JPS5934085A - Valve gear - Google Patents

Valve gear

Info

Publication number
JPS5934085A
JPS5934085A JP14190082A JP14190082A JPS5934085A JP S5934085 A JPS5934085 A JP S5934085A JP 14190082 A JP14190082 A JP 14190082A JP 14190082 A JP14190082 A JP 14190082A JP S5934085 A JPS5934085 A JP S5934085A
Authority
JP
Japan
Prior art keywords
gear
valve
valve seat
planetary gear
valve plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14190082A
Other languages
Japanese (ja)
Other versions
JPS6346309B2 (en
Inventor
田中 武延
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Shimazu Seisakusho KK
Original Assignee
Shimadzu Corp
Shimazu Seisakusho KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp, Shimazu Seisakusho KK filed Critical Shimadzu Corp
Priority to JP14190082A priority Critical patent/JPS5934085A/en
Publication of JPS5934085A publication Critical patent/JPS5934085A/en
Publication of JPS6346309B2 publication Critical patent/JPS6346309B2/ja
Granted legal-status Critical Current

Links

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。
(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【発明の詳細な説明】 本発明は弁板を弁座に圧接して流体管路を閉止する弁装
置に係り、特に遊星歯車でもって弁板を兼用した弁装置
に関する。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a valve device that closes a fluid pipeline by pressing a valve plate against a valve seat, and particularly relates to a valve device in which a planetary gear also serves as a valve plate.

弁板を弁座に圧接して流体管路を閉止するタイプの弁装
置は真空系管路に使用する弁装置として特に重要である
が、一般的にはその機構か複雑で且つ大型のものが多か
った。
Valve devices of the type that press the valve plate against the valve seat to close the fluid pipeline are particularly important as valve devices used in vacuum system pipelines, but generally the mechanism is complex and large. There were many.

本発明は上記事情に鑑みてなされたもので、遊星歯車機
構の原理を利用して簡易な機構で小型に製作し得る弁装
置を提供することを目的としている。
The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a valve device that can be manufactured in a small size with a simple mechanism using the principle of a planetary gear mechanism.

以下図面に従って本発明の実施例について説明する。Embodiments of the present invention will be described below with reference to the drawings.

第1図は本発明に係る弁装置の実施例の部分破断斜視図
、茅2図は同じく部分破断平面図である。
FIG. 1 is a partially cutaway perspective view of an embodiment of a valve device according to the present invention, and FIG. 2 is a partially cutaway plan view.

環状の絵本10の両面lこは円板状のグ1り面11と1
Yがが0リング12と12′を介して気密に冠着されて
いる。
Both sides of the circular picture book 10 are disc-shaped guide surfaces 11 and 1.
The Y is hermetically sealed via O-rings 12 and 12'.

面前記側板11と11′には中心から外れた位置に相対
向して開口部13がそれぞれ設けられていて、これら開
口部には配管14がそれぞれ気密に接続されていて全体
として流体管路を構成している。
The side plates 11 and 11' are respectively provided with openings 13 facing each other at off-center positions, and piping 14 is hermetically connected to each of these openings to form a fluid pipeline as a whole. It consists of

また側板の内部には円弧状に形成した内歯歯車15が固
設されてあり、その一端側所定個所には後述する遊星歯
車を当接停止するための適宜形状のストッパ16が前記
側板の内部≦こ設けられている。
Further, an internal gear 15 formed in an arc shape is fixedly installed inside the side plate, and a stopper 16 of an appropriately shaped shape is provided at a predetermined position on one end side of the internal gear 15 to stop contact with a planetary gear, which will be described later. ≦This is provided.

17は弁座部であって、開口部13と同位置かつ側板の
内部側に設けられている。
Reference numeral 17 denotes a valve seat, which is provided at the same position as the opening 13 and inside the side plate.

:30は七−夕であ−)で、このモータの軸にはウオー
ム3Iか同軸に取付けられてあり、ウオーム31はウオ
ームホイール32と咬合うことにより、回転トルクの方
向を直角に偏向させ、一方ウオームホイール32の軸3
21の先端にはスパイラル歯車33が取付けられている
。もう一つのスパイラル歯車34はtars記スパイラ
ル歯車33と咬合っており、スパイラル歯車34の軸は
後述の駆動歯車37の軸と平行となるように構成されて
いる。
:30 is Tanabata), and a worm 3I is coaxially attached to the shaft of this motor, and the worm 31 engages with the worm wheel 32 to deflect the direction of rotational torque at right angles. On the other hand, the shaft 3 of the worm wheel 32
A spiral gear 33 is attached to the tip of 21. Another spiral gear 34 meshes with the tars spiral gear 33, and the axis of the spiral gear 34 is configured to be parallel to the axis of a drive gear 37, which will be described later.

