JPS5931428A - Mechanism for detecting temperature of glass substrate for master disc - Google Patents

Mechanism for detecting temperature of glass substrate for master disc

Info

Publication number
JPS5931428A
JPS5931428A JP14154982A JP14154982A JPS5931428A JP S5931428 A JPS5931428 A JP S5931428A JP 14154982 A JP14154982 A JP 14154982A JP 14154982 A JP14154982 A JP 14154982A JP S5931428 A JPS5931428 A JP S5931428A
Authority
JP
Japan
Prior art keywords
temperature
glass substrate
master
signal
master disc
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14154982A
Other languages
Japanese (ja)
Inventor
Yasuyuki Goto
康之 後藤
Kenichi Ito
健一 伊藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP14154982A priority Critical patent/JPS5931428A/en
Publication of JPS5931428A publication Critical patent/JPS5931428A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01KMEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K13/00Thermometers specially adapted for specific purposes
    • G01K13/04Thermometers specially adapted for specific purposes for measuring temperature of moving solid bodies
    • G01K13/08Thermometers specially adapted for specific purposes for measuring temperature of moving solid bodies in rotary movement

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing Optical Record Carriers (AREA)

Abstract

PURPOSE:To adjust the temperature of an atmosphere to a fixed temperature, by providing a signal transmission means for transmitting a detection signal of a temperature detecting element which is provided in a glass substrate to the outside through a revolving shaft. CONSTITUTION:At the time of processing a glass substrate 2 for master disc by rotating the revolving shaft 1, the temperature of the substrate 2 itself is detected accurately by a temperature detecting element 5 and its detected signal is transmitted the outside through a signal transmission means consisting of a brush 5 and conductive bodies 4, 4 which are formed on the revolving shaft 1 to supply the transmitted signal to a temp. controller. The temperature of the substrate can be controlled with high accuracy by supplying controlled constant temperature wind from the temperature controller to the circumference of the glass substrate for master disc.

Description

【発明の詳細な説明】 発明の技術分野 本発明は光デイスク製造等に使用される原盤用ガラス基
板の温度検出機構に関するものである。
DETAILED DESCRIPTION OF THE INVENTION TECHNICAL FIELD OF THE INVENTION The present invention relates to a temperature detection mechanism for a master glass substrate used in optical disk manufacturing and the like.

技術の背景 光ディスクの製造に使用される原盤は、フロートガラス
より形成される円板状ガラス基板の表面にフォトレジス
トを均一に塗布し、該ガラス基板を回転させなからレー
ザで該フォトレジストに所定のパターンで露光した後現
像を行って作成される。光ディスクは、この原盤のレジ
スト上にN1等のメッキを行って該メッキ膜をはく離し
、該メッキ膜を基板に貼り付けてなるスタンプ型を用い
てプレス等により製造される。
Background of the Technology The master disc used in the manufacture of optical discs is made by uniformly coating the surface of a disc-shaped glass substrate made of float glass with photoresist, and then applying a laser beam to the photoresist in a predetermined manner while rotating the glass substrate. It is created by exposing the pattern to light and then developing it. An optical disk is manufactured by applying a plate such as N1 on the resist of this master, peeling off the plating film, and applying the plating film to a substrate using a stamp mold or the like using a press or the like.

従来技術と問題点 この種の原盤を製造する際には、情轄パターン梢贋を土
げるためVc原盤用ガラス基板を一定温度11C保って
処理を行う必費がある。このため、従来ガラス基板を取
り付けた装置を恒温宴曲気中で一定温度に保って処理を
行っているが、回転しているガラス基板自体の温度を測
定して温度をl!I)4節することは行っておらず、ガ
ラス基板自体を一定温度に維持することは回船であった
Prior Art and Problems When manufacturing this type of master, it is necessary to maintain the glass substrate for the Vc master at a constant temperature of 11 C during processing in order to remove fake patterns. For this reason, conventionally, processing is carried out by maintaining a device with a glass substrate attached at a constant temperature in a constant temperature atmosphere, but the temperature can be adjusted by measuring the temperature of the rotating glass substrate itself. I) No heating was done, and the glass substrate itself was maintained at a constant temperature.

