JPS59501062A - Wafer installation equipment - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

[Detailed description of the invention] Wafer moving device Background of the invention This invention provides automatic high-precision positioning of objects, such as semiconductor wafers in a holder. equipment for positioning or installing on a boat.

Place the wafer in a plastic bowl, keeping the surface of the semiconductor wafer free of dirt. from the board (introducing the wafers into the diffusion furnace) or It is desirable to perform the reverse transfer quickly. The above contamination may cause the wafer to become The wafer often rubs against the receiving slot during installation in the receiving slot. arise. These slots are only slightly wider than the wafer itself, so It was difficult to install them accurately enough without causing such rubbing.

Contamination can also result from rubbing or slipping of parts inside the moving device.

Reproducible movement of arms, receptacles, etc. (e.g. robot elements) between correct positions It is desirable to be able to move easily (i.e., return to the same location after leaving temporarily). half For equipment that moves conductor wafers, wafer boats and wafer transfer The arm must be moved accurately.

Summary of the invention According to a feature of the invention in one aspect, a support member (paddle); A known shape change part (e.g. strip) into which an element (e.g. semiconductor wafer) is positioned. A sensor is attached to the support member to detect alignment with a known position that is recognized as a lot. Set et al. 2 It will be done.

In a preferred embodiment, detection occurs prior to positioning. To perform the detection, energy ・A beam (e.g., light) intersects with a slot formed in a semiconductor wafer holder. pass along the path. Process the output of the sensor to create a wade paddle. Position the holder so that the supported wafer fits into the center of the slot. Determine whether or not there is. Remember these alignment positions and later actually use the wafer. Used when moving. Detect each slot in the two slots of the holder Two sensors are provided on the wafer noddle. A mirror installed in the paddle medium heat Reflects light between the light source and sensor located outside the pearl. actually the center Only the outer part of the boat is constructed to fit inside the boat.

According to another feature of the invention, the semiconductor wafer is moved closer to its periphery than to its center. The semiconductor wafer is picked up (lifted) using the vacuum openings placed in the area. By doing this, even if the wafer has warpage, the wafer will not touch the pickup element. The position of the edge of - is reliably maintained. In a preferred embodiment, the vacuum opening is surrounded by a raised area. The central part of the wedge inside the opening is lower than the opening surface. , the shaved part of the wafer is placed in the vacuum opening with pressure sensors on both sides of the remaining part of the wafer. Because of this, detecting the pressure change in one opening will prevent the paddle from wagging. It can detect when contact has begun. Move the paddle against the wow The device is configured to reduce speed when it detects that one aperture has opened. Work (.

According to another aspect of the invention, the wafer metal is made of aluminum with Teflon. It has a layered structure. In a preferred embodiment, the aluminum is grooved and has tubes therein. This tube applies a vacuum to the opening in the Teflon surface.

According to another feature of the invention, the individual wafers are - Rotate the wafer to improve alignment between the wafer and the holder slot. Ru. In the preferred embodiment, the slot position is determined by a sensor and the sensor output is Increase the rotation angle. Rotation is given by a step motor and a cam drive arm. available.

According to another feature of the invention, a set of rollers provided on the upper and lower surfaces of the track The roller is supported and a flexible element presses the roller against the track surface. suitable fruit In the example, a wafer holder is supported using such a track/trosoy device. and translate it relative to Unihapat9. Double set of above-mentioned trucks and trolleys The wafer paddle is accurately translated in the plane by

There is a chain and sprocket driven by a step motor, and it is connected to the sprocket. The position of the trolley is measured using the encoder that is matched to the trolley.

In accordance with another aspect of the invention, a quartz hoard of semiconductor wafers is In order to By holding the two rails with the flat surface without (4 parts) as the fourth point, the rails can be It can be handled even on boats with inconsistencies between the cables.

The seed aspect of the invention has a number of advantages. Sensor on the wafer paddle itself Because of this, there is no need to know the absolute position of the paddle or wafer holder. therefore, manufacturing tolerance requirements are less stringent and time and environmental It can also automatically respond to fluctuations caused by changes in wafer without scraping the slot walls. can be inserted into the holder slot to avoid contamination caused by particles. can be used. The wafer holder and handle arm are free from contamination from the moving mechanism. To accurately translate between predetermined positions without causing any distortion. Wafer placement and pin Backup is performed without impact, preventing particles from falling off from the wafer edge. This can further reduce dirt. Warped wafers can be removed using the vacuum pick of the present invention. The distortion of bow 4 can be dealt with by the boat holding device of the present invention. Wear.

Other features and advantages of the invention include the following description of preferred embodiments and It is clear from the scope of the claims.

DESCRIPTION OF THE PREFERRED EMBODIMENT Preferred embodiments of the present invention will be described below.

drawing Figure 1 is a slightly diagrammatic perspective view of the preferred embodiment, and Figure 2 is the preferred embodiment with the cover removed. A partially cutaway diagram of the example, FIG. 3 is a partial cutaway of the preferred embodiment. The plan view, Figure 4, is taken along line 4-4 in Figure 6. Figure 5 is a perspective view of the quartz boat and its holding device, Figure 6 is a plus side view. a perspective view of the tick boat, its holding device, and wafer alignment mechanism; Figure 7 shows a typical wafer. Figure 8 is a perspective view of the wafer operation panel, and Figure 9 shows the suction opening and optical position system. Cross-sectional view of the wafer handling paddle, Fig. 10 is a cross-sectional view taken along the line io-io in Fig. 9, and Fig. 11 is a cross-sectional view of the Quorut boat. , a partially cutaway top view of the wafer handling paddle, with the lens shown in the diagram. , a diagram including an optical fiber system, a light source, and a sensor of an optical slot detection device, Figure 12α and Figure 12b is a top view of the wafer handling paddle and arm, with the arm positioned at two different angles. (Fig. 12h is a partial view of one end of the arm), Figure 16 is a plan view of the plastic and Qualupport trolley drive mechanism. FIG. 14 is a cross-sectional view taken along line 1414 in FIG. 16, and FIG. 15 is a wafer operation node ξ. 9 is a cross-sectional view of the plastic boat showing the wafer alignment mechanism; FIG. 16 is a diagram of a mechanism for placing and picking up a wafer without impact.

