JPS5946666U - 研磨布クリ−ニング装置 - Google Patents

研磨布クリ−ニング装置

Info

Publication number
JPS5946666U
JPS5946666U JP1982138965U JP13896582U JPS5946666U JP S5946666 U JPS5946666 U JP S5946666U JP 1982138965 U JP1982138965 U JP 1982138965U JP 13896582 U JP13896582 U JP 13896582U JP S5946666 U JPS5946666 U JP S5946666U
Authority
JP
Japan
Prior art keywords
surface plate
cleaning device
polishing cloth
brush
main body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1982138965U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6218370Y2 (enrdf_load_stackoverflow
Inventor
正治 木下
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP1982138965U priority Critical patent/JPS5946666U/ja
Publication of JPS5946666U publication Critical patent/JPS5946666U/ja
Application granted granted Critical
Publication of JPS6218370Y2 publication Critical patent/JPS6218370Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)
JP1982138965U 1982-09-16 1982-09-16 研磨布クリ−ニング装置 Granted JPS5946666U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1982138965U JPS5946666U (ja) 1982-09-16 1982-09-16 研磨布クリ−ニング装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1982138965U JPS5946666U (ja) 1982-09-16 1982-09-16 研磨布クリ−ニング装置

Publications (2)

Publication Number Publication Date
JPS5946666U true JPS5946666U (ja) 1984-03-28
JPS6218370Y2 JPS6218370Y2 (enrdf_load_stackoverflow) 1987-05-12

Family

ID=30311628

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1982138965U Granted JPS5946666U (ja) 1982-09-16 1982-09-16 研磨布クリ−ニング装置

Country Status (1)

Country Link
JP (1) JPS5946666U (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS6218370Y2 (enrdf_load_stackoverflow) 1987-05-12

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