発明の目的 本発明は上述の問題を解決するだめのもの〒、ガラス基
板自体の温度を一定温度に維持して処理を行うことを可
能にする原盤用ガラス基板の温度検出機構を提供するこ
とを目的としている。
OBJECTS OF THE INVENTION The present invention is intended to solve the above-mentioned problems.It is an object of the present invention to provide a temperature detection mechanism for a glass substrate for a master, which makes it possible to perform processing while maintaining the temperature of the glass substrate itself at a constant temperature. The purpose is

発明の構成 本発明では、上述の目的を達成するため、原盤用ガラス
基板内に温度検出子を設けるとともに、該温度検出子の
検出信号を外部に伝達する信号伝達手段を設け、該伝達
された検出信号によυ原盤用ガラス基板の周囲豚囲気の
温度を調節するように構成されている。
Structure of the Invention In order to achieve the above-mentioned object, the present invention provides a temperature detector within a master glass substrate, and also provides a signal transmission means for transmitting a detection signal of the temperature detector to the outside. It is configured to adjust the temperature of the surrounding air around the glass substrate for the υ master based on the detection signal.

発明の実施例 以下、図面に関連して本発明の詳細な説明する。Examples of the invention The invention will now be described in detail in conjunction with the drawings.

図中、lは回転ll1l+、2は原盤用ガラス基板、3
はブラシである。
In the figure, l is the rotation ll1l+, 2 is the master glass substrate, 3
is a brush.

回転軸1は、恒温y囲気中に設けられ、矢印方向に30
0 rpm程反の定速で回転する。この回転軸lの表面
には軸線方向に伸びる対の導体4.4が設けられ、該導
体4,4の一端部4a、4aは、回転軸1が回転する際
にブラシ3に尋通する。
The rotating shaft 1 is installed in a constant temperature y environment, and rotates 30 degrees in the direction of the arrow.
It rotates at a constant speed of about 0 rpm. A pair of conductors 4.4 extending in the axial direction are provided on the surface of the rotating shaft 1, and one end portion 4a, 4a of the conductors 4, 4 penetrates the brush 3 when the rotating shaft 1 rotates.

原盤用ガラス基板2の外周部にはアルメル・クロメル熱
電対等の温度検出子5が埋設されておυ、この原盤用ガ
ラス基板2は、該基板の裏面に伸延される温度検出子5
の累#il(図中点線で示す)を導体訃4の他端部に接
続させて中心部を回転軸1の先端部に支持され、該回転
軸1とともに回転する。
A temperature detector 5 such as an alumel/chromel thermocouple is embedded in the outer circumference of the glass substrate 2 for master disc.
The conductor end 4 (indicated by a dotted line in the figure) is connected to the other end of the conductor 4, and its center is supported by the tip of the rotating shaft 1, and rotates together with the rotating shaft 1.

従って、回転軸lを回転させて原盤用ガラス基板lの処
理を行う際に、原盤用ガラス基板1自体の温度が温度検
出子5によシ正確に検出され、その検出信号は、回転+
111+ 1に形成されたシ、ダ体4,4およびブラシ
5よυなる信号伝達手段を介して外部に伝達される。そ
こでこの伝達された検出信号を例えば温度制御装置に供
給すれば、該温度制御装置から管理さiした恒温風を原
盤用ガラス基板の周囲に供給して該基板の温度を高精度
で制御することが可能である。具体的には、この温度制
御装置から供給される恒温風の温度は、原盤用ガラス基
板の温度が上ると低くなシ、基板温度が下ると高くなる
Therefore, when processing the master glass substrate l by rotating the rotation axis l, the temperature of the master glass substrate 1 itself is accurately detected by the temperature sensor 5, and the detection signal is
The signal is transmitted to the outside through signal transmitting means such as the blade bodies 4, 4, and the brush 5 formed at 111+1. Therefore, if this transmitted detection signal is supplied to, for example, a temperature control device, controlled constant-temperature air can be supplied from the temperature control device around the master glass substrate to control the temperature of the substrate with high precision. is possible. Specifically, the temperature of the constant temperature air supplied from this temperature control device decreases as the temperature of the master glass substrate increases, and increases as the substrate temperature decreases.

