JPS5943865A - Method for working high damping alloy material - Google Patents

Abstract

PURPOSE:To improve the toughness and other mechanical properties of the surface of a high damping Fe-Cr-Al alloy material without reducing the damping capacity, by forming Ti and Cr films of a specified thickness on the alloy material by vapor deposition. CONSTITUTION:Ti and Cr films of 3-10mum thickness are formed on the surface of ''Silentalloy'' as a high damping Fe-Cr-Al alloy by a vapor deposition method such as ionic plating. By forming the Ti and Cr films, the toughness and other mechanical properties of the alloy material can be improved while maintaining the high damping capacity.

Description

Detailed Description of the Invention [Technical Field of the Invention] The present invention improves the mechanical properties of the surface of a vibration-proof alloy material made of, for example, 37[; Concerning vapor deposition methods and processing methods for anti-vibration materials.

[Technical background of the invention and its problems]

Metal materials are widely used as structural materials because of their excellent strength. The metal material often produces a noise that is extremely jarring to Iruma. Recently, the problem of industrial accidents caused by noise caused by metal materials has been taken up closely, and anti-vibration materials have been developed that seem to be used to prevent sound absorption. It is only necessary to have a reduction in Nt+hi.Reduction ability refers to the ability to convert vibration energy into heat.Whether or not Bf is effective in preventing pi noise depends on the internal friction of the holder.

The greater the internal friction, the more significant the damping effect, the flatter the resonance curve, and the smaller the resonance amplitude.

These defense 1 materials include ・I whose defeat resistance coefficient decreases inversely as the blood level increases i*′f.・Term 4. These eight anti-vibration types are classified as (1) complex type, (2) ferromagnetic type,
It is divided into (3) dislocation type and (4) twin type.

If such materials are used as structural materials in machine design, it can be expected that mechanical noise can be fundamentally eliminated by reaching the sound source. In order to use Shiro-1 as a mechanical structural material, it must maintain properties that meet the specifications of mechanical parts. Generally, the materials used for machine parts are those made of aluminum, forged, cold-drawn, and hardened with charcoal. For cast and immersed products, a composite type of anti-vibration base metal is generally used. However, moving parts of mechanical parts such as engine rocker arms, tappets, and tabet locking guns need to be toughened and mechanically strengthened, so cold-drawn steel rods are treated with gas charcoal hardening and used for a long time. ing.

Therefore, the moving parts of mechanical parts become a source of noise,
Engine manufacturers are paying attention to ferromagnetic anti-vibration alloy materials that have good secondary processability. Ferromagnetic Nylentalloy is easy to perform secondary processing, but after the secondary processing, silent processing is performed at a temperature of 1000±200'0 to adjust the magnetic domain walls, which softens the surface and makes it less wear resistant. 1.6 could not be applied to structural mechanical parts. As a countermeasure,
Although the surface hardening of nylentalloy was achieved through hard chrome plating, the results were disadvantageous, such as defects in the plating layer and a reduction in vibration damping ability due to residual stress at the substrate interface. We also tried a vapor deposition method, but although the vibration damping effect was good with plasma etching alone, the biggest issue was setting the flexibility of the vapor deposition process, such as fluctuations in wear resistance that affected the bonding force at the substrate interface.

The purpose of this invention is to apply Xylentalloy, a material with low workability, to moving parts that are a source of noise in structural mechanical parts. This provides a processing method for Zarenotalloy that maintains its vibration damping ability even after the right 4 cutting process is performed.

[Summary of the invention]

The processing method for increasing the mechanical properties of the anti-vibration pot material Nilenotalloy according to the present invention uses cold-rolled steel bars and forged steel. A woman who worked hard on 'r+ parts, even after applying silent treatment (+000±200"C) to a specified thickness of gold+Ii vapor deposition, the vibration damping ability of the vibration-proof joint material Nylentalloy was not maintained. It is characterized by being made of 1. The vapor deposition method is Kuku Shikashira, sputtering,
・Ion pnoting and reactivity'-ILJ(AK)
All were achieved using . Boken I: The material used in the process depends on the young fruit treated with Irentaloy Jl (the relationship between the board and the board interface is Rikiba[) II treated. The pre-treated young fruit was removed by a combination of wet washing and plasma etching.

