JPS5935876U - 低温用プロ−バ - Google Patents

低温用プロ−バ

Info

Publication number
JPS5935876U
JPS5935876U JP13174382U JP13174382U JPS5935876U JP S5935876 U JPS5935876 U JP S5935876U JP 13174382 U JP13174382 U JP 13174382U JP 13174382 U JP13174382 U JP 13174382U JP S5935876 U JPS5935876 U JP S5935876U
Authority
JP
Japan
Prior art keywords
chamber
low temperature
temperature prober
prober
positioning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13174382U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6339656Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
健治 活田
大原　多賀彦
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP13174382U priority Critical patent/JPS5935876U/ja
Publication of JPS5935876U publication Critical patent/JPS5935876U/ja
Application granted granted Critical
Publication of JPS6339656Y2 publication Critical patent/JPS6339656Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP13174382U 1982-08-31 1982-08-31 低温用プロ−バ Granted JPS5935876U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13174382U JPS5935876U (ja) 1982-08-31 1982-08-31 低温用プロ−バ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13174382U JPS5935876U (ja) 1982-08-31 1982-08-31 低温用プロ−バ

Publications (2)

Publication Number Publication Date
JPS5935876U true JPS5935876U (ja) 1984-03-06
JPS6339656Y2 JPS6339656Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1988-10-18

Family

ID=30297740

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13174382U Granted JPS5935876U (ja) 1982-08-31 1982-08-31 低温用プロ−バ

Country Status (1)

Country Link
JP (1) JPS5935876U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63164442A (ja) * 1986-12-26 1988-07-07 Tokyo Electron Ltd プローバ

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63164442A (ja) * 1986-12-26 1988-07-07 Tokyo Electron Ltd プローバ

Also Published As

Publication number Publication date
JPS6339656Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1988-10-18

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