JPS5947156A - Method and device for polishing hydraulically vibrating surface - Google Patents

Method and device for polishing hydraulically vibrating surface

Info

Publication number
JPS5947156A
JPS5947156A JP15861282A JP15861282A JPS5947156A JP S5947156 A JPS5947156 A JP S5947156A JP 15861282 A JP15861282 A JP 15861282A JP 15861282 A JP15861282 A JP 15861282A JP S5947156 A JPS5947156 A JP S5947156A
Authority
JP
Japan
Prior art keywords
workpiece
polishing
media
hydraulic cylinder
vibration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15861282A
Other languages
Japanese (ja)
Inventor
Shigeru Baba
馬場 繁
Takao Ishida
石田 喬男
Takao Yokoyama
横山 恭男
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SHINTOU BUREETAA KK
Sintobrator Ltd
Original Assignee
SHINTOU BUREETAA KK
Sintobrator Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SHINTOU BUREETAA KK, Sintobrator Ltd filed Critical SHINTOU BUREETAA KK
Priority to JP15861282A priority Critical patent/JPS5947156A/en
Publication of JPS5947156A publication Critical patent/JPS5947156A/en
Pending legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B31/00Machines or devices designed for polishing or abrading surfaces on work by means of tumbling apparatus or other apparatus in which the work and/or the abrasive material is loose; Accessories therefor
    • B24B31/003Machines or devices designed for polishing or abrading surfaces on work by means of tumbling apparatus or other apparatus in which the work and/or the abrasive material is loose; Accessories therefor whereby the workpieces are mounted on a holder and are immersed in the abrasive material

Abstract

PURPOSE:To enable highly accurate and high-speed polishing up to every corner of labyrinth holes by polishing a workpiece which is fitted to the work grip of a double acting hydraulic cylinder, in a media vessel through the operation of a servo valve connected to a vibration command signal generator. CONSTITUTION:A workpiece (a) is fitted to a work grip 4 at the tip of a cylinder rod 3, a hydraulic cylinder 1 is driven at high speed, a polishing vessel 2 containing media is raised and the workpiece (a) is plunged into the media. On the other hand, oil pressure is generated through an oil-pressure unit 8 connected to the hydraulic cylinder 1, and is transmitted to a servo valve 9. Furtheremore, vibration command signals, which are transmitted to a servo amplifier 10, and after amplified, they are also inputted in the servo valve 9 to generate hydraulic vibration, thereby vertically vibrating the cylinder rod 3. That is, the vibration directly applied to the workpiece due to oil pressure enabled the use of minute media which will not cause clogging, thereby providing smooth and uniform polishing with small finished-surface roughness, regardless of the depth and shape of the holes.

Description

【発明の詳細な説明】 加工品を装入して振動により被加工品を研摩する油圧振
動式表面研摩方法およびその装置に関するものである。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a hydraulic vibratory surface polishing method and apparatus for charging a workpiece and polishing the workpiece by vibration.