The deposition conditions to increase the wear resistance and mechanical properties of the surface while maintaining the vibration damping ability of Silentalloy are the deposition rate,
It needs to be regulated because it depends on the type of reaction gas, substrate temperature, and deposited film thickness. Silentalloy, which has metal and metal oxide coatings formed using the vapor deposition method to increase its mechanical properties, has a much lower vibration damping ability than those coated with hard Pechrome plating, and is equivalent to untreated length Silentalloy. It was confirmed that there is.

The above-mentioned vapor deposition method of forming metal and gold 4 and oxides to increase the mechanical properties of nylentalloy is performed by using the vapor deposition method after sufficient pretreatment of solvent ultrasonic cleaning and plasma etching treatment. It can be easily produced by forming oxides of metals and metals.

〔Effect of the invention〕

According to the present invention, for example, using nylentalloy, a material made of a ternary alloy of Fe-Cr-41, as a base material, using a vapor deposition method, a film of Pi and Cr is deposited to a thickness of 3μ to 10μ. By forming Silentalloy, it is possible to maintain the toughness of the surface and increase the mechanical properties of the surface, and also to maintain the vibration damping ability, making it possible to use it in 1st weave parts for curved structures.
It's all about IT. The evaporation method (deposition method), which is a thread-proofing material with improved flame resistance, can be used in engine applications, and it can significantly reduce the amount of heat and heat used on the surface. This is the deciding thread for ``Iff'' to ?1i during the labor accident complaint.

When using the anti-vibration alloy material mentioned above in conjunction with the anti-vibration metal for secondary foundation iron, it is possible to reduce the amount of vibration more effectively than with iC. .

[Embodiments of the invention]

This work will be explained in detail below with reference to the drawings. Fig. 1 shows a line of thread-proofing (φ material nylentalloy) wrapped by ion blating group atb, which is a thread of this invention; In order to reduce the wear resistance and improve the wear resistance of the deposited film, the deposition process is a device that separates the plasma etching process using gas discharge and the deposition process. In addition to rotating each substrate, we adopted a rotating method to ensure uniform film thickness on each individual substrate.

In the ion brating deposition method, the exhaust 1 control valve (2) is opened and the vacuum chamber (1) is heated to 10-3 by the high vacuum exhaust system (3).
After setting it to ~10' Torr, the magnetic field (the anode 18 of the gas discharge generator (9)) and the cand f13
A method was adopted in which a plasma (lυ) was generated during 1 to perform the plasma etching process, and then a vapor flow Bi3 vaporized from the evaporation source (force) of the resistance heater (6) was uniformly deposited on the substrate (1). Further, metal oxides and the like were deposited by evaporation using a reactive gas from the gas inlet (4).

Figure 2 shows Crt'l'r and T
FIG. 3 is a diagram illustrating the attenuation mode of a cantilever beam using a specimen on which Iez is deposited. The diagram is a diagram showing changes in amplitude lIg with amplitude (rum) on the vertical axis and time +b'1 (sec) on the horizontal axis.

(2 people) is a diagram showing the dynamic attenuation state without silent processing of the 3-dimensional song, where defense aa = metal F''e -Cr-M.

(2B) is the silent treated one and Cr*Ti*T
FIG. 3 is a diagram showing the vibration damping ability of a test piece on which iO2 is deposited. The presence or absence of a vibration damping effect due to the pretreatment conditions before vapor deposition and the distribution of the thickness of the vapor deposited film can be easily determined from the attenuation diagram of the cantilever beam. For example, the logarithmic attenuation rate (log r1/ As a result of calculating r2=δ), it was found that the Nando blasted product has a good vibration damping rate of 1.
01, the logarithmic attenuation rate was as low as 40 inches.

Therefore, the fourth effect of vibration damping of the ferromagnetic type vibration-proof alloy material is the pretreatment L'! during vapor deposition. l! It depends on the deposition conditions and the I film thickness.

