JPS5938053Y2 - microwave circuit device - Google Patents
microwave circuit deviceInfo
- Publication number
- JPS5938053Y2 JPS5938053Y2 JP18219378U JP18219378U JPS5938053Y2 JP S5938053 Y2 JPS5938053 Y2 JP S5938053Y2 JP 18219378 U JP18219378 U JP 18219378U JP 18219378 U JP18219378 U JP 18219378U JP S5938053 Y2 JPS5938053 Y2 JP S5938053Y2
- Authority
- JP
- Japan
- Prior art keywords
- microwave circuit
- circuit device
- resin
- input
- terminal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Lead Frames For Integrated Circuits (AREA)
Description
【考案の詳細な説明】
本考案は樹脂塗布されたマイクロ波集積回路装置におけ
る外部接続端子の位置に関するものである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to the position of external connection terminals in a resin-coated microwave integrated circuit device.
マイクロ波用の増幅回路や発振回路等を単一基板上に構
成した集積回路装置に於いては、従来保護手段として金
属容器に収容する、いわゆるキャン・タイプ・パッケー
ジが採用されているが、最近はセラミック・パッケージ
や樹脂モールドパッケージも採用されるようになった。For integrated circuit devices in which microwave amplifier circuits, oscillation circuits, etc. are constructed on a single substrate, so-called can-type packages, which are housed in metal containers, have traditionally been adopted as a protection measure. Ceramic packages and resin mold packages have also come to be used.
セラミックや樹脂モールドのパッケージは、金属パッケ
ージと異なり、絶縁体であるため、外部接続用の端子を
設ける位置に関して自由度が増すことを利点の−にあげ
ることができる。Unlike a metal package, a ceramic or resin mold package is an insulator, so one of its advantages is that it increases the degree of freedom regarding the location of external connection terminals.
マイクロ波集積回路装置を組合せてミより大きな機能を
有する装置を形成するため、此等を複数個差べて使用す
る場合がしばしばあり、その場合前記利点を利用して接
続を容易にし、かつ損失や寄生効果を最少にする外部接
続端子の構造が発明され、本件出願人によって出願され
ている。In order to combine microwave integrated circuit devices to form a device with greater functionality, it is often the case that multiple pieces of these devices are used. A structure for an external connection terminal that minimizes parasitic effects has been invented and filed by the present applicant.
一方、ハイブリッドICやプリント板上に形成した各種
の回路装置に樹脂を塗布するだけで、金属パッケージ等
を使わずに、大気中の酸素、水分あるいは塵埃から装置
を保護することは以前から行なわれており、特に低周波
用装置に於いては、比較的高硬度の樹脂を塗布すること
によって、ある程度の外力に対する保護能力を持たせ、
輸送中や装置への組込み作業中の、外力による損傷を防
ごうとすることが行なわれている。On the other hand, it has long been possible to protect devices from oxygen, moisture, and dust in the atmosphere by simply coating hybrid ICs and various circuit devices formed on printed boards with resin, without using metal packages or the like. Especially in low-frequency equipment, coating with relatively high hardness resin provides protection against external forces to a certain extent.
Efforts are being made to prevent damage caused by external forces during transportation and installation into equipment.
従来このような利用が低周波用に限られていたのは高周
波装置に於いては樹脂塗布によって高周波損失が大きく
なり、実用的でないとの判断が先行していたためと考え
られるが、近年斯種樹脂の開発が進み、本件考案者等が
実際に使用した結果として、例えばポリイミド樹脂の塗
布によって、外部から加えられる機械的な力に対しであ
る程度の保護能力を有し、かつ、高周波損失も許容範囲
内である被覆が得られている。In the past, this kind of use was limited to low-frequency applications, probably because in high-frequency equipment, resin coating increases high-frequency loss and was judged to be impractical, but in recent years this type of use has The development of resins has progressed, and as a result of actual use by the inventors of this case, for example, by coating polyimide resin, it has been found that it has a certain degree of protection ability against external mechanical forces and also tolerates high frequency loss. A coverage within the range has been obtained.