孔が開いた物品の製造工程においては孔の内面を研摩す
る要求があり、その加工方法は種々知られているが、い
ずれも一長一短があって複数種の研摩法を併用したシ手
作業による最終仕上を行わなければならない。すなわち
、研摩砥石を往復連動さゼて研摩するylt−ニングマ
シンによる方法では加工孔の大きさ深さに制限があるう
え迷路孔の加工を行えず、また、量産性に欠けるうえに
研摩中に生ずる二次パリの発生という問題もある。一方
、圧縮空気を利用したエアープラスト方法では研摩後の
表面の平滑度が低いうえ盲孔を61F Mする場合にH
満足な結果が得られず、また、迷路孔では孔中をエアー
が通過するに際して圧力が減少して研摩状態が部分的に
異なって均一性が保たれない。しかも、高いエアー圧力
を要するため大きな動力を要し、さらに、砥粒が力(シ
1ー面に埋込まれることもあって仕上げ粗さも粗く、ま
た、二次パリが発生するなど精密仕上けができない。次
に.ケも衝撃加工法では被加工品の利質の溶融湯度、熱
伝導性、耐食性、比熱などの物理的性質により加工性が
変わり、適用する月質が限られるうえに表面t= の変質変形が41;じる外、精密仕上ができない、量産
性がない、作業条件設定が部かしい、操作性が容易でな
い、爆発の危険性がある、平滑仕上ができないなど多く
の問題点がある。次に、公知の回転バレル研摩法、振動
バレル研摩法、遠心バレル研摩法によっては孔内面のj
if+摩、パリ取り加工は殆んど不可能である。他方、
粘弾性砥粒流動加工法では大形形状の被加工品の単純な
孔内面の研摩はできるけれども、研摩後に砥粒を除去洗
浄する工程が複雑であること、角部と平坦面との研摩度
合の差が大ぎいこと、複雑な形状の孔の研摩の場合孔の
形態に合ったクリアランスと強度を有する治具を必要と
すること、量産性が低いなどの問題点があり、ジャイロ
研摩法、スピンフィニツシユ研摩法も孔内面の研摩には
不適である。さらに、オーボレゾナント加工機を用いる
方法では被加工品を取り付ける梁を極めて頑丈なものに
しなければならないこと、被加工品重量に合ゼで常に振
動数調整が必要なこと、研摩剤の性状なとにより振動条
件を調節しなければならないこと、加工条件を変えるこ
とができないなどの問題(点がある。
In the manufacturing process of articles with holes, there is a need to polish the inner surface of the hole, and various processing methods are known, but all of them have advantages and disadvantages, and the final polishing process is a manual process using multiple polishing methods. Finishing work must be done. In other words, the method using a ylt-ning machine, in which a grinding wheel is reciprocated and interlocked for polishing, has limitations on the size and depth of the hole to be machined, and it is not possible to machine labyrinth holes.In addition, it is not suitable for mass production, and There is also the problem of secondary Paris occurring. On the other hand, with the air blast method that uses compressed air, the smoothness of the surface after polishing is low, and H
Satisfactory results are not obtained, and the pressure in the labyrinth hole is reduced when air passes through the hole, resulting in local differences in polishing conditions and non-uniformity. Moreover, it requires high air pressure, which requires a large amount of power. Furthermore, the abrasive grains are forced into the surface (sometimes embedded in the surface of the sheet, resulting in a rough finish, and secondary cracks may occur, resulting in precision finishing damage. Second, with the impact processing method, the workability changes depending on the physical properties of the workpiece, such as the molten metal content, thermal conductivity, corrosion resistance, and specific heat, and the material to which it can be applied is limited. The deformation of t= is 41; in addition, there are many problems such as precision finishing is not possible, mass production is not possible, working condition settings are difficult, operability is not easy, there is a risk of explosion, and smooth finishing is not possible. Next, depending on the known rotary barrel polishing method, vibrating barrel polishing method, and centrifugal barrel polishing method, the j
If + polishing, deburring is almost impossible. On the other hand,
Although the viscoelastic abrasive flow processing method can simply polish the inner surface of a hole in a large-sized workpiece, the process of removing and cleaning the abrasive grains after polishing is complicated, and the degree of polishing of corners and flat surfaces is difficult. The gyro polishing method The spin finish polishing method is also unsuitable for polishing the inner surface of a hole. Furthermore, with the method of using an ovo-resonant processing machine, the beam to which the workpiece is attached must be extremely sturdy, the frequency must be constantly adjusted depending on the weight of the workpiece, and the properties of the abrasive may vary. There are problems such as the need to adjust the vibration conditions and the inability to change the machining conditions.

