JPS5944742B2 - X-ray generator - Google Patents
X-ray generatorInfo
- Publication number
- JPS5944742B2 JPS5944742B2 JP56110879A JP11087981A JPS5944742B2 JP S5944742 B2 JPS5944742 B2 JP S5944742B2 JP 56110879 A JP56110879 A JP 56110879A JP 11087981 A JP11087981 A JP 11087981A JP S5944742 B2 JPS5944742 B2 JP S5944742B2
- Authority
- JP
- Japan
- Prior art keywords
- discharge
- cylinder
- ray generator
- thin tube
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000003213 activating effect Effects 0.000 claims 1
- 239000000615 nonconductor Substances 0.000 claims 1
- 239000003990 capacitor Substances 0.000 description 9
- 238000010586 diagram Methods 0.000 description 6
- 239000000463 material Substances 0.000 description 6
- 238000009429 electrical wiring Methods 0.000 description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 3
- 229910052799 carbon Inorganic materials 0.000 description 3
- 239000012212 insulator Substances 0.000 description 3
- 239000011148 porous material Substances 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000004698 Polyethylene Substances 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 239000012777 electrically insulating material Substances 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 230000005283 ground state Effects 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- -1 polyethylene Polymers 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 210000005239 tubule Anatomy 0.000 description 1
- 238000009834 vaporization Methods 0.000 description 1
- 230000008016 vaporization Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05G—X-RAY TECHNIQUE
- H05G2/00—Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma
- H05G2/001—Production of X-ray radiation generated from plasma
- H05G2/003—Production of X-ray radiation generated from plasma the plasma being generated from a material in a liquid or gas state
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Optics & Photonics (AREA)
- Plasma & Fusion (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- X-Ray Techniques (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Description
【発明の詳細な説明】
本発明はＸ線発生の起動をさせるためのトリガ機構を設
けたＸ線発生装置に関するものである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an X-ray generator provided with a trigger mechanism for starting X-ray generation.
従来、例えばＬＳＩ等半導体装置の製造プロセスにおい
て、微小パターンの転写には、より短波長の光を採用す
ることによつて高解像度を得る努力がなされており、紫
外線に代りＸ線露光も行なわれるようになつた。その光
源としても有望な細管形Ｘ線発生装置がある〔例えば、
Ｐ、Ｂｏｇｅｎ、ｅｔａｌ、゛ＣｏｎｔｉｎｕｕｍＲａ
ｄｉａｔｉｏｎＳｏｕｒｃｅｏｆＨｉｇｈｌｎｔｅｎｓ
ｉｔｙ″Ｊ、Ｏｐｔ、Ｓｏｃ、Ａｍｅｒ、ユ」、、ム２
、ｐ、２０３（１９６８）、参照〕。第１図は上記論文
に発表されている細管形Ｘ線発生装置の動作原理説明図
であり、同図ａは正面図、ｂはａのＡ−Ａ線における断
面図及び電気結線図を示す。Conventionally, for example, in the manufacturing process of semiconductor devices such as LSI, efforts have been made to obtain high resolution by using shorter wavelength light to transfer minute patterns, and X-ray exposure is also used instead of ultraviolet light. It became like that. There are capillary X-ray generators that are promising as light sources [for example,
P, Bogen, etal, ゛ContinuumRa
diationSource of Highlntens
ity"J, Opt, Soc, Amer, Yu",,mu2
, p. 203 (1968)]. FIG. 1 is an explanatory diagram of the operating principle of the capillary X-ray generator disclosed in the above paper, in which a is a front view, and b is a sectional view taken along line A--A in a and an electrical wiring diagram.