しかして側板11の所要位置には小径の軸孔36が開設
されていて、前記スパイラル歯車調に直結した回転駆動
軸341はブッシング35を介し−て、軸孔36を気密
でかつ軸方向安位自在に貫通し、回転トルクを筒体10
の内部に設けた駆動歯車37に伝えるように構成されて
いる。またあはスプリングであって、スパイラル歯車3
4とブッシング35との間隙に一定力にて圧縮された状
態で駆動軸341に遊嵌されている。駆動歯車37と回
転駆動軸341の関係は図示のとおりビン34Pを介し
て回転方向および軸方向とも一体的に結合されている。
A small-diameter shaft hole 36 is formed at a predetermined position in the side plate 11, and the rotary drive shaft 341 directly connected to the spiral gear is connected to the shaft hole 36 through a bushing 35 so that the shaft hole 36 is airtight and axially stable. The cylindrical body 10 freely penetrates and transfers rotational torque.
It is configured to transmit the signal to a drive gear 37 provided inside. Also, A is a spring, and spiral gear 3
The drive shaft 341 is loosely fitted into the gap between the drive shaft 341 and the bushing 35 while being compressed with a constant force. As shown in the figure, the drive gear 37 and the rotary drive shaft 341 are integrally connected in the rotational direction and the axial direction via the pin 34P.

しかもこの駆動歯車37は中央部か凸状をなしてその段
部が押え板40の溝40′に挿入された形で係止さオ]
ている。
Moreover, the drive gear 37 has a convex shape in the center, and the stepped part is inserted into the groove 40' of the holding plate 40 and locked.]
ing.

39は弁板を兼ねる遊星歯車であ−)で、この遊星歯車
39は前記内歯歯車15の内歯と噛合する一方、レバ状
の押え板40でもって駆動歯車37と一定の関係で結合
されている。なお遊星歯車39には弁座部と対応した位
置1こ0リング41が設けられて弁座部を圧接した際l
(気密性か保持されるようになっている。なお42はウ
オーム31、ウオームホイール32、スパイラル歯車3
3.34等を保持するためのハウジングであって、側板
11に固設されている。また遊星歯車39の突起部43
(第2図参照)は押え板4oの段付孔44に緩嵌してお
り、凸部を接して互に逆向きに配設された2枚の球面状
スプリングワッシャ45 、45を介してボルト46で
軸支されている。
Reference numeral 39 designates a planetary gear which also serves as a valve plate.This planetary gear 39 meshes with the internal teeth of the internal gear 15, and is connected to the drive gear 37 in a fixed relationship by a lever-shaped holding plate 40. ing. Note that the planetary gear 39 is provided with a ring 41 at a position corresponding to the valve seat, so that when the valve seat is pressed against the valve seat,
(It is designed to maintain airtightness. Note that 42 is a worm 31, a worm wheel 32, and a spiral gear 3.
3.34, etc., and is fixed to the side plate 11. Also, the protrusion 43 of the planetary gear 39
(See Fig. 2) is loosely fitted into a stepped hole 44 of the holding plate 4o, and the bolt is inserted through two spherical spring washers 45, 45, which are arranged in opposite directions with their protrusions in contact with each other. It is pivoted at 46.

次に上記のように構成した実施例についてその動作を説
明する。
Next, the operation of the embodiment configured as described above will be explained.

電源入りによりモータ30 i;J回転するが、その回
転トルクは前述の如く、ウオーム31、ウオームホイー
ル32、スパイラル歯車33、スパイラル歯車34そし
て駆動軸34】の順に伝達される。その際1こスパイラ
ル歯車34はスパイラル歯車33によって回転[・ルク
か伝達されると同時に軸方向の分力も発生ずる。しかし
軸方向の分力はスプリングあのバネ力の方か大きいので
駆動歯車37か回転しうる期間は前記スパイラル歯車3
4は回転力のみ伝達する。
When the power is turned on, the motor 30i;J rotates, and the rotational torque is transmitted in this order to the worm 31, worm wheel 32, spiral gear 33, spiral gear 34, and drive shaft 34, as described above. At this time, the spiral gear 34 transmits the rotation torque and simultaneously generates an axial component force. However, since the axial component force is greater than that of the spring force, the period during which the drive gear 37 can rotate is limited to the period when the spiral gear 3
4 transmits only rotational force.