structure FIG. 1 shows a semiconductor wafer 11 transferred to a plastic boat 12 and a plastic boat 12. Quoru boat 14 from tick boat 12 (wafers are removed when entering the diffusion furnace A wafer transfer device 10 is shown for transporting wafers to a boat supporting a wafer.

The device 10 includes a base 16 (on which a cover 18 is placed) 6 There is a trolley 20.22 and a wave moving arm 32 for moving the boat. Ru.

The trolley 20.22 extends through a slot 24.26 in the cover 18. vinegar Lips 21 are provided along both sides of the lot. Trolley 20 is quartz bo It has an upper platform 28 for supporting the seat 14. Trolley 22 is plus It has an upper end platform 60 that supports the tick boat 12.

Both trolleys 20 and 22 are attached to the upper and lower parts of the trolley (see Figure 14 for trolley 22). (shown) includes a groove material 116 that is bolted therebetween. drip shield 11 8 is attached to the cover 18 and disposed within the groove-shaped opening formed by the member 116. It will be done. The groove-like member 116, the drip shield 118, and the lip-like portion 21 allow cleaning. To prevent cleaning liquid from leaking into the cover 18.

The moving arm 32 is a vertical arm that passes through the slot 68 in the cover 18. 64, attached to filter 6. The arm 32 is made of aluminum via the right angle member 40. - Connected to the wafer nodle ξ 42; Wafer patrol 42 is its central leg. There are four suction openings 154 at 46 for gripping the way/S. Each vacuum opening 154 has a stroke-shaped raised part (o, oio inch raised part) surrounding the opening. . The opening and the raised part are arranged so that the ueno can be caught closer to the edge than over medium heat.

Referring to FIGS. 8 and 10, the paddle 42 has a layered layer on one side of the central leg 46. There is a Teflon sheet 16. Teflon (etched for easy adhesion) ・The seat is Chemgrip (manufactured by Chempresto, Uniin, New Jersey). Glued to aluminum with epoxy adhesive and then reduced to a desired thickness of approximately 0.020 inch. The thickness of the center leg 46 is approximately 0.12 inches. this small The end of the boat where you can fit the paddle into the slot and the wafer into the slot. It can be moved very close to. Glue a Teflon sheet to the suction tube 164 Before inserting into the aluminum groove. Vacuum accessories, vacuum lines (not shown) Connect suction tube 164 to a vacuum source. 4 solenoids/valves and 4 sensors - (not shown) is provided for each vacuum line to determine the vacuum state of each opening 154. individually controlled and detected.

A vacuum tank is connected to the main vacuum line, which is used in the event of a failure of the main vacuum source. It is used to maintain the vacuum level of the two openings 154 through the Lenoy de valve. Ru.

The pressure sensor in the vacuum line makes sure that the vacuum level of the two openings, that is, the sea urchin... Provides information indicating whether or not the state is set. The remaining two opening valves are then closed. Similarly, the vacuum tank maintains the vacuum in only the remaining two openings. tank can maintain the vacuum until the wafers are placed on the boat. Ru.

FIG. 16 shows the drive mechanism of the trolley 20 of the quartz boat. The servo ・The motor 48 is connected to the sprocket 49 via a helical coupling 51. Ru. Chain 55 (other chains mentioned in this book include WinFriend M. There is a cable chain belt made by Barb, and this belt has backlash. Although it has little ductility, it is supported by bearings like other sprockets. ) between sprocket 49 and sprocket 56. Fixed downward play and possible An adjustment upper plate (not shown) supports sprockets 49 and 53, with one sprocket By moving the rocket relative to the other sprocket, the chain 55 is tensioned. can be adjusted. The sprocket 56 is connected to the clutch device 57 and the helical coupling 52. It is coupled to the sprocket 50 via. Trolley 20 is an aluminum truck The check placed on the lock 110 (Figure 2) and suspended between the sprockets 50 and 56. 54. The sprocket 50, 56 supports are aligned along two axes (Fig. 2). It is movable and the tension of the chain 54 can be adjusted. Trolley 20 is trolley and Connected to the chain 54 by a flexible fastener 201 bolted to the chain do. The incremental optical encoder 60 connects to the sprocket 6 via a helical coupling 61. Combine to 1. A redundant incremental optical encoder 47 can be provided (hashelical (coupled to sprocket 50 via shilling 450). The encoder 60 It has a resolution of 0.00.03 inch for the movement of Lolly 20 in the Z direction. Ru.

Also shown in FIG. 16 is the drive mechanism for the plastic trolley 22. The servo· The motor 62 is coupled to a sprocket 66 via a helical coupling 65. . A chain 67 runs between sprockets 66 and 69. chain 6 The tension of chain 7 can be adjusted in a similar manner to chain 55. Sprocket 69 is cracked. The chain device 71 is connected to the sprocket 64 via a helical cutter ring 66. . The trolley 22 is placed on an aluminum trunk 112 (Figs. 2 and 14). , connected to a chain 68 extending between sprockets 64 and 70. sprocket The supports 64 and 70 can be moved in the Z-axis direction to adjust the tension of the chain 68.