図において、１は所定の波長域のＸ線を放射すべき元素
を含有せる電気的絶縁性の物質（例えば炭素のＸ線が必
要な場合、炭素を含有する物質としてはポリエチレンが
選ばれる）からなる円筒（以下、単に円筒と記す）で、
その中央に放電空間を形成する細管（細孔）２を有する
。円筒１の両端面に電極３が設けられ、それには高耐圧
のコンデンサ４が接続されている。コンデンサ４には高
抵抗５を介して直流高圧電源６が接続され、この電源に
よつてコンデンサ４は高電圧に充電されている。円筒１
、電極３は高真空容器に収められている。コンデンサ４
の充電が進行して円筒１の両端の電極３に充分高い電圧
が加わり、細管２の壁面の材質及び状態・形状から一義
的に定まる沿面放電開始電圧に達すると、細管２の壁面
に沿つて沿面放電が発生し、コンデンサ４に蓄えられた
電気量が急激に流れ始める。これによつて細管２の壁面
が急激に加熱され、円筒１の構成物質が爆発的に蒸発・
気化し、細管２内部に充満する。ここに至つて放電は細
管２に充満した蒸気のガス放電に移行し、細管２内はプ
ラズマで満たされる。プラズマ中のイオンが周囲に浮遊
する電子を捕捉して基底状態に戻るときにＸ線が発生し
、細管２から放射される。この一連の現象がコンデンサ
４が放電するまでの極く短時間（１００ｎｓ前後）に集
中的に起きるために、一回の放電毎に強力なＸ線が放射
される。上に述べたように、従来の細管形Ｘ線発生装置
では、放電開始は円筒１を構成する物質の物性と細管２
の壁面状態のみで決定され、外部からコントロールする
ことが出来なかつた。In the figure, 1 is an electrically insulating material containing an element that should emit X-rays in a predetermined wavelength range (for example, if carbon X-rays are required, polyethylene is selected as the carbon-containing material). A cylinder (hereinafter referred to simply as a cylinder),
It has a thin tube (pore) 2 that forms a discharge space in its center. Electrodes 3 are provided on both end faces of the cylinder 1, and a high voltage capacitor 4 is connected to the electrodes 3. A DC high voltage power supply 6 is connected to the capacitor 4 via a high resistance 5, and the capacitor 4 is charged to a high voltage by this power supply. Cylinder 1
, the electrode 3 is housed in a high vacuum container. capacitor 4
As the charging progresses and a sufficiently high voltage is applied to the electrodes 3 at both ends of the cylinder 1, and a creeping discharge starting voltage is uniquely determined from the material, condition, and shape of the wall surface of the thin tube 2, a discharge starts along the wall surface of the thin tube 2. A creeping discharge occurs, and the amount of electricity stored in the capacitor 4 begins to rapidly flow. As a result, the wall surface of the thin tube 2 is rapidly heated, and the constituent materials of the cylinder 1 are evaporated explosively.
It vaporizes and fills the inside of the thin tube 2. At this point, the discharge shifts to a gas discharge of the vapor filling the thin tube 2, and the inside of the thin tube 2 is filled with plasma. When ions in the plasma capture electrons floating around and return to the ground state, X-rays are generated and emitted from the thin tube 2. Since this series of phenomena occurs intensively in a very short period of time (approximately 100 ns) until the capacitor 4 discharges, powerful X-rays are emitted every time the capacitor 4 discharges. As mentioned above, in the conventional capillary X-ray generator, the start of discharge depends on the physical properties of the material constituting the cylinder 1 and the capillary 2.
It was determined only by the condition of the wall surface and could not be controlled from the outside.
本発明は、細管形Ｘ線発生装置におけるこれらの欠点を
除去するため、新たに放電開始トリガ用の電極を設けた
もので、以下図面について詳細に説明する。In order to eliminate these drawbacks of the capillary type X-ray generator, the present invention newly provides an electrode for a discharge start trigger, and will be described in detail below with reference to the drawings.
第２図は本発明の実施例の装置を示すもので、同図ａは
正面図、ｂはａのＢ−Ｂ線における断面図及び電気結線
図である。FIG. 2 shows an apparatus according to an embodiment of the present invention, in which a is a front view, and b is a sectional view taken along line B--B of a and an electrical wiring diagram.
図において、前出のものと同一符号のものは同一または
均等部分を示すものとする。円筒１はＸ線源となるべき
元素を含有する電気的絶縁性σ吻質で形成され、中央に
は細孔（細管２）が明いている。その両端面に電極３（
例えばカーボン製）が設けられている。７はトリガ電極
（図に示したものは針状の突起を有しているが、単に平
板であつてもよい）で、絶縁碍子８を介して電極３の一
方に取りつけられている。In the figures, the same reference numerals as those mentioned above indicate the same or equivalent parts. The cylinder 1 is formed of an electrically insulating sigma substance containing an element to serve as an X-ray source, and has a pore (tubule 2) open in the center. Electrodes 3 (
(for example, made of carbon). Reference numeral 7 denotes a trigger electrode (the one shown in the figure has a needle-like protrusion, but it may simply be a flat plate), which is attached to one side of the electrode 3 via an insulator 8.
９はトリガ放電用の高圧パルス発生器である。9 is a high voltage pulse generator for trigger discharge.
なお、円筒１、電極３、トリガ電極７、絶縁碍子８は高
真空中に収められている。直流高圧電源６によつてコン
デンサ４が充電され始めると、電極３により円筒１の両
端面に印加される電圧が時間とともに増し始める。Note that the cylinder 1, electrode 3, trigger electrode 7, and insulator 8 are housed in a high vacuum. When the capacitor 4 begins to be charged by the DC high voltage power supply 6, the voltage applied to both end surfaces of the cylinder 1 by the electrodes 3 begins to increase with time.
ここで高圧パルス発生器９によつて、近接している電極
３とトリガ電極７の間に小さな放電を起こさせる。この
放電が引金となつて、細管２の壁面に沿面放電が誘発さ
れて、以下壁面物質の蒸発・気化、気体放電への移行、
プラズマの生成、Ｘ線の発生が段階的に極く短時間の内
に進行し、細管２からＸ線が放出される。なお、具体的
な構成と動作の一例を示すと、円筒１の長さ約２０ｍ』
細管２の内径０．５〜２．０ｍｍのもので、直流高圧電
源６の電圧４００とし、トリガ放電用の高圧パルスとし
てはパルス幅５０ｍｓ１１０〜１５ＫＶを印加する。Here, the high-voltage pulse generator 9 causes a small electrical discharge to occur between the electrode 3 and the trigger electrode 7 which are close to each other. This discharge triggers a creeping discharge on the wall surface of the thin tube 2, which leads to evaporation and vaporization of the wall material, transition to gas discharge,
Generation of plasma and generation of X-rays proceed step by step within a very short time, and X-rays are emitted from the thin tube 2. In addition, to show an example of a specific configuration and operation, the length of the cylinder 1 is approximately 20 m.