駆動歯車37の回転はこれと咬合っている遊星歯車1こ
伝達される結果、遊星歯車39は内歯歯車15によって
案内されつ\、第1図に図示した矢印方向に公転運動し
、弁座部17の直上に来たとき、ストッパ16に当接し
て停止する。
As a result, the rotation of the drive gear 37 is transmitted to the planet gear meshing with the drive gear 37. As a result, the planet gear 39 is guided by the internal gear 15 and revolves in the direction of the arrow shown in FIG. When it comes directly above the portion 17, it comes into contact with the stopper 16 and stops.

遊星歯車39か停止することにより、これと咬合ってい
る駆動歯車37も回転を停止する。
When the planetary gear 39 stops, the drive gear 37 meshing with it also stops rotating.

しかしこの際、モータ30は更に回転を続+jようとす
るか前述の如く駆動歯車37か停止しているためスパイ
ラル歯車34は回転することかできず、伝達された回転
□トルクは軸方向の分力として現われ、前記スパイラル
歯車34は軸方向へ移動しようとする。
However, at this time, the spiral gear 34 cannot rotate because the motor 30 tries to continue rotating or the drive gear 37 has stopped as described above, and the transmitted rotational torque is divided into axial components. This appears as a force and the spiral gear 34 tends to move in the axial direction.

一方スパイラル歯車34に固設されている駆動軸341
が遊嵌する側板11′の軸穴47は軸方向に余裕を持た
せて穿設されているので、スパイラル歯車34は前述の
軸方向分力により、スプリングあのバネ力(圧縮力)に
抗して軸方向に移動し、駆即J$+b341を介して駆
動歯車37を下方に押す。するとこの歯車37に係止さ
れた押え板40はその他端凸部405を支点とし突起部
43を作用点とするテコとして機能し、遊星歯車39ず
なわぢ弁板を倍増の力で弁座部の方向に抑圧し、流体管
路を閉止する。この際遊星歯車39は前述の如く余裕を
もって押え板40の段付穴44に緩嵌軸支されているの
で、遊星歯車39は弁座部17に対して均一にJ((を
理なく圧接される。そして弁座部17が遊星歯車39に
よ−〕て圧接閉止されると、図示しないリミットスイッ
チにより、モータの電源はIUjとなり、モータ30は
停止する1、尚この場合、スプリング38の復元力によ
、・てスパイラル歯車34は逆転しようとするトルクが
発生ずるが、ウオームホイール32とウオーム3Iによ
って逆転か阻止されるので、スパイラル歯車34は軸方
向に移動したま\、復帰できず、従って遊星歯車39は
弁座f4j≦17に圧接された状態で保持される。
On the other hand, a drive shaft 341 fixed to the spiral gear 34
Since the shaft hole 47 of the side plate 11' into which the screw fits loosely is bored in the axial direction, the spiral gear 34 resists the spring force (compressive force) due to the aforementioned axial component force. moves in the axial direction and pushes the drive gear 37 downward via the drive gear J$+b341. Then, the holding plate 40 that is locked to the gear 37 functions as a lever with the protrusion 405 at the other end as the fulcrum and the protrusion 43 as the point of action, and doubles the force of the planetary gear 39 to push the valve plate toward the valve seat. direction and close the fluid line. At this time, since the planetary gear 39 is loosely fitted into the stepped hole 44 of the holding plate 40 with sufficient margin as described above, the planetary gear 39 is uniformly pressed against the valve seat 17 without any reason. Then, when the valve seat 17 is closed by the planetary gear 39, the power to the motor becomes IUj and the motor 30 is stopped by a limit switch (not shown).In this case, the spring 38 is restored. Due to the force, a torque is generated that tries to reverse the spiral gear 34, but the worm wheel 32 and the worm 3I prevent the spiral gear 34 from reversing, so the spiral gear 34 moves in the axial direction and cannot return. Therefore, the planetary gear 39 is held in pressure contact with the valve seat f4j≦17.