FIG. 3 is a diagram showing the decrease in logarithmic attenuation rate (δ) and the change in hardness +f with respect to the film thickness of the sample deposited by the vapor deposition method shown in FIG. The evaporation conditions obtained in Figure 3 are (1) degree of vacuum during evaporation of 5X10-3 to 10' Torr, L2) deposition rate of 0.5 μ to 1 μ/min, and (3) sudden change of 10' Torr to 4.
It was r. In Figure 3, the horizontal axis is the vaporized NI film thickness, and the left vertical axis is lll1.
The attenuation rate of the silent processing agent is 1009 in II! +,
The decrease in logarithmic attenuation rate due to evaporation)/1 thickness is shown in 100%, and the right vertical axis shows the micro-Vickers hardness (HMv) Z change with respect to valley & F metal film thickness. The graph shows the relationship between the change in mechanical properties and the effectiveness of the prevention.Diagram (3υ is the graph 1 showing the decrease in the thickness of the chromium deposited film and the logarithmic attenuation rate; Diagram showing changes in thickness and hardness.Diagram 1 is a diagram showing changes in titanium deposited film thickness and hardness.

The hardness of titanium films in the left group also increases depending on the coordination number of oxygen in the film, but the change in hardness depends on the oxygen partial pressure during deposition.・Figure 4 is a diagram analyzing the wear resistance of the deposited film.

The abrasion resistance test was conducted using a Silentalloy beak plate with a 10μ thick vapor-deposited chrome film, and a steel ball coated with hard chrome plating and vapor-deposited chrome film as a specimen. A load of 2 kg is applied to the steel ball.
, operate on a steel plate at a speed of 0.6171/min,
A method was adopted in which the amount of wear of the steel ball with respect to the working distance i was measured by ultrasonic cleaning and drying after the test path r, and expressed as loss in weight. The vertical axis shows wear 4t (mg), and the horizontal axis shows travel distance (e). ,
The solid line in Figure 4 shows the change in the amount of wear depending on the thickness of the vapor-deposited chromium film, and the dotted line is a diagram showing the relationship between the amount of wear on the hard chrome plating film.

The line diagram (41) in FIG. 4 shows the thickness of vapor deposited chromium 1. /IZ
! J) Figure 611, line diagram I/s t421 is a line diagram of vapor deposition and hard chrome film with a thickness of 3 μm. Diagram (43p t4'
jj is a diagram of vapor deposition and hard coating with one comb and plating film thickness of 10 μm.

The analysis results of wear resistance shown in FIG. 4 showed that the amount of wear was clearly different between wet plating/1-M plating and vapor deposition. Phase A of the amount of wear is that in wet plating, the density of lattice defects caused by adsorption of anions during electrodeposition increases by one degree of abrasion resistance.

Hereinafter, the present invention will be described with respect to the processing method for increasing the surface F&mechanical properties while maintaining the vibration-proofing effect of the vibration-proofing alloy material nylentalloy, and setting the method for forming chrome and titanium patterns and the range of film thickness formation. specific)! :θm An example will be given and explained.

[Actual shoulder row 1] In order to increase the mechanical properties of the surface of the anti-vibration alloy material silently treated, hard chrome plating was advanced, and the logarithmic attenuation rate with respect to the film thickness was measured. As a result, the logarithmic attenuation rate of hard chrome plating was (δ) decreases depending on the film thickness, but when the logarithm and attenuation rate of the silent treatment piece are taken as 100 degrees and the relative ratio is taken, it decreases to 40 degrees even with a film thickness of 1 μm. Therefore, from FIG. 4, when considering wear resistance, vibration damping rate, etc., almost no young fruits were observed when the mechanical properties of nylentalloy were modified by hard loam plating.

[Example 2] As a result of determining the correlation between the vibration damping rate and wear resistance due to pretreatment during vapor deposition, using the apparatus shown in Figure 1, the vibration damping rate was good when only plasma etching treatment was used, but the durability was poor. The wear resistance was poor and the yield was about 60 inches. In addition, as a result of analyzing the vibration damping rate after the metal ring 4 by combining solvent ultrasonic cleaning with pre-treatment sandblasting, and solvent ultrasonic / 7Il: cleaning only, the results show that
Although the logarithmic attenuation rate (δ) was lowered by over 40, the sample using only solvent ultrasonic cleaning had a logarithmic attenuation rate (δ) equivalent to that of the Nylent-treated piece and a yield of 99 inches.

