JPS5930080A - 粒子線の入射位置検出装置 - Google Patents

粒子線の入射位置検出装置

Info

Publication number
JPS5930080A
JPS5930080A JP14079682A JP14079682A JPS5930080A JP S5930080 A JPS5930080 A JP S5930080A JP 14079682 A JP14079682 A JP 14079682A JP 14079682 A JP14079682 A JP 14079682A JP S5930080 A JPS5930080 A JP S5930080A
Authority
JP
Japan
Prior art keywords
incident position
layer
particle beam
substrate
electrodes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14079682A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0465353B2 (enrdf_load_stackoverflow
Inventor
Koichiro Oba
大庭　弘一郎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hamamatsu TV Co Ltd
Original Assignee
Hamamatsu TV Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hamamatsu TV Co Ltd filed Critical Hamamatsu TV Co Ltd
Priority to JP14079682A priority Critical patent/JPS5930080A/ja
Publication of JPS5930080A publication Critical patent/JPS5930080A/ja
Publication of JPH0465353B2 publication Critical patent/JPH0465353B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
    • G01T1/29—Measurement performed on radiation beams, e.g. position or section of the beam; Measurement of spatial distribution of radiation
    • G01T1/2914—Measurement of spatial distribution of radiation
    • G01T1/2921—Static instruments for imaging the distribution of radioactivity in one or two dimensions; Radio-isotope cameras
    • G01T1/2957—Static instruments for imaging the distribution of radioactivity in one or two dimensions; Radio-isotope cameras using channel multiplier arrays

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Molecular Biology (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Measurement Of Radiation (AREA)
JP14079682A 1982-08-13 1982-08-13 粒子線の入射位置検出装置 Granted JPS5930080A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14079682A JPS5930080A (ja) 1982-08-13 1982-08-13 粒子線の入射位置検出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14079682A JPS5930080A (ja) 1982-08-13 1982-08-13 粒子線の入射位置検出装置

Publications (2)

Publication Number Publication Date
JPS5930080A true JPS5930080A (ja) 1984-02-17
JPH0465353B2 JPH0465353B2 (enrdf_load_stackoverflow) 1992-10-19

Family

ID=15276937

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14079682A Granted JPS5930080A (ja) 1982-08-13 1982-08-13 粒子線の入射位置検出装置

Country Status (1)

Country Link
JP (1) JPS5930080A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61237081A (ja) * 1985-04-12 1986-10-22 Hamamatsu Photonics Kk 放射線の入射位置を検出する装置
JPS61271486A (ja) * 1985-05-28 1986-12-01 Hamamatsu Photonics Kk 放射線の入射位置を検出する装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5428685A (en) * 1977-08-05 1979-03-03 Philips Nv Apparatus for detecting photon and*or particle radiations and for indicating thetr positions
JPS57148759U (enrdf_load_stackoverflow) * 1981-03-16 1982-09-18

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5428685A (en) * 1977-08-05 1979-03-03 Philips Nv Apparatus for detecting photon and*or particle radiations and for indicating thetr positions
JPS57148759U (enrdf_load_stackoverflow) * 1981-03-16 1982-09-18

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61237081A (ja) * 1985-04-12 1986-10-22 Hamamatsu Photonics Kk 放射線の入射位置を検出する装置
JPS61271486A (ja) * 1985-05-28 1986-12-01 Hamamatsu Photonics Kk 放射線の入射位置を検出する装置

Also Published As

Publication number Publication date
JPH0465353B2 (enrdf_load_stackoverflow) 1992-10-19

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