Trolley 20 is connected to the chain in a similar manner as trolley 22 is connected to chain 54. Connected to Inn 68.

Incremental optical encoder 74 is coupled to sprocket 70 via a coupling. be done. Clutches 57 and 71 are designed to prevent the trolley from moving (wafers and (by applying excessive pressure to the wafer). Crap Although the relationship between the servo motor and trolley is deviated due to the slippage of the chain, the encoder 60 ．． Regarding the relationship between 74 and the trolley, the encoder is the sprocket that drives the trolley. Since it is directly connected to the clutch, there is no effect, and if the clutch slips, the trolley will be removed. location information will not be lost.

A support mechanism for the wafer moving arm 32 is shown in FIGS. 2 and 6. vertical axis 4.66 is attached to a trolley mounted on a vertical aluminum track 78. is attached. The vertical track 78 is used to move the arm roller 2 in the X and Y directions. A horizontal aluminum truck is rigidly attached to the base 16 by support members 84. The trolley 80 is attached to a rack 82 .

2, 6 and 4 show the drive mechanism of the wafer moving arm 62. There is. A step motor 86 is coupled to a sprocket 88 via a clutch 90. Ru. A chain 92 spans between sprockets 88 and 94. Sprocket 94 is vertical 10 It is coupled to a sprocket 96 via a shaft 98 passing through the member OO. Che In 100 is wound around sprocket 96.102.104.10, and the cup is It is connected to the vertical arm filter 4 via a ring 107. To translate the vertical arm 4 The coupling 107 that moves the chain 100 has an opening on the arm 34. attached to the chain 100 inserted into the corresponding hole of the block 111 There is pin 109. The vertical and horizontal movements (movements in the X and Y directions) of the paddle are coupled The step drives the chain 100 which is connected to the vertical arm filter 4 via the ring 107. is controlled by a pump motor 86. -710 inserted into the corresponding hole of the block 9 indicates the movement of the arm roller 4 from the X direction to the Y direction or from the Y direction to the X direction. Rotates freely when turning. The carriage 76 has a track that allows vertical movement. The carriage 80 rides on a trunk 82 that allows horizontal movement.

Referring to FIG. 5, a Teflon support member 120 supporting the quartz boat 14 , 122, 124, 126 are attached to platform 28. plant - The member 126 located at one end of the platform is fixed, but the member 124 located at the other end can be freely attached to the platform. Members 124 and 126 are attached to one lower bolt. engages both ends of the seat rail 160. The part located on the back side of the platform 28 The material 120 has an aluminum back surface 121 that secures the material 120, while the front surface has an aluminum back surface 121. The located members 122 and 126 are connected to the platform through spring steel flexures to the base. variably mounted. The fixed member 120 has a support member parallel to the upper boat rail 128. A recess 202 that can be engaged with this and aligned with the center pan (134) of the quartz boat. A vertical cutout 204 is formed. The flexible member 123 has a A recess 210 is formed that is parallel to and rests against the upper boat rail.

Flexible member 122 does not have a recess to engage the top rail, but instead has a flat, tapered surface. There is. 4 parts (for example, the position along the surface of the upper rail adjustment member 122 without a recess) This reduces the angular misalignment between the two top rails. can be adjusted.

This allows the top rail to fit snugly over the other four parts of the support member.

If all members have four parts, all boards with mismatched holes will have four parts. It no longer fits into the recess, and it is impossible to predict which recess it is supported by. child In the six-point configuration shown here, the rails are always connected to the six-point configurations formed in members 120 and 122. Because it fits perfectly into the two recesses, you can accurately and reproducibly position the hoard. be able to.

The quartz boat 14, which is aligned with the support member, has two upper rails 128 and one or more has two lower rails 160. The upper rail receives a wafer 130. Slots 1 and 2 are formed. The rail has 6 semicircular bands 1, 4 and 2 ends They are interconnected by members 166 and are parallel to each other. The wafer is placed in the slot. and is supported by the lower rail. There is a ball between the two slotted upper rails. There is usually a deviation due to errors in the production of the boat or warping of the boat in the diffusion furnace.

This misalignment or misalignment may be nothing more than a relative misalignment along two directions, but Usually, the wafer is placed between two slots without scraping the slot walls. The wafer must be rotated around the Y axis in order to be inserted into the cut. .

In FIG. 6, the support members of the plastic boat 12 are shown. aluminum· Channel portions 139 are located at each end of the platform 6° and are connected to flexible members 168. ．． 142 is supported. Members 138 and 142 are Teflon spring steel plates 143. It is attached to the channel part 169 through the channel part 169. Located in the center of platform 6o The fixed aluminum channel 141 located between both boats 12 support member 140.

Support members 168, 140, 142 slide in grooves 145 located at each end of the boat. Ru. The flexibility of members 168, 142 ensures that the boat is supported in place; On the other hand, the rigidity of member 140 allows accurate positioning of the boat relative to the platform. It is possible to maintain a sense of balance. The plastic boat 12 is for receiving wafers. It has an open bottom and side slots 144.

Alignment rollers 146, 148 extend along the length of the top surface of platform 60. wafers can be contacted through the open bottom of the boat. Shown in Figure 15 As such, roller 146 is coupled to motor 150 via chain 152.

