JPS5946667U - ポリシヤの研磨布ブラツシング装置 - Google Patents

ポリシヤの研磨布ブラツシング装置

Info

Publication number
JPS5946667U
JPS5946667U JP1982140453U JP14045382U JPS5946667U JP S5946667 U JPS5946667 U JP S5946667U JP 1982140453 U JP1982140453 U JP 1982140453U JP 14045382 U JP14045382 U JP 14045382U JP S5946667 U JPS5946667 U JP S5946667U
Authority
JP
Japan
Prior art keywords
polishing cloth
brushing device
cloth brushing
polisher
shaft
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1982140453U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6218371Y2 (cg-RX-API-DMAC10.html
Inventor
正治 木下
正美 遠藤
優 池辺
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Shibaura Machine Co Ltd
Original Assignee
Toshiba Corp
Toshiba Machine Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Toshiba Machine Co Ltd filed Critical Toshiba Corp
Priority to JP1982140453U priority Critical patent/JPS5946667U/ja
Publication of JPS5946667U publication Critical patent/JPS5946667U/ja
Application granted granted Critical
Publication of JPS6218371Y2 publication Critical patent/JPS6218371Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)
JP1982140453U 1982-09-16 1982-09-16 ポリシヤの研磨布ブラツシング装置 Granted JPS5946667U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1982140453U JPS5946667U (ja) 1982-09-16 1982-09-16 ポリシヤの研磨布ブラツシング装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1982140453U JPS5946667U (ja) 1982-09-16 1982-09-16 ポリシヤの研磨布ブラツシング装置

Publications (2)

Publication Number Publication Date
JPS5946667U true JPS5946667U (ja) 1984-03-28
JPS6218371Y2 JPS6218371Y2 (cg-RX-API-DMAC10.html) 1987-05-12

Family

ID=30314464

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1982140453U Granted JPS5946667U (ja) 1982-09-16 1982-09-16 ポリシヤの研磨布ブラツシング装置

Country Status (1)

Country Link
JP (1) JPS5946667U (cg-RX-API-DMAC10.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2016199333A1 (ja) * 2015-06-12 2016-12-15 信越半導体株式会社 ワークの加工装置

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2016199333A1 (ja) * 2015-06-12 2016-12-15 信越半導体株式会社 ワークの加工装置
JP2017001151A (ja) * 2015-06-12 2017-01-05 信越半導体株式会社 ワークの加工装置
KR20180017004A (ko) * 2015-06-12 2018-02-20 신에쯔 한도타이 가부시키가이샤 워크의 가공장치
US10335918B2 (en) 2015-06-12 2019-07-02 Shin-Etsu Handotai Co., Ltd. Workpiece processing apparatus

Also Published As

Publication number Publication date
JPS6218371Y2 (cg-RX-API-DMAC10.html) 1987-05-12

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