JPS5948053U - メカニカルチヤツク - Google Patents

メカニカルチヤツク

Info

Publication number
JPS5948053U
JPS5948053U JP14266682U JP14266682U JPS5948053U JP S5948053 U JPS5948053 U JP S5948053U JP 14266682 U JP14266682 U JP 14266682U JP 14266682 U JP14266682 U JP 14266682U JP S5948053 U JPS5948053 U JP S5948053U
Authority
JP
Japan
Prior art keywords
mechanical chuck
claw
equalizing ring
wafer
jaw
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14266682U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6211002Y2 (enExample
Inventor
勝義 工藤
正博 高木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP14266682U priority Critical patent/JPS5948053U/ja
Publication of JPS5948053U publication Critical patent/JPS5948053U/ja
Application granted granted Critical
Publication of JPS6211002Y2 publication Critical patent/JPS6211002Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Gripping Jigs, Holding Jigs, And Positioning Jigs (AREA)
  • Drying Of Semiconductors (AREA)
JP14266682U 1982-09-22 1982-09-22 メカニカルチヤツク Granted JPS5948053U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14266682U JPS5948053U (ja) 1982-09-22 1982-09-22 メカニカルチヤツク

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14266682U JPS5948053U (ja) 1982-09-22 1982-09-22 メカニカルチヤツク

Publications (2)

Publication Number Publication Date
JPS5948053U true JPS5948053U (ja) 1984-03-30
JPS6211002Y2 JPS6211002Y2 (enExample) 1987-03-16

Family

ID=30318703

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14266682U Granted JPS5948053U (ja) 1982-09-22 1982-09-22 メカニカルチヤツク

Country Status (1)

Country Link
JP (1) JPS5948053U (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010253624A (ja) * 2009-04-27 2010-11-11 Ihi Corp ワーク設置装置とワーク設置方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010253624A (ja) * 2009-04-27 2010-11-11 Ihi Corp ワーク設置装置とワーク設置方法

Also Published As

Publication number Publication date
JPS6211002Y2 (enExample) 1987-03-16

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