JPS5942789A - Method of producing airtight terminal - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

DETAILED DESCRIPTION OF THE INVENTION Technical Field This invention relates to a method for manufacturing an airtight terminal in which a lead wire is hermetically sealed to a glass substrate and a glass pipe is fused to a through hole.

Background technology As a one-by-one device for airtightness used in laser oscillators, etc.
There is a part (4 in number 11) not shown in Figures 1 and 2.

Figure 1 shows a plan view, a mirror, and Figure 2 shows the I+ -' of Figure 1.
A sectional view taken along line II is shown. In FIG.
Nitsuur cobalt alloy (F, e53%, N128%,
A lead wire 2 made of 0.0018%) is hermetically sealed, and is roughly eccentric and at a 90° angle from the sealed portion of the lead wire 2.
It has through-holes 3 at different positions, and a glass vibrator 4 made of glass acid glass or the like is integrally fused to coincide with the through-holes 3.

The hermetic terminal having the above structure has conventionally been manufactured by the following two methods. The first method θ3 is a heating sealing method using a gas burner, in which the crow J4+ plate 1 and the lead wire 2k are placed in a predetermined relationship in the first position on a sealing jig such as a turntable. j′, then move the turntable intermittently at a predetermined angle/ζ at the second position
is melted with a glass burner, the glass substrate 1 with melted pieces is pressed in the third position to airtightly seal the lead wire 2, and the glass vibrator 4 is supplied to the through hole 3 of the glass substrate l in the fourth position. At the 5th position, the lower joint of the glass substrate 1 and the glass vibrator 4 is heated with a gas burner, at the 6th position the glass substrate 1 is pressed to fuse the glass vibrator 4, and at the 7th position, the glass vibrator 4 is heated. A? I'm trying to take out the terminal. However, since this method involves sequentially pickling one piece at a time, it is not suitable for production in many years, and currently it is hardly used in practice.

The 20th direction is a method of batch-type blowing using a multi-piece sealing jig, and as shown in FIG. A glass substrate 1 is placed on the glass substrate 1, and a lead wire 2 is inserted into the through hole not shown in the glass substrate 1.
At the same time, a glass vibrator 4 is arranged in the through hole 3, a lower sealing jig 6 having a through hole 6a into which the glass vibrator 4 is fitted from above is placed, and the glass vibrator 4 is placed inside the glass pipe 4. The core jig 7 is arranged in a b-shape, and the whole is heated to about 1000'C in a neutral or weakly reducing atmosphere to melt the glass plate 1 and the glass vibrator 4 and fuse them together. Similarly, the lead wire 2 is hermetically sealed to the glass substrate. This method has the advantage of being able to seal the lead wire 2 and attach the glass vibrator 4 in one heating step, but since the entire crow vibe 4 is melted, the entire glass vibrator 4 is melted. It is necessary to insert and arrange the core jig 7' into the child jig 7', and it is difficult to remove the core jig 7 from inside the crow vibrator 4 after the two culms are sealed due to the dimensional tolerance of the two. @There was 1 point for 4kIl, such as easy to lose.

DISCLOSURE OF THE INVENTION An object of the present invention is to provide a method for manufacturing an airtight terminal that is easier to manufacture than the first method, is suitable for mass production, and does not damage the crow vibrator.

In this invention, in the first step, the glass substrate is melted and the lead wires are sealed first, and in the second step, the glass pipe is placed in the through hole of the glass substrate using a graphite fitting. At the same time, this glass parr).

The core jig is pushed in and moved to a depth equal to the thickness of the inner glass substrate, and then transported to the anchoring tool and the heat generated by the sealing jig itself separates the glass substrate and glass. It is characterized in that only the fitting part of the vibrator is selectively heated and melted so that both parts are newly attached.

Based on the above configuration 1, although the heating process is carried out twice, batch processing of a large number of pieces is possible in both cases. Since it is only necessary to insert the core jig in one part depending on the dimensions, it is easier to remove the core jig after the glass substrate and glass vibrator have been placed, and it is possible to eliminate accidents of crow vibrator breakage. It is a proof of the effect that it can be done.

Embodiments of this invention will be described below with reference to FIGS. 4 to 6.
I will explain it in detail.

