JPS5932941A - 電界電離型イオン源 - Google Patents

電界電離型イオン源

Info

Publication number
JPS5932941A
JPS5932941A JP14362982A JP14362982A JPS5932941A JP S5932941 A JPS5932941 A JP S5932941A JP 14362982 A JP14362982 A JP 14362982A JP 14362982 A JP14362982 A JP 14362982A JP S5932941 A JPS5932941 A JP S5932941A
Authority
JP
Japan
Prior art keywords
electric field
high frequency
ion source
low frequency
variable component
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14362982A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0116531B2 (enExample
Inventor
Masahiko Okunuki
昌彦 奥貫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
NTT Inc
Original Assignee
Jeol Ltd
Nihon Denshi KK
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK, Nippon Telegraph and Telephone Corp filed Critical Jeol Ltd
Priority to JP14362982A priority Critical patent/JPS5932941A/ja
Publication of JPS5932941A publication Critical patent/JPS5932941A/ja
Publication of JPH0116531B2 publication Critical patent/JPH0116531B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Or Chemical Processes And Apparatus (AREA)
JP14362982A 1982-08-18 1982-08-18 電界電離型イオン源 Granted JPS5932941A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14362982A JPS5932941A (ja) 1982-08-18 1982-08-18 電界電離型イオン源

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14362982A JPS5932941A (ja) 1982-08-18 1982-08-18 電界電離型イオン源

Publications (2)

Publication Number Publication Date
JPS5932941A true JPS5932941A (ja) 1984-02-22
JPH0116531B2 JPH0116531B2 (enExample) 1989-03-24

Family

ID=15343195

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14362982A Granted JPS5932941A (ja) 1982-08-18 1982-08-18 電界電離型イオン源

Country Status (1)

Country Link
JP (1) JPS5932941A (enExample)

Also Published As

Publication number Publication date
JPH0116531B2 (enExample) 1989-03-24

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