次にモータ30を前述と逆方向に回゛転すると、Ajl
述と逆の経過をたとり、開口部は開放され、流体の移動
は自由となる。なお」−記実施例においCは二m(l動
源としてモータを使用した場合について説明したが、本
発明はこれに限定されることなく、油圧モータ等を使用
することも可能であり、またエアンリンダ等1こよる往
復運動を利用して、へりカルラツクを介してスパイラル
歯車34を直接駆動させることも勿論可能である。
Next, when the motor 30 is rotated in the opposite direction to that described above, Ajl
Following the reverse process as described above, the opening is opened and fluid can move freely. In addition, in the embodiment described above, C is 2 m (l), but the present invention is not limited to this, and it is also possible to use a hydraulic motor etc. Of course, it is also possible to directly drive the spiral gear 34 via the helical rack using the reciprocating motion of an air cylinder or the like.

以上説明した如く本発明は一連の減速歯車列のうちの遊
星歯車を弁板に兼用すると共に、弁板の移動、弁板の弁
座部への圧接等をすべて前記の減速歯列によって行わせ
ているので、簡易な構造で小型化し得る効果を有すると
共に、弁板を弁挫に圧接し得るので特に真空管路用弁装
置として有効である。
As explained above, the present invention uses the planetary gear in a series of reduction gear trains as a valve plate, and also allows the movement of the valve plate, the pressure contact of the valve plate to the valve seat, etc. to be performed entirely by the reduction gear train. Therefore, it has the effect of being miniaturized with a simple structure, and the valve plate can be pressed against the valve constriction, so it is particularly effective as a valve device for vacuum pipes.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明に係る実施例の部分破断斜視図、第2図
は同じく部分破断平面図である。。 10・・・篩体、15・・・内歯歯車、16・・・スト
ッパ、]7・・・弁座部、30・・・モータ、31・・
・ウオーム、32・・・ウオーム歯車、33.34・・
・スパイラル歯車、あ・・・スプリング、37・・・駆
動歯車、39・・・遊星歯車、麹・・・押え板。 特許出願人 株式会社島津製作所 代理人弁理士大西孝治
FIG. 1 is a partially cutaway perspective view of an embodiment of the present invention, and FIG. 2 is a partially cutaway plan view. . DESCRIPTION OF SYMBOLS 10... Sieve body, 15... Internal gear, 16... Stopper, ]7... Valve seat part, 30... Motor, 31...
・Worm, 32... Worm gear, 33.34...
・Spiral gear, ah...spring, 37...driving gear, 39...planetary gear, koji...pressing plate. Patent applicant Koji Onishi, patent attorney representing Shimadzu Corporation

Claims (1)

【特許請求の範囲】[Claims] (1)流体管路の弁座部に弁板を進退させること1こよ
り、流体管路を開閉する弁装置において、駆動両車1こ
より、自転しつ\、内歯歯車1こ沿って公転する遊星歯
車を弁板として構成し、前記公転lこよりこの弁板を弁
座部に対して進退させるようにするとともに流体管路の
閉止時弁板を弁座部こと圧接させる機構を合わせ備え有
したことを特徴とする弁装置。
(1) Moving the valve plate forward and backward from the valve seat of the fluid pipeline.In the valve device that opens and closes the fluid pipeline, the drive vehicle rotates on its own axis and revolves along the internal gear. The planetary gear is configured as a valve plate, and the valve plate is moved forward and backward with respect to the valve seat part by the revolution l, and a mechanism is also provided for bringing the valve plate into pressure contact with the valve seat part when the fluid pipe line is closed. A valve device characterized by:
JP14190082A 1982-08-16 1982-08-16 Valve gear Granted JPS5934085A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14190082A JPS5934085A (en) 1982-08-16 1982-08-16 Valve gear

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14190082A JPS5934085A (en) 1982-08-16 1982-08-16 Valve gear

Publications (2)

Publication Number Publication Date
JPS5934085A true JPS5934085A (en) 1984-02-24
JPS6346309B2 JPS6346309B2 (en) 1988-09-14

Family

ID=15302769

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14190082A Granted JPS5934085A (en) 1982-08-16 1982-08-16 Valve gear

Country Status (1)

Country Link
JP (1) JPS5934085A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007333209A (en) * 2006-06-16 2007-12-27 Vat Holding Ag Vacuum valve

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007333209A (en) * 2006-06-16 2007-12-27 Vat Holding Ag Vacuum valve

Also Published As

Publication number Publication date
JPS6346309B2 (en) 1988-09-14

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