 平3−86913(JP,A) 特開 平3−86914(JP,A) 特開 昭63−204513(JP,A) 特開 昭62−236136(JP,A) 特開 平3−54719(JP,A) 特開 平3−183014(JP,A) 特開 平4−76813(JP,A) 特開 平1−205716(JP,A) 特開 昭61−9821(JP,A) (58)調査した分野(Int.Cl.7,DB名) G11B 5/66 G11B 5/85 ──────────────────────────────────────────────────続 き Continuation of the front page (56) References JP-A-61-139920 (JP, A) JP-A-3-86913 (JP, A) JP-A-3-86914 (JP, A) JP-A-63-139 204513 (JP, A) JP-A-62-236136 (JP, A) JP-A-3-54719 (JP, A) JP-A-3-183014 (JP, A) JP-A-4-76813 (JP, A) JP-A-1-205716 (JP, A) JP-A-61-9821 (JP, A) (58) Fields investigated (Int. Cl. 7 , DB name) G11B 5/66 G11B 5/85

Claims (4)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】ポリエチレンテレフタレートよりなる基板
上に直接または下地層を介して磁性層を有する磁気記録
媒体であって、前記磁性層が前記基板側から順にCoと
CrまたはCoとCrとNiを主成分として含む第1の
磁性層と、CoとOまたはCoとNiとOを主成分とし
て含む第2の磁性層とからなり、前記第1の磁性層の磁
気異方性が膜面内方向から15度以下5度以上にあるこ
とを特徴とする磁気記録媒体。
1. A magnetic recording medium having a magnetic layer on a substrate made of polyethylene terephthalate directly or via an underlayer, wherein the magnetic layer mainly comprises Co and Cr or Co, Cr and Ni in order from the substrate side. A first magnetic layer containing Co and O or a second magnetic layer containing Co, Ni and O as main components, wherein the magnetic anisotropy of the first magnetic layer is from the in-plane direction of the film. A magnetic recording medium, wherein the angle is 15 degrees or less and 5 degrees or more.
【請求項2】ポリエチレンナフタレートよりなる基板上
に直接または下地層を介して磁性層を有する磁気記録媒
体であって、前記磁性層が前記基板側から順にCoとC
rまたはCoとCrとNiを主成分として含む第1の磁
性層と、CoとOまたはCoとNiとOを主成分として
含む第2の磁性層とからなり、前記第1の磁性層の磁気
異方性が膜面内方向から30度以下15度以上にあるこ
とを特徴とする磁気記録媒体。
2. A magnetic recording medium having a magnetic layer directly or via an underlayer on a substrate made of polyethylene naphthalate, wherein the magnetic layer comprises Co and C in order from the substrate side.
a first magnetic layer containing r or Co, Cr, and Ni as main components; and a second magnetic layer containing Co, O, or Co, Ni, and O as main components. A magnetic recording medium wherein the anisotropy is 30 degrees or less and 15 degrees or more from the in-plane direction of the film.
【請求項3】真空中で長尺のポリエチレンテレフタレー
トよりなる基板を円筒状キャンの周面に沿って走行させ
ながら真空蒸着法によって前記基板上に直接または下地
層を介してCoとCrまたはCoとCrとNiを主成分
として含む第1の磁性層と、CoとOまたはCoとNi
とOを主成分として含む第2の磁性層とを順次形成する
磁気記録媒体の製造方法において、前記第1の磁性層を
形成する際の初期入射蒸気流と前記基板の法線のなす入
射角が90度〜70度の範囲内にあり、かつ前記円筒状
キャンの周面温度を50℃以下とすることを特徴とする
磁気記録媒体の製造方法。
3. A method in which a substrate made of long polyethylene terephthalate is run in a vacuum along the peripheral surface of a cylindrical can by a vacuum deposition method on the substrate directly or via an underlayer. A first magnetic layer containing Cr and Ni as main components, Co and O or Co and Ni
And a second magnetic layer containing O as a main component in a method for manufacturing a magnetic recording medium, wherein an initial incident vapor flow at the time of forming the first magnetic layer and an incident angle formed by a normal to the substrate. Is within the range of 90 to 70 degrees, and the peripheral surface temperature of the cylindrical can is 50 ° C. or lower.
【請求項4】真空中で長尺のポリエチレンナフタレート
よりなる基板を円筒状キャンの周面に沿って走行させな
がら真空蒸着法によって前記基板上に直接または下地層
を介してCoとCrまたはCoとCrとNiを主成分と
して含む第1の磁性層と、CoとOまたはCoとNiと
Oを主成分として含む第2の磁性層とを順次形成する磁
気記録媒体の製造方法において、前記第1の磁性層を形
成する際の初期入射蒸気流と前記基板の法線のなす入射
角が70度〜50度の範囲内にあり、かつ前記円筒状キ
ャンの周面温度が60℃〜110℃の範囲内にあること
を特徴とする磁気記録媒体の製造方法。
4. A method in which a substrate made of a long polyethylene naphthalate is run in a vacuum along the peripheral surface of a cylindrical can, and Co and Cr or Co or Co is deposited on the substrate directly or via an underlayer by a vacuum deposition method. And a first magnetic layer containing Cr and Ni as main components and a second magnetic layer containing Co and O or Co, Ni and O as main components in order. The angle of incidence between the initial incident vapor flow and the normal to the substrate when forming the magnetic layer is in the range of 70 to 50 degrees, and the peripheral surface temperature of the cylindrical can is 60 to 110 degrees Celsius. A method for manufacturing a magnetic recording medium, wherein
JP3200604A 1991-08-09 1991-08-09 Magnetic recording medium and method of manufacturing the same Expired - Fee Related JP3044850B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3200604A JP3044850B2 (en) 1991-08-09 1991-08-09 Magnetic recording medium and method of manufacturing the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3200604A JP3044850B2 (en) 1991-08-09 1991-08-09 Magnetic recording medium and method of manufacturing the same

Publications (2)

Publication Number Publication Date
JPH0546968A JPH0546968A (en) 1993-02-26
JP3044850B2 true JP3044850B2 (en) 2000-05-22

Family

ID=16427131

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3200604A Expired - Fee Related JP3044850B2 (en) 1991-08-09 1991-08-09 Magnetic recording medium and method of manufacturing the same

Country Status (1)

Country Link
JP (1) JP3044850B2 (en)

Also Published As

Publication number Publication date
JPH0546968A (en) 1993-02-26

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