JPS5950311A - Displacement measuring device - Google Patents

Abstract

PURPOSE:To raise the measuring accuracy, by making a high rigidity connecting shaft member almost orthogonal to a position reciprocating motion direction, and energizing both its end parts in the direction for pressing them against the second member and the second detecting body receiving seat, so that slide resistance by a reciprocating motion of a scale does not exert influence on a slider supporting member. CONSTITUTION:A receiving seat 20 and 21 positioned on the same straight line being parallel to a reciprocating motion direction are provided on the tip of an arm part 5 and a slider 13, respectively, and one end and the other end are engaged so as to be rotatable to the receiving seat 20 of the arm part 5 and the receiving seat 21 of the slider 13, respectively, by which there are provided with a high rigidity connecting shaft member 22 for connecting a detecting mechanism 3 and the slider 13, and a compression coil spring 23 for making the high rigidity connecting shaft member 22 almost orthogonal to the reciprocating motion direction, and energizing both its end parts in the direction for pressing them against the arm part 5 and the receiving seat 20 and 21 of the slider 13, so that the slider 13 is pressed against a scale face 10A side combined with the first operation reference face of a main scale 10, and the end face side being the second operation reference face being orthogonal to a scale face of the main scale 10, respectively, by the tip of the high rigidity connecting shaft member 22.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a displacement measuring device, and in particular, to a displacement measuring device that is attached to a first member.
a first detection gap attached to the second member, and a second detection gap attached to the second member, both of which are capable of reciprocating along the first detection body; a base end portion is attached to the second member, and a distal end portion presses the second sensing body against the first sensing body in a direction substantially perpendicular to the reciprocating direction;
The present invention relates to an improvement in a displacement measuring device that measures the relative displacement of the first and second members from the relative movement of the first sensing body and the second sensing body.

A type of length measuring device for measuring and adjusting the relative positions of two objects, for example, is constructed as shown in Figs. 1 to 3. There is something that is happening.

In the figure, the 1lIll long case 1 has a hollow cross section of Ir rectangular shape, and is elongated in the direction orthogonal to the plane of the drawing of FIG. It is provided with a gap L12.

A movable member 3 is brought into contact with the end face of the elongated case 1 on the opening 2 side via a sliding member 4, and is movable along the longitudinal direction of the elongated case 1. There is.

An arm portion 5 extending from the space 1 2 into the elongated space 1 is integrally formed on one side of the detection mechanism 3 . Further, on the outer surface of the elongated case 1 in the vicinity of the opening 2, a magnet 6 is provided along the longitudinal direction of the IM long case 1, and a magnet 6 is provided between the magnets 1-6.
At this time, a closing member 7 consisting of a thin iron plate 13 covering the opening 2 is attracted to prevent dust from entering into the elongated case 1 through the opening 2 (detected); l! The blocking member 7 in the portion where the arm portion 5 of the partner 3 is inserted is connected to the detector 483.
At the same time, both ends are inserted into the side chevron-shaped groove 8 which is opened in the soil surface of the detection 1 geometry 3, and the arm part 5, which is straddled by this groove 8, is inserted into the elongated case 1. It is possible to insert -C.

In the groove 9 provided in the longitudinal direction in the elongated case 1, there is a main plate made of glass or the like, on which a vertically striped scale 10A' (see Fig. 2) is formed on the - side (scale surface) 'IOB'. The lower end of the scale 10 is inserted and fixed with an adhesive 11 or the like.

The arm portion 5 of the detection mechanism 3 extends as far as the main scale 10, and a slider 13 is movably attached to the distal end of the arm portion 5 via a connecting means 12.

This connecting means 12 has, for example, a triangular annular portion 1 at its tip.
2A is integrally formed, and the proximal end is attached to the arm portion 5.
1.2 B and a linear C-holding spring 12 elastic member fixed with a screw 12C, and a truncated cone 12E that is engaged with the annular portion 12A.

