JPS5934085A - 弁装置 - Google Patents

弁装置

Info

Publication number
JPS5934085A
JPS5934085A JP14190082A JP14190082A JPS5934085A JP S5934085 A JPS5934085 A JP S5934085A JP 14190082 A JP14190082 A JP 14190082A JP 14190082 A JP14190082 A JP 14190082A JP S5934085 A JPS5934085 A JP S5934085A
Authority
JP
Japan
Prior art keywords
gear
valve
valve seat
planetary gear
valve plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14190082A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6346309B2 (enrdf_load_stackoverflow
Inventor
田中　武延
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Shimazu Seisakusho KK
Original Assignee
Shimadzu Corp
Shimazu Seisakusho KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp, Shimazu Seisakusho KK filed Critical Shimadzu Corp
Priority to JP14190082A priority Critical patent/JPS5934085A/ja
Publication of JPS5934085A publication Critical patent/JPS5934085A/ja
Publication of JPS6346309B2 publication Critical patent/JPS6346309B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Sliding Valves (AREA)
JP14190082A 1982-08-16 1982-08-16 弁装置 Granted JPS5934085A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14190082A JPS5934085A (ja) 1982-08-16 1982-08-16 弁装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14190082A JPS5934085A (ja) 1982-08-16 1982-08-16 弁装置

Publications (2)

Publication Number Publication Date
JPS5934085A true JPS5934085A (ja) 1984-02-24
JPS6346309B2 JPS6346309B2 (enrdf_load_stackoverflow) 1988-09-14

Family

ID=15302769

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14190082A Granted JPS5934085A (ja) 1982-08-16 1982-08-16 弁装置

Country Status (1)

Country Link
JP (1) JPS5934085A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007333209A (ja) * 2006-06-16 2007-12-27 Vat Holding Ag 真空バルブ

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007333209A (ja) * 2006-06-16 2007-12-27 Vat Holding Ag 真空バルブ

Also Published As

Publication number Publication date
JPS6346309B2 (enrdf_load_stackoverflow) 1988-09-14

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