本発明はこのような現状に鑑みて開発された油圧振動式
表面研摩方法およびその装置を目的として完成されたも
ので、被加工品を複動形の油圧シリンダーのシリンター
ロッドに設けS′i″したワークグリップに保持させて
該被加工品を前記油1−Fシリンダーの高速駆動によシ
直接振動させつつfJf摩槽に収容されたメディア中に
装入して被加工品の表面を研摩することを特徴とする油
圧振動式表面研摩方法を第1の発明とし、研摩イυ1と
対向して設けた複動形の油圧シリンダーのシリンターロ
ッドに被加工品を保持して研摩槽内のメディア中に装入
するワークグリップを股りて該油圧シリンダーの油1−
E回路には振動指令信号発生器にサーボ増幅器を介して
接続されるサーボ弁を組与込んたことを特徴とする油圧
振動式表面研摩装置を第2の発明とするものである。以
下に本発明を図示の池月:、振動式表面研摩装置にょシ
詳しく説明する。
The present invention was completed with the aim of providing a hydraulic vibration type surface polishing method and an apparatus therefor developed in view of the current situation. The surface of the workpiece is polished by holding it in a workpiece grip and placing it into the media stored in the fJf polishing tank while directly vibrating the workpiece by the high-speed drive of the oil 1-F cylinder. The first invention is a hydraulic vibratory surface polishing method characterized by Oil 1- of the hydraulic cylinder across the work grip to be charged into the media
A second invention provides a hydraulic vibrating surface polishing apparatus characterized in that the E circuit incorporates a servo valve connected to a vibration command signal generator via a servo amplifier. The present invention will be explained in detail below using a vibrating surface polishing apparatus as shown in the drawings.

(1)は複動形の油圧シリンダーであって、該油圧シリ
ンダー(1)は昇降動自在な研摩槽(2)の上方位置に
シリンダーロッド(3)を下向きとして設けられていて
シリンターロッド(3)の先端には被加工品(イ)を保
持させて該研摩槽(2)内に収容されているメディア中
に装入させるためのワークグリップ(4)が設けらハ5
ている。(5)は油H・、シリンダー(1)内のピスト
ン(6)をもって区画される室(7)、(7)と油圧ユ
ニット(8)とを接続する油圧回路で、該油14:、回
路(5)の中間にはサーボ弁(9)が組み込まれており
、さらに、このサーボ弁(9)はサーボ増幅器θQを介
して振動指令信号発生器Oυに電気的に接続させである
。なお、図中(1功はシリンターロッド(3)に鉄心a
カを連結させた差動トランス−Cあって、該差動トラン
スaarrzシリンダーロッド(3)の作動中立点がら
の変位を検出して電気信号に変え、変位δt 03によ
シサーボ増幅器(1()にフィー1゛バツクして位置修
正を行い常に安定lまた作動中立点と振幅値を自動的に
確保するために必要に応じ設4−1られるものであるか
ら、他ノ位置センサに代えてもよい。
(1) is a double-acting hydraulic cylinder, and the hydraulic cylinder (1) is installed above a polishing tank (2) which can be moved up and down, with a cylinder rod (3) facing downward. A work grip (4) is provided at the tip of 3) for holding the workpiece (a) and loading it into the media housed in the polishing tank (2).
ing. (5) is a hydraulic circuit that connects the hydraulic unit (8) with the oil H, chambers (7), (7) partitioned by the piston (6) in the cylinder (1); A servo valve (9) is installed in the middle of (5), and this servo valve (9) is electrically connected to the vibration command signal generator Oυ via a servo amplifier θQ. In addition, in the figure (1) the iron core a is attached to the cylinder rod (3).
There is a differential transformer C connected to the differential transformer aarrz cylinder rod (3), which detects the displacement from the operating neutral point of the differential transformer aarrz cylinder rod (3) and converts it into an electric signal, and uses the displacement δt03 to drive the servo amplifier (1 () Since the sensor can be installed as necessary to correct the position by adjusting the position based on the feedback and automatically ensure the neutral point and amplitude value of the operation, it can also be used in place of other position sensors. good.

このように構成された装置によって被加工品の表面研摩
を行うには、先ず、泊り一シリンダー(1ンのシリンダ
ーレッド(3)の先端に設itられたワーククリップ(
4)に被加工品(へ)を手動或いはロボットを使用して
装着保持させ、該油圧シリンダー(1)を高速駆動させ
つつ水、コンパウンドとともにメチイアを収容した研摩
槽(2)を上昇させるが、シリンターロッド(3)と共
に油圧シリンダー(1)を下降さセで被加工品哨を研摩
槽(2)内のメディア中に装入する。
In order to perform surface polishing of a workpiece using the device configured in this way, first, the work clip (
4) The workpiece is attached and held manually or using a robot, and the polishing tank (2) containing water and compound as well as Mechia is raised while driving the hydraulic cylinder (1) at high speed. The hydraulic cylinder (1) is lowered together with the cylinder rod (3), and the workpiece is loaded into the media in the polishing tank (2).