The cantilever spring 12D presses the slider 13 toward the graduation surface 10B, which also serves as the first scanning reference surface of the main scale 10.
is pushed directly onto the end surface 10C, which is the second scanning reference surface, of the scale surface 10B of the main scale 10.

The slider 13 includes a contact claw A' member 13A formed from a plate material in an oval shape, and a contact claw A' member 13A formed from a plate material.
A thick light emitting element part 1, 113 B, which is screwed to the short side of the main scale 10 on which the scale 10Δ is not formed, and the contact claw. The main scale 10 is attached to the screw (not shown) fixed to the bent long side of the other end of the A1 member 13A.
A thick light-receiving element mounting member 1 facing the scale surface 10B of
3C.

On the surface of the contact claw member 13A of the slider 13 facing the scale surface 10B of the main scale 10, there is an index scale 14 having vertical striped scales (not shown) similar to the main scale 10. is fixed and C is fixed. This in-ex scale 14 and main scale 1
A light emitting element 15, a light receiving element 16, etc. as a light source are arranged with 0 in between.

In this case, one light emitting element 15 is the contact claw f4 part 13A.
(of the L-shape), (number of light-emitting elements fixed to the i side - the number of light-emitting elements f-J member 13B, and the light-receiving element 16 is the light-receiving element fixed to the long side of the L-shape of the contact holder f=J member 13Δ). Claw 1 member 1
3C is attached on two sides each.

The scale surface 1, which is the first scanning reference surface of the main scale 10,
A plurality of sliding pieces 17 and 18 each made of a resin with a low coefficient of friction such as polyacetal resin are fixed to the surface facing 0B and the end surface 10C, which is a second scanning reference surface orthogonal to this scale surface. These sliding pieces 17.1
8 is brought into contact with the graduation surface 10B of the main scale 10 and the end surface 10G perpendicular to the graduation surface 10B by the biasing force of the cantilever spring 12D.

This soil/,'i tM l 戊のい(、Hosoto、)l-
゛1.1ko, ノ, (> moving part (4 doshokuno(・)exp1
1 time fl" + 13 no cover or one), 191 e1
．． 1: io: Out! U'! IM (! IIM to the measured 'tQ object
wo defeat (f((のl\ツ1-15)) f-1 side 19△,
l! l 1. Fixed to J and measured 1+! I (3 movements 4
Main scale '10 l=l lj咎'I U
Between △ and Innox scale 1/'lσ month-1 height (
The light-receiving system J'-
16 (Poetry “-”)
l, i 6] C IIM (rule j'i ', c o
5 b no (' 9)ru.

This J, - displacement measurement (Increase the influence of the request by 5.

For example, add 1:1j of Surin 1~h during 10μIll culm pulling.
! In the optical measuring device ((31, IvI constant measurement 1^ degree', 111f (I:!)/j (l is the gap must be widened by 20 μm (3L).

scolding
Yohiin 1' Tux scale I /I LL,
There is / J”. Therefore (, main scale '1 (
→Doin 1'Tux scale 1111Jtin 121
Dynamic resistance is extremely small (small, one side adds 1 j to the other;
Ij L-'c It is necessary to maintain the above-mentioned gap by 12l + 2j'i'.

- One for the purpose] fJ, for the displacement measurement in Figs.
), the tip of lI' and Il-shaped part 12 are exposed to the circle 811 stand 12F on the index scale 14 side.

≧1, the mode of the song - ( is as shown in Fig. 5 (
This j′l holder is 4212 D and the tip of ball 121 is bound (
, the side of the in 1'x scale' 14 has a V-shaped groove 12.
There is something wrong with G.

Such a linear spring with J21 presses the main scale and the in-hook scale against the phase U, and also applies sliding resistance to the in-hook scale during relative movement in the longitudinal direction of these scrolls. j resisting C: Il'l in a fixed position with respect to one of the objects.