1. Through-hole for lead wire 2 to pass through and glass vibrator 4
Prepare a glass substrate 1 in which the through hole 3 of the ring 1 is wart, and attach the glass substrate &1 to the lower part 1 with the four parts 8a and the protrusions 8b as shown in FIG. Place the lead wire 2 through the through hole for eel 1.iT+ in the jig 8, and then cut out the 1:m''-1 anchoring tool 9 from the The whole is heated to about 1000'C in a neutral, weakly reducing atmosphere to melt the glass substrate 1, and the lead wires 2 are attached in an airtight manner. In this way,
As shown in FIG. 5, a sealed body 10 is obtained in which a lead wire 2 is hermetically sealed to a glass substrate 1 having one slotted hole 3. Next, as shown in FIG. 6, the gate h', the fixture 11, and the /+l1 anchoring fixture 11 are cut with a predetermined gap in the F direction; A jig in which a core jig 13 for holding the inner diameter is inserted into the through hole 111 of the welding jig 11, the top of which protrudes from the four parts 11a to the upper surface 1f of the welding jig 11. Prepare ingredients 14,
4t'Ll'+1'1a of the fusion jig 11,
The sealed body IO is inserted and arranged. After this, before inserting the glass vibrator 4 into the through hole 3 of the glass substrate 1, □
Karasuno! , the weight jig 15 which has a through hole 15a through which the glass pipe 4 can be inserted is discolored on the plate l, and the four positioning parts 16a of the wheel jig 15 are provided downward from the bottom of the weight jig 15. Place the tool 16 on ff-. In this state, in a neutral atmosphere (weakly neutral), electricity is applied to the diagonal piece 1 and the Joule heat generated by the welding jig 11 causes the mating portion of the glass substrate 1 and the glass pipe 4 to be bonded together. is selectively heated to about 850''C to fuse and integrate the glass substrate l and the glass pipe 4.

At this time, a core jig 13 is inserted and supported in the through hole 1 l b of the welding jig 11, and since this core jig 13 is in close contact with the inner surface of the crow vibe 4, the glass pipe 4 is It is heated not only directly from the fusing jig 11 or via the core jig 11, but also from the inner side via the core jig 3. On the other hand, since the wheel jig 15I/i is only placed on the glass substrate 1, it cannot be completely heated, and therefore, the part of the crow vibrator 4 that protrudes from the glass substrate 1 cannot be completely heated. Since it does not melt, it will not deform even if there is no core jig in this part.

According to the above manufacturing method, the sealing process of the lead wire 2 shown in l''+41-1 and the cuff 4 shown in FIG.
In both of the fusing processes, a large number of pieces can be processed at the same time. Core jig only for the part] 3 can be increased by 4?lj people, so the force of the core jig 13 increases after fusion; It is very easy to do, and the 4 Ij Itl of Crow Vibe 4 is eliminated. .

In addition, in the above-mentioned real u1 hair example, when using the punching jig 15 and the positioning jig 16, 11
1, but these may be omitted.

The dimensions, number and position of the lead wires 2, through holes 3, crow holes 4, etc. can be set at any time other than those described in the above embodiments.

[Brief explanation of drawings]

1 and 2 show an airtight terminal which is the background of the present invention, FIG. 1 is a plan view, and FIG. 2 is an old front view taken along the first nu gauze. Figure 3: 1t Go” - Signs? Figures 4 to 6 are Y1 side view showing the assembly state of the vehicle 11 light shield before being sealed in accordance with the second conventional manufacturing method of the i1 terminal;
1A and 1B show cross-sectional views at each stage VC for explaining the method according to the embodiment of the present invention. l...Glass substrate, 2...Lead wire, 3...Through hole, 4...Glass pipe, 10...Sealing hole, 11...
Fusing percentage. 13... Core jig. 415 Fig. 3 Fig. 4] 8a8b Fig. 5 Fig. 6

Claims (1)

[Claims] A step of penetrating a lead wire into a glass substrate having a through hole and sealing it, placing the sealed body on a graphite holder II, and arranging a glass pipe in the through hole. , Insert the core jig into this glass pipe to a depth that is less than the wall thickness of the glass substrate, pass it through the MiJ fusion fixing tool, and insert the part inserted into the Is hole of the glass substrate of the glass pipe. 1. A method for manufacturing an airtight terminal, comprising the steps of 1. fusing a glass pipe to a glass substrate by selectively heating the glass pipe.