JPS5931428A - Mechanism for detecting temperature of glass substrate for master disc - Google Patents

Abstract

PURPOSE:To adjust the temperature of an atmosphere to a fixed temperature, by providing a signal transmission means for transmitting a detection signal of a temperature detecting element which is provided in a glass substrate to the outside through a revolving shaft. CONSTITUTION:At the time of processing a glass substrate 2 for master disc by rotating the revolving shaft 1, the temperature of the substrate 2 itself is detected accurately by a temperature detecting element 5 and its detected signal is transmitted the outside through a signal transmission means consisting of a brush 5 and conductive bodies 4, 4 which are formed on the revolving shaft 1 to supply the transmitted signal to a temp. controller. The temperature of the substrate can be controlled with high accuracy by supplying controlled constant temperature wind from the temperature controller to the circumference of the glass substrate for master disc.

Description

DETAILED DESCRIPTION OF THE INVENTION TECHNICAL FIELD OF THE INVENTION The present invention relates to a temperature detection mechanism for a master glass substrate used in optical disk manufacturing and the like.

Background of the Technology The master disc used in the manufacture of optical discs is made by uniformly coating the surface of a disc-shaped glass substrate made of float glass with photoresist, and then applying a laser beam to the photoresist in a predetermined manner while rotating the glass substrate. It is created by exposing the pattern to light and then developing it. An optical disk is manufactured by applying a plate such as N1 on the resist of this master, peeling off the plating film, and applying the plating film to a substrate using a stamp mold or the like using a press or the like.

Prior Art and Problems When manufacturing this type of master, it is necessary to maintain the glass substrate for the Vc master at a constant temperature of 11 C during processing in order to remove fake patterns. For this reason, conventionally, processing is carried out by maintaining a device with a glass substrate attached at a constant temperature in a constant temperature atmosphere, but the temperature can be adjusted by measuring the temperature of the rotating glass substrate itself. I) No heating was done, and the glass substrate itself was maintained at a constant temperature.

OBJECTS OF THE INVENTION The present invention is intended to solve the above-mentioned problems.It is an object of the present invention to provide a temperature detection mechanism for a glass substrate for a master, which makes it possible to perform processing while maintaining the temperature of the glass substrate itself at a constant temperature. The purpose is

Structure of the Invention In order to achieve the above-mentioned object, the present invention provides a temperature detector within a master glass substrate, and also provides a signal transmission means for transmitting a detection signal of the temperature detector to the outside. It is configured to adjust the temperature of the surrounding air around the glass substrate for the υ master based on the detection signal.

Examples of the invention The invention will now be described in detail in conjunction with the drawings.

In the figure, l is the rotation ll1l+, 2 is the master glass substrate, 3
is a brush.

The rotating shaft 1 is installed in a constant temperature y environment, and rotates 30 degrees in the direction of the arrow.
It rotates at a constant speed of about 0 rpm. A pair of conductors 4.4 extending in the axial direction are provided on the surface of the rotating shaft 1, and one end portion 4a, 4a of the conductors 4, 4 penetrates the brush 3 when the rotating shaft 1 rotates.

A temperature detector 5 such as an alumel/chromel thermocouple is embedded in the outer circumference of the glass substrate 2 for master disc.
The conductor end 4 (indicated by a dotted line in the figure) is connected to the other end of the conductor 4, and its center is supported by the tip of the rotating shaft 1, and rotates together with the rotating shaft 1.

Therefore, when processing the master glass substrate l by rotating the rotation axis l, the temperature of the master glass substrate 1 itself is accurately detected by the temperature sensor 5, and the detection signal is
The signal is transmitted to the outside through signal transmitting means such as the blade bodies 4, 4, and the brush 5 formed at 111+1. Therefore, if this transmitted detection signal is supplied to, for example, a temperature control device, controlled constant-temperature air can be supplied from the temperature control device around the master glass substrate to control the temperature of the substrate with high precision. is possible. Specifically, the temperature of the constant temperature air supplied from this temperature control device decreases as the temperature of the master glass substrate increases, and increases as the substrate temperature decreases.

In the above description, an example was described in which one temperature sensor 1 was provided, but several sensors may be provided at a predetermined pitch in the circumferential direction of the disk.

Effects of the Invention: As described above, according to the present invention, the temperature of the glass substrate itself can be accurately measured at all times and the detection signal can be transmitted to the outside. It becomes possible to control the temperature of the atmosphere around the substrate based on the -C substrate temperature and perform processing while maintaining the substrate temperature constant.

[Brief explanation of drawings]

The drawing is a perspective view showing an embodiment of the temperature detection mechanism for a glass substrate for a master disc according to the present invention, in which l is a rotating shaft, 2 is a glass substrate for a master disc, 3 is a brush, and 4 is the same as the brush 3. The conductor 5 which constitutes the signal transmission means is a temperature sensor. Patent applicant Fujitsu Ltd. Representative Patent Attorney Hisashi Tamamushi Gobu (3 others)a

Claims (1)

[Claims] In a master glass substrate whose center is supported by a rotating shaft and processed in a constant temperature atmosphere, one or more temperature detectors are provided in the glass substrate, and the detection signals of the temperature detectors are transmitted to the rotating shaft. A glass substrate for a master disc, characterized in that it is provided with a signal transmission means for transmitting the signal to the outside, and is configured such that the temperature of the above-mentioned >V surrounding air can be determined by the transmitted detection signal. temperature detection mechanism.