JPS5954573U - Single crystal pulling equipment - Google Patents

Single crystal pulling equipment

Info

Publication number
JPS5954573U
JPS5954573U JP15105382U JP15105382U JPS5954573U JP S5954573 U JPS5954573 U JP S5954573U JP 15105382 U JP15105382 U JP 15105382U JP 15105382 U JP15105382 U JP 15105382U JP S5954573 U JPS5954573 U JP S5954573U
Authority
JP
Japan
Prior art keywords
single crystal
crystal pulling
pulling equipment
seed crystal
holder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15105382U
Other languages
Japanese (ja)
Other versions
JPS6135563Y2 (en
Inventor
龍資 中井
Original Assignee
住友電気工業株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 住友電気工業株式会社 filed Critical 住友電気工業株式会社
Priority to JP15105382U priority Critical patent/JPS5954573U/en
Publication of JPS5954573U publication Critical patent/JPS5954573U/en
Application granted granted Critical
Publication of JPS6135563Y2 publication Critical patent/JPS6135563Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。
(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of drawings]

第1図は単結晶引上装置の例を示す断面図である。第2
図はネッキング部の例を示す側面図である。第3図は本
考案装置の実施例における種結晶取付部付近を示す斜視
図である。第4図は本考案装置の実施例を用いた場合の
種結晶と原料融液の間の状態の例を示す断面図である。 1・・・るつぼ、2・・・主ヒータ−,3・・・原料融
液、4・・・B2O3融液、5・・・種結晶、6・・・
単結晶、7・・・熱電対、8・・・ネッキング部、9・
・・種結晶ホールダ、10・・・ホールダヒーター、1
1・・・保温材、12・・・スリップリング、13・・
・ブラシ、14・・・メニスカス、A・・・上部。
FIG. 1 is a sectional view showing an example of a single crystal pulling apparatus. Second
The figure is a side view showing an example of a necking part. FIG. 3 is a perspective view showing the vicinity of the seed crystal mounting portion in an embodiment of the device of the present invention. FIG. 4 is a sectional view showing an example of the state between the seed crystal and the raw material melt when the embodiment of the apparatus of the present invention is used. DESCRIPTION OF SYMBOLS 1... Crucible, 2... Main heater, 3... Raw material melt, 4... B2O3 melt, 5... Seed crystal, 6...
Single crystal, 7... thermocouple, 8... necking part, 9.
...Seed crystal holder, 10...Holder heater, 1
1... Heat insulation material, 12... Slip ring, 13...
・Brush, 14... Meniscus, A... Upper part.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 種結晶ホールダの外周に、種結晶の温度を制御するホー
ルダヒーター、およびその外側をおおう保温材を設けた
ことを特徴とする単結晶の引上装置。
A single crystal pulling device characterized in that a holder heater for controlling the temperature of the seed crystal and a heat insulating material covering the outside thereof are provided around the outer periphery of the seed crystal holder.
JP15105382U 1982-10-04 1982-10-04 Single crystal pulling equipment Granted JPS5954573U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15105382U JPS5954573U (en) 1982-10-04 1982-10-04 Single crystal pulling equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15105382U JPS5954573U (en) 1982-10-04 1982-10-04 Single crystal pulling equipment

Publications (2)

Publication Number Publication Date
JPS5954573U true JPS5954573U (en) 1984-04-10
JPS6135563Y2 JPS6135563Y2 (en) 1986-10-16

Family

ID=30334842

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15105382U Granted JPS5954573U (en) 1982-10-04 1982-10-04 Single crystal pulling equipment

Country Status (1)

Country Link
JP (1) JPS5954573U (en)

Also Published As

Publication number Publication date
JPS6135563Y2 (en) 1986-10-16

Similar Documents

Publication Publication Date Title
JPS5954573U (en) Single crystal pulling equipment
JPS59141579U (en) Single crystal pulling device
JPS6010197U (en) Crucible for single crystal growth
JPS58121377U (en) Graphite parts for silicon single crystal pulling equipment
JPS609189U (en) High temperature electric heating parts
JPS59186988U (en) heat shrink equipment
JPS583037U (en) bonding equipment
JPS59148509U (en) electric heater
JPS6012251U (en) heat sensing line
JPS60182365U (en) Liquid simple cold pack
JPS59131150U (en) Compound semiconductor heat treatment equipment
JPS6082297U (en) Glass melting furnace off-gas nozzle
JPS5999402U (en) Insulated glass encapsulated thermistor
JPS59123870U (en) Heat fixing device
JPS608893U (en) Baking equipment
JPS58128982U (en) Semiconductor crystal growth equipment
JPS59125976U (en) Graphite heating table for thin film growth equipment
JPS6032278U (en) beer cooler
JPS59125333U (en) Thermal pot with temperature display function
JPS58129658U (en) Wafer adhesion and peeling equipment
JPS59164574U (en) Hot water bottle warmer
JPS60107494U (en) thermal tube
JPS59162659U (en) Molten metal analyzer
JPS5922148U (en) inhaler
JPS6018409U (en) Temperature sensing device mounting device