As shown in FIGS. 8 and 11, the wafer paddle 42 has a central leg 46 and two outer legs. It has a square leg 156. Infrared LED-ξ Lux light source 400 (Texas Inc. Tl Approximately 10,000 pulses/second by Riro 1, pulse duration approximately 10 microseconds) The light passes through the lens 401 and the optical fiber bundle 402 (the cavity of the arm member 168). ), and passes through the lens 403 of the paddle. The light reflected by the mirror 160 is reflected by the lens 405. The light is received and sent to another optical fiber bundle (not shown) and another lens (not shown). (not shown) to an infrared sensor (Texas Inc. Tl131, not shown) . The same configuration of light source lens, optical fiber bundle and sensor are used on both sides of the paddle. I can stay. The lens at the end of the light source and optical fiber sensor bundles the light from the light source. It focuses the light from the bundle onto the sensor. The lens of Met9le has a strong light beam. The light is focused on the slot location, and the piece width at that location is minimized during the slot. Improve the ability to identify the center.

The mirror 60 has a trapezoidal cross section. The narrow base of the trapezoid reflects the light and only about 0.060 mm It is inches wide and only reflects light beams of the same width. (For inclined legs with trapezoidal cross section) corresponding) adjacent surfaces of the mirror reflect other light.

The light beam is focused narrowest at the slot, so the center of the slot High ability to identify. The beam width at such locations is comparable to the slot width; Must be wider than 150% of slot width.

The optical fiber bundle is continuously bent when the paddle arm moves in the XY plane. In order to avoid Align the light source and sensor only when they are at the measurement location inside the quartz boat. . At other paddle positions, light measurements are not required, so the bundle is shifted away from the light source and sensor.

Referring to FIGS. 2, 4, and 12, the rotating arm 62 is rotated around the Y axis. 14 shows the mechanism for rotating the wafer. be. The wafer moving arm 62 consists of a solid member 166 and a hollow member 168. Mo The motor 170 has a pin 174 (FIG. 12) extending through a slot 176 in member 166. The cam 172 is coupled to the cam 172. Member 166 is attached to member 140 that supports paddle 42. Can be firmly attached. Members 140 and 168 provide Y-axis rotation between member 166 and the paddle. It is attached via a spring steel flexure 141 that allows for.

Figure 16 shows what happens when a wafer is placed (or lifted) violently. To avoid contamination caused by flying wafer debris from the edge of the wafer, - A mechanism that gently places the wafer on the boat and lifts it from the boat. Ru. Vacuum actuated actuator 410 and spring 412 are part of pivot arm 414. Attached to the end. Frictionless damper 416 is part 1 of the wafer transfer arm. 68 at the far end. A lot that connects the diameter member 416 and the member 168. 418 is free to pivot until enlargement 420 contacts pivot arm 414. Slide through the arm.

To perform gentle placement, first actuate the actuator 410 to move the arm 414. Slightly lift the wafer transfer paddle by pulling the Once in place, release actuator 410 and it will quickly move under the force of spring 412. The arm 414 is moved upward, and the downward movement of the paddle is only caused by the force of the damper 416. so that it receives more resistance.

To gently lift it, just activate the vacuum actuator. damper 416 slowly lifts the paddle to resist the downward movement of the actuator. can be done. The vertical movement of the paddle during gentle loading and lifting is 100 The movement is about 20 to 20 romils, and the time required for this movement is about 1/2 second. a An adjustable counterweight at the far end of beam member 168 can be adjusted to (in the soldered state) with a downward impact force of approximately 50 Durhams. manual in vacuum line An adjustable variable flow valve adjusts the rate of rise and fall.

Referring to FIG. 14, aluminum track 112 is connected to track 78.82. ．． 110, an inclined surface 1 extending longitudinally along the top and bottom thereof. 88 are provided.

Similar to Trolley 2 old Trolley 22.76.80, it can be used via Rollanoshi-189. and is supported on the track 112. Each bar is placed on a 45 degree slope 188 It has a pair of aluminum rollers 190. Each roller 190 is a roller It rotates around a fixed shaft that is Sores fitted to the bar and held by a set screw. Ru. Contact between roller 190 and roller bar 189 by spacer on shaft is prevented while a retaining ring holds the roller on the shaft, the roller holds the carrier By the action of parallel spring steel flexures 185, 187 connected to one of the roller bars , in pressure contact with the surface 188 of the track. Trolley 20. 22. Set at 76°80 The parallel spring steel flexures 185, 187 act as parallelograms and slop Absorbs fluctuations, prevents trolley tilting and loss of motion, without backlash Support the trolley on the track without. The bottom surface 188 is such that the flexure material absorbs the fluctuation of the bottom surface. For absorption purposes, the bottom surface 188 does not need to be precisely machined.

6 The boat trolley 20.22 is equipped with an adjustment mechanism (not shown) to Vertical adjustment and tilt adjustment (and around the Y axis) between the trolley support mechanism and the trolley.

motion The two plastic boats 12 loaded with wafers 11 are cleaned and then transported to the trolley. Place it on the platform 0 of A 22 and hold it at a predetermined position using the supporting members to hold.

Step motor 1 coupled to roller 146 below plastic boat 12 50 for a short time to rotate roller 146 so that the flat side 192 of the wafer is 11 until they all point downwards (i.e. parallel to the platform O) Rotate. Rollers 148 are free to move and help guide the wafer to the desired position. make it easier. The roller 146 rotates the wafer when the flat side of the wafer faces downward. Stop rotation. The operating time of step motor 150 is desired for all wafers. Make it long enough to reach the desired position.

