JPS5954924U - drying equipment - Google Patents

drying equipment

Info

Publication number
JPS5954924U
JPS5954924U JP15005482U JP15005482U JPS5954924U JP S5954924 U JPS5954924 U JP S5954924U JP 15005482 U JP15005482 U JP 15005482U JP 15005482 U JP15005482 U JP 15005482U JP S5954924 U JPS5954924 U JP S5954924U
Authority
JP
Japan
Prior art keywords
tube
drying equipment
placing
dried
flowing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15005482U
Other languages
Japanese (ja)
Inventor
敏郎 加藤
弘 佐藤
Original Assignee
ソニー株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ソニー株式会社 filed Critical ソニー株式会社
Priority to JP15005482U priority Critical patent/JPS5954924U/en
Publication of JPS5954924U publication Critical patent/JPS5954924U/en
Pending legal-status Critical Current

Links

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図は本考案による乾燥装置の一実施例を示す断面図
、第２図は管体の開口を示す平面図である。 １は管体、２は清浄空気送出機、５は熱線透過カバー、
６は排気手段、７は流量調節弁、８は導管、９は赤外線
ランプ、１０は赤外線加熱器、１２は半導体ウェハー、
１３はキャリアである。FIG. 1 is a sectional view showing an embodiment of the drying device according to the present invention, and FIG. 2 is a plan view showing the opening of the tube body. 1 is a tube body, 2 is a clean air delivery device, 5 is a heat ray transparent cover,
6 is an exhaust means, 7 is a flow control valve, 8 is a conduit, 9 is an infrared lamp, 10 is an infrared heater, 12 is a semiconductor wafer,
13 is a carrier.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 管体と、該管体内に乾燥すべき試料を入れる手段と、該
管体内に清浄気体を流す手段と、該管体の外側にある輻
射熱線源を有する乾燥装置。A drying apparatus having a tube, means for placing a sample to be dried within the tube, means for flowing a clean gas into the tube, and a radiant heat source external to the tube.
JP15005482U 1982-10-01 1982-10-01 drying equipment Pending JPS5954924U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15005482U JPS5954924U (en) 1982-10-01 1982-10-01 drying equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15005482U JPS5954924U (en) 1982-10-01 1982-10-01 drying equipment

Publications (1)

Publication Number Publication Date
JPS5954924U true JPS5954924U (en) 1984-04-10

Family

ID=30332912

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15005482U Pending JPS5954924U (en) 1982-10-01 1982-10-01 drying equipment

Country Status (1)

Country Link
JP (1) JPS5954924U (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61164023U (en) * 1985-03-28 1986-10-11
JPS62245639A (en) * 1986-04-18 1987-10-26 Hitachi Ltd Vapor drying device

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5019408U (en) * 1973-06-15 1975-03-05
JPS5269557A (en) * 1975-12-08 1977-06-09 Mitsubishi Electric Corp Processing method of semiconductor wafer
JPS5742121A (en) * 1980-08-27 1982-03-09 Nippon Telegr & Teleph Corp <Ntt> Method and apparatus for drying wafer

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5019408U (en) * 1973-06-15 1975-03-05
JPS5269557A (en) * 1975-12-08 1977-06-09 Mitsubishi Electric Corp Processing method of semiconductor wafer
JPS5742121A (en) * 1980-08-27 1982-03-09 Nippon Telegr & Teleph Corp <Ntt> Method and apparatus for drying wafer

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61164023U (en) * 1985-03-28 1986-10-11
JPS62245639A (en) * 1986-04-18 1987-10-26 Hitachi Ltd Vapor drying device

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