The 11th and 12th D is buried! ”, in advance, the fourth
As shown in the figure, one C molding is made in one curve.
'c d3 and take (in the J state, C should be parallel to the moving direction of the main scale 10 as shown in FIG. rshij”tuxsu lnor1 'I'w
I'm sliding like crazy! (Moha Mochi 1.r 4212 D
In this case, only the tension 3j, 311'1a load ('1') is applied, and the reciprocating movement of the slider 13 is interlocked to prevent this effect.

However, in reality, there are 121 springs and 4 members.
Variations in the bullet tjt coefficients of the J-strip, 9i difference in the ideal spring shape deflection curve, 111 no 1 (, 1 no 1
2 Parts other than D, 'full IQ I North 1
, mainsfunol 10, detection number structure 33, etc. 1.
'K'), and then take the measuring tool 'N?
By adjusting the parallelism of the j+ plane and the measuring device (and the parallelism of the J plane, etc., the main scale (this text jshiC・l7-f
j na i persona (2 ■ 1 list f・) (no thing is II full
bawl.

Taking a situation like this (= 1 digit 1' 1 holding
20, when the slider 13 is moved to the right, in addition to the tension and compression stress, the bending force also acts on the T-men 1, which causes compression in the sliding direction. , which has an adverse effect on the measurement Ii degree and causes problems such as difficulty and difficulty.

1:11・fll:' Determine the deflection λ in the swinging direction of the J spring 121).

Mazu゛, No. (5
, the degree is reduced by 1 in the figure. Assuming a curve with a radius of 1 and a radius of 1, the force of pushing 1 is N. =240g, friction coefficient 1-1-0, 3,
I'+ I: tUne (1) From lj end to "Q L" (
1) Conditions (, slider 1) where l1lli Flf is L (vn), the line forming the holding spring is (A purchase is S~・V1] - △, and its diameter is Φ (ll1m')
During relative movement in the direction of the arrow in the figure with respect to the main scale 10 of No. 3, horns of 1:1.1-2 act on the tips of the holding springs as shown in FIG. 8, respectively.

First, from Figure 7, F+=2N...(1) 2-2μN...(2> From formula (1)<2), 1-2-μF1...(3) From Figure 8, Fixed end J of spring 12 cos Φ
-COS θ )... (4) where φ is the midplane angle between the fixed end and the free end, and θ is the central angle from the fixed end to the free end. )
The distortion channel VUs stored in this section is... (5)) (S is the distance Nt from the fixed end to m n Pli, 1-
is the Kito(zu II' 11 coefficient, and IZ is the moment of inertia of the I!Jt surface.) Substituting the equation (/I) into equation (5), we get IJs = . displacement (λ
According to Castelino's 7 theorem, S) is So - 1 θ Yuji - θ1 □ ... (-7) Therefore, the load direction (Ii'J 1FJ
The displacement (λ) in the direction of the front vehicle (in the sliding direction) is calculated by taking into consideration the reconnaissance surroundings... There are 22 sentences considering displacement.

Sentence detection here (Large +? 4:3 t-I-j'"!Take it to shallow areas etc.") etc., the slider 13 can be accurately pushed onto the scale surface even if the fertility of the geometry 3 changes three-dimensionally. l)'s ♀iβ (¥191
, the number of detections (slider i L that reaches 'l-1 to 143)
tb-constant self 11.11. ! J'c formation - (
Orf', iJ lhot J -C'+ll'r -j＞
t'-do is absolutely necessary.

Also, 1 example area confession lit, by the imperial order ゛゛゛゛
Considering that I-7'9'-13 is less than 2' from the scale, and also taking into consideration the ease of use of the device, I'+I-'1 and 4w 121-) pillow shape q
I=O, 8″3~1.(Ill lit, length 1-
30~5 (-) mm, here C is t in terms of shape.
) unreasonableness can be omitted ()i = (-1, t3m river, l
-, -Ll'1, S:'l n1llll? p14
III l, /,,: Tsuma/J, I'l how old is 4-! l S Wl) - key i (bullet 1 coefficient is l2 =
2, 1 x 10' l (g, 'mm' te d).

