JPS5933660U

JPS5933660U - Goniometer sample position control device

Info

Publication number: JPS5933660U
Application number: JP12952282U
Authority: JP
Inventors: 本田　敏和; 木原　春己
Original assignee: 日本電子株式会社
Priority date: 1982-08-27
Filing date: 1982-08-27
Publication date: 1984-03-01
Also published as: JPH0132288Y2

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

[Brief explanation of the drawing]

第１図は本考案の一実施例による透過型電子顕微鏡用サ
イドエントリーゴニオメータの一部を切欠いた平面図、
第２図はその主要部をＡ−Ａ面で切断して示す垂直断面
図、第３図はポールピースの特性の一例を示す曲線図で
ある。各図中、同一符号は同一または相当部分を示し、１は試
料室、２．３はポールピース、４はヨーク、５はスペー
サ、６はゴニオメータ、７は試料ホルダー、８は試料傾
斜軸、９は試料台、１０は試料、１３はステージ、２１
．２２は２枚板バネ、２５はオネジ、２６はウオームホ
イール、２７はメネジ、３０はウオーム、３１はブツシ
ュである。FIG. 1 is a partially cutaway plan view of a side entry goniometer for a transmission electron microscope according to an embodiment of the present invention;
FIG. 2 is a vertical sectional view showing the main part taken along the line A-A, and FIG. 3 is a curve diagram showing an example of the characteristics of the pole piece. In each figure, the same reference numerals indicate the same or equivalent parts, 1 is the sample chamber, 2.3 is the pole piece, 4 is the yoke, 5 is the spacer, 6 is the goniometer, 7 is the sample holder, 8 is the sample tilt axis, 9 is a sample stage, 10 is a sample, 13 is a stage, 21
．． 22 is a two-plate spring, 25 is a male screw, 26 is a worm wheel, 27 is a female screw, 30 is a worm, and 31 is a bush.

Claims

[Scope of utility model registration request]

(1) A sample holder that is inserted into the sample chamber through the side wall, a stage that supports this sample holder in the sample chamber so that it can rotate around the sample tilt axis, and this stage that can be moved up and down in a vacuum-sealed state. 1. A goniometer sample position control device comprising: a vertical mechanism that adjusts the sample position by moving the stage; and a fixing mechanism that fixes the stage after adjustment.

(2) The goniometer sample position control device according to claim 1, wherein the stage up and down mechanism is a screw mechanism.

(3) The goniometer sample position control device according to claim 2, wherein the screw mechanism is driven by a worm gear mechanism.

(4) The goniometer sample position control device according to any one of claims 1 to 3, wherein the vacuum sealing mechanism is a two-plate spring connected to the upper and lower sides of the stage via a sealing material.

(5) The stage fixing mechanism is a bush having a tapered surface provided on the outer periphery of the stage and a fixing screw facing the bush as described in any one of claims 1 to 4 of the utility model registration claim. goniometer sample position control device.