一方、δII圧シリンダ(1)の高速駆動すなわちシリ
ンダーロッド(3)を振動させるには、油圧シリンター
(1)と接続される油圧ユニット(8)で油圧を発生さ
ゼ、この油圧を油圧回路(5)の中間に組み込まれたサ
ーボ弁(9)に送シ、さらに、振動指令信号発生器(1
1)から電気回路によって設定振動信号をツーボ増幅器
(11に伝達してハQ−幅し、これをサーボ弁(9)に
入力してサーボ弁(9)で油圧振動を発生きせ、この油
H]振動を油圧シリンダー(1)に伝達してシリンター
ロッド(3)に設定振動信号に従う上手運動の振動をさ
せる。しかして、メディア中に装入した被加工品(イ)
を振動Wi!; 〜/ 00 Hz、全撮幅0. j 
〜30111ff程度の広い条件範囲内の被加工品(イ
)に最適の条件を選定して振動させたシリンダート1ツ
ド(3)により直接振動させると、被加工品(イ)とメ
ディアとの相対運動差による摩擦によシ被加工品(イ)
はその表面が?iJf摩−れるから、研摩が終れば被加
工品を水洗槽に移して水洗し、さらに、防錆槽に移して
防錆処理を行う。なお、研摩槽は多数設置しても研摩槽
またはワークグリップを公転させて順次研摩してもよく
、また、ω1摩槽、水洗槽、防錆槽などを工程順に設問
順次公転処理してもよい。さらに、研摩槽も撮動させた
り、回転させたυ或いはワーククリップ側を回転させな
がら振動させることなどは自由である。
On the other hand, in order to drive the δII pressure cylinder (1) at high speed, that is, to vibrate the cylinder rod (3), hydraulic pressure is generated in the hydraulic unit (8) connected to the hydraulic cylinder (1), and this hydraulic pressure is transferred to the hydraulic circuit ( The vibration command signal generator (1) is sent to the servo valve (9) built in the middle of the
The set vibration signal is transmitted from 1) to the two-boot amplifier (11) for a Q-width, which is input to the servo valve (9) to generate hydraulic vibration at the servo valve (9). ] The vibration is transmitted to the hydraulic cylinder (1) to cause the cylinder rod (3) to vibrate in a vertical motion according to the set vibration signal.Thus, the workpiece (a) loaded into the media
Vibrate Wi! ~/00 Hz, total imaging width 0. j
If the cylinder head (3) is directly vibrated under the optimum conditions for the workpiece (A) within a wide range of conditions, such as ~30111ff, the relative relationship between the workpiece (A) and the media will be reduced. Workpiece processed by friction caused by differential motion (a)
Is that surface? After polishing, the workpiece is transferred to a washing tank and washed with water, and then transferred to a rust prevention tank for rust prevention treatment. Note that even if a large number of polishing tanks are installed, the polishing tanks or work grips may be rotated and polished one by one, or the ω1 polishing tank, washing tank, rust prevention tank, etc. may be rotated in the order of the questions in the process order. . Furthermore, the polishing tank can also be photographed, and the rotated υ or workpiece clip can be vibrated while being rotated.

