JPS5952541U - 真空バルブ - Google Patents

真空バルブ

Info

Publication number
JPS5952541U
JPS5952541U JP14782182U JP14782182U JPS5952541U JP S5952541 U JPS5952541 U JP S5952541U JP 14782182 U JP14782182 U JP 14782182U JP 14782182 U JP14782182 U JP 14782182U JP S5952541 U JPS5952541 U JP S5952541U
Authority
JP
Japan
Prior art keywords
vacuum
vacuum valve
metal bellows
small chamber
vacuum container
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14782182U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0117066Y2 (cs
Inventor
川村　佳博
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP14782182U priority Critical patent/JPS5952541U/ja
Publication of JPS5952541U publication Critical patent/JPS5952541U/ja
Application granted granted Critical
Publication of JPH0117066Y2 publication Critical patent/JPH0117066Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • High-Tension Arc-Extinguishing Switches Without Spraying Means (AREA)
JP14782182U 1982-09-29 1982-09-29 真空バルブ Granted JPS5952541U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14782182U JPS5952541U (ja) 1982-09-29 1982-09-29 真空バルブ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14782182U JPS5952541U (ja) 1982-09-29 1982-09-29 真空バルブ

Publications (2)

Publication Number Publication Date
JPS5952541U true JPS5952541U (ja) 1984-04-06
JPH0117066Y2 JPH0117066Y2 (cs) 1989-05-18

Family

ID=30328611

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14782182U Granted JPS5952541U (ja) 1982-09-29 1982-09-29 真空バルブ

Country Status (1)

Country Link
JP (1) JPS5952541U (cs)

Also Published As

Publication number Publication date
JPH0117066Y2 (cs) 1989-05-18

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