JPS5942017A - Panel for adsorption - Google Patents
Panel for adsorptionInfo
- Publication number
- JPS5942017A JPS5942017A JP57152247A JP15224782A JPS5942017A JP S5942017 A JPS5942017 A JP S5942017A JP 57152247 A JP57152247 A JP 57152247A JP 15224782 A JP15224782 A JP 15224782A JP S5942017 A JPS5942017 A JP S5942017A
- Authority
- JP
- Japan
- Prior art keywords
- panel
- adsorbent
- adhesive
- adsorption
- good heat
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
Description
【発明の詳細な説明】 不明本丸19j府用パネルに関する。[Detailed description of the invention] Concerning the unknown Honmaru 19j government panel.
従来のこの樵のものとして、銅板前パネル本体の表10
1に法性病与の吸着剤で結着したものがあったが、接)
[7削の存在によりパネル本体とt占1!1ユ炭との曲
ので・、ン! Iz= 2H性がtill 害さ)L−
rいlc o従つ−C1このパネルをIA、空室に連、
lIhシたクライオポンプ、ソープションポンプ寺の容
gs内トC収納して使用した場6、該容器を介しての6
却のため史に冷却に時1川がかかり光分な/1】却が得
られなかった。七rL故に排気効率が非常に凹かった。Table 10 of the copper plate front panel main body as a conventional one of this woodcutter
1 was bound with an adsorbent that caused venereal disease, but
[Due to the presence of 7 cuts, the panel itself and the song with 1! 1 charcoal... Iz = 2H property is still harmful) L-
rlc o Follow-C1 This panel is connected to IA, vacant room,
When the cryopump is stored and used in the container of the sorption pump, it is used through the container.
Because of this, it took a river of time to cool down, so it was not possible to obtain a light. The exhaust efficiency was very low because it was 7rL.
木兄り1は−に記従来の欠点を除去し、特にP、−N!
伝導性が良好で急速にl′ri却できる吸iW用パネル
を提供することを綱的とする。Kienori 1 eliminates the drawbacks of the conventional ones, especially P, -N!
The objective is to provide a panel for absorbing iW that has good conductivity and can rapidly dissipate l'ri.
この目的逼lJy!、のため不発り]の0」、パネル本
俸に吸着剤が接盾削を介して取付けられ、該依tW剤内
にはy75艮屏性扮木がl昆入されたことを要旨とする
。This purpose is true! The gist is that the adsorbent was attached to the main panel through the engraving, and the Y75 adhesive was inserted into the adsorbent.
以下不発り]の実軸例を図聞にもとづいて睨IJI −
fる。IJI −
Fru.
吸着剤8としでは、油性灰、その他(je米使用されて
いるものから任:+a: m 4.I+! +?用さJ
L 6 om 空排気すウム尋の冷媒やクライオl)i
〜1債時で−200〜−260′C位゛まで冷却さiL
、その状1四ミで三′と気その他のガスを犬鼠に吸蔵す
るものが血し、クフイλボンフ゛、ソーブションボンソ
゛峙にj4用される。この原料として使用される1汲7
& #IJ 8の扮粒悸は、1〜3腑径の粒度が好まし
く 、jill ’A”; 11td d程度のy杓粒
度のもので形状の不規i1jな粒子を使用し、これを金
属粉末の入った接地jdJで接着する。接盾剤2として
例えばエポキシ樹脂線が用いられ、七ノLにアルミナ、
銅などの熱良21−性金属粉末4が撹拌+I4 aきれ
る。そして該接着剤2によす銅、アルミニウム線の金属
パネル本体1に前d己吸j&剤8が接フぽ1白1尾され
る。As adsorbent 8, oily ash, etc.
L 6 om air exhaust refrigerant or cryo l)i
~1 bond cooled to around -200 to -260'C iL
In that state, those who absorb 3' and other gases in the dog and mouse bleed, and are used in the fight against Kufui λ Bonfire and Sosorption Bonso. 1 kan 7 used as this raw material
&# IJ 8's particle size is preferably 1 to 3 mm in diameter, and particles with an irregular shape of about 11 td are used, and these are made into metal powder. For example, an epoxy resin wire is used as the shielding agent 2, and alumina,
Heat-resistant metal powder 4 such as copper is stirred +I4a. Then, a self-absorbing agent 8 is applied to the metal panel body 1 made of copper or aluminum wire using the adhesive 2.
鍵属粉木の粒子の大きさはミクロンオーダのものが好I
I〜であり、金属W料として&1前記のほか、娘、ニッ
ケル、クロム、アルミニウム、チタン、・fリジウム、
マンガン、インジウム、錫、’84に、アン六セン、バ
ナジウム、セリブデン、メンダスデン、白金、金寺の低
一点金縞から晶融点金属に至る全ての金属およびその合
金が使用し得る。The particle size of powdered wood of the key genus is preferably on the micron order.
