JPS5935876U - Low temperature prober - Google Patents

Low temperature prober

Info

Publication number
JPS5935876U
JPS5935876U JP13174382U JP13174382U JPS5935876U JP S5935876 U JPS5935876 U JP S5935876U JP 13174382 U JP13174382 U JP 13174382U JP 13174382 U JP13174382 U JP 13174382U JP S5935876 U JPS5935876 U JP S5935876U
Authority
JP
Japan
Prior art keywords
chamber
low temperature
temperature prober
prober
positioning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13174382U
Other languages
Japanese (ja)
Other versions
JPS6339656Y2 (en
Inventor
健治 活田
大原　多賀彦
Original Assignee
日本電信電話株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日本電信電話株式会社 filed Critical 日本電信電話株式会社
Priority to JP13174382U priority Critical patent/JPS5935876U/en
Publication of JPS5935876U publication Critical patent/JPS5935876U/en
Application granted granted Critical
Publication of JPS6339656Y2 publication Critical patent/JPS6339656Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

添付図は本考案の一実施例の概略構成を示す縦断面図で
ある。The attached drawing is a vertical sectional view showing a schematic configuration of an embodiment of the present invention.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 気密・断熱構造のチャンバ内部に冷熱源によって冷却さ
れる熱伝導体製の載物台を設け、前記チャンバ外部に、
前記載物台に載置された被測定物に接触させられるプロ
ーブを一端部が前記チャンバ内に挿入された断熱構造の
運動伝達機構を介して移動させて位置決めする位置合わ
せ機構を設けたことを特徴とする低温用プローバ。A stage made of a thermal conductor that is cooled by a cold source is provided inside a chamber with an airtight and heat-insulating structure, and outside the chamber,
A positioning mechanism is provided for moving and positioning a probe that is brought into contact with an object to be measured placed on the object table through a motion transmission mechanism having an adiabatic structure with one end inserted into the chamber. A low-temperature prober with special features.
JP13174382U 1982-08-31 1982-08-31 Low temperature prober Granted JPS5935876U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13174382U JPS5935876U (en) 1982-08-31 1982-08-31 Low temperature prober

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13174382U JPS5935876U (en) 1982-08-31 1982-08-31 Low temperature prober

Publications (2)

Publication Number Publication Date
JPS5935876U true JPS5935876U (en) 1984-03-06
JPS6339656Y2 JPS6339656Y2 (en) 1988-10-18

Family

ID=30297740

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13174382U Granted JPS5935876U (en) 1982-08-31 1982-08-31 Low temperature prober

Country Status (1)

Country Link
JP (1) JPS5935876U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63164442A (en) * 1986-12-26 1988-07-07 Tokyo Electron Ltd Wafer prober

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63164442A (en) * 1986-12-26 1988-07-07 Tokyo Electron Ltd Wafer prober

Also Published As

Publication number Publication date
JPS6339656Y2 (en) 1988-10-18

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