このようにして行う表面研摩は被加工品に直接振動が油
圧により加えられることによって、メディアとして孔中
で目詰シしない微小なメチイアを使用することができて
孔の深さ形状に制限な〈実施でき、また、二次パリの発
生などもなくて迷路孔のすみずみまで仕上面粗らさを小
さくして平滑にしかも均一に研摩できるという利点かあ
る。また、油圧使用のため装置をコンバクl−にできる
うえに研削力を増すための振動数を非常に高くすること
ができて短時間に加工できるという利点もあり、さらに
、共振型でなく被加]二品に直接振動を与える直動型の
ため、装置の振動部の疲労破損が少なく、さらにまた、
振幅の変動がないため加工条件の設定が容易で操作性に
すぐれ被加工品ごとに均一で一定の品質が得られ、被加
工品を独立してそれぞれ固定するために被加工品間の衝
突がなく、従って、被加工品に打こんを生ずることもな
い。しかも、高振幅、高振動数で加工することが容易な
うえに振幅、振動数とも無段調整できるので被加工品に
適合した条件を設定でき、また、被加工品の材質に特に
制限がなく、操作性に優れてて工程ラインへ組込んで自
動化することもできるので、飛産性も高く、装置の設置
面積を小ネくかつ製造原価も低くすることができるなど
種々の利点がある。
In surface polishing performed in this way, direct vibrations are applied to the workpiece using hydraulic pressure, and as a result, it is possible to use minute media that does not clog the hole, and there is no limit to the depth and shape of the hole. Moreover, it has the advantage of reducing the roughness of the finished surface and making it smooth and uniform even in every corner of the labyrinth hole without the occurrence of secondary cracks. In addition, since it uses hydraulic pressure, the equipment can be used in combination, and the vibration frequency to increase the grinding force can be made very high, making it possible to process in a short time. ] Since it is a direct-acting type that directly vibrates two parts, there is less fatigue damage to the vibrating part of the device, and furthermore,
Since there is no fluctuation in amplitude, it is easy to set machining conditions and has excellent operability. Uniform and constant quality can be obtained for each workpiece. Collisions between workpieces are prevented because each workpiece is fixed independently. Therefore, no dents are caused in the workpiece. Moreover, it is easy to process with high amplitude and high frequency, and since both amplitude and frequency can be adjusted steplessly, conditions suitable for the workpiece can be set, and there are no particular restrictions on the material of the workpiece. It has various advantages, such as being easy to operate and can be integrated into a process line for automation, making it easy to manufacture, reducing the installation area of the device, and lowering manufacturing costs.

彷って、本発明は従来の表面研摩法の間顕点を解決した
油圧振動式表面ω1摩法およびその装置として業界の発
展に寄与するところ極めて大なものである。
In summary, the present invention greatly contributes to the development of the industry as a hydraulic vibratory surface ω1 polishing method and its apparatus which solve the problems of conventional surface polishing methods.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明の油圧振動式表面研摩装置の実施例を示
す一部切欠正面図、第2図は同【二<一部切欠側面図、
第3図は同じく油圧回路と電気回路の概略を示す回路図
である。 (1):油Lt:、シリンダー、 (2) :研摩槽、
(3)ニジリンダ−ロッド、(4):ワークグリップ、
(5):油圧回路、(8):油圧ユニット、(9):サ
ーボ弁、顛:サーボ増幅器、01):振動指令信号発生
器、(イ):被加工品。
FIG. 1 is a partially cutaway front view showing an embodiment of the hydraulic vibration type surface polishing device of the present invention, and FIG. 2 is a partially cutaway side view of the same.
FIG. 3 is a circuit diagram schematically showing a hydraulic circuit and an electric circuit. (1): Oil Lt:, cylinder, (2): Polishing tank,
(3) Niji cylinder rod, (4): Work grip,
(5): Hydraulic circuit, (8): Hydraulic unit, (9): Servo valve, Part: Servo amplifier, 01): Vibration command signal generator, (A): Workpiece.

Claims (1)