I ~, and metal W materials &1 In addition to the above, daughter, nickel, chromium, aluminum, titanium, f lydium,
All metals and their alloys ranging from manganese, indium, tin, '84, anhexene, vanadium, celibdenum, mendasdene, platinum, Kindera's low single point gold stripes to crystalline melting point metals can be used.
」二記において、該吸智用パネルがタライオンポンプ寺
における貞空婉内に設置dさtした場合、吸TM削8は
空気中の分子を吸Rt L、、該勤向を貞′ととするが
、パネル本体lと吸着剤8とは金属粉末4を介E2て抜
屑されるため熱伝導性が(mlめて号Iシ、冷却効率が
尚いため、吸着速度、排気速度が速く湊る。しかも、金
属粉末4がパネル本俸10表面に按している場合は、パ
ネル本体から接着剤2へめPキ1ム導i!+が者じるし
く向上すると共に、吸着剤8&Cも金属粉末4が接する
場合には熱伝導性は更に向上する。しかも特にrl:目
すべきは、金属パネル本体lと金1,1.14粉末人#
)接iMバ1」2とは熱膨張体数がほぼ同じとななので
、昇温降温熱ライフル(都)8000に=7勺10’K
)にもとづく温度変化により接7v削2がばく隙する
とい′)現象も阻止することが可能となった。In Section 2, when the suction panel is installed inside the temple of Tallion Pump Temple, the suction TM cutter 8 absorbs molecules in the air RtL, and the suction panel is placed inside the temple. However, since the panel body 1 and the adsorbent 8 are extracted through the metal powder 4 through E2, the thermal conductivity is low (ml), and the cooling efficiency is low, so the adsorption speed and exhaust speed are high. In addition, when the metal powder 4 is spread on the surface of the panel 10, the conductivity from the panel body to the adhesive 2 is markedly improved, and the adsorbent 8&C is also improved. The thermal conductivity is further improved when the metal powder 4 is in contact with the metal powder 4.What should be noted is that the metal panel body 1 and the gold 1, 1.14 powder layer #
) Since the number of thermal expansion bodies is almost the same as that of the contact iM bar 1'2, the temperature increasing temperature decreasing thermal rifle (capital) 8000 = 7 10'K
) It has also become possible to prevent the phenomenon that the contact 7V cutting 2 is exposed due to temperature changes.
不完1j111によるとパネル不1令と吸フd削との熱
伝導が極めてよく、こ7tをクツィオボンブ寺に1史月
1したとき、排気速度が向上し、ポンプ1」体の性能が
篩瓜化し、しかも、吸1uパネル面11J熱ザイクルに
強い。According to Incomplete 1j111, the heat conduction between the panel and suction pipe was extremely good, and when this 7t was delivered to Kuziobombu temple in 12 months, the pumping speed improved and the performance of the pump body improved. In addition, the panel surface absorbs 1U and is resistant to thermal cycles.
図tま本完用の一夷緬例を示す縦+ur tAi図であ
る。
■・・・パネル本俸、2・・・接右〜1.8・・・1汲
盾剤、4・・・金属粉末
代理人 弁理士大桐υ「平FIG. ■...Panel base salary, 2...Entrance to 1.8...1 shielding agent, 4...Metal powder agent Patent attorney Ogiri υ "Hira"
Claims (1)
該祉】l¥AIJ内にをゴ解!艮導性粉本がl毘スされ
たこと6・9・′T(Jrlとする吸jd用パネル。Pile Honka & C suction cutter is attached via myophthalmic agent,
[Applicable welfare] Go into l\AIJ! 6/9/'T (Jrl and JD panel.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP57152247A JPS5942017A (en) | 1982-08-31 | 1982-08-31 | Panel for adsorption |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP57152247A JPS5942017A (en) | 1982-08-31 | 1982-08-31 | Panel for adsorption |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5942017A true JPS5942017A (en) | 1984-03-08 |
Family
ID=15536310
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP57152247A Pending JPS5942017A (en) | 1982-08-31 | 1982-08-31 | Panel for adsorption |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5942017A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03168793A (en) * | 1989-11-29 | 1991-07-22 | Pioneer Electron Corp | Reflecting member for light source |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5330488A (en) * | 1976-09-01 | 1978-03-22 | Ulvac Corp | Adsorbing element of good heat conductivity and production thereof |
-
1982
- 1982-08-31 JP JP57152247A patent/JPS5942017A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5330488A (en) * | 1976-09-01 | 1978-03-22 | Ulvac Corp | Adsorbing element of good heat conductivity and production thereof |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03168793A (en) * | 1989-11-29 | 1991-07-22 | Pioneer Electron Corp | Reflecting member for light source |
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