2) The ball at the tip of the blade 12 [) and the blade of the ball bearing are determined to be 41 and 11.

This key, as shown in Table 1, brings about a significant increase in measurement accuracy of 41 to 51. This LL experiment 11'1
From the Sung Dynasty, it was 111fn2.

G1;
It is also possible to consider strengthening the 1-1'), but in order to strengthen the rigidity of this platform, it is possible to increase the rigidity of the platform by changing the length of the bar (1). (The degree of freedom of the slider 13 that slides to tf4c3 decreases, and the pushing force that increases λ・1 to the main scale of the slider increases, 1.
'[Operation 1 due to increase in 1, 14 dynamic resistance of the slider
'] 9 shown in Figure 7 due to low contact force or excessive LL contact force.
♀Ii of increasing success of four moving pieces 1B 1. : Identifies problems.

In addition to this, for example, the slider is pulled in the direction of the proximal end of the slider by a linear spring. This will suppress the measurement error caused by the deflection of the cantilever due to the force in the direction of movement.
) can be considered as a displacement measuring device.

However, this displacement measuring device requires a separate force means to press the slider against the main scale, which increases the size of the device and prevents miniaturization.
In order for the slider to move according to the table 1r11 of the main scale, the linear spring (
Make the confinement a′ [containing structure (J must follow (
The problem remains that the measurement error caused by the deflection of the linear spring due to the force in the direction of movement of the slider cannot be sufficiently reduced.

This y reduction was extended in view of the above-mentioned problem of <, 'C>l<(1' due to the <-L return movement of the thread
! The object of the present invention is to provide a displacement measuring device that can prevent dynamic resistance from affecting the slider support portion (4) and improve measurement accuracy.

Another object of Kuchi no Komei is to provide a displacement measuring device that has a small device size and can be miniaturized.

The present invention also provides a displacement measuring device that can be easily attached to a support part for supporting a sweeper and for pressing a sweeper against a main scale. It's spot on.

This light was picked up by the first member and was detected in January.
, the second part (A) l' The part is taken by the second part, and the second sensing body is pressed against the first sensing body at the tip part in a direction substantially perpendicular to the reciprocating direction, and '1 inspection, from the relative movement of the 11 body and the second detection member, the relative displacement of the first member, i:; For each of the two members and the second sensing body, there is one
IIJ 7'j direction, parallel to the same straight line, one end of which is located on the same straight line, one end of which is connected to the second Fil'S 't3, the other end of which is connected to the second Fil'S 't3; a high-rigidity connecting shaft member which is rotatably engaged with each other and thereby connects the second member and the second sensing body; The above object is achieved by providing biasing means that are perpendicular to each other and that are biased in a direction in which both ends thereof are pressed against the second part No. 4 and the second sensing body receiving seat.

Further, in the displacement measuring device, the second member and the second sleeve of the high-rigidity connecting shaft member of the present invention are arranged such that both end portions that engage with the 11 seats are closed with a ball 4] (and the Both catches are shaped like the spherical end (C1).
The above object is achieved by providing the second member and the second sensing body with a distance of 1'' in the same direction.

Hereinafter, an embodiment will be described in which the present invention is applied to a similar conventional displacement measuring device such as the one shown in FIGS. 1 to 3. In this embodiment, the same or equivalent parts as those of the displacement measuring device shown in FIGS. 1 to 8 are replaced with the symbols Y)・]-, and their explanations are omitted. I'll take what I have.