Place the empty Quoru boat 14 on the platform 28, and place the members 120, 122, 124, 126 to hold it in place. Lower the paddle to the boat and take the trolley 20 Move the paddle to pass through the slot. The height of the paddle is such that the light path is at that height. Adjust to a point where fluctuations in the optical sensor output at the slot position always occur.

This adjustment need not be made every time a movement is made. The supporting members of the Quoru boat This is because the quartz rail and slot are always at the same height.

To measure the position of the slot in the upper rail of the empty quartz boat 14, Move paddle 42 to one end of the interior of the empty quartz boat. paddle The center leg 46 of the runs between the upper rails, while the previous leg 156 runs along the outside of the boat. Pass. Next, the trolley 20 of the quartz boat is advanced, and ξ dollars (about 1 inch) is moved forward. inch/second) into the support part 126 (the support member having the recess 210). Pass through the five slots 1 and 2 closest to the end of the boat. Measure at this end Do it with Only in this position are both boat rails at known vertical positions. (at the other end, one of the rails will be higher due to misalignment). If it is too high or too low, the slot sensor will not operate satisfactorily. ) The positions of slots 1 and 2 are determined by detecting changes in the light intensity of the optical sensor. Can be determined. Light from the light source is reflected by mirror 160 and reaches the sensor. This optical path is As shown in Figure 9, if slots 1 and 2 are not aligned with the optical path, they will be disconnected. . The maximum transmitted light is at the exact center of each slot. paddle and 10 slots (5 on each rail) The alignment between the positions is between En-1-F60 and the output of the optical sensor. It can be determined from The 10 position information is processed and the wafer is carried on the paddle. Determine the rotation angle θ (FIG. 11) required to align the plane with the slot. all slots One wafer rotation angle is generally sufficient for each cut (two upper The variation in slot spacing between rails is smaller than the deviation in the length direction of the rails. ) is desired, set the wafer rotation angle separately for each slot pair. You can write it down.

After determining the misalignment angle θ of the wafer, move the path 42 around the Y axis at that angle. Rotate. To do this, the step motor 170 is rotated so that the cam 17 2, and the pin 174 (Figs. 12a and 12h) is inserted into the member 16 of the 7-m 32. longitudinally within the slot 176 located at 6. As a result, the paddle 42 is fixed and movably attached to the C/L member 168 by a spring steel flexure member 141. The attached member 166 rotates about the Y axis relative to member 168.

To check the accuracy of the angle correction, move the paddle 42 again and adjust the quartz boat 14. Pass it through. Record the output of encoder 6σ again and determine the matching position from the position of maximum light intensity. Set.

If the alignment is insufficient, set a new wafer rotation angle and turn the step motor 170. Actuation positions the paddle 42 at a new angle and threads it through the quartz boat again.

Repeat this step several times until the correct match is obtained. Correct alignment cannot be obtained. If not, an error will be displayed on the controller. As a final check for alignment, the boat One or two slots on each end that pass through the slots in the virtual clasp are visible under light. However, it is easier to calculate the position based on other slot positions. ・can be filled), and from the output of the encoder 60 and optical sensor, each slot pair is 1. Make sure the wafer is received close enough to the center of the slot that the edge of the wafer Determine if there is no rubbing between the slot walls. back ley position so that all slots in the module are detected and their centers are free from rubbing. must be protected. For front rails, always fill all slots No need to detect. This is often caused by front rails due to rail mismatch. If the slot of the sensor is too high or too low that the sensor τ can detect it. This is to do so. Therefore, when deciding to move, all front slots need not be detected.

To move the wafer, first move the ξ dollar 42 between one end of the first boat and the first wafer. - The first of the two plastic boats between them did not move. This patrol The position is the same for all movements. The outside that gives suction to the opening 154 Activate the vacuum source and place one of the four vacuum openings on the pressure sensor (not shown). is completely or partially removed by contact between the first wafer and the raised portion 15 surrounding this opening. The trolley 22 is advanced until a partial closure is detected. Then the trolley Immediately reduce the speed of the When closed, let the trolley come to a complete stop. Such 6-point wafer, pick-up wafer (which occurs when applying force to the wafer through all four apertures) ) No bending stress occurs. The first wafer is held by the suction force of the opening 154. The paddle 42 is then raised and the first wafer is already lifted by the trolley 20. be transferred to a quall boat that is positioned at the exact location to receive the Then lower it to the Kuoru boat. Qualify wafers without impact In order to place the paddle on the boat, the non-impact loading mechanism shown in Figure 16 is activated, and the final descent of the paddle is carried out. 0 It is controlled by a damper 416. Next, stop the suction in the vacuum opening 154 and close the vacuum opening 154. Move the quartz boat slightly to release the wafer from the paddle, then move the paddle to the quartz boat. ・Elevate it from the boat and return it to the plastic boat.

Repeat the above transfer procedure until all waves have been delivered to the quartz boat.

Transfer from quartz boat to plastic boat is shockless instead of shockless With a strike pickup, the procedure is reversed.

As a sensor, (1) one or two plastic boats are mounted on the trolley 22; (2) Whether or not there are wafers in the quartz boat (sensor). Infrared light source/sensor in servlock 422 and light path along two directions through the boat (Fig. 5)), (3) Whether or not there is a wedge in the plastic boat. Infrared light source/sensor similar to that of the Quartz Boat) (4) The Quartz Boat is (located in Noroku 420, detected along the Z axis, Some detect infrared light sources/sensors that are blocked by the boat.

The quartz boat slot is approximately 0.030 inch wide and the wafer is approximately 0.030 inch wide. It is 0.025 inches wide. Align the edge of the wedge precisely with the center of the slot This prevents the wedge from being rubbed against the slot during insertion; Avoid stains due to scrubbing (washing and boat cleaning) (There is a risk that the scattered particles may be welded to the surface.)