[Example 3] When the wear resistance was evaluated by vapor deposition using the sputtering method of all four vapor deposition methods, the wear resistance was poor in the sputtering pattern and the wear resistance deteriorated if heat treatment was performed at 400'a or more after vapor deposition. showed a trend. The low wear resistance of the sputtering pattern is caused by an increase in lattice defect density due to the occlusion of glazma gas ions during vapor deposition. Therefore, when vapor deposition is performed by sputtering, it is necessary to perform a degassing treatment at a temperature of 400"0 or higher after forming a sputtered film.

[,I! [Fear sub-column 4] In the case of tan evaporation, activation reaction 1t%) evaporation was also attempted, but the reaction gas used was N2.02.C: (4tO2, etc.). Although the residual stress in the direction was high and the vibration damping rate decreased, the vibration damping rate was also good in 02, and the surface hardness was A due to the partial pressure ratio with the inert gas.
I was able to arrange it. Accordingly, from FIGS. 3 and 4, it was predicted that the defectivity would increase due to a thick film during vapor deposition, and it was regulated to be equal to the chrome film thickness.

[Example 5] Pretreatment series 1 combines solvent ultrasonic cleaning and plasma etching treatment, and the evaporation specimen was analyzed using the ion grating device ft shown in Figure 1. Since the decrease in the metal vapor deposition film thickness and S dynamic damping rate of the vibration alloy material + 7-ylentalloy is approximately 10% lower when the chrome film thickness is 10 μm, the upper limit film thickness was limited to 10 μm. Furthermore, 4
The relationship between wear resistance and film thickness was determined from Figure 4, and the lower limit of the deposited film thickness was set at 3μ.

Therefore, for Cry'ri and riOz, when the d thickness is 3 μ or more, 1
The specimen, which was limited to 0 μ or less and was deposited on nylentalloy, had an attenuation diagram equivalent to the diagram (2B) in Figure 2, and improved the mechanical quality of the surface, making it suitable for application to 4-engineering machine parts. It was made into an oT function. Furthermore, by using the code 1# shown in FIG. 1, bankruptcy is made 1IT possible.

[Brief explanation of the drawing]

FIG. 1 shows one row of vapor deposition apparatus d used in the present invention. FIG. 2 is a diagram showing the attenuation form of the imaging amplitude of a vapor-deposited sample with or without Nylent treatment of the anti-vibration table material Nylentalloy. FIG. 3 is a diagram showing the rate of decrease in vibration damping ability and change in hardness with respect to the thickness of the deposited film, and is a diagram regulating the upper limit film thickness regarding the vibration damping ability. Figure 4 is a diagram that evaluates the difference between hard plating and deposited film quality from the viewpoint of abrasion resistance, and is a diagram in which the upper limit film thickness for 1≠abrasion resistance 1 (1#) is controlled. ■... Vacuum chamber, 2... Exhaust', ft adjustment box, 3...
to) 1! Exhaust system, 4... Gas inlet, 5... Diversion board mounting door, 6... Resistance heater, 7... Evaporation source, 8... Anode, 9... Gas discharge Occurrence diagnosis, 1
0...PaI-ized magnetic coil, 11...Gas discharge plasma region, 12...Vapor flow, 1:3...Substrate, 2N...
Vibration attenuation diagram of a board without silent treatment, 2B...
Silent place 1 [Diagram showing good vibration damping of the piece and the straw-covered piece, 31... Degradation line of the tatami reduction of the vapor-deposited specimen, 32
... Ri [comb 礪庸 も 1 も thick and hard! cc conversion, diagram, 33...Diagram of hardness change due to 4 thickness changes of titanium smoke pattern, 41-43...Diagram of steam rot loam film thickness change and wear resistance properties, 4) to 4・・・Hard chrome film thickness change r and wear resistance Lr
! Diagram of f note. Proxy Attorney Nori Chika Sae (11 people) Figure 1 Figure 2 Figure 3 (U) Figure 4 (η)

Claims (1)

[Claims] Regarding the processing method to satisfy the mechanical properties of a vibration-proof alloy material consisting of the three elements Fe-Cr-kl as a base material, the Ill j and Cr film thicknesses were
A method for processing a vibration-proof alloy material, characterized in that it is formed to have a thickness of μ or more and −10 μ or less.