Examples of the mouth are illustrated in FIGS. 9-11 (
In this displacement measuring device similar to the conventional one, the tip of the arm portion 5 extending to the vicinity of the main scale 10 in the shallow area 3 and the slider 13 are provided with:
Seats 20 and 21 are provided whose reciprocating power directions are parallel to the same straight line, and one end is connected to the seat 20 of the arm part, and the other end is connected to the seat of the slider '13. 21, a high Mll resistance connecting shaft member 22 which is engaged with a rotation control member and thereby connects the detection mechanism 3 and the slider 13; The arm portion 5J is substantially orthogonal to the moving direction and has both ends thereof.
j Press the catch 20 of the Yopi slider 13 to the A3 Yopi 21 j
1.49″3 Lee-61″ in the direction of soil j1
A compression coil spring 23 is provided, which allows the high I'IN
The scale surface 1 where the slider 13 is used in parallel with the first operation reference surface of the main scale 10 by the tip of the raw connecting shaft member 22
Push L['? It was designed so that it would look like this.

The high-rigidity connecting shaft portion (A22 is the compressed coil spring 2
3 is transmitted to the slider 13 without causing any bending.

The seat 20 on the side of the arm portion 5 has a cylindrical shape opening in a direction substantially perpendicular to the reciprocating direction of the sweeper 13 and in a direction away from the main scale 10, and has a conical bottom with a cross-sectional shape. ! M 2 OA, and the catch seat 21 is
111 viewing direction of the slider 13 and 18i self 2Ii
It has a cylindrical shape with a frontage in the I direction, which is spaced from the main scale 10h by t'lf1, and the first surface is a circle with a V-shaped cross section>It R2'l△, and There is one rod-like portion 22C of the rigid connecting shaft member 22 (one piece is
At the 1st and -th positions of the cylindrical wall, sleeves h20S13J and '21S are formed in the axis fG+ direction at opposite positions on the cylindrical wall.

Both ends of the high rigidity connecting shaft (A?2) have JJ (shaped ends 2)
2Δ, 2213 are formed, and these spherical ends 22A, 2
213 Lt, a cylindrical catch 20 formed at the tip of the arm part and a seat in the center of the slider 13 (
The slider 1 is fitted to each of the hollowed cylindrical receivers 21 through the high-rigidity connecting shaft member 20.
33 is adapted to perform reciprocating motion C in conjunction with the arm portion 5, and the spherical end portions 22Δ, 2213 and the circular phase groove 20.2
Due to the contact with the IA, the sleeves h2OS and 213 are made to undergo rocking of the healed young.

In addition, instead of the conventional 1:11 moving piece, the slider 193 is attached to the 1''-'' 271△ and 24B that are in contact with the target surface 1013 and the end surface 10C of the main scale 10. -C is here.

Graduation surface 1 of the main scale 10 of the slider 13
0 [3 is in contact with Φ11 [-1-RA2/IA is the front and rear ends of the slider 13 in the direction of movement, on the side near the end surface 10G, opposite to IJ3 side 1, and on the j side and in the direction of movement. 1 piece in the center, 33 pieces in the middle part.
M ln+ 10 G (: 1 turn If f le D - ra 2 / I [3 lotus y Iku'+ 3's residence 1 (Ko motion before and after Manmen - 11 installations +) is written.

In this embodiment, the detection + FW (f'f) is connected by a high rigidity connecting shaft member 22 in which the slider 133 on the 3 side is hardly deflected by 3 units, and is connected with high rigidity in the 1- state. Since the shaft member 22 or the slider 13 is parallel to the movement lj direction (j), the high rigidity connecting shaft part (A20 is not bent/V) due to the force in the movement direction of -C when the slider 13 reciprocates. Therefore, it is possible to significantly reduce measurement errors.

For example, as can be seen from equation (8) in the previous section, the displacement λ in the load direction at the high-rigidity connecting shaft member (22nd spherical end 2213) −
Since the inverse ratio is in accordance with the numbers 1 to 1, the present example has () The high rigidity connection +1'+t+ part (A22's 2nll11 is rounded down to the specific axis, the cross-section of the secondary t-men 1~ is approximately 3918, and therefore, in this example, the slider 13 of d3() is
9 Error in direction of motion [Yo, above? , is approximately 1/39th of that of the latest displacement measuring device, which is a significant improvement.