After inserting into the slot, all wedges tilt equally in one direction (around the X axis) height-adjustable feet (not shown) to raise the device approximately 15 Can be tilted.

Vacuum openings are provided in the paddle, so wafers with severe warpage (e.g. It is advantageous to be able to support even 1 mil per inch of diameter. Vacuum opening time The wafer is supported away from the path surface, and there is some The wafer can be supported without contacting the rest of the . There is plenty of room for sledding. Since the vacuum opening is placed near the periphery of the way... , the effect of warping at the edge of the wafer can be reduced, which means that (・ξ$) The distance between the vacuum opening and the wafer edge is short (supporting the wafer in a known position) Therefore, it is impossible for the edge to be largely displaced due to warping.

In contrast, if the wafer is supported at its center, the position of the edge of the wafer (this is why the edge of the wafer is placed in the slot of the boat). (difficult to align). 5 inch (125mm) wafer However, this system can handle such wafers without any problems.

Prior to slot measurement or wafer transfer, the instrument must undergo a calibration process (power off). (Start by cutting the material and reinserting it.) In this process (all other operation (under computer control), whether the power supply and vacuum are normal Check and cycle the various step motors. two trolleys The step motor that drives the motor is driven to one limit position, and the absolute The counter of each motor is used as standard. Set to 0. Wafer angle step motor also cycle operation 1, upper and lower limits of lever , and then set it to its center position at °C. Wafer arm step motor Set the motor (the motor that moves the arm in the XY plane) to the normal reset position. . The front panel is used to start/stop the equipment and start/stop wafer transfer. A button (not shown) is provided. The latter is used to stop transport in an emergency.

When you press the transfer start button, the sensor output is checked and the loaded plastic is checked. Number of stick boats (1 or 2) and whether a quartz boat is installed Determine whether Whether the wafer is placed in a quartz boat or a plastic boat We will also check to see if it is present. This information tells the equipment the direction of wafer transfer. Ru. If the wafer is in both locations, display an error message (e.g. on the front panel). (by displaying a numeric error code on the screen).

For transfer from plastic boat to quartz boat, quartz trolley center and lower the paddle to the desired height for the slot position. then Translate the quartz boat and bring the patrol/sensor to one end of the boat . Now repeat the procedure for determining the paddle rotation angle θ: (for 115 pairs of slots) (2) Rotate the paddle to correct the misalignment. (3) Check slot/paddle alignment after rotation; (4) Best alignment. Repeat the steps until the rotation angle is obtained. Other embodiments are within the scope of the following claims. For example, equipment of different sizes can be easily modified to suit different types of boats and boats of different configurations.・ξ dollar Add a sensor to detect the slot position of the bottom rail of the quartz boat. can be set. The trolley track may also be provided with different types of surfaces.

For example, instead of surface 188, plastic plates attached to the upper and lower tracks The use of backbars results in quieter operation and less wear and tear. Se by adding a sensor to detect whether it is on the front or back side of the wafer. can detect whether the seat is facing backwards.

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Claims (1)