上述の説明では温度検出子1を1個設けた例について述
べたが、円板の円周方向に所定のピッチで榎数個設けて
も良い。
In the above description, an example was described in which one temperature sensor 1 was provided, but several sensors may be provided at a predetermined pitch in the circumferential direction of the disk.

発明の効果 以」:述べたように、本発明によノtば、M(盤用ガラ
ス基板自体の温度を常時正確に測定して検出信号を外部
に伝達することができるため、この検出信号をもとに基
板周囲の雰囲気の温度を制御し−C基板温度を一定に維
持して処理を行うことが可能になる。
Effects of the Invention: As described above, according to the present invention, the temperature of the glass substrate itself can be accurately measured at all times and the detection signal can be transmitted to the outside. It becomes possible to control the temperature of the atmosphere around the substrate based on the -C substrate temperature and perform processing while maintaining the substrate temperature constant.

【図面の簡単な説明】[Brief explanation of drawings]

図面は本発明に係る原盤用ガラス基板の温度検出機構の
実施例を示す斜視図で、図中、lは回転軸、2は原盤用
ガラス基板、3はブラシ、4はブラシ3ととも゛に信号
伝達手段を構成する導体、5は温度検出子である。 特許出願人 富士通株式会社 代理人弁理士 玉 蟲 久 五 部(外3名)a
The drawing is a perspective view showing an embodiment of the temperature detection mechanism for a glass substrate for a master disc according to the present invention, in which l is a rotating shaft, 2 is a glass substrate for a master disc, 3 is a brush, and 4 is the same as the brush 3. The conductor 5 which constitutes the signal transmission means is a temperature sensor. Patent applicant Fujitsu Ltd. Representative Patent Attorney Hisashi Tamamushi Gobu (3 others)a

Claims (1)

【特許請求の範囲】[Claims] 回転軸に中心部を支持され恒温雰囲気中で処理さiする
原盤用ガラス基板において、前記ガラス基板内に1個以
上の温度検出子を設けるとともに、該温度検出子の検出
信号を前記回転軸を通し外部に伝達する信号伝達手段を
設けてなり、該伝達された検出信号によシ前記>V囲気
の温度をy、11節できるように構成さノtたことを特
徴とする原盤用ガラス基板の温度検出機構。
In a master glass substrate whose center is supported by a rotating shaft and processed in a constant temperature atmosphere, one or more temperature detectors are provided in the glass substrate, and the detection signals of the temperature detectors are transmitted to the rotating shaft. A glass substrate for a master disc, characterized in that it is provided with a signal transmission means for transmitting the signal to the outside, and is configured such that the temperature of the above-mentioned >V surrounding air can be determined by the transmitted detection signal. temperature detection mechanism.
JP14154982A 1982-08-14 1982-08-14 Mechanism for detecting temperature of glass substrate for master disc Pending JPS5931428A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14154982A JPS5931428A (en) 1982-08-14 1982-08-14 Mechanism for detecting temperature of glass substrate for master disc

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14154982A JPS5931428A (en) 1982-08-14 1982-08-14 Mechanism for detecting temperature of glass substrate for master disc

Publications (1)

Publication Number Publication Date
JPS5931428A true JPS5931428A (en) 1984-02-20

Family

ID=15294545

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14154982A Pending JPS5931428A (en) 1982-08-14 1982-08-14 Mechanism for detecting temperature of glass substrate for master disc

Country Status (1)

Country Link
JP (1) JPS5931428A (en)

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