The thin tube 2 has an inner diameter of 0.5 to 2.0 mm, the voltage of the DC high voltage power source 6 is 400, and a pulse width of 50 ms and 110 to 15 KV is applied as a high voltage pulse for trigger discharge.
高圧パルスによる起動で、放電開始時間の制御のみなら
ず、放電開始電圧（例えば２０〜３５ＫＶ）の制御も可
能になる。以上説明したように、本発明によれば、細管
２の物質と形状から定まる沿面放電開始電圧に関係なく
、トリガ電極７にパルスを加えることにより、所望の時
間に所望の放電間隔でＸ線を発生させうる利点がある。By starting with a high-voltage pulse, it is possible to control not only the discharge start time but also the discharge start voltage (for example, 20 to 35 KV). As explained above, according to the present invention, X-rays are emitted at a desired time and at a desired discharge interval by applying a pulse to the trigger electrode 7, regardless of the creeping discharge starting voltage determined by the material and shape of the thin tube 2. There are advantages that can be generated.
従つて、例えば半導体装置の製造プロセス（ホトリソグ
ラフイ）における露光用光源として、本発明のＸ線発生
装置を用いれば、その作業性を著しく向上させることが
できる等の効果がある。Therefore, if the X-ray generator of the present invention is used as an exposure light source in a semiconductor device manufacturing process (photolithography), for example, the workability can be significantly improved.
第１図は従来の細管形Ｘ線発生装置の動作原理説明図で
、同図ａは正面図、ｂはａのＡ−Ａ線における断面図及
び電気結線図、第２図は本発明になる装置を示すもので
、同図ａは正面図、ｂはａのＢ−Ｂ線における断面図及
び電気結線図である。
１・・・・・・円筒、２・・・・・・細管（細孔）、３
・・・・・・電極、４・・・・・・コンデンサ、５・・
・・・・高抵抗、６・・・・・・直流高圧電源、７・・
・・・・トリガ電極、８・・・・・・絶縁碍子、９・・
・・・・高圧パルス発生器。Fig. 1 is an explanatory diagram of the operating principle of a conventional capillary type X-ray generator, in which a is a front view, b is a cross-sectional view taken along line A-A of a, and an electrical wiring diagram, and Fig. 2 is the present invention. The device is shown in which Figure a is a front view, and Figure b is a sectional view taken along line B-B of Figure a and an electrical wiring diagram. 1... Cylinder, 2... Thin tube (pore), 3
...Electrode, 4...Capacitor, 5...
...High resistance, 6...DC high voltage power supply, 7...
...Trigger electrode, 8...Insulator, 9...
...High pressure pulse generator.
Claims (1)
筒と、該円筒の両端に設けた放電用高電位を印加する電
極とを具備してなる細管形Ｘ線発生装置において、一方
の電極の外側に電気絶縁碍子を介して支持された針状ま
たは平板状のトリガ電極を設け、該トリガ電極と上記一
方の電極の間にパルス電圧を印加してスパークを起こさ
せることによつてＸ線発生を起動することを特徴とする
Ｘ線発生装置。1. In a capillary X-ray generator comprising an insulating cylinder having a thin tube forming a discharge space in the center and electrodes for applying a high potential for discharge provided at both ends of the cylinder, one of the electrodes X-rays are generated by providing a needle-shaped or flat trigger electrode supported through an electrical insulator on the outside, and applying a pulse voltage between the trigger electrode and the above one electrode to cause a spark. An X-ray generator characterized by activating.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56110879A JPS5944742B2 (en) | 1981-07-17 | 1981-07-17 | X-ray generator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56110879A JPS5944742B2 (en) | 1981-07-17 | 1981-07-17 | X-ray generator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5814459A JPS5814459A (en) | 1983-01-27 |
| JPS5944742B2 true JPS5944742B2 (en) | 1984-10-31 |
Family
ID=14547005
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP56110879A Expired JPS5944742B2 (en) | 1981-07-17 | 1981-07-17 | X-ray generator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5944742B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20200094090A (en) | 2019-01-29 | 2020-08-06 | 글로브라이드 가부시키가이샤 | Double bearing type reel |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH021904A (en) * | 1988-06-10 | 1990-01-08 | Mitsubishi Electric Corp | Exposure of mask |
-
1981
- 1981-07-17 JP JP56110879A patent/JPS5944742B2/en not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20200094090A (en) | 2019-01-29 | 2020-08-06 | 글로브라이드 가부시키가이샤 | Double bearing type reel |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5814459A (en) | 1983-01-27 |
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