[Claims] 1. An apparatus for placing a first element on a position of a second element, wherein the second element has a known change in shape at the position; supporting said first element and translating it towards said second element along a mounting direction; a first moving device that moves the supporting member or the second element along a transverse direction that traverses the placement direction; a detection device for detecting relative alignment along the transverse direction between; 2. The device according to claim 1 further includes a second moving device that moves the support member and the detection device with respect to the second element along the placement direction. In the apparatus according to claim 1, the detecting device is shaped like the supporting member. The energy beam is directed so that more energy beams are transmitted along path r when the misalignments are aligned than when they are misaligned. - a beam source and an energy beam sensor for detecting the difference in the amount of the energy beam along the path. 4. The apparatus according to claim 1, wherein the second element has a plurality of shape changing portions, and the first moving device is configured such that the detection device sequentially detects the plurality of shape changing portions. moving said support member or said second element to pass; 5. The device according to claim 4 further provides that the first moving device is connected to the detection device. a first processing device that stores information regarding the relative alignment between the support member and the shape-changing portion when the shape-changing portion is passed through the shape-changing portion; The support member moves along the placement direction so that the first element can be placed on the plurality of shape changing parts. (b) a second processing device that determines a desired position of the first moving device; 6. In the apparatus according to claim 1, the first element is a semiconductor wafer, the support member supports the wafer, the shape changing section is a socket for the wafer, and the detection device is a semiconductor wafer. including a device for passing an energy beam or detection element through said receptacle. Z. The apparatus of claim 6, wherein the second element is a holder for a plurality of wafers, and the receptacle comprises a wafer support slot, and the slot is curved. A second moving device is provided that is arranged along the transverse direction and further moves the support member and the detection device with respect to the holder along the placement direction. 8. The apparatus according to claim 7 further includes a device for sequentially moving the support member back and forth along the placement direction in order to place the wafers one at a time in the pair of slots. . 9. The device according to claim 7 further includes: a position measuring device that measures the position along the transverse direction of the holder or support member moved by the tenth moving device; and the first moving device. actuate the support member and the detection device. a measurement control device that moves the device to pass through the plurality of slots; and a measurement control device that moves the device to pass through the plurality of slots; processing the position and the output of the detection device, and connecting the support member and the slot so that the wafer carried by the support member along the loading direction is received in the slot. a first processing device that determines a plurality of alignment positions along the transverse direction at which the objects are aligned; 10. The device according to claim 9 further operates the first moving device to sequentially move the support member or holder to each of the alignment positions, and moves the second moving device to each of the positions. is actuated to move the wedge carried by the support member into the slot. Includes a wafer loading control device that moves the 11. The apparatus according to claim 10, wherein the holder includes each of the wafers. There are two slots for each pair of slots, and based on the alignment position of each slot pair, the slots are moved along the mounting direction around an axis substantially parallel to the mounting direction. a second processing device is provided for determining the rotation angle by which the wafer must be rotated so that the wafer is received in the pair of slots when the wafer is received in the pair of slots; What I did. 12. The apparatus according to claim 11 further includes rotating the support member around the rotation axis by the rotation angle before installing the wafer in the slot. including equipment for 16. In the apparatus according to claim 10, the wafer holder is a quartz holder suitable for placing the wafer 1 in a furnace, and the supporting portion material, a sensing device, and first and second moving devices work together with said quartz holder. and. 14. The apparatus according to claim 6, wherein the detection device detects an error along a path intersecting the slot at least when the support member and the slot are aligned. an energy beam source positioned such that more energy beams pass through the energy beam when the support member and the slot are aligned than when the slots are misaligned; Energies arranged to detect differences in the amount of beams gee beam sensor and more. 154. The apparatus of claim 14, wherein the energy beam source is a light source that directs a light beam along the path, and the energy beam sensor The sensor must be a light sensor. 16. The apparatus according to claim 14, wherein the holder includes each of the wafers. two slots per server, said two sources and two sensors disposed on said support member, each directed beam intersecting a respective slot of said pair of slots under alignment; . 17 The device according to claim 16 is further configured to be operated by the first moving device. a position measuring device for measuring the position along the transverse direction of the holder 1 or the support member to be moved; a first measurement control device for processing the outputs of the sensors of both the position measurement device and the verification device to determine a position along the transverse direction at which the energy beam and the slot are aligned; 18. The apparatus according to claim 16, wherein the support member includes a central portion placed inside the holder, and a central portion located outside the holder but along the transverse direction. at least one outer part disposed at substantially the same position as the holder, the central part and the outer part straddling one side of the holder, and the detection device transmits light from the central part to the outer part. including a device for directing the 19. The device according to claim 18, wherein the light source and the sensor are arranged in the outer part, and a mirror that reflects the light from the light source is arranged in the central part. 20. The apparatus of claim 19, wherein there are two mirrors on either side of the central portion, and two pairs of light sources and sensors on the two outer portions, each straddling one side of the holder. thing. 21. The apparatus of claim 16, wherein the light source and sensor include two optical fiber paths leading to the support member and the light source and sensor located remote from the support member. 22. In the device according to claim 16, the region ψ of the light beam that intersects with the slot has a width that is 1.5 times or less the width of the slot (width along the transverse direction). , the resolution of the position of the slot by the detection device is increased. 23. The apparatus according to claim 17, wherein the first processing device and a device for determining the alignment position by determining a position along the transverse direction where the amount of passage of the beam through the lot is maximum. 24. The apparatus according to claim 12, wherein the measurement control device and a device for moving the supporting member and the detection device to pass through the plurality of slots again after rotating the holding member by the rotation angle, and the second processing device rotates the holding member by the rotation angle. and a device for determining whether the alignment of the support member with respect to the slot has deteriorated due to a change in temperature. 25. The apparatus according to claim 12, wherein the measurement control device includes a device for moving the support member and the detection device to allow only a portion of the plurality of slots to pass through, and includes a device for determining the rotation angles for all slots from outputs for only some of the slots. 26. When moving equipment such as semiconductor wafers, each a wafer pick-up element forming at least two apertures disposed near the edge of the wafer; and applying a lower than atmospheric pressure or a vacuum to the apertures to attract the wafer to the wafer pick-up surface; and a device for picking up the wafer without shifting the position of the edge of the wafer with respect to the pick-up element. There is an embankment around it, and a region between the openings of the wafer pick-up element is formed by the embankment. Wafers with warpage can be picked up by positioning the wafer under the That's what I tried to do. 28 The device according to claim 26 further includes a vacuum line leading to each of the openings. It has individual pressure sensors connected to the wafer, and the initial contact between one aperture and the wafer can be detected from a change in the output of the pressure sensor of either aperture. 