JPS58133489A - Adsorbing panel for adsorbing pump - Google Patents
Adsorbing panel for adsorbing pumpInfo
- Publication number
- JPS58133489A JPS58133489A JP57015712A JP1571282A JPS58133489A JP S58133489 A JPS58133489 A JP S58133489A JP 57015712 A JP57015712 A JP 57015712A JP 1571282 A JP1571282 A JP 1571282A JP S58133489 A JPS58133489 A JP S58133489A
- Authority
- JP
- Japan
- Prior art keywords
- adsorption
- adsorbing
- liquid helium
- panel
- supporting board
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001179 sorption measurement Methods 0.000 claims abstract description 15
- 239000003463 adsorbent Substances 0.000 claims abstract description 10
- 239000007788 liquid Substances 0.000 claims abstract description 9
- 239000001307 helium Substances 0.000 claims abstract description 7
- 229910052734 helium Inorganic materials 0.000 claims abstract description 7
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims abstract description 7
- 229910052751 metal Inorganic materials 0.000 claims abstract description 6
- 239000002184 metal Substances 0.000 claims abstract description 6
- 229910000838 Al alloy Inorganic materials 0.000 abstract description 3
- 238000001816 cooling Methods 0.000 abstract description 3
- SWQJXJOGLNCZEY-BJUDXGSMSA-N helium-3 atom Chemical compound [3He] SWQJXJOGLNCZEY-BJUDXGSMSA-N 0.000 abstract description 3
- 230000000694 effects Effects 0.000 abstract 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 6
- 239000007789 gas Substances 0.000 description 4
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 241000894006 Bacteria Species 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- GSQKXUNYYCYYKT-UHFFFAOYSA-N cyclo-trialuminium Chemical compound [Al]1[Al]=[Al]1 GSQKXUNYYCYYKT-UHFFFAOYSA-N 0.000 description 1
- 229920006332 epoxy adhesive Polymers 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/02—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by absorption or adsorption
- F04B37/04—Selection of specific absorption or adsorption materials
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Separation Of Gases By Adsorption (AREA)
Abstract
Description
【発明の詳細な説明】 本発明は、吸着ポジづに関する。[Detailed description of the invention] The present invention relates to a suction positive.
高真空を得、又は維持するため、吸着ポンプパネルに、
残存する気体分子を吸着して除去するものである。To obtain or maintain a high vacuum, the adsorption pump panel
It adsorbs and removes remaining gas molecules.
なわれるのであるが２発生するヘリウムガスを排気する
ため、液体へ・リウム冷却の吸着ポジづが用いられる。However, in order to exhaust the helium gas generated, a liquid adsorption system with lium cooling is used.
この吸着ポジづの吸着パネルは、銅又はアル三合金製の
支持板の片面に吸着剤粒子（活性炭やｔし＋ニラシーづ
等）をエポ士シ系接着剤で接着したもので、その反対面
が液体ヘリウムで冷却される。This adsorption positive adsorption panel is made by adhering adsorbent particles (activated carbon, T-shi + Nirashi-zu, etc.) to one side of a support plate made of copper or tri-aluminum alloy with an epoxy adhesive, and the other side. is cooled with liquid helium.
しかるに、このような吸着板では、吸着速度が小さく、
かつポンプとしての吸着容量は、平衡吸着量の数％にし
かならないことが判明した。However, with such a suction plate, the suction speed is low,
It was also found that the adsorption capacity as a pump was only a few percent of the equilibrium adsorption amount.
発明者は、その原因について検討した結果。The inventor investigated the cause.
気体が吸着されると吸着熱が発生して局部的な温度上昇
が生ずるのに対し七し＋ニラシーづや活性炭の熱伝導率
が低く、液体ヘリウムによる冷却が十分及ばないことが
一つの原因であることをつきとめた。One reason for this is that when gas is adsorbed, heat of adsorption is generated and a local temperature rise occurs, whereas activated carbon has a low thermal conductivity and cannot be cooled sufficiently by liquid helium. I found out.
更に、吸着剤表面に吸着された気体分子が吸着剤内部に
速やかに拡散することが必要であるが、活性炭等の細孔
は、数十〜数百Ａ（１１１１位の拡散速度が遅いことも
原因であることが判明した。Furthermore, it is necessary for gas molecules adsorbed on the surface of the adsorbent to quickly diffuse into the interior of the adsorbent, but the pores of activated carbon etc. It turned out to be the cause.
本発明は、前記した事情に鑑みなされたもので、吸着剤
及び接着剤を熱伝導率の高い金属で構成し、冷却が十分
に行われて吸着速度が高い吸着パネルを提供することを
目的とする。The present invention has been made in view of the above-mentioned circumstances, and an object of the present invention is to provide an adsorption panel in which the adsorbent and adhesive are made of a metal with high thermal conductivity, and the cooling is sufficiently performed and the adsorption rate is high. do.
菌
以下本発明を図示の実施例に基づいて説明する。図にお
いて、アルミ合金製の支持板１は。Bacteria The present invention will now be described based on illustrated embodiments. In the figure, a support plate 1 made of aluminum alloy is shown.
貯槽２の中の液体ヘリウム３に接して冷却される。液体
ヘリウムの蒸気は２図示しないシエづ０シバツフルや熱
シールド板も冷却する。It is cooled by contacting liquid helium 3 in a storage tank 2. The liquid helium vapor also cools the heat shield plate (not shown) and the heat shield plate.
に冷却されている。is cooled to.
図示しないシェｊＯシバッフルを通過したヘリウムの分
子は吸着剤板４に吸着される。Helium molecules that have passed through a not-shown baffle are adsorbed on the adsorbent plate 4.
前記した本実癩例において、吸着パネルを構成する支持
板１．吸着剤板４及び接着剤は、すべて熱伝導率のよい
金属からできているので。In the present example described above, the support plate 1 constituting the suction panel. The adsorbent plate 4 and the adhesive are all made of metal with good thermal conductivity.
発生した吸着熱は直ちに除去され、常に所定温度に保持
されるので、吸着性能は著しく向上された。The generated heat of adsorption is immediately removed and the temperature is always maintained at a predetermined level, so the adsorption performance is significantly improved.
もよい。Good too.
図は２本発明の実施例を示す概略断面図である。 The figure is a schematic sectional view showing two embodiments of the present invention.
Claims (1)
ジづ用吸着パネル。[Claims] On the back side of a metal plate cooled with liquid helium. An adsorption panel for use with adsorption positives, characterized by forming a metal adsorbent layer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57015712A JPS58133489A (en) | 1982-02-03 | 1982-02-03 | Adsorbing panel for adsorbing pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57015712A JPS58133489A (en) | 1982-02-03 | 1982-02-03 | Adsorbing panel for adsorbing pump |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS58133489A true JPS58133489A (en) | 1983-08-09 |
Family
ID=11896373
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57015712A Pending JPS58133489A (en) | 1982-02-03 | 1982-02-03 | Adsorbing panel for adsorbing pump |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58133489A (en) |
-
1982
- 1982-02-03 JP JP57015712A patent/JPS58133489A/en active Pending
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