【特許請求の範囲】 /、被加工品を複動形の油圧シリンダーのシリンダーロ
ッドに設けられたワークグリップに保持させて該被加工
品を前記油圧シリンダーの高速駆動により直接振動させ
つつ研摩槽に収容されたメディア中に装入して被加工品
の表面を研摩することを特徴とする油1(、振動式表面
研摩方法。 2、研摩槽と対向して設けた複動形の油圧シリンダーの
シリンダーロッドに被加工品を保持して研摩槽内のメデ
ィア中に装入するワークグリップ。 を設けて該油圧シリンダーの油圧回路には振動指令信号
発生器にサーボ増幅器を介して接続されるサーボ弁を組
み込んだことを特徴とする油圧振動式表面研摩装置。
[Scope of Claims] / A workpiece is held in a work grip provided on a cylinder rod of a double-acting hydraulic cylinder, and the workpiece is directly vibrated by high-speed drive of the hydraulic cylinder and placed in a polishing tank. 1. A vibrating surface polishing method characterized in that the oil is charged into a contained media to polish the surface of the workpiece. 2. A double-acting hydraulic cylinder provided opposite the polishing tank. A workpiece grip is provided to hold the workpiece on the cylinder rod and loaded into the media in the polishing tank.The hydraulic circuit of the hydraulic cylinder is equipped with a servo valve connected to a vibration command signal generator via a servo amplifier. A hydraulic vibratory surface polishing device characterized by incorporating.
JP15861282A 1982-09-10 1982-09-10 Method and device for polishing hydraulically vibrating surface Pending JPS5947156A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15861282A JPS5947156A (en) 1982-09-10 1982-09-10 Method and device for polishing hydraulically vibrating surface

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15861282A JPS5947156A (en) 1982-09-10 1982-09-10 Method and device for polishing hydraulically vibrating surface

Publications (1)

Publication Number Publication Date
JPS5947156A true JPS5947156A (en) 1984-03-16

Family

ID=15675509

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15861282A Pending JPS5947156A (en) 1982-09-10 1982-09-10 Method and device for polishing hydraulically vibrating surface

Country Status (1)

Country Link
JP (1) JPS5947156A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61500351A (en) * 1983-11-09 1986-03-06 ジエネラル キネマテイクス コ−ポレイシヨン Vibratory parts cleaning device and method
FR2587928A1 (en) * 1985-09-27 1987-04-03 Bertin & Cie DEVICE FOR DECAPING OR IMPROVING THE CONDITION OF THE SURFACE OF AN OBJECT WITH SOLID PARTICLES
EP0845327A2 (en) * 1996-11-27 1998-06-03 Shuji Kawasaki Buffing apparatus and method
EP0922530A2 (en) * 1997-12-10 1999-06-16 Shuji Kawasaki Barrel-polishing apparatus and barrel-polishing method
CN109834557A (en) * 2019-03-28 2019-06-04 山东富驰精密机械科技有限公司 A kind of piezoelectric actuator friction plate automatically grinding device and application method

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4940891B1 (en) * 1968-10-12 1974-11-06

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4940891B1 (en) * 1968-10-12 1974-11-06

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61500351A (en) * 1983-11-09 1986-03-06 ジエネラル キネマテイクス コ−ポレイシヨン Vibratory parts cleaning device and method
JPH0547349B2 (en) * 1983-11-09 1993-07-16 Gen Kinematics Corp
FR2587928A1 (en) * 1985-09-27 1987-04-03 Bertin & Cie DEVICE FOR DECAPING OR IMPROVING THE CONDITION OF THE SURFACE OF AN OBJECT WITH SOLID PARTICLES
US5150548A (en) * 1985-09-27 1992-09-29 Bertin & Cie Method for treating the surface of an article with solid particles
EP0845327A2 (en) * 1996-11-27 1998-06-03 Shuji Kawasaki Buffing apparatus and method
EP0845327A3 (en) * 1996-11-27 1998-09-30 Shuji Kawasaki Buffing apparatus and method
TR199701398A3 (en) * 1996-11-27 1999-10-21 Shuji Kawasaki Wet type polishing method, accumulation coating method, soot polishing method, soot polishing equipment, soot surface treatment method, plug polishing equipment work support unit and polishing environment
EP0922530A2 (en) * 1997-12-10 1999-06-16 Shuji Kawasaki Barrel-polishing apparatus and barrel-polishing method
EP0922530A3 (en) * 1997-12-10 2002-10-30 Shuji Kawasaki Barrel-polishing apparatus and barrel-polishing method
CN109834557A (en) * 2019-03-28 2019-06-04 山东富驰精密机械科技有限公司 A kind of piezoelectric actuator friction plate automatically grinding device and application method
CN109834557B (en) * 2019-03-28 2020-02-21 山东富驰精密机械科技有限公司 Automatic polishing device for friction plate of piezoelectric actuator and using method

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