29. The device according to claim 27, wherein the raised portion is made of Teflon. To be. 60. The device of claim 27, wherein there are four openings, each opening at the front. It extends along a direction parallel to the radial direction of the wafer, and the front Surrounded by the embankment. Ro1. The apparatus according to claim 28 further comprises: a device for moving the wafer pick-up element relative to a wafer holder in a direction perpendicular to the plane of the wafer supported by the pick-up element; Finally, when one vacuum opening is closed and it is detected that it is starting to make contact with the wafer surface, a device is installed to reduce the wafer movement speed, and a device is installed to reduce the wafer movement speed and detect that multiple vacuum openings have closed. shall include a device to stop the movement of the wave when 62, wafers are placed on a QUORUT wafer boat that can hold more than 50 wafers. A wafer thin enough to hold a wafer, a pick-up element A semiconductor wafer transfer device consisting of an element laminated with a layer of Teflon that provides inert contact to the substrate and a layer of Atsubenium that provides rigidity. 36. The apparatus according to claim 62, wherein the aluminum includes wafer. C. A vacuum opening in the contact surface has a groove filled with a tube for guiding the vacuum, the groove opening into the surface of the aluminum layered on the Teflon layer, and the tube opening in the groove prior to layering. be located within. 34. In an apparatus for loading semiconductor wafers on a boat or picking up wafers from a boat, a wafer support member or a device that supports the wafers in a substantially vertical direction includes a patrol, a moving device for moving the supporting member to the boat, and a moving device for moving the supporting member to the wafer mounting position. A damping device configured to cause the supporting member and the wafer to move downwardly by a damping force when picking up the wafer, and to move upwardly by slowing the supporting member and the wafer by the damping force when picking up the wafer. 65. The device according to claim 64, wherein the support member is supported by an arm supported with a deflection so as to be rotatable, and the damping device is arranged on the arm. Acting to prevent rotation of the system. 66 A boat equipped with at least two slots for receiving semiconductor wafers. In an apparatus for inserting a wafer, a wafer support member or a nodule that supports the wafer and an angle necessary to insert the edge of the wafer into the center of the slot. a rotation device that rotates the support member; and a rotation device that translates the rotated support member and an installation device for installing the wafer in the slot of the boat, the device being capable of installing the wafer in the slot without an edge of the wafer rubbing against a wall of the slot. 67. The apparatus according to claim 36 provides a a detection device that detects the position of the slot, and a processing device that calculates the rotation angle from the detected position. 68. The apparatus of claim 66, wherein upon installation, said translation is along a single installation direction and said rotation is about an axis parallel to said installation direction. and. 9. The apparatus according to claim 37, wherein the wafer support member is supported by an arm that is rotatably supported, and the rotation axis of the wafer corresponds to the rotation of the arm. 40. The apparatus of claim 69 further comprises: a step motor and a cam for rotating the step motor, and the step motor is controlled by the processing device. 41. The apparatus of claim 40, wherein the detection device is disposed on the support member and further operates the step motor to rotate the support member. rotate the wafer by the rotation angle, and then activate the detection device to detect the wafer according to the selected rotation angle. determining whether the desired alignment between the edge of the stepper and the center of the slot has been achieved, and repeatedly activating the stepper motor to change the angle of rotation. 42 The device according to claim 40 further includes variable support for the rotary arm. have a fixed arm. 46. The apparatus of claim 42, wherein said step motor is fixed to said fixed arm, said cam having a rotatable member coupled to said step motor shaft, and said step motor having a rotatable member coupled to said step motor shaft. a pin offset from the axis of the shaft and a slot in the rotatable arm for receiving the pin, rotation of the stepper motor causing the pin to move within the slot; a The system was designed to give rotation to the system. 44. The device according to claim 42, wherein the arm changes the rotation angle. Transferring the wafers to said boat by translation together without causing any 45. A device for repeatedly translating a member along a predetermined path so that the member moves away from and back from a precise position, the track having an upper surface and a lower surface along said path. a trolley supported by the track, rollers supporting the trolley on the upper and lower surfaces of the truck, and a flexible member attached to the lower surface of the track between the trolley and the rollers, The sawing material is moved forward by firmly pressing the rollers against the upper and lower surfaces of the track. The trolley and the front 11 of the truck are made so that there is no slippage in the throttle motion. A device that supports the loli on the truck. 46. The device according to claim 45, wherein each of the upper surface and the lower surface has a respective Two inclined surfaces each supporting one roller are formed. 34 4Z The device according to claim 45, wherein the upper surface is smoother than the lower surface. To be something. 48. The apparatus of claim 45, wherein the flexure comprises a parallelogram structure of two flexible plates extending below the trolley to the structure supporting the rollers. Be successful. 49. The device according to claim 45, wherein the trolley has upper and lower rods. The roller has a front and rear set of rollers, making a total of 8 rollers. 50. The apparatus of claim 45 further comprising a chain supported on a sprocket and coupled to the trolley for driving the trolley along the track. That's what I do. 51 The device according to claim 45 further includes a device attached to the first trolley. a first track mounted on the second trolley; a second track attached to the second trolley; be configured so that it can be translated by 52. The device of claim 50 further comprises a device coupled to the sprocket. a step motor coupled to the sprocket and driving the chain; and an encoder for displaying the position of the trolley. 56. The apparatus of claim 51 is further coupled to the second trolley. a continuous chain; a sprocket adapted to move the chain along a non-linear path in said plane; and a sprocket for coupling said trolley to said continuous chain. a coupling member that allows the arm to move through a non-linear path within the plane defined by the non-linear path of the chain. 54 Transferring at least one semiconductor wafer between the first boat and the second boat. The transferring device includes: a wafer support member that supports the wafer during transfer; an arm to which the support member is attached; an arm moving device that moves the arm between the first and second boats; a first boat support device that supports the first boat; and a second boat support device that supports the second boat; Apparatus having a track for supporting a trolley with a boat attached thereon by means of roller bearings. 55. The apparatus of claim 56, wherein both of said boat support devices include said tracks, rollers, bearings and trolleys. 56 The device according to claim 54 further includes a device in which the arm is translated in an XY plane. and a device for translating the boat in the Z direction. 57. The apparatus of claim 54, wherein the arm moving device has the two track configuration of claim 51. 58 In a semiconductor wafer transfer device, in which a wafer holder of the type placed in a furnace is provided with two upper rails with spouts, one of the rails is attached to two upper rails spaced apart along the rail. Two recesses to accept in position a first retaining member having a section and receiving the other rail at a first position along the rail; a second holding member having a recessed portion along the rail; and a sixth holding member having a flat, unrecessed surface for engaging the other rail at a second position along the rail; It is constrained only in six positions, and the fourth position is forced to assume its natural position to compensate for the misalignment between the rails. A device characterized by the fact that 59. The apparatus of claim 58, wherein the first holding member is fixed, and the second and sixth holding members are freely attached.