Also, generally, instead of a top between the slider 13 and the main scale 10 as in this embodiment, 1.1-ra 24△,
24 ``I want to take 3.'' But I felt resistance;
8. Since the number of loads in the moving direction is reduced, the measurement error based on the cart is reduced, but the displacement measuring device of the present invention is useful. Although there is a problem in that it is affected by the acceleration of the vibration in the dynamic Ij direction, resulting in a large measurement error, in the case of this embodiment, the rigidity of the high-rigidity connecting shaft member can be increased by 1-intervention. Therefore, the high-rigidity connecting shaft portion (422) hardly bends over the slider 13, and the influence of vibrations from the T-machine, etc., on the slider 13 can be suppressed.

If g', then i, then c will be the candy that supports the degree of freedom of slurr 13.
, so if the rigidity of the holding spring in the sliding direction cannot be measured for 1 minute, and i]f is used for one of the four moving pieces of 171, "take out the 1-ra" () with the least resistance. , IIIJ11j direction vibration acceleration acts on the slider 13, , 1-1
However, in this embodiment τ', the high rigidity connecting shaft member 22 directly prevents the bending in the direction of the sliding force from occurring in the spring.

In addition, in this embodiment, compared with the case where a 4D torsion coil is mounted on one end of the highly rigid connecting shaft part (A22), the spring force of the compression coil spring 23, which is the biasing means, varies. is small, so move slider 13 to main scale 1.
There is an advantage that the pressing force to zero can be made constant, and that the slider 13 can better follow the undulations of the scale face 10Δ or 10B of the main scale 10.

Historically, in this embodiment, the catch seat 20.21 is pressed against both ends of the connecting shaft part 22 in the same direction. 'l connection shaft part (422
It stably supports the reaction force of C and receives 20.21 (20.
Since the slider 13 is supported flat in the IJJ direction, it is bent and deformed (J becomes smaller, f, u' ℃
measurement? You can avoid improving the fifth degree.

J'3 In the above example, press 1 (-q) to scale face 10△, 10[3 of scale iter 13 or main scale '10. (d) However, the present invention is not limited to this, but the slider '13 is arranged so as to embrace the main scale '10, and the scale face 1 of the main scale '10
It is also applied to a type of displacement measuring device in which the distance Rff between the two is kept constant by applying a force f'' in the direction of ij between 1013 and 81. be.

Therefore, in this case, as shown in FIG. 12, if the strike plate 20, 210fJ direction is opposite to that of the first embodiment shown in FIGS. 9 to 11, then f=J force. 1・
As a step, 1 contraction 21 (le (Jne 230 instead of tension = 1
()1. r IJ ;1. p 23△ (more than 2, high 1'
lll l'l Pull the connecting part 22 in the direction of the detected number R'f +3, and thereby
3 is 14 times 20.21 (each presses 1) 1 stricken.

Also, in the figure (j is not shown, but 1-1-ra 24△
+) j and 2 /l 13 Lll, scale face ゛10△,
10 [3] Arrange it so that it touches the main chain 10 one turn from the opposite direction.

Furthermore, the above-mentioned implementation (Uri is high 1411) has a round bar shape for the shaft part 03C.
2 may be an elongated part (any number may be used; therefore, it may be, for example, a hollow vibrator shape, etc.).

In the case of this vibrator Ilj4jt, it has the advantage that it has a larger cross-section than the vehicle weight, and is more suitable for the if-men 1 to C1 than the previous embodiment.

Further, in the above embodiment, the slider 13 is set to the main scale 1.
This is a model of a two-sided kite that uses two reference planes at 0. 1. Make a kite and use it as a sword id.

In addition, the above-mentioned embodiment (:, Higashi, Honkomei) is applied to a displacement measuring device using 40 optical q' heaters.