本考案はこのような樹脂塗布した集積回路装置に於いて
も前述の如き外部接続端子を設けることを提示するもの
である。The present invention proposes to provide external connection terminals as described above even in such resin-coated integrated circuit devices.
第1図に本考案の装置を示す。FIG. 1 shows the device of the present invention.
銅あるいはその他の熱伝導の良好な材料から成る台1の
上にサファイアチップ2が貼付され、この上にマイクロ
波集積回路(図示せず)が形成されている。A sapphire chip 2 is pasted onto a base 1 made of copper or other material with good thermal conductivity, on which a microwave integrated circuit (not shown) is formed.
該回路装置部にはポリイミド樹脂3が塗布されている。A polyimide resin 3 is applied to the circuit device section.
この樹脂塗布は、サファイアをダイシングする前に、す
なわちサファイアがウェファ−状であって集積回路装置
は形成されている状態の時に、スピンコードで行なわれ
る。This resin coating is performed using a spin cord before dicing the sapphire, ie, when the sapphire is in the form of a wafer and an integrated circuit device is formed.
その後サファイアをダイシングすれば塗布された樹脂も
同時に分割される。If the sapphire is then diced, the applied resin will also be divided at the same time.
この状態では、外部接続端子上にも樹脂が塗布されてい
るから、フォトプロセスによってこの部分の樹脂を除去
すれば外部接続端子4が露出される。In this state, since the resin is also applied onto the external connection terminals, the external connection terminals 4 will be exposed by removing the resin at this portion by photoprocessing.
このようにして形成した集積回路装置を複数個接続した
状態が第2図に示されている。FIG. 2 shows a state in which a plurality of integrated circuit devices formed in this manner are connected.
図から明らかなように、−個の集積回路装置の出力端子
は次の装置の入力端子に隣接することになり、両者の接
続は、接続用金属、例えば金、のベレットを双方にまた
がるようにはめ込み、ボンディングあるいはアロイング
等の処理によって行なうことができる。As is clear from the figure, the output terminal of one integrated circuit device will be adjacent to the input terminal of the next device, and the connection between the two will be such that the connecting metal, e.g. This can be done by a process such as fitting, bonding, or alloying.
これはバイアス用端子についても同様であって、外部接
続端子をこのような位置に設けた結果生ずる効果である
。This also applies to the bias terminal, and is an effect produced by providing the external connection terminal at such a position.
第1図、第2図は本考案を示す図であって1は銅ブロッ
ク、2はサファイア、3はポリイミド樹脂、4は外部接
続端子である。1 and 2 are diagrams showing the present invention, in which 1 is a copper block, 2 is sapphire, 3 is polyimide resin, and 4 is an external connection terminal.
Claims (1)
波回路と、マイクロ波の入出力用端子とバイアス用端子
を有し、該入出力用端子とバイアス用端子は、前記マイ
クロ波回路が形成された絶縁基板を複数個突合せて並べ
た場合にそれぞれの端子同士が隣接する位置に設けられ
ており、前記入出力用端子とバイアス用端子を除いて保
護用樹脂が塗布されていることを特徴とするマイクロ波
回路装置。It has a microwave circuit formed by arranging required elements on an insulating substrate, a microwave input/output terminal, and a bias terminal, and the input/output terminal and the bias terminal are connected to the microwave circuit. When a plurality of formed insulating substrates are butted and lined up, the respective terminals are provided in adjacent positions, and protective resin is applied except for the input/output terminals and bias terminals. Characteristic microwave circuit device.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18219378U JPS5938053Y2 (en) | 1978-12-28 | 1978-12-28 | microwave circuit device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18219378U JPS5938053Y2 (en) | 1978-12-28 | 1978-12-28 | microwave circuit device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5599160U JPS5599160U (en) | 1980-07-10 |
JPS5938053Y2 true JPS5938053Y2 (en) | 1984-10-22 |
Family
ID=29193872
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP18219378U Expired JPS5938053Y2 (en) | 1978-12-28 | 1978-12-28 | microwave circuit device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5938053Y2 (en) |
-
1978
- 1978-12-28 JP JP18219378U patent/JPS5938053Y2/en not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPS5599160U (en) | 1980-07-10 |
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