The present invention is based on the first part (first part,
+1 f4V and taken by the second member (J+, J taken, and
This second member has a second sensing body which is capable of reciprocating along the first sensing line, and the second silk sensing body is connected to one first sensing line, i11! , z-movement direction, f = J force means, etc., which are pushed in a direction substantially perpendicular to the direction of movement, and from the relative movement Φ1 between the first sensing body and the second sensing body, the first +3 and a displacement measuring device for determining the 1.1-pair displacement of the second member, which is generally used for iU.

Therefore, it is generally used in displacement measuring devices that measure the relative displacement of two parts + 4 from the relative movement of two detection bodies, such as the C contact type, the electric U1 type, and the capacitance HN type. applicable.

The present invention is as described above (1.
J: 13￥AI of 1jt1 speed of vibration in IH moving direction
Based on the 2nd detection break and the 2nd part Io are linked! Eliminate or significantly reduce the deflection of the high-rigidity connecting shaft (JJ) as well as the measurement errors caused by this deflection.

1
(41) Since it is arranged flat in the direction tJ of the 4th shift mJ, there is an effect that no bending force is generated due to sliding resistance force.

[Brief explanation of drawings]

Figure 1 is a sectional view of a conventional displacement measuring device, and Figure 2 is a cross-sectional view taken along line JT-II of Figure 1 [Ui iR+ Figure,
Fig. 3 is a sectional view taken along the line Ill-lit in Fig. 1, Fig. 4 is an explicit front view showing the shape of the holding spring in the conventional displacement measuring device, and Fig. 5 is the same section. Fig. 6 is a front view showing the ideal use condition of the holding spring, Figure 6 is a simplified front view showing the shape of the holding spring in actual use, and Fig. 7 is a simplified front view showing the shape of the holding spring in actual use. Show the solution #li 'L of the state?
J'Simplified front view 1. Figure 8 shows the deformed state of the spring 11 shown in Figure 7, and is a schematic small front view;
Fig. 10 is a front view of the embodiment when applied to a stud displacement measuring device, with a part ++ h surface, and Fig. 10 is the I of Fig. 9.
X-I X-ray sectional view, FIG. 11 is
X 1♀iil I'Ji diagram, surface 12 diagram [There is a top view C that accepts the main part of the second embodiment of Gobon Komyo. '1... Thin (case (first member), 3... Detector (j4 <second member), 10... Inj'' scale (first sensing object), 1
J...Switer (second detection object), 14...Inlux scale (second detection off), 20.21...Disaster seat 22...High rigidity connecting shaft section, 22△, 2213 ... Spherical end, 23 ... Pressure point = J Ile (imitation (I) force means), 2
3Δ, 23+3...Coil spring (I) force means. Agent: Ju Matsuyama, Bj Ku and 1 other person) Figure 1, Figure 2, Figure 11, Volume 1'7, Figure 3, Figure 4, Figure 5, Figure 6, Figure 7, Figure 8.

Claims (2)

[Claims] (1) The first detection stop attached to the first member, the second part -
a second sensing body which is attached to the material and is capable of reciprocating movement along the first sensing body by the second members; The second sensing body is pressed against the first sensing body at the tip in a direction substantially perpendicular to the reciprocating direction, and from the relative movement between the first sensing body and the second sensing body, the first sensing body is and a displacement measuring device for measuring relative displacement of a second member, wherein the second member and the second member
A catch located on the same straight line parallel to the direction of the reciprocating force is installed on each of the sensing bodies, and one end is connected to the catch of the second member and the other end is connected to the catch of the second sensing body. , a high-rigidity connecting shaft member that is rotatably engaged with each other and thereby connects the second member and the second sensing body; A displacement measuring device characterized in that it is provided with a means for biasing both ends thereof in a direction to press the second member and the receiving seat of the second sensing body. (2) Both ends of the high-rigidity connecting shaft member that engage with the second member Jj and the seats of the second sensing body are spherical, and both the seats are attached to the spherical ends. [9'] The displacement measuring device according to claim 1, wherein the second member and the